• Tribology and Lubricants
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• v.30 no.5
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• pp.271-277
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• 2014

Hydraulic reciprocating seals have been widely used to prevent fluid leakage and to provide lubricant film on counter surface in various hydraulic system. The degradation of the seal may cause the catastrophic failure of the hydraulic system. To assess the durability of the seals and the compatibility with counter surface, accelerated life testing (ALT) has been typically employed from industry. However, ALT often takes up to a few months to cause a failure of the seals, and therefore, there is a need to develop more efficient ALT methods. In this work, the degradation characteristics of polyurethane (PU) seals from field test are investigated and they are compared to those from the component and bench tests, with an aim to contribute to the development of ALT method. From the comparison of the cross-sectional profiles of the sealing surface of the PU specimens before and after the tests, both wear and compression set are found to be responsible for degradation of the PU seals. It is also shown that the major wear mechanisms of the PU seals from the field is abrasive wear and formation of pits. The component and bench tests performed in this work are shown to reproduce such wear mechanisms, and therefore, those test methods can be used as an ALT method for PU seals. In particular, the bench test proposed in this work may be effectively utilized to assess the durability and the compatibility of the seals with the counter surface. The results of this work are expected to aid in the design of ALT for PU seal.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.38 no.8
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• pp.863-867
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• 2014

In this study, an acoustic emission (AE) sensor was used for measuring the abrasive and molecular-scale phenomena in chemical mechanical polishing (CMP). An AE sensor is a transducer that converts a mechanical wave into an electrical signal, and is capable of acquiring high-level frequencies from materials. Therefore, an AE sensor was installed in the CMP equipment and the signals were measured simultaneously during the polishing process. In this study, an AE monitoring system was developed for investigating the sensitivity of the AE signal to (a) the variations in the material properties of the pad, slurry, and wafer and (b) the change in conditions during the CMP process. This system was adapted to Oxide and Cu CMP processes. AE signal parameters including AE raw frequency, FFT, and amplitude were analyzed for understanding the abrasive and molecular-level phenomena in the CMP process. Finally, we verified that AE sensors with different bandwidths could function in complementary ways during CMP process monitoring.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1999.06a
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• pp.47-52
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• 1999

In recent years, the micro-tribological behavior of silicon has been the topic of much interest. peformance of thin film under light load is important for potential applications in MEMS. In this work under light load and various humidity, the tribological behavior of undulated surface with various width and shape was Investigated. The results show that undulated surface of linear type had good tribological properties abrasive wear occur depending on the sliding condition. Also the effect of humidity on friction and wear was not important if exist undulation. Finally, undulations on HDD were found to be effective in trapping wear particles.

• Tribology and Lubricants
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• v.18 no.3
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• pp.204-210
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• 2002

Automotive brake pads with four different sizes of zircon particles (average sizes of 1㎛, 6㎛, 75㎛, and 140㎛, respectively) were investigated to evaluate the size effect of abrasive particles on friction performance. Results showed that the brake pads with the larger size of zircon particles tend to show better frictional stability and low pad wear. However, the rotor surface was severely abraded in the case of using larger zircon particles. On the other hand, the small zircon particles in the pads showed the fast increase of the coefficient of friction with friction force oscillation and the tendency was pronounced at low sliding speeds. The brake pads with small particle sizes also exhibited strong fade phenomena at elevated temperatures.

• Proceedings of the KIEE Conference
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• 2006.07a
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• pp.603-604
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• 2006

We investigated the effects of oxidizer additive on the performance of Cu-CMP process using commonly used tungsten slurry. According to the CMP removal rates and particle size distribution, and the micro- structures of surface layer as a function of oxidizer contents were greatly influenced by the slurry chemical composition of oxidizers. The difference in removal rate and roughness of copper surface are believed to cause by modification in the mechanical behavior of $Al_{2}O_3$ abrasive particles in CMP slurry.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1998.04a
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• pp.91-96
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• 1998

In recent years, the tribological behavior of coated ceramic material has been the topic of much interest. Particularly, the understanding of the tribological performance of thin film under light load is important for potential applications in MEMS. In this work under light load and low speed, the tribological behavior of coated silicon was investigated. The results show that both adhesive and abrasive wear occur depending on the sliding condition. Also the effect of humidity on friction was influenced by the apparent ares of contact between the two surfaces. Finally, undulations on the silicon wafer were found to be effective in trapping wear particles.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.7
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• pp.1280-1287
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• 2002

The old technique of sandblasting which has been used for decoration of glass surface has recently been developed into a powder blasting technique for brittle materials such as glass, silicon and ceramics, capable of producing micro structures larger than $100{\mu}$ m. This paper describes the performance of powder blasting technique in micro-line grooving of glass and the effect of the number of nozzle scanning on the depth and width of line groove. Experimental results showed that increasing the no. of nozzle scanning resulted in the increase of depth and width in grooves. Increase of width which may cause several problems in the precision machining results from wear of mask film. Therefore, well-controlled masking process is the most important factor for micro machining of glass with accuracy.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.1060-1063
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• 2001

The mechanical etching technique has recently been developed to a powder blasting technique for various materials, capable of producing micro structures larger than 100$\mu$m. This paper describes the performance of powder blasting technique in micro-pocketing of stainless steel and the effect of the number of nozzle scanning and the nozzle height on the depth and width of pockets. Experimental results showed that increasing the no. of nozzle scanning and decreasing the nozzle height resulted in the increase of depth and width in pockets. Increase of width results from wear of mask film.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.04a
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• pp.692-697
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• 1997

This paper presents a method of grinding and polishing automation of precision die after CNC machining. The method employs a robot system equipped with a pneumatic spindle and a special abrasive film pad. The robote program is automatically generated off-line from a PC and downloaded to robot controller. Position and orientation data for the program is supplied from cutter contact (CC) data of NC machining process. This eliminates separate robot teaching process. This paper aims at practical automation of die finishing process which is very time consuming and suffering from shortage of workpeople. Time loss for changeover from one product to next is eliminated by off-line programming exploiting appropriate NC machining data. Dextrous 6-axis robot with rigid wrist and simple tooling enables the process applicable to larger, rather complex 3 dimensional free surfaces

• Tribology and Lubricants
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• v.15 no.1
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• pp.29-38
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• 1999

In recent years, the tribological behavior of coated ceramic material has been the issue of much interest. Particularly, the understanding of the tribological performance of thin film under light load is important for its potential in applications of MEMS. The friction and wear behavior of ceramic material that occur at light load depends on several factors such as surface roughness, contact area and material properties. In this work, the tribological behavior of coated silicon under light load and low speed was investigated. Particularly, the effects of coated materials, humidity and undulated surface were also studied. The results show that the effect of humidity on fiction was influenced by the apparent area of contact between the two surfaces. Also both adhesive and abrasive wear occurred depending on the sliding condition. Finally, undulations on the silicon wafer were found to be effective in trapping wear particles and resulted in the reduction of friction.