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Data Qualification of Optical Emission Spectroscopy Spectra in Resist/Nitride/Oxide Etch: Coupon vs. Whole Wafer Etching

  • Kang, Dong-Hyun;Pak, Soo-Kyung;Park, George O.;Hong, Sang-Jeen
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.433-433
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    • 2012
  • As the requirement in patterning geometry continuously shrinks down, the termination of etch process at the exact time became crucial for the success in nano patterning technology. By virtue of real-time optical emission spectroscopy (OES), etch end point detection (EPD) technique continuously develops; however, it also faced with difficulty in low open ratio etching, typically in self aligned contact (SAC) and one cylinder contact (OCS), because of very small amount of optical emission from by-product gas species in the bulk plasma glow discharge. In developing etching process, one may observe that coupon test is being performed. It consumes costs and time for preparing the patterned sample wafers every test in priority, so the coupon wafer test instead of the whole patterned wafer is beneficial for testing and developing etch process condition. We also can observe that etch open area is varied with the number of coupons on a dummy wafer. However, this can be a misleading in OES study. If the coupon wafer test are monitored using OES, we can conjecture the endpoint by experienced method, but considering by data, the materials for residual area by being etched open area are needed to consider. In this research, we compare and analysis the OES data for coupon wafer test results for monitoring about the conditions that the areas except the patterns on the coupon wafers for real-time process monitoring. In this research, we compared two cases, first one is etching the coupon wafers attached on the carrier wafer that is covered by the photoresist, and other case is etching the coupon wafers on the chuck. For comparing the emission intensity, we chose the four chemical species (SiF2, N2, CO, CN), and for comparing the etched profile, measured by scanning electron microscope (SEM). In addition, we adopted the Dynamic Time Warping (DTW) algorithm for analyzing the chose OES data patterns, and analysis the covariance and coefficient for statistical method. After the result, coupon wafers are over-etched for without carrier wafer groups, while with carrier wafer groups are under-etched. And the CN emission intensity has significant difference compare with OES raw data. Based on these results, it necessary to reasonable analysis of the OES data to adopt the pre-data processing and algorithms, and the result will influence the reliability for relation of coupon wafer test and whole wafer test.

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A clinical study on the 16 cases of intubation granuloma (후두 삽관육아종 16례에 대한 임상적 고찰)

  • 김용신;김정은;차형근;장백암
    • Proceedings of the KOR-BRONCHOESO Conference
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    • 1993.05a
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    • pp.76-76
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    • 1993
  • Endotracheal intubation is common technique for general anesthesia or patency of airway. However, laryngeal intubation granuloma is the most common sequale of endotracheal intubation in otolaryngologic field. From 1982 to 1992, the authors had experienced 16 cases intubation granuloma. The following results were as follows; 1. Age distribution was mostly in the 20 to 49 years old group (84 %).The sex ratio of male to female was 1:7, predominantly in female. 2. Main sx. were hoarse in 12(75%), F.B. sensation in 3(18%), dyspnea in 1 (6%). 3. The side of lesion was bilateral in 6 cases (37%) and unilateral in 10 cases (63%). Unilateral had the 3 cases (30%) in left and the 7 cases (70%) in right. The location of mass was vocal process of arytenoid cartilage in 8 cases(50%), post 1/3 of vocal cord in 6 cases (37 %) and middle 1/3 of vocal cord in 2 cases (12 %). 4. The duration between extubation and onset of symptom in less than a month was most frequent in 7 cases (44 %) out of 16 cases. 5. The most common operation was cesarean section in 6 cases (37 %). 6. Mean duration of intubation time was 2 hour 5 minutes. 7. Composition of used intubation tube was red rubber tube. 8. One case (6 %) was recurred.

