• 제목/요약/키워드: AS₂O₃

검색결과 37,286건 처리시간 0.057초

Atomic layer chemical vapor deposition of Zr $O_2$-based dielectric films: Nanostructure and nanochemistry

  • Dey, S.K.
    • E2M - 전기 전자와 첨단 소재
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    • 제16권9호
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    • pp.64.2-65
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    • 2003
  • A 4 nm layer of ZrOx (targeted x-2) was deposited on an interfacial layer(IL) of native oxide (SiO, t∼1.2 nm) surface on 200 mm Si wafers by a manufacturable atomic layer chemical vapor deposition technique at 30$0^{\circ}C$. Some as-deposited layers were subjected to a post-deposition, rapid thermal annealing at $700^{\circ}C$ for 5 min in flowing oxygen at atmospheric pressure. The experimental x-ray diffraction, x-ray photoelectron spectroscopy, high-resolution transmission electron microscopy, and high-resolution parallel electron energy loss spectroscopy results showed that a multiphase and heterogeneous structure evolved, which we call the Zr-O/IL/Si stack. The as-deposited Zr-O layer was amorphous $ZrO_2$-rich Zr silicate containing about 15% by volume of embedded $ZrO_2$ nanocrystals, which transformed to a glass nanoceramic (with over 90% by volume of predominantly tetragonal-$ZrO_2$(t-$ZrO_2$) and monoclinic-$ZrO_2$(m-$ZrO_2$) nanocrystals) upon annealing. The formation of disordered amorphous regions within some of the nanocrystals, as well as crystalline regions with defects, probably gave rise to lattice strains and deformations. The interfacial layer (IL) was partitioned into an upper Si $o_2$-rich Zr silicate and the lower $SiO_{x}$. The latter was sub-toichiometric and the average oxidation state increased from Si0.86$^{+}$ in $SiO_{0.43}$ (as-deposited) to Si1.32$^{+}$ in $SiO_{0.66}$ (annealed). This high oxygen deficiency in $SiO_{x}$ indicative of the low mobility of oxidizing specie in the Zr-O layer. The stacks were characterized for their dielectric properties in the Pt/{Zr-O/IL}/Si metal oxide-semiconductor capacitor(MOSCAP) configuration. The measured equivalent oxide thickness (EOT) was not consistent with the calculated EOT using a bilayer model of $ZrO_2$ and $SiO_2$, and the capacitance in accumulation (and therefore, EOT and kZr-O) was frequency dispersive, trends well documented in literature. This behavior is qualitatively explained in terms of the multi-layer nanostructure and nanochemistry that evolves.ves.ves.

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SHS법을 이용한 복합분말(Al2O3-SiC) 제조시 TiO2첨가의 영향 (The effect of the addition of TiO2 in the preparation of (Al2O3-SiC)- SiC composite powder by SHS Process)

  • 윤기석;양범석;이종현;원창환
    • 한국재료학회지
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    • 제12권1호
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    • pp.48-53
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    • 2002
  • $Al_2O_3-SiC$ and $Al_2O_3-SiC$-TiC composite powders were prepared by SHS process using $SiO_2,\;TiO_2$, Al and C as raw materials. Aluminum powder was used as reducing agent of $SiO_2,\;TiO_2$ and activated charcoal was used as carbon source. In the preparations of $Al_2O_3-SiC$, the effect of the molar ratio in raw materials, compaction pressure, preheating temperature and atmosphere were investigated. The most important variable affecting the synthesis of $Al_2O_3-SiC$ was the molar ratio of carbon. Unreactants remained in the product among all conditions without compaction. The optimum condition in this reaction was $SiO_2$: Al: C=3: 5: 5.5, 80MPa compaction pressure under Preheating of $400^{\circ}C$ with Ar atmosphere. However there remains cabon in the optimum condition. The effect of $TiO_2$ as additive was investigated in the preparations of $Al_2O_3-SiC$. As a result of $TiO_2$ addition, $Al_2O_3-SiC$-TiC composite powder was prepared. The $Al_2O_3$ powder showed an angular type with 8 to $15{\mu}m$, and the particle size of SiC powder were 5~$10{\mu}m$ and TiC powder were 2 to $5{\mu}m$.

