• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.12S
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• pp.1181-1186
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• 2003

Chemical Mechanical Polishing (CMP) is an essential dielectric planarization in multilayer microelectronic device fabrication. In the CMP process, it is necessary to minimize the extent of surface defect formation while maintaining good planarity and optimal material removal rates. The polishing mechanism of W-CMP process has been reported as the repeated process of passive layer formation by oxidizer and abrasion action by slurry abrasives. Thus, it is important to understand the effect of oxidizer on W passivation layer, in order to obtain higher removal rate (RR) and very low non-uniformity (NU %) during W-CMP process. In this paper, we compared the effects of oxidizer or W-CMP process with three different kind of oxidizers with 5 wt% hydrogen peroxide such as Fe(NO$_3$)$_3$, H$_2$O$_2$, and KIO$_3$. The difference in removal rate and roughness of W in stable and unstable slurries are believed to caused by modification in the mechanical behavior of Al$_2$O$_3$ particles in presence of surfactant stabilizing the slurry.

• Carbon letters
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• v.27
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• pp.72-80
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• 2018

In the present work, a comparative study of the mechanical behavior of two series of elastomeric composites, based on carboxylated styrene butadiene rubber (X-SBR) and reinforced with rice bran carbon (RBC) and graphite, is reported. Hybrid composites of X-SBR filled with RBC-graphite were also investigated in terms of the cure characteristics, hardness, tensile properties, abrasion resistance, and swelling. It was observed that the cure times decreased with the incorporation of a carbon filler whereas the torque difference, tensile strength, tensile modulus, hardness, and swelling resistance increased compared to the neat X-SBR revealing a favorable characteristic of crosslinking. Dynamic rheological analysis showed that the G' values of the composites, upon the addition of RBC-graphite, were changed to some extent. This demonstrates that the presence of a strongly developed network of fillers will ensure a reinforcing characteristic in a polymer matrix.

• Journal of the Korean institute of surface engineering
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• v.27 no.4
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• pp.193-206
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• 1994

A wear behavior of electroless (Ni-P-X, X: SiC, $Al_2O_3$, Diamond) composite coating layers, formed under various conditions on commerical grade low carbon steel, has been investigated using Taber abrasion tester and scanning electron microscope. Several factors, which are type of particles, co-deposited content, particle size, distribution of particles and heat-treatment, influenced the wear resistance. The wear resistance of the composited coating layers after heat-treatment at $400^{\circ}C$ for 1 hr was increased 70 times with diamond, 15 times with SiC and 8 times with $Al_2O_3$, compared with the electroless nickel plating layer without heat-treatment.

• Elastomers and Composites
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• v.57 no.3
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• pp.92-99
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• 2022

A large amount of particles on the roads is produced by friction between the vehicles and the road surface and by inflow from outside. The type of these particles affects the abrasion behavior of tire tread. In this study, road dust collected at a bus stop was separated by size, and the particles with sizes of 106-212 mm were analyzed. The particles were separated by density using NaI and NaBr aqueous solutions with densities in the range of 1.10-1.80 g/cm³ with the 0.10 g/cm³ interval. In the road dust sample, the following particle types were found: tire-road wear particles (TRWPs), asphalt pavement wear particles (APWPs), plant-related particles (PRPs), road paint wear particles (RPWPs), and plastic particles (PPs). The densities of TRWPs, APWPs, PRPs, and RPWPs were 1.20-1.80, >1.60, >1.10, and >1.40 g/cm³, respectively, while PPs were found in all density ranges. Additionally, many small mineral particles were observed on the particles. Order of the relative content of the particles was PRP > TRWP > APWP ~ RPWP > PP. APWPs that were stuck to TRWP could be removed by chloroform treatment. The shapes of the particles were characterized using their magnified images.

• Journal of the Korean Society of Industry Convergence
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• v.25 no.6_2
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• pp.987-992
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• 2022

STS 410, a representative martensitic stainless steel, contains 13 % chromium and is used for building materials, automobile parts, office equipment, kitchen utensils, and tableware. In general, the strength of STS 410 changes by the carbon content, and STS 410 of low carbon has excellent toughness and high carbon has excellent abrasion resistance. In this study, a fatigue test was performed on the STS 410 material to evaluate the exact fatigue limit and to evaluate the behavior of the material against fatigue. In addition, the effect on burnishing, a kind of plastic processing that creates a smooth surface by pressing a ball or roller on the inner and outer surfaces of the material was evaluated. The fatigue limit was 509 MPa for the STS 410 material, and the result was 54.5 % of the tensile strength. The fatigue limit was 542 MPa for the specimen of diamind burnished STS 410 material, and it was 58.5 % of the tensile strength.