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A Statistical Survey of the Foreign Bodies in the Food and Air Passages (식도및 기도이물의 통계적 고찰)

  • Lee, Min-Hyung;Kang, Baek;Lee, Byung-Hee;Cheon, Kyung-Doo;Kim, Chul-Woo
    • Proceedings of the KOR-BRONCHOESO Conference
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    • 1983.05a
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    • pp.6.3-6
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    • 1983
  • A total of 287 patients with foreign body in the air and food passage was treated in our unit between 1972 and 1982 and the following results were obtained : 1) The ratio between food and air passage was about 8 : 1. 2) The most common foreign bodies in the esophagus were coin (55.8%) and bone (28.5 %). Beans were the most common in the air passage (39.4%). 3) In sex distribution, there was no significant difference between male and females in the esophageal foreign bodies, but in the air passage male were prevalent (M : F = 57.9% : 42.1%). 4) In the age incidence, 61.8 % of the esophageal foreign bodies and 71 % of the foreign bodies in the air passage were under 5 Years of age. 5) The most prevalent site of Lodgement in the esophagus was the first narrowing (82.3 %). In the air passage, bronchial foreign bodies were more common and the right bronchus was the more frequent site (2 : 1). 6) In duration of lodgement, 62.2 % of esophageal foreign bodies and 55.2 % of foreign bodies in the air passage were removed within one day. 7) The most common complication of foreign bodies in the air passage was pneumonia (55.5%). 8) The removal of the foreign bodies in the air passage was performed by ventilation - bronchoscopy (84.3%). Two of 38 cases expired.

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The Design of Predistortion Linearizer with Polar Function Generator for Cellular Band Using Even Order Harmonic Signals (2차 고조파 신호를 이용한 극 함수 발생기를 갖는 셀룰라 밴드용 전치 왜곡 선형화기 설계)

  • Kim, Ell-Kou;Jeon, Ki-Kyoung;Kim, Young;Kwon, Sang-Keun;Yoon, Young-Chul
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.17 no.11 s.114
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    • pp.1050-1057
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    • 2006
  • This paper proposes a new predistortion linearizer with amplitude modulator and PFG(Polar Function Generator) using second order harmonic signals. This linearizer consists of PFG that combine with in-phase and quadrature-phase of second harmonic signals and amplitude modulator in main path. The predistorted third order intermodulation distortion(IMD3) signals that are generated by amplitude modulator with fundamental and PFG signals, improve a amplifier nonlinear characteristics. The proposed linearizer and amplifier have been manufactured and tested to operate in cellular base-station transmitting band$(869\sim894MHz)$. The test results show that IMD3 can be removed by more than 22.5 dB in case of CW 2-tone signals ${\Delta}f=1$ MHz, and the adjacent channel power ratio(ACPR) also can be improved by more than 8.4 dB for CDMA IS-95 1FA signals.

Evaluation of barley to replace milk by-product in weaning pig's diet

  • Jin, Kyung Young;Hong, Jin Su;Sin, Dong Wook;Kang, Hyo Kon;Jo, Yun Young;Lee, Geon Il;Jin, Xing Hao;Jang, Jae Cheol;Jeong, Jae Hark;Kim, Yoo Yong
    • Journal of Animal Science and Technology
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    • v.61 no.2
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    • pp.77-86
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    • 2019
  • The supplementation level of barley was limited because of high contents of fiber in monogastric animals. Barley contained high soluble fiber, thus it could prevent to diarrhea of weaning pigs. Moreover, as the barley break down by enzymes, free sugars come out from the barley, which could be used as an energy source in weaning pigs and replace milk by-products in weaning pig's diet. Therefore, present study was conducted to investigate the influence of barley to replace milk by-product in weaning pig's diet on growth performance, blood profile, nutrient digestibility, diarrhea incidence, and economic analysis in weaning pigs. A total of 112 crossbred ($[Yorkshire{\times}Landrace]{\times}Duroc$, weaned at 28 days of age) piglets were allotted to 4 treatments in a randomized complete block (RCB) design. Each treatment has 7 replications with 4 pigs per pen. Pigs were fed each treatment diet which containing different levels of barley (0%, 10%, 20%, and 30%) at the expense of whey powder and lactose. Three phase feeding programs were used for 6 weeks of growth trial (phase 1: 0-2 weeks; phase 2: 3-4 weeks; phase 3: 5-6 weeks). During 0-2 week, body weight (BW), average daily gain (ADG) and G:F ratio were decreased as barley level increased in the diet (linear response, p < 0.01). In blood profile, blood urea nitrogen was decreased as the barley level increased in the diet (linear, p < 0.01). However, no significant differences were observed in blood glucose level. In nutrient digestibility, crude fat digestibility was linearly increased as barley increased (linear, p < 0.01). The incidence of diarrhea was improved as increasing barley contents in all phases (linear, p < 0.01). These results demonstrated that supplementation of barley to replace milk by-product influenced negatively on growth performance during 0-2 week. However, the incidence of diarrhea and later growth performance from 3 week postweaning were improved as dietary barley level increased.