가상화 환경에서 NVMe SSD 성능 분석 및 직접 접근 엔진 개발 (Performance Analysis of NVMe SSDs and Design of Direct Access Engine on Virtualized Environment)

  • 김세욱;최종무
    • 정보과학회 컴퓨팅의 실제 논문지
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    • 제24권3호
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    • pp.129-137
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    • 2018
  • 낸드 플래시 메모리 기반의 NVMe(Non-Volatile Memory express) SSD(Solid State Drive)는 멀티 I/O 큐 환경을 제공하는 PCIe 인터페이스 기반에 NVMe 프로토콜을 사용하는 저장장치이다. NVMe SSD는 Multi-core 시스템에서 병렬 I/O 처리가 가능하고 SATA SSD에 비해 대역폭이 크며 대용량의 저장 공간을 제공하기 때문에 데이터 센터, 클라우드 컴퓨팅 등에 사용될 차세대 저장장치로 주목받고 있다. 하지만 가상화 시스템에서는 소프트웨어 I/O 스택의 병목으로 인하여 NVMe SSD의 성능을 충분히 활용하지 못하고 있다. 특히, Xen과 KVM과 같이 호스트 시스템의 I/O 스택을 사용하는 경우에는, 호스트 시스템과 가상머신의 중복된 I/O 스택을 통해서 입출력이 처리되기 때문에 성능 저하가 크게 발생한다. 본 논문에서는 NVMe SSD에 직접 접근하는 기술을 KVM 가상화 시스템에 적용함으로써 가상 머신 I/O의 성능을 향상시키는 Direct-AIO (Direct-Asynchronous I/O)엔진을 제안한다. 그리고 QEMU 에뮬레이터에 제안한 엔진을 개발하고 기존의 I/O 엔진과의 성능 차이를 비교 및 분석한다.

Effects of Additives on the Properties of $YBa_2Cu_3O_x$

  • Soh, Dea-Wha;Cho, Yong-Joon;Fan, Zhanguo
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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    • pp.341-344
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    • 2004
  • The superconducting properties of $YBa_2Cu_3O_x$ with different content impurities of PbO and $BaPbO_3$ were studied. When the PbO was used as an additive in $YBa_2Cu_3O_x$, although the melting point could be reduced, the superconductivity became poor. From the XRD pattern of the sintered mixture of $YBa_2Cu_3O_x$ and PbO it was known that there is a reaction between $YBa_2Cu_3O_x$ and PbO, and the product is $BaPbO_3$. In the process of the reaction the superconducting phase of $YBa_2Cu_3O_x$ was decreased and $BaPbO_3$ would be the main phase in the sample. Therefore, $BaPbO_3$ was chosen as the impurity additive for the comparative study. The single phase of $BaPbO_3$ was synthesized by the simple way from both mixtures of $BaCO_3$ and PbO, $BaCO_3$ and $PbO_2$. Different contents of $BaPbO_3$ (10%, 20%, 30%) were added in the $YBa_2Cu_3O_x$. By the Phase analysis in the XRD patterns it was proved that there was no reaction between $YBa_2Cu_3O_x$ and $BaPbO_3$. When $BaPbO_3$ was used as impurity in $YBa_2Cu_3O_x$ the superconductivity was much better than PbO as an impurity additive in $YBa_2Cu_3O_x$.

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$(Zr_{0.65}, Sn_{0.35})Ti_{1.04}O_{4.04}$세라믹스의 NiO첨가에 따른 고주파 유전 특성 (Microwave dielectric properties according to the additions of NiO to $(Zr_{0.65}, Sn_{0.35})Ti_{1.04}O_{4.04}$ ceramics)

