• Journal of the Korean Society for Precision Engineering
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• v.18 no.11
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• pp.168-173
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• 2001

The chemical mechanical polishing (CMP) is generally consisted of pad, slurry including abrasives and so on. However, there are some problems in a general CMP: defects, a high Cost of Consumable (CoC), an environmental problem. The slurry including abrasives especially gives rise to not only increase a CoC, but also prohibition from achieving an eco-process. This paper introduces an abrasive capsulation pad to achieve an eco-process decreasing abrasives used is CMP. The binder wth a water a water swelling and a water soluble characteristic is used for an auto-conditioning, and the $CeO_2$abrasive is selected for an abrasive capsulation pad. Comparing with a conventional CMP, an abrasive capsulation pad appears good characteristics in ILD CMP and is able to achieve an eco-process decreasing wasted slurry.

• Journal of the Korean Society for Heat Treatment
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• v.20 no.2
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• pp.72-77
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• 2007

Abrasive wear between piston ring face and cylinder liner is an extremely unpredictable and hard-to-reproduce phenomenon that significantly decreases engine performance. Wear by abrasion are forms of wear caused by contact between a particle and solid material. Abrasive wear is the loss of material by the passage of hard particles over a surface. From the pin-on-disk test, particle dent test and scuffing test, abrasive wear characteristics of diesel engine cylinder liner-piston ring have been investigated. Pin-on-disk test results indicate that abrasive wear resistance is not simply related to the hardness of materials, but is influenced also by the microstructure, temperature, lubricity and micro- fracture properties. In particle dent test, dent resistance stress decreases with increasing temperature. From the scuffing test by using pin-on-disk tester, scuffing mechanisms for the soft coating and hard coating were proposed and experimentally confirmed.

• Journal of the Korean Society of Safety
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• v.16 no.3
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• pp.35-40
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• 2001

An internal finishing process applying Magnetic Abrasive Finishing (MAF) was proposed to produce smooth inner surfaces of tubes at a high rate. Since this process uses the tube rotation system, it has been considered applicable only to tubes which are rotatable at high speeds. Here development of the stainless tube(STS 304) rotation system to extend the scope of the application of the internal finishing process applying MAF was made. By the stainless tube(STS 304) rotation system, the abrasive magnetically attracted by the poles is rotated along the inner surface of the tube by magnetic force together with fixed poles, finishing the inner surface of the tube. The main results obtained are as follows : 1) The magnet abrasive finishing minimized influence due to external force because non-contact finishing, 2) The profile of surface roughness decreased very good in 11.4m/min range because abrasive size and speed, 3) The profile of surface roughness by flux density decreased in finishing speed 28m/min, 4) The profile of surface roughness by fled rate decreased in 0.16mm/rev and 0.18mm/rev.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07a
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• pp.243-246
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• 2004

W CMP 공정에서 abrasive 의 size 및 shape 에 따른 CMP 거동에 대해 관찰하였으며, 주요 제거 막질인 W 막질과 stopping layer 로 사용되는 Oxide 막질에 대한 압력(P)과 상대 속도(V) 영향성을 관찰하였다. CMP 제거량이 입자의 size 변화에 의존한다는 기존의 이론과는 달리 응집도(aggregate ratio) 변화가 주요 변수임을 밝혀 내었다. 한편, 각 막질에 대한 P,V 영향성 평가를 통해, 변형된 Prestonian equation 이 abrasive size 및 shape 에 상관없이 W 막질의 제거 거동을 설명하는데 중요한 역할을 수행함을 보였다. 그렇지만, W CMP 공정에서 stopping layer 로 사용되는 oxide 막질의 거동을 설명하는 데에는 어려움이 있었으며, 특히 P,V 에 의한 비선형적 removal rate(RR) 거동발생으로 인해 기존의 이론치와는 많은 차이를 나타내었다. 또한, abrasive size 와 shape 에 따라서도 복잡한 거동을 나타낸다.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.12
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• pp.192-199
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• 2001

