• 한국정밀공학회지
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• 제18권11호
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• pp.168-173
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• 2001

The chemical mechanical polishing (CMP) is generally consisted of pad, slurry including abrasives and so on. However, there are some problems in a general CMP: defects, a high Cost of Consumable (CoC), an environmental problem. The slurry including abrasives especially gives rise to not only increase a CoC, but also prohibition from achieving an eco-process. This paper introduces an abrasive capsulation pad to achieve an eco-process decreasing abrasives used is CMP. The binder wth a water a water swelling and a water soluble characteristic is used for an auto-conditioning, and the $CeO_2$abrasive is selected for an abrasive capsulation pad. Comparing with a conventional CMP, an abrasive capsulation pad appears good characteristics in ILD CMP and is able to achieve an eco-process decreasing wasted slurry.

• 열처리공학회지
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• 제20권2호
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• pp.72-77
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• 2007

Abrasive wear between piston ring face and cylinder liner is an extremely unpredictable and hard-to-reproduce phenomenon that significantly decreases engine performance. Wear by abrasion are forms of wear caused by contact between a particle and solid material. Abrasive wear is the loss of material by the passage of hard particles over a surface. From the pin-on-disk test, particle dent test and scuffing test, abrasive wear characteristics of diesel engine cylinder liner-piston ring have been investigated. Pin-on-disk test results indicate that abrasive wear resistance is not simply related to the hardness of materials, but is influenced also by the microstructure, temperature, lubricity and micro- fracture properties. In particle dent test, dent resistance stress decreases with increasing temperature. From the scuffing test by using pin-on-disk tester, scuffing mechanisms for the soft coating and hard coating were proposed and experimentally confirmed.

• 한국안전학회지
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• 제16권3호
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• pp.35-40
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• 2001

An internal finishing process applying Magnetic Abrasive Finishing (MAF) was proposed to produce smooth inner surfaces of tubes at a high rate. Since this process uses the tube rotation system, it has been considered applicable only to tubes which are rotatable at high speeds. Here development of the stainless tube(STS 304) rotation system to extend the scope of the application of the internal finishing process applying MAF was made. By the stainless tube(STS 304) rotation system, the abrasive magnetically attracted by the poles is rotated along the inner surface of the tube by magnetic force together with fixed poles, finishing the inner surface of the tube. The main results obtained are as follows : 1) The magnet abrasive finishing minimized influence due to external force because non-contact finishing, 2) The profile of surface roughness decreased very good in 11.4m/min range because abrasive size and speed, 3) The profile of surface roughness by flux density decreased in finishing speed 28m/min, 4) The profile of surface roughness by fled rate decreased in 0.16mm/rev and 0.18mm/rev.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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• pp.243-246
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• 2004

W CMP 공정에서 abrasive 의 size 및 shape 에 따른 CMP 거동에 대해 관찰하였으며, 주요 제거 막질인 W 막질과 stopping layer 로 사용되는 Oxide 막질에 대한 압력(P)과 상대 속도(V) 영향성을 관찰하였다. CMP 제거량이 입자의 size 변화에 의존한다는 기존의 이론과는 달리 응집도(aggregate ratio) 변화가 주요 변수임을 밝혀 내었다. 한편, 각 막질에 대한 P,V 영향성 평가를 통해, 변형된 Prestonian equation 이 abrasive size 및 shape 에 상관없이 W 막질의 제거 거동을 설명하는데 중요한 역할을 수행함을 보였다. 그렇지만, W CMP 공정에서 stopping layer 로 사용되는 oxide 막질의 거동을 설명하는 데에는 어려움이 있었으며, 특히 P,V 에 의한 비선형적 removal rate(RR) 거동발생으로 인해 기존의 이론치와는 많은 차이를 나타내었다. 또한, abrasive size 와 shape 에 따라서도 복잡한 거동을 나타낸다.