  • 윤중락;권정열;이헌용;김경용
    • E2M - 전기 전자와 첨단 소재
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    • 제8권5호
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    • pp.594-600
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    • 1995
  • Dielectric properties at microwave frequencies of ($Zr_{0.65}$, $Sn_{0.35}$) $Ti_{1.04}$ $O_{4.04}$ ceramics with additives, NiO as an agent to improve dielectric properties and $B_{2}$ $O_{3}$ as a firing agent were investigated. When 0.5 - 1.5 wt% of NiO is add, the grain growth is inhibited and the shape of the grain is uniformed, Dielectric constant(Fr) and bulk density are increased with raising amount of NiO at sintering temperature of 1330 - 1360.deg. C, but the temperature coefficient of resonant frquency(.epsilon.$_{r}$) decreased gradually as the NiO content increased. The value of Qx $f_{o}$ was increased as the amount of NiO was increased in the range of 0.5 to 1.0 wt% and the Qx $f_{o}$, was decreased slightly with raising sintering temperature. With NiO of 1.0 wt% and at sintering temperature of 1360.deg. C, this ceramics was found to have excellent microwave properties of .epsilon.$_{r}$=37.8, Qx $f_{o}$ = 48.600 and .tau.$_{f}$ = 7 ppm/.deg. C.C.. C.. C.C.. C.. C.

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펄스레이저법으로 MgO 단결정 기판위에 YBCO/BaZrO$_3$ 박막의 증착 (Deposition of YBCO/BaZrO$_3$ films on MgO single crystal substrates by pulsed laser deposition)

  • 정준기;고락길;김호섭;하홍수;송규정;문승현;유상임;김철진;박찬
    • 한국초전도ㆍ저온공학회논문지
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    • 제6권3호
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    • pp.12-15
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    • 2004
  • There are two major approaches to obtain texture template for HTS coated conductor (CC) ---IBAD and RABiTS. CC's with IBAD template showed both longer and higher Ic results so far. IBAD for CC began with YSZ, the processing of which is very slow compared to other processings needed for the fabrication of CC. Because of this very slow processing speed, IBAD with other materials such as Gd$_2$Zr$_2$O$_{7}$(GZO) and MgO have been developed. The processings of IBAD-GZO and IBAD-MgO are known to be up to 3times and 100 times. respectively, as fast as the processing of IBAD-YSZ. IBAD-MgO is very attractive in that the processing is very fast. IBAD-MgO also needs additional buffer layer(s). Many materials are being investigated to be used as a buffer layer on top of the MgO. BaZrO$_3$ (BZO) is a good candidate as the buffer layer on top of the IBAD-MgO because it is chemically stable and does not react with YBCO at high temperatures. It also has good lattice match with MgO. The BZO film has been deposited on single crystal MgO, and YBCO film was deposited on BZO/MgO to investigate the possibility of using BZO as both the buffer and capping layer of the CC.C.

BaTiO$_3$ 세라믹스의 전기저항에 미치는 첨가제와 냉각속도의 영향(I) - TiO$_2$, SiO$_2$ 및 Al2O$_3$ 단미첨가 - (Effect of Additives and Cooling Rates on the Electrical Resistivity of BaTiO3 Ceramics (I))

  • 염희남;하명수;이재춘;정윤중
    • 한국세라믹학회지
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    • 제28권9호
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    • pp.661-666
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    • 1991
  • Microstructure, room temperature resistivity and temperature coefficient of resistance of BaTiO3 ceramics were studied by varying cooling rates and additives such as TiO2, SiO2 and Al2O3. The basic composition of the BaTiO3 ceramics was formed by adding 0.25 mol% Dy2O3 and 0.07 mol% MnO2 to the BaTiO3 composition. Unlike the additives of SiO2 and Al2O3, an addition of 2 mol% TiO2 to the basic composition was effective to control the grain size of the fired specimens. The room temperature resistivity and the temperature coefficient of resistance for the specimen of this particular compostion were measured as about 102 ohm.cm and 16.5%/$^{\circ}C$, respectively. The observed grain boundary phase of the sample with Al2O3 additive was BaTi3O7, while that of the samples with SiO2 additive was confirmed as BaTiSiO5.