Nutritional and productive parameters of Holstein/Zebu cows fed diets containing cactus pear

  • Borges, Lucas Daniel Alcantara;Rocha, Vicente Ribeiro Junior;Moncao, Flavio Pinto;Soares, Camila;Ruas, Jose Reinaldo Mendes;Silva, Fredson Vieira e;Rigueira, Joao Paulo Sampaio;Costa, Natanael Mendes;Oliveira, Laura Lucia Santos;Rabelo, Walber de Oliveira
    • Asian-Australasian Journal of Animal Sciences
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    • v.32 no.9
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    • pp.1373-1380
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    • 2019
  • Objective: This study ascertained effects of cactus pear in association with different roughage in the diet of F1 Holstein/Zebu cows on intake, nutrient digestibility, nitrogen balance, ingestive behavior and performance. Methods: Eight cows with $72{\pm}11$ days of lactation were used. The experimental design was simultaneous in two $4{\times}4$ Latin squares. Four experimental diets were used: Diet 1, sorghum silage as exclusive roughage; Diet 2, sorghum silage associated with cactus pear in a proportion of 50% of the roughage (dry matter basis); Diet 3, elephant grass (Pennisetum purpureum cv. Roxo) as exclusive roughage; Diet 4, elephant grass associated with cactus pear in a proportion of 50% of the roughage. The roughage:concentrate ratio was 75:25. Results: Dry matter intake (p = 0.01) was higher with sorghum silage. There were differences in dry matter intake (p = 0.01), crude protein (p<0.01), ether extract (p = 0.01), non-fibrous carbohydrates (p<0.01) and total digestible nutrients (p = 0.01) among the diets. Cactus pear in the diet reduced water intake by 44.52% (p<0.01). The nitrogen balance was 59.71% and 27.49% lower in animals treated with exclusive sorghum silage and sorghum silage associated with cactus pear in relation to diets with elephant grass and elephant grass associated with cactus pear, respectively (p<0.01). The diets did not influence the milk production (p = 0.70), 3.5% fat corrected milk production (p = 0.72) or feed efficiency (p = 0.61). Conclusion: The association of cactus pear with sorghum or elephant grass silage does not alter milk production, reduces the intake of dry matter and water and improves the digestibility of nutrients.

Role of Myocardial Extracellular Volume Fraction Measured with Magnetic Resonance Imaging in the Prediction of Left Ventricular Functional Outcome after Revascularization of Chronic Total Occlusion of Coronary Arteries

  • Yinyin Chen;Xinde Zheng;Hang Jin;Shengming Deng;Daoyuan Ren;Andreas Greiser;Caixia Fu;Hongxiang Gao;Mengsu Zeng
    • Korean Journal of Radiology
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    • v.20 no.1
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    • pp.83-93
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    • 2019
  • Objective: The purpose of this study was to prospectively investigate the value of the myocardial extracellular volume fraction (ECV) in predicting myocardial functional outcome after revascularization of coronary chronic total occlusion (CTO). Materials and Methods: Thirty patients with CTO underwent cardiovascular magnetic resonance (CMR) before and 6 months after revascularization. Three baseline markers of functional outcome were evaluated in the dysfunctional segments assigned to the CTO vessels: ECV, transmural extent of infarction (TEI), and unenhanced rim thickness (RIM). At the global level, the ECV values of the whole myocardium with and without a hyperenhanced region (global and remote ECV) were respectively measured. Results: In per-segment analysis, ECV was superior to TEI and RIM in predicting functional recovery (area under receiver operating characteristic curve [AUC]: 0.86 vs. 0.75 and 0.73, all p values < 0.010), and it emerged as the only independent predictor of regional functional outcome (odds ratio [OR] = 0.83, 95% confidence interval [CI]: 0.77-0.89; p < 0.001) independent of collateral circulation. In per-patient analysis, global baseline ECV was indicative of ejection fraction (EF) at the follow-up examination (β = -0.61, p < 0.001) and changes in EF (β = -0.57, p = 0.001) in multivariate regression analysis. A patient with global baseline ECV less than 30.0% (AUC, 0.93; sensitivity 94%, specificity 80%) was more likely to demonstrate significant EF improvement (OR: 0.38; 95% CI: 0.17-0.85; p = 0.019). Conclusion: Extracellular volume fraction obtained by CMR may provide incremental value for the prediction of functional recovery both at the segmental and global levels in CTO patients, and may facilitate the identification of patients who can benefit from revascularization.