Chemical mechanical planarization (CMP) has emerged as the planarization technique of choice in both front-end and back-end integrated circuit manufacturing. Conventional CMP process utilize a polyurethane polishing pad and liquid chemical slurry containing abrasive particles. There hale been serious problems in CMP in terms of repeatability and deflects in patterned wafers. Especial1y, dishing and erosion defects increase the resistance because they decrease the interconnection section area, and ultimately reduce the lifetime of the semiconductor. Methods to reduce dishing & erosion have recently been interface hardness of the pad, optimization of the pattern structure as dummy patterns. Dishing & erosion are initially generated an uneven pressure distribution in the materials. These defects are accelerated by free abrasives and chemical etching. Therefore, it is known that dishing & erosion can be reduced by minimizing the abrasive concentration. Minimizing the abrasive concentration by using CeO$_2$is the best solution for reducing dishing & erosion and for removal rate. This paper introduce dishing & erosion generating mechanism and a method fur developing a semi-rigid abrasive pad to minimize dishing & erosion during CMP.

• Journal of Biosystems Engineering
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• v.12 no.1
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• pp.20-30
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• 1987

Major rice grain losses both in quality and in quantity are incurred in the whitening process which is indispensable in the milling process. Rice whitening it performed by two different whitening actions known as abrasive and frictional. In Korea, abrasive-type whiteners equipped with a emery-stone roller have been adopted in the whitening system in large scale milling plants, but not in customary small scale. However, researches on this type whitener have rarely been conducted in Korea. This study was attempted to establish design criteria or a modified abrasive-type whitener which is aerated with blower. The factors considered in this study were three levels of feedscrew pitch (20, 27, 34 mm) and three levels of clearance(11, 13, 15 mm) between surfaces or emery-stone roller and screen and two levels of moisture content (14.5%, 15.7%, w.b.) of brown rice. Also, the effect of aeration on whitening performance was examined, and a system performance consisting of one pass in the aerated abrasive-type and two passes in the existing friction type was compared with the performance of the existing whitening system consisting of three passes in friction type only. The latter system is prevailed in customery small milling plants. The results of this study are summarized as follows. 1. The interactions between feed-screw pitch and chamber clearance of the aerated abrasive-type whitener had great effect on the performance of the machine. When the value of a nondimensional parameter, $C^2/(P{\cdot}d_p)$, expressing the relations between feed-screw pitch, P, and chamber clearance, C, ranged from 0.40 to 0.45, the performance of the aerated abrasive-type whitener was the best. 2. Aeration to the abrasive-type whitener gave positive effect on milled and head rice recoveries. 3. The whitening system involving the aerated abrasive-type whitener, which has appropriate feed-screw pitch and chamber clearance as described in item 1 above, produced more milled and head rice recoveries by about 1.5% and 2.0%, respectively, than the existing frictional whitening system. The former also consumed less electricity by about 10% (0.9KwH/1000kg).

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.487-487
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• 2009

One of the critical consumables in chemical mechanical polishing (CMP) is a specialized solution or slurry, which typically contains both abrasives and chemicals acting together to planarize films. In single abrasive slurry (SAS), the solid phase consists of only one type of abrasive particle. On the other hand, mixed abrasive slurry (MAS) consists of a mixture of at least two types of abrasive particles. In this paper, we have studied the CMP characteristics of mixed abrasive slurry (MAS) retreated by adding of $CeO_2$ abrasives within 1:10 diluted silica slurry (DSS). The slurry designed for optimal performance should produce reasonable removal rates, acceptable polishing selectivity with respect to the underlying layer, low surface defects after polishing, and good slurry stability. The modified abrasives in MAS are evaluated with respect to their particle size distribution, surface morphology, and CMP performances such as removal rate and non-uniformity. As an experimental result, we obtained the comparable slurry characteristics compared with original silica slurry in the viewpoint of high removal rate and low non-uniformity.

