• 한국정밀공학회지
• /
• 제29권8호
• /
• pp.863-872
• /
• 2012

The squareness measurement of driving axes of a machine tool is very important to evaluate the performance of the machine. Laser interferometer measurement system is one of the most reliable equipment to measure the squareness. However, squareness measurement using laser system with an optical square result in restriction of straightness optics setup and Abbe's offset. This offset combines with angular errors during the motion of an axis to cause Abbe's error. In addition, the difficulty in optical square setup causes restriction of other optics and limitation of measurable range. In this paper, mathematical approaches are presented to eliminate the Abbe's error and to estimate squareness for full range by using the best fit of straightness data measured without an optical square. Experiments for squareness measurement of 3 axis machine tool were conducted and the proposed techniques were used for squareness evaluation with elimination of Abbe's error and squareness estimation for the full travel range.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2005년도 춘계학술대회 논문집
• /
• pp.1438-1441
• /
• 2005

To establish of standard technique of nano-length measurement in 2D plane, new AFM system has been designed. In this system, measurement uncertainty is dominantly affected by the Abbe error of XY scanning stage. No linear stage is perfectly straight; in other words, every scanning stage is subject to tilting, pitch and yaw motion. In this paper, an AFM system with minimum offset of XY sensing is designed. And XY scanning stage is designed to minimize rotation angle because Abbe errors occur through the multiply of offset and rotation angle. To minimize the rotation angle optimal design has performed by maximizing the stiffness ratio of motion direction to the parasitic motion direction of each stage. This paper describes the design scheme of full AFM system, especially about XY stage. Full range of fabricated XY scanner is $100um\times{100um}$. And tilting, pitch and yaw motion are measured by autocollimator to evaluate the performance of XY stage. Using this AFM system, 3um pitch specimen was measured. As a result, the uncertainty of total system has been evaluated.

• 한국정밀공학회지
• /
• 제23권6호
• /
• pp.96-103
• /
• 2006

To establish of standard technique of nano-length measurement in 2D plane, new AFM system has been designed. In the long range (about several tens of ${\mu}m$), measurement uncertainty is dominantly affected by the Abbe error of XY scanning stage. No linear stage is perfectly straight; in other words, every scanning stage is subject to tilting, pitch and yaw motion. In this paper, an AFM system with minimum offset of XY sensing is designed. And XY scanning stage is designed to minimize rotation angle because Abbe errors occur through the multiply of offset and rotation angle. To minimize the rotation angle optimal design has performed by maximizing the stiffness ratio of motion direction to the parasitic motion direction of each stage. This paper describes the design scheme of full AFM system, especially about XY stage. Full range of fabricated XY scanner is $100{\mu}m\times100{\mu}m$. And tilting, pitch and yaw motion are measured by autocollimator to evaluate the performance of XY stage. As a result, XY scanner can have good performance. Using this AFM system, 3um pitch specimen was measured. The uncertainty of total system has been evaluated. X and Y direction performance is different. X-direction measuring performance is better. So to evaluate only ID pitch length, X-direction scanning is preferable. Its expanded uncertainty(k=2) is $\sqrt{(3.96)^2+(4.10\times10^{-5}{\times}p)^2}$ measured length in nm.

• 대한기계학회논문집A
• /
• 제28권7호
• /
• pp.1038-1046
• /
• 2004

In order to acquire high-speed and high-precision performances in servomechanisms, an integrated design method have been proposed. Based on strict mathematical modeling and analysis of system performance according to design and operating parameters, a nonlinear constrained optimization problem including the relevant subsystem parameters of the servomechanism is formulated. Optimum design results of mechanical and electrical parameters are obtained according to the design parameters specified by designers through the integrated design processes. Motors are optimally selected from the servo motor database. Both the geometric errors referring to Abbe offset and the contour errors are minimized while required constraints such as stability conditions and saturated conditions are satisfied. This design methodology both offers the improved possibility to evaluate and optimize the dynamic motion performance of the servomechanism and improves the quality of the design process to achieve the required performance for high-speed/precision servomechanisms.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2011년도 춘계학술대회 논문집
• /
• pp.853-854
• /
• 2011

• 한국정밀공학회지
• /
• 제11권4호
• /
• pp.158-164
• /
• 1994

A volumetric error compensation method was stueide with measuring systematic error of a Coordinate Measuring Machine(CMM). The volumetric error equations were proposed for a Moving Bridge type CMM. Using the error equations, error vectors in the measuring volume were corrected by a software method. The CMM was controlled by the compensation program separately in the measuring and moving function of the CMM proving. The linear accuracy of the CMM was measured by the Laser Interferometer and compared with the data before the volumetric error compensation. This method was proved as low cost and effective to reduce the systematic error of the CMM, as no hardware modification is required.

• 대한기계학회논문집A
• /
• 제28권7호
• /
• pp.1029-1037
• /
• 2004

High-speed/precision servomechanisms have been widely used in the manufacturing and semiconductor industries. In order to ensure the required high-speed and high-precision specifications in servomechanisms, an integrated design methodology is required, where the interactions between mechanical and electrical subsystems will have to be considered simultaneously. For the first step of the integrated design process, it is necessary to obtain not only strict mathematical models of separate subsystems but also formulation of an integrated design problem. A two-degree-of-freedom controller described in the discrete-time domain is considered as an electrical subsystem in this paper. An accurate identification process of the mechanical subsystem is conducted to verify the obtained mathematical model. Mechanical and electrical constraints render the integrated design problem accurate. Analysis of the system performance according to design and operating parameters is conducted for better understanding of the dynamic behavior and interactions of the servomechanism. Experiments are performed to verify the validity of the integrated design problem in the x-Y positioning system.

• 한국정밀공학회지
• /
• 제19권1호
• /
• pp.56-64
• /
• 2002

Machine tools are engineered to give high dimensional accuracy in machining operation. However, errors due to thermal effects degrade dimensional accuracy of machine tools considerably, and many machine tools are equipped with thermal error compensation function. In general, thermal errors can be generated in the angular directions as well as linear directions. Among them, thermal errors in the angular directions contribute a large amount of error components in the presence of offset distance as in the case of Abbe error. Because most of thermal error compensation function is based on a good correlation between temperature change and thermal deformation, angular thermal deformation is often to be the most difficult hurdle for enhancing compensation accuracy. In this regard, this paper investigates the effect of thermal bending to total thermal error and gives how to deal with thermally induced bending effects in thermal error compensation.