The Empirical Exploration of the Conception on Nursing (간호개념에 대한 기초조사)

  • 백혜자
    • Journal of Korean Academy of Nursing
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    • v.11 no.1
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    • pp.65-87
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    • 1981
  • The study is aimed at exploring concept held by clinical nurses of nursing. The data were collected from 225 nurses conviniently selected from the population of nurses working in Kang Won province. Findings include. 1) Nurse's Qualification. The respondents view that specialized knowledge is more important qualification of the nurse. Than warm personality. Specifically, 92.9% of the respondents indicated specialized knowledge as the most important qualification while only 43.1% indicated warm personality. 2) On Nursing Profession. The respondents view that nursing profession as health service oriented rather than independent profession specifically. This suggests that nursing profession is not consistentic present health care delivery system nor support nurses working independently. 3) On Clients of Nursing Care The respondents include patients, family and the community residents in the category of nursing care. Specifically, 92.0% of the respondents view that patient is the client, while only 67.1% of nursing student and 74.7% of herself. This indicates the lack of the nurse's recognition toward their clients. 4) On the Priority of Nursing care. Most of the respondents view the clients physical psychological respects as important component of nursing care but not the spiritual ones. Specially, 96.0% of the respondents indicated the physical respects, 93% psychological ones, while 64.1% indicated the spiritual ones. This means the lack of comprehensive conception on nursing aimension. 5) On Nursing Care. 91.6% of the respondents indicated that nursing care is the activity decreasing pain or helping to recover illness, while only 66.2% indicated earring out the physicians medical orders. 6) On Purpose of Nursing Care. 89.8% of the respondents indicated preventing illness and than 76.6% of them decreasing 1;ai of clients. On the other hand, maintaining health has the lowest selection at the degree of 13.8%. This means the lack of nurses' recognition for maintaining health as the most important point. 7) On Knowledge Needed in Nursing Care. Most of the respondents view that the knowledge faced with the spot of nursing care is needed. Specially, 81.3% of the respondents indicated simple curing method and 75.1%, 73.3%, 71.6% each indicated child nursing, maternal nursing and controlling for the communicable disease. On the other hand, knowledge w hick has been neglected in the specialized courses of nursing education, that is, thinking line among com-w unity members, overcoming style against between stress and personal relation in each home, and administration, management have a low selection at the depree of 48.9%,41.875 and 41.3%. 8) On Nursing Idea. The highest degree of selection is that they know themselves rightly, (The mean score measuring distribution was 4.205/5) In the lowest degree,3.016/5 is that devotion is the essential element of nursing, 2.860/5 the religious problems that human beings can not settle, such as a fatal ones, 2,810/5 the nursing profession is worth trying in one's life. This means that the peculiarly essential ideas on the professional sense of value. 9) On Nursing Services. The mean score measuring distribution for the nursing services showed that the inserting of machine air way is 2.132/5, the technique and knowledge for surviving heart-lung resuscitating is 2.892/s, and the preventing air pollution 3.021/5. Specially, 41.1% of the respondents indicated the lack of the replied ratio. 