• Journal of Korean Tunnelling and Underground Space Association
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• v.21 no.6
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• pp.763-778
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• 2019

Abrasive waterjet cutting technology has been used for rock excavation of tunnels and underground structures due to various advantages. In order to cut rocks by using the abrasive waterjet system, abrasive is essential to enhance impact energies for fracturing the target rock. Since garnet abrasives are not produced in Korea, alternative abrasives, instead of garnets, are needed to achieve the economical waterjet cutting. This study is to analyze cutting performance for rocks with sandy particles as alternative abrasive. Cutting tests were carried out on granite specimens at the constant waterjet energy (e.g., water pressure or water flow rate). The five kinds of sands, sampled by construction fields and natural sites, were prepared to perform the experimental tests. When sea sand was used as an alternative abrasive, cutting performance was secured to be 60~70% compared to the commercial garnet abrasive. Thus, it is expected that sand abrasives can be applied on the waterjet cutting process for the economical excavation construction.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.38 no.8
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• pp.887-892
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• 2014

In a conventional magnetic abrasive polishing process, the polishing abrasives are mixed with ferrous particles and slight cutting oil to form a cluster of abrasives. However, when a tool rotates at a high revolution speed, most of the polishing abrasives are scattered away from it due to the increase in centrifugal force. This phenomenon directly reduces the polishing efficiency. The use of a highly viscous matter such as silicone gel instead of cutting oil for mixing is one method to solve this problem and increase abrasive adhesion. Another method to avoid high abrasive scattering is the application of wet magnetic abrasive polishing (WMAP). In WMAP, abundant mineral oil is preliminarily applied to the workpiece surface. This study experimentally evaluated the effect of WMAP on abrasive adhesion. The relationship between the amount of working abrasives and polishing conditions was characterized. Despite the lower adhesion ratio of polishing abrasives, the surface roughness was found to be significantly improved as the result of WMAP.

• Journal of the korean academy of Pediatric Dentistry
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• v.24 no.4
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• pp.763-770
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• 1997

The air abrasive technique is a non-mechanical method by which teeth are treated before restoration and stains and calculi are removed from tooth surfaces using the kinetic energy of small particles. The air abrasive technique in dentistry was first introduced in the 1950's with as instrument called 'Airdent'. But, as the main restorative materials of the period were amalgam and gold, and the instrument's inability to control the flow of particles caused the particles to be spread throughout the clinics, widespread use was not possible. In the 1990's, as these techincal problems were solved and more interest in new restorative materials rose in an effort to preserve sound tooth structure, new developements took place in instruments related to the air abrasive technique. The air abrasive technique produces less pressure, vibration and heat that might cause patient discomfort and facilitates the preservation of sound tooth structure. It also reduces the need for anesthesia and is less harmful to the pulp. Other advantages include increase in dentin bonding strength of composite resin, lower possibility of saliva contamination and maintenance of a dry field. But there is not direct contact between the nozzle and the tooth, the operator cannot use his or her tactile sense and must rely solely upon visual input. Other disadvantages are: the tooth preparation depends on the operator's ability; alpha-alumina particles, after bouncing off the tooth surface, cause damage to dental mirrors; the equipment is expensive and takes up a certain amount of space in the clinic. The author conducted case report using the air abrasive technique on patient visiting the Department of Pediatric Dentistry at Seoul National University Dental Hospital and arrived at the following conclusions. 1. The tooth preparation capability of different air abrasive devices varied widely among manufacturers. 2. It was more effective in treating early caries lesions and stains compared to lesions where caries had already progressed to produce soft dentin. 3. The cold stream and noise caused by the evacuation system was a major cause of discomfort to pediatric patients. 4. As there is no direct contact with tooth surface when using the air abrasive technique for tooth preparation, considerable experience and skill is required for proper tooth preparation.