• 한국정밀공학회지
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• 제18권12호
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• pp.192-199
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• 2001

Chemical mechanical planarization (CMP) has emerged as the planarization technique of choice in both front-end and back-end integrated circuit manufacturing. Conventional CMP process utilize a polyurethane polishing pad and liquid chemical slurry containing abrasive particles. There hale been serious problems in CMP in terms of repeatability and deflects in patterned wafers. Especial1y, dishing and erosion defects increase the resistance because they decrease the interconnection section area, and ultimately reduce the lifetime of the semiconductor. Methods to reduce dishing & erosion have recently been interface hardness of the pad, optimization of the pattern structure as dummy patterns. Dishing & erosion are initially generated an uneven pressure distribution in the materials. These defects are accelerated by free abrasives and chemical etching. Therefore, it is known that dishing & erosion can be reduced by minimizing the abrasive concentration. Minimizing the abrasive concentration by using CeO$_2$is the best solution for reducing dishing & erosion and for removal rate. This paper introduce dishing & erosion generating mechanism and a method fur developing a semi-rigid abrasive pad to minimize dishing & erosion during CMP.

• Journal of Biosystems Engineering
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• 제12권1호
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• pp.20-30
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• 1987

Major rice grain losses both in quality and in quantity are incurred in the whitening process which is indispensable in the milling process. Rice whitening it performed by two different whitening actions known as abrasive and frictional. In Korea, abrasive-type whiteners equipped with a emery-stone roller have been adopted in the whitening system in large scale milling plants, but not in customary small scale. However, researches on this type whitener have rarely been conducted in Korea. This study was attempted to establish design criteria or a modified abrasive-type whitener which is aerated with blower. The factors considered in this study were three levels of feedscrew pitch (20, 27, 34 mm) and three levels of clearance(11, 13, 15 mm) between surfaces or emery-stone roller and screen and two levels of moisture content (14.5%, 15.7%, w.b.) of brown rice. Also, the effect of aeration on whitening performance was examined, and a system performance consisting of one pass in the aerated abrasive-type and two passes in the existing friction type was compared with the performance of the existing whitening system consisting of three passes in friction type only. The latter system is prevailed in customery small milling plants. The results of this study are summarized as follows. 1. The interactions between feed-screw pitch and chamber clearance of the aerated abrasive-type whitener had great effect on the performance of the machine. When the value of a nondimensional parameter, $C^2/(P{\cdot}d_p)$, expressing the relations between feed-screw pitch, P, and chamber clearance, C, ranged from 0.40 to 0.45, the performance of the aerated abrasive-type whitener was the best. 2. Aeration to the abrasive-type whitener gave positive effect on milled and head rice recoveries. 3. The whitening system involving the aerated abrasive-type whitener, which has appropriate feed-screw pitch and chamber clearance as described in item 1 above, produced more milled and head rice recoveries by about 1.5% and 2.0%, respectively, than the existing frictional whitening system. The former also consumed less electricity by about 10% (0.9KwH/1000kg).

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.487-487
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• 2009

One of the critical consumables in chemical mechanical polishing (CMP) is a specialized solution or slurry, which typically contains both abrasives and chemicals acting together to planarize films. In single abrasive slurry (SAS), the solid phase consists of only one type of abrasive particle. On the other hand, mixed abrasive slurry (MAS) consists of a mixture of at least two types of abrasive particles. In this paper, we have studied the CMP characteristics of mixed abrasive slurry (MAS) retreated by adding of $CeO_2$ abrasives within 1:10 diluted silica slurry (DSS). The slurry designed for optimal performance should produce reasonable removal rates, acceptable polishing selectivity with respect to the underlying layer, low surface defects after polishing, and good slurry stability. The modified abrasives in MAS are evaluated with respect to their particle size distribution, surface morphology, and CMP performances such as removal rate and non-uniformity. As an experimental result, we obtained the comparable slurry characteristics compared with original silica slurry in the viewpoint of high removal rate and low non-uniformity.