10) On Nurses' Qualifications. The respondents were selected five items as the most important qualifications. Specially, 17.4% of the respondents indicated specialized knowledge, 15.3% the nurses' health, 10.6% satisfaction for nursing profession, 9.8% the experience need, 9.2% comprehension and cooperation, while warm personality as nursing qualifications have a tendency of being lighted. 11) On the Priority of Nursing Care The respondents were selected three items as the most important component. Most of the respondents view the client's physical, spiritual: economic points as important components of nursing care. They showed each 36.8%, 27.6%, 13.8% while educational ones showed 1.8%. 12) On Purpose of Nursing Care. The respondents were selected four items as the most important purpose. Specially,29.3% of the respondents indicated curing illness for clients, 21.3% preventing illness for client 17.4% decreasing pain, 15.3% surviving. 13) On the Analysis of Important Nursing Care Ranging from 5 point to 25 point, the nurses' qualification are concentrated at the degree of 95.1%. Ranging from 3 point to 25, the priorities of nursing care are concentrated at the degree of 96.4%. Ranging from 4 point to 16, the purpose of nursing care is concentrated at the degree of 84.0%. 14) The Analysis, of General Characteristics and Facts of Nursing Concept. The correlation between the educational high level and nursing care showed significance. (P < 0.0262). The correction between the educational low level and purpose of nursing care showed significance. (P < 0.002) The correlation between nurses' working yeras and the degree of importance for the purpose of nursing care showed significance (P < 0.0155) Specially, the most affirmative answers were showed from two years to four ones. 15) On Nunes' qualification and its Degree of Importance The correlation between nurses' qualification and its degree of importance showed significance. (r = 0.2172, p< 0.001) 0.005) B. General characteristics of the subjects The mean age of the subject was 39 ; with 38.6% with in the age range of 20-29 ; 52.6% were male; 57.9% were Schizophrenia; 35.1% were graduated from high school or high school dropouts; 56.l% were not have any religion; 52.6% were unmarried; 47.4% were first admission; 91.2% were involuntary admission patients. C. Measurement of anxiety variables. 1. Measurement tools of affective anxiety in this study demonstrated high reliability (.854). 2. Measurement tools of somatic anxiety in this study demonstrated high reliability (.920). D. Relationship between the anxiety variables and the general characteristics. 1. Relationship between affective anxiety and general characteristics. 1) The level of female patients were higher than that of the male patient (t = 5.41, p < 0.05). 2) Frequencies of admission were related to affective anxiety, so in the first admission the anxiety level was the highest. (F = 5.50, p < 0.005). 2, Relationship between somatic anxiety and general characteristics. 1) The age range of 30-39 was found to have the highest level of the somatic anxiety. (F = 3.95, p < 0.005). 2) Frequencies of admission were related to the somatic anxiety, so .in first admission the anxiety level was the highest. (F = 9.12, p < 0.005) 0. Analysis of significant anxiety symptoms for nursing intervention. 1. Seven items such as dizziness, mental integration, sweating, restlessness, anxiousness, urinary frequency and insomnia, init. accounted for 96% of the variation within the first 24 hours after admission. 2. Seven items such as fear, paresthesias, restlessness, sweating insomnia, init., tremors and body aches and pains accounted for 84% of the variation on the 10th day after admission.