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Crystalline Phases and Dielectric Properties of Crystallized Glasses in the System (Ca, Sr, Ba) O-Al2O3-B2O3-SiO2-TiO2

  • Tuzuku, Koichiro;Kishi, Hiroshi;Taruta, Seiichi;Takusagawa, Nobuo
    • The Korean Journal of Ceramics
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    • 제5권2호
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    • pp.189-194
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    • 1999
  • Crystallization of glasses in the system (Ca, Sr, Ba)$O-Al_2O_3-B_2O_3-SiO_2-TiO_2$ and dielectric properties of crystallized glasses were investigated. As increasing B2O3 content and decreasing SiO2 content in the glass, the major crystalline phase changed from $(Sr, Ba)_2TiSi_2O_8$ to (Ca, Sr, Ba)TiO3, the dielectric constant of crystallized glasses increased and the Temperature Coefficient of Capacitance (TCC) changed to negative. The dielectric constant and TCC was estimated for (Sr, Ba)2TiSi2O8 phase as 18 and -440 $ppm/^{\circ}C$, respectively and for (Ca, Sr, Ba)TiO3 phase as 307 and -1900 $ppm/^{\circ}C$, respectively. The dielectric properties of (Ca, Sr, Ba)TiO3 phase (in this study) were similar to those of (Ca, Ba) TiO_3 solid-solution^12)$, but $(Sr, Ba)_2TiSi_2O_8$ phase (in this study) and $Sr_2TiSi_2O_\;8^4$ showed the different properties.

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만성 골수성 백혈병 세포주에서 As2O3가 세포주기 및 세포고사에 미치는 영향 (The Effects of Arsenic Trioxide on Cell Cycle and Apoptosis in Chronic Myelogenous Leukemia Cell Line)

  • 심문정
    • 대한임상검사과학회지
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    • 제38권2호
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    • pp.82-86
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    • 2006
  • Leukemia arises in hematopoietic progenitor cells and is characterized by impaired or blocked differentiation, uncontrolled proliferation and resistance to apoptosis. Molecular mechanisms underlying cellular functions by $As_2O_3$, however, have been poorly investigated. The consensus of several reports is that $As_2O_3$ induces apoptosis in leukemia cells by activating genes for apoptosis. The present study aimed to investigate the effects of $As_2O_3$ on the cell cycle and its morphological change and a relationship between the caspase-3 and $As_2O_3$-induced apoptosis. Caspase-3 is involved in $As_2O_3$-induced apoptosis in K562 cells. In this study, to address whether $As_2O_3$-induced apoptosis is mediated by caspase-3 activity, the same samples were probed with a specific antibody. The pretreatment of $25{\mu}M$ Z-VAD-fmk, a specific inhibitor of caspase, decreased $As_2O_3$-induced cytotoxicity. And $As_2O_3$ significantly increased the percentages of the cells accumulated in the G2/M phase of the cell cycle in a time- and dose-dependent manner. Chromatin condensational changes were observed with Hoechst 33258 staining after treatment of $As_2O_3$. It was shown that $As_2O_3$-induced apoptosis is controlled through caspase-3 activation. These results may provide a useful rationale for CML treatment.

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ZTA계에서 첨가물($Cr_2O_3$, $HfO_2$)에 따른 물성 변화 및 기계적 성질이 마모성에 미치는 영향 (Characteristics and Effects for the Mechanical Properties on the Wearness of the ZTA System with $Cr_2O_3$ and $HfO_2$) as Additives)

  • 최성철;이응상
    • 한국세라믹학회지
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    • 제27권3호
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    • pp.369-382
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    • 1990
  • ZrO2-Toughened Alumina-Ceramics(ZTA) with Cr2O3 and HfO2 as addition were synthesized by assintering method for solid solution of Al2O3/Cr2O3 and ZrO2/HfO2, and were prepared by pressureless sintering at 1$600^{\circ}C$. The effects of Cr2O3 and HfO2 on the thermal and mechanical properties, the sintering mechanism, and the wearness between theory and experiment were investigated. Among three kinds of mechanisms such as stress-induced transformation, microcracking, and crack deflection it contributed to the ZTA system with a few exceptons according to composite. We show that wearness can be estimated sufficiently by HV and KIC through theory and experiment.

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