• 한국터널지하공간학회 논문집
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• 제21권6호
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• pp.763-778
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• 2019

연마재 워터젯 절삭 기술은 다양한 장점으로 인하여 터널 및 지하공간 암반굴착에 활용되고 있다. 워터젯을 이용하여 암반을 파쇄하기 위해서는 반드시 연마재 투입이 필수적이다. 기존 석류석(garnet) 연마재는 국내에서 생산되지 않기 때문에 경제적 측면에서 대체 연마재가 필요한 실정이다. 본 연구는 국내 자연 및 건설현장에서 쉽게 구할 수 있는 모래를 대체 연마재로 사용 가능한지 규명하고자 한다. 실험 데이터 확보를 위해 준비한 현장 모래 5종을 연마재로 사용하여, 동일한 에너지 조건(수압, 유량)에서 화강암 절삭 실험을 수행하였다. 바다 모래를 연마재로 사용할 경우, 절삭성능은 상용 석류석 대비 60~70%가 확보되는 것으로 확인 되었다. 현장에서 경제적인 워터젯 굴착을 위해서 현장 모래를 대체 연마재로 활용 할 수 있을 것으로 기대된다.

• 대한기계학회논문집A
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• 제38권8호
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• pp.887-892
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• 2014

일반적인 자기연마가공에서 브러쉬는 연마입자와 자성입자 그리고 약간의 절삭유가 혼합되어 형상을 갖춘다. 그러나 공구가 고속으로 회전하게 되면 대부분의 연마입자는 원심력의 증가로 공구에서부터 떨어져나간다. 이러한 현상은 가공 효율을 저하시키는 결과를 야기한다. 이러한 문제점을 해결할 수 있는 방법 중 하나는 절삭유 대신에 실리콘 겔과 같은 고점성의 물질을 사용하여 입자의 구속을 증가시키는 것이다. 연마입자의 과도한 탈락에 대응하는 또 다른 방법은 습식자기연마(WMAP)이다. 습식자기연마는 절삭유가 공작물의 표면에 충분히 공급된 상태의 자기연마를 의미한다. 본 연구에서는 습식자기연마에서 구속된 연마입자의 구속량과 표면거칠기 향상의 상관관계를 분석하였다. 그 결과 습식자기연마에서 연마입자의 구속률이 낮음에도 불구하고 표면거칠기가 더 많이 향상됨을 알 수 있었다.

• 대한소아치과학회지
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• 제24권4호
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• pp.763-770
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• 1997

The air abrasive technique is a non-mechanical method by which teeth are treated before restoration and stains and calculi are removed from tooth surfaces using the kinetic energy of small particles. The air abrasive technique in dentistry was first introduced in the 1950's with as instrument called 'Airdent'. But, as the main restorative materials of the period were amalgam and gold, and the instrument's inability to control the flow of particles caused the particles to be spread throughout the clinics, widespread use was not possible. In the 1990's, as these techincal problems were solved and more interest in new restorative materials rose in an effort to preserve sound tooth structure, new developements took place in instruments related to the air abrasive technique. The air abrasive technique produces less pressure, vibration and heat that might cause patient discomfort and facilitates the preservation of sound tooth structure. It also reduces the need for anesthesia and is less harmful to the pulp. Other advantages include increase in dentin bonding strength of composite resin, lower possibility of saliva contamination and maintenance of a dry field. But there is not direct contact between the nozzle and the tooth, the operator cannot use his or her tactile sense and must rely solely upon visual input. Other disadvantages are: the tooth preparation depends on the operator's ability; alpha-alumina particles, after bouncing off the tooth surface, cause damage to dental mirrors; the equipment is expensive and takes up a certain amount of space in the clinic. The author conducted case report using the air abrasive technique on patient visiting the Department of Pediatric Dentistry at Seoul National University Dental Hospital and arrived at the following conclusions. 1. The tooth preparation capability of different air abrasive devices varied widely among manufacturers. 2. It was more effective in treating early caries lesions and stains compared to lesions where caries had already progressed to produce soft dentin. 3. The cold stream and noise caused by the evacuation system was a major cause of discomfort to pediatric patients. 4. As there is no direct contact with tooth surface when using the air abrasive technique for tooth preparation, considerable experience and skill is required for proper tooth preparation.