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GPU Based Feature Profile Simulation for Deep Contact Hole Etching in Fluorocarbon Plasma

  • Im, Yeon-Ho;Chang, Won-Seok;Choi, Kwang-Sung;Yu, Dong-Hun;Cho, Deog-Gyun;Yook, Yeong-Geun;Chun, Poo-Reum;Lee, Se-A;Kim, Jin-Tae;Kwon, Deuk-Chul;Yoon, Jung-Sik;Kim3, Dae-Woong;You, Shin-Jae
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.80-81
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    • 2012
  • Recently, one of the critical issues in the etching processes of the nanoscale devices is to achieve ultra-high aspect ratio contact (UHARC) profile without anomalous behaviors such as sidewall bowing, and twisting profile. To achieve this goal, the fluorocarbon plasmas with major advantage of the sidewall passivation have been used commonly with numerous additives to obtain the ideal etch profiles. However, they still suffer from formidable challenges such as tight limits of sidewall bowing and controlling the randomly distorted features in nanoscale etching profile. Furthermore, the absence of the available plasma simulation tools has made it difficult to develop revolutionary technologies to overcome these process limitations, including novel plasma chemistries, and plasma sources. As an effort to address these issues, we performed a fluorocarbon surface kinetic modeling based on the experimental plasma diagnostic data for silicon dioxide etching process under inductively coupled C4F6/Ar/O2 plasmas. For this work, the SiO2 etch rates were investigated with bulk plasma diagnostics tools such as Langmuir probe, cutoff probe and Quadruple Mass Spectrometer (QMS). The surface chemistries of the etched samples were measured by X-ray Photoelectron Spectrometer. To measure plasma parameters, the self-cleaned RF Langmuir probe was used for polymer deposition environment on the probe tip and double-checked by the cutoff probe which was known to be a precise plasma diagnostic tool for the electron density measurement. In addition, neutral and ion fluxes from bulk plasma were monitored with appearance methods using QMS signal. Based on these experimental data, we proposed a phenomenological, and realistic two-layer surface reaction model of SiO2 etch process under the overlying polymer passivation layer, considering material balance of deposition and etching through steady-state fluorocarbon layer. The predicted surface reaction modeling results showed good agreement with the experimental data. With the above studies of plasma surface reaction, we have developed a 3D topography simulator using the multi-layer level set algorithm and new memory saving technique, which is suitable in 3D UHARC etch simulation. Ballistic transports of neutral and ion species inside feature profile was considered by deterministic and Monte Carlo methods, respectively. In case of ultra-high aspect ratio contact hole etching, it is already well-known that the huge computational burden is required for realistic consideration of these ballistic transports. To address this issue, the related computational codes were efficiently parallelized for GPU (Graphic Processing Unit) computing, so that the total computation time could be improved more than few hundred times compared to the serial version. Finally, the 3D topography simulator was integrated with ballistic transport module and etch reaction model. Realistic etch-profile simulations with consideration of the sidewall polymer passivation layer were demonstrated.

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Effect of Fruit Thinner on Fruit Set and Quality in 'Hongro' and 'Fuji' Apples (적과제 처리가 '홍로'와 '후지' 사과의 착과 및 과실품질에 미치는 영향)

  • Yoo, Jingi;Park, Moo-Yong;Kang, In-Kyu
    • Horticultural Science & Technology
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    • v.32 no.5
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    • pp.577-583
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    • 2014
  • Benzyladenine (BA, 99% purity), MaxCel$^{(R)}$ (1.9% BA), Fruitone (3.5% NAA), MaxCel$^{(R)}$ + Fruitone, a nd s imazine were applied postbloom as fruitlet thinning agents to mature 'Hongro' and 'Fuji' apple (Malus domestica Borkh.) trees. BA and MaxCel$^{(R)}$ were applied at $100mg{\cdot}L^{-1}$ a.i. while Fruitone at $0.1mg{\cdot}L^{-1}$ a.i. and simazine at $400mg{\cdot}L^{-1}$ a.i. All PGRs were applied at 8 days after full bloom (DAFB, 6 mm fruit diameter) in both cultivars, while simazine was treated twice at 7 and 14 DAFB. In 'Hongro', the number of total fruit set per flower cluster in terminal buds was 1.67, 1.84, and 1.81 in MaxCel$^{(R)}$ + F ruitone, MaxCel$^{(R)}$, and simazine applications, respectively, when compared with 2.35 of water control. These reductions in fruit set were mainly attributed to the increased ratio of defruited clusters by the thinning agents. In 'Fuji' apple, the number of total fruit set per flower cluster in terminal buds was 1.29, 1.60, and 1.76 in MaxCel$^{(R)}$ + Fruitone, Fruitone, and MaxCel$^{(R)}$, respectively, when compared with 2.56 of water control in 'Fuji' apple. The addition of Fruitone to the MaxCel$^{(R)}$ promoted the thinning efficacy in both cultivars, compared to MaxCel$^{(R)}$ only. The thinning efficacies were similarly observed with lateral flowers in both cultivars. A significant increase of fruit weight by the postbloom thinning treatments was observed only in the BA application in 'Hongro', while the effect was observed in BA and MaxCel$^{(R)}$ in 'Fuji'. While the soluble solids content increased in the BA, MaxCel$^{(R)}$ and MaxCel$^{(R)}$+Fruitone treatments in both cultivars, other fruit quality attributes were not affected by the application of post-bloom thinning agents.