• Korean Journal of Materials Research
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• v.33 no.10
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• pp.422-429
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• 2023

High-strength low-alloy steel is one of the widely used materials in onshore and offshore plant engineering. We investigated the alloying effect of solute atoms in α-Fe based alloy using ab initio calculations. Empirical equations were used to establish the effect of alloying on the Vicker's hardness, screw energy coefficient, and edge dislocation energy coefficient of the steel. Screw and edge energy coefficients were improved by the addition of V and Cr solute atoms. In addition, the addition of trace quantities of V, Cr, and Mn enhanced abrasion resistance. Solute atoms and contents with excellent mechanical properties were selected and their thermal conductivity and thermal expansion behavior were investigated. The addition of Cr atom is expected to form alloys with low thermal conductivity and thermal expansion coefficient. This study provides a better understanding of the state-of-the-art research in low-alloy steel and can be used to guide researchers to explore and develop α-Fe based alloys with improved properties, that can be fabricated in smart and cost-effective manners.

• 한국도로학회:학술대회논문집
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• 2002.10a
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• pp.89-92
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• 2002

The objective of this research is to evaluate engineering properties of recycled aggregates, slag as coarse & fine aggregate and waste foundry sand(WFS) as fine aggregate, in hot mix asphalt(HMA). In this research, soundness, gradation and particle analysis, abrasion, specific gravity and absorption test were carried out. The optimum asphalt binder content(OAC) for various HMA combinations of recycled aggregate was determined by Marshall Mix Design. The ranges determined is between 7.2% and 7.5%. Indirect tensile test, resilient modulus test, creep test were carried out for characterization of rutting behavior of various combination of HMA. Judging from the limited tests, the HMA with recycled aggregates is not as good rutting resistance as the HMA with common aggregates. After finishing the Wheel tracking test, the application or feasibility for the use of recycled aggregate as asphalt paving material will be determined.

• Journal of the Korean Society of Propulsion Engineers
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• v.17 no.5
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• pp.113-120
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• 2013

Graphite is commonly used as a solid lubricant leading to low friction coefficient and abrasion. In this study, wear behavior of sealing graphite(HK-6) at elevated temperature was evaluated. Reciprocating wear test was carried out as wear occurred graphite as a seal(HK-6) is positioned between the liner and driving shaft. Variables which are temperature, sliding speed and contact load are set. This study suggest optimized environment conditions through the wear properties of graphite.

• Journal of Korean Tunnelling and Underground Space Association
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• v.20 no.2
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• pp.453-467
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• 2018

The excavation performance and the cutting tool wear prediction of shield TBM are very important issues for design and construction in TBM tunneling. For hard-rock TBMs, CSM and NTNU model have been widely used for prediction of disc cutter wear and penetration rate. But in case of soft-ground TBMs, the wear evaluation and the excavation performance have not been studied in details due to the complexity of the ground behavior and therefore few testing methods have been proposed. In this study, a new soil abrasion and penetration tester (SAPT) that simulates EPB TBM excavation process is introduced which overcomes the drawbacks of the previously developed soil abrasivity testers. Parametric tests for penetration rate, foam mixing ratio, foam concentration were conducted to evaluate influential parameters affecting TBM excavation and also ripper wear was measured in laboratory. The results of artificial soil specimen composed of 70% illite and 30% silica sand showed TBM additives such as foam play a key role in terms of excavation and tool wear.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.546-546
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• 2008

Copper (Cu) Chemical mechanical polishing (CMP) has been an essential process for Cu wifing of DRAM and NAND flash memory beyond 45nm. Copper has been employed as ideal material for interconnect and metal line due to the low resistivity and high resistant to electro-migration. Damascene process is currently used in conjunction with CMP in the fabrication of multi-level copper interconnects for advanced logic and memory devices. Cu CMP involves removal of material by the combination of chemical and mechanical action. Chemicals in slurry aid in material removal by modifying the surface film while abrasion between the particles, pad, and the modified film facilitates mechanical removal. In our research, we emphasized on the role of chemical effect of slurry on Cu CMP, especially on the effect of amine functional group on removal rate selectivity between Cu and Tantalum-nitride (TaN) film. We investigated the two different kinds of complexing agent both with amine functional group. On the one hand, Polyacrylamide as a polymer affected the stability of abrasive, viscosity of slurry and the corrosion current of copper film especially at high concentration. At higher concentration, the aggregation of abrasive particles was suppressed by the steric effect of PAM, thus showed higher fraction of small particle distribution. It also showed a fluctuation behavior of the viscosity of slurry at high shear rate due to transformation of polymer chain. Also, because of forming thick passivation layer on the surface of Cu film, the diffusion of oxidant to the Cu surface was inhibited; therefore, the corrosion current with 0.7wt% PAM was smaller than that without PAM. the polishing rate of Cu film slightly increased up to 0.3wt%, then decreased with increasing of PAM concentration. On the contrary, the polishing rate of TaN film was strongly suppressed and saturated with increasing of PAM concentration at 0.3wt%. We also studied the electrostatic interaction between abrasive particle and Cu/TaN film with different PAM concentration. On the other hand, amino-methyl-propanol (AMP) as a single molecule does not affect the stability, rheological and corrosion behavior of the slurry as the polymer PAM. The polishing behavior of TaN film and selectivity with AMP appeared the similar trend to the slurry with PAM. The polishing behavior of Cu film with AMP, however, was quite different with that of PAM. We assume this difference was originated from different compactness of surface passivation layer on the Cu film under the same concentration due to the different molecular weight of PAM and AMP.