• Proceedings of the Korean Vacuum Society Conference
• /
• 2011.08a
• /
• pp.121-121
• /
• 2011

Graphene formed by chemical vapor deposition was exposed to the various plasmas of Ar, O2, N2, and H2 to examine its effects on the bonding properties of graphene to metal. Upon the Ar plasma exposure of patterned graphene, the subsequently deposited metal electrodes remained intact, enabling successful fabrication of field effect transistor (FET) arrays. The effects of enhancing adhesion between graphene and metals were more evident from O2 plasmas than Ar, N2, and H2 plasmas, suggesting that chemical reaction of O radicals induces hydrophilic property of graphene more effectively than chemical reaction of H and N radicals and physical bombardment of Ar ions. From the electrical measurements (drain current vs. gate voltage) of field effect transistors before and after Ar plasma exposure, it was confirmed that the plasma treatment is very effective in controlling bonding properties of graphene to metals accurately without requiring buffer layers.

• Korean Journal of Optics and Photonics
• /
• v.18 no.1
• /
• pp.74-78
• /
• 2007

We report theoretical and experimental results for application of transmittance-controlled photomask technology to ArF lithography. The transmittance-controlled photomask technology is thought to be a promising technique fo critical dimension (CD) uniformity correction on a wafer by use of phase patterns on the backside of a photomask. We could theoretically reproduce experimental results for illumination intensity drop with respect to the variation of backside phase patterns by considering light propagation from the backside to the front side of a photomask at the ArF lithography wavelength. We applied the transmittance-controlled photomask technology to ArF lithography for a critical layer of DRAM (Dynamic Random Access Memory) having a 110-nm design rule and found that the in-field CD uniformity value was improved from 13.8 nm to 9.7 nm in $3{\sigma}$.

• Journal of the Korean institute of surface engineering
• /
• v.39 no.3
• /
• pp.137-141
• /
• 2006

Process window for infinite etch selectivity of silicon nitride $(Si_3N_4)$ layers to ArF photoresist (PR) was investigated in dual frequency superimposed capacitive coupled plasma (DFS-CCP) by varying the process parameters such as low frequency power $(P_{LF})$, $CH_2F_2$ and $H_2$ flow rate in $CH_2F_2/H_2/Ar$ plasma. It was found that infinite etch selectivities of $Si_3N_4$ layers to the ArF PR on both blanket and patterned wafers can be obtained for certain gas flow conditions. The etch selectivity was increased to the infinite values as the $CH_2F_2$ flow rate increases, while it was decreased from the infinite etch selectivity as the $H_2$ flow rate increased. The preferential chemical reaction of the hydrogen with the carbon in the polymer film and the nitrogen on the $Si_3N_4$ surface leading to the formation of HCN etch by-products results in a thinner steady-state polymer and, in turn, to continuous $Si_3N_4$ etching, due to enhanced $SiF_4$ formation, while the polymer was deposited on the ArF photoresist surface.

• Asia pacific journal of information systems
• /
• v.31 no.2
• /
• pp.220-235
• /
• 2021

Technology has been changing the travel experience of visitors. Particularly, augmented reality (AR) is one of the emerging technologies, which widely used in cultural heritage tourism sites. This study is based on a new technology acceptance model and future modified this model to examine the relationship between product beliefs, consumer satisfaction with AR, and destination loyalty in cultural heritage sites. Moreover, this paper examined the role of technology readiness (TR) forming travellers' loyalty of destination with a kind of travel technology--AR. The results show that perceived usefulness and perceived ease of use have significant effects on the satisfaction of AR towards the travellers' loyalty of destination. TR is found to have moderating effects on this model.

• The Journal of the Korea Contents Association
• /
• v.21 no.2
• /
• pp.474-488
• /
• 2021

The application of Augmented Reality(AR) technology is visible in medical procedures, education, marketing, and journalism. By experimenting, this study examines how the evaluation of the three elements of augmented reality news contents(visual image, storytelling, interactivity) affects immersion and information acquisition. Specifically, a 2 (video technology: AR vs. general) × 2 (news type: disaster vs. sports) between-subject design was examined. Results showed that the evaluation of all three elements was higher when viewing AR news than when viewing general news. The level of immersion was higher when viewing AR news, and the evaluation of storytelling and interactivity had positive effect on the level of immersion regardless of the news types. However, the evaluation of visual images did not affect the level of immersion. Information acquisition was higher after viewing AR news, yet the effect of the evaluation of the three elements on information acquisition had not been found. Implication and discussion of the study were added in the end.

• Proceedings of the Korea Information Processing Society Conference
• /
• 2018.05a
• /
• pp.545-548
• /
• 2018

본 논문에서는 모바일 디바이스의 GPS, Compass, Gyroscope Sensor를 이용하여 실외 공간의 위치를 찾아주는 실시간 AR 나침반을 제안한다. 제안 AR 나침반에서는 모바일 디바이스의 Sensor 이용하여 사용자의 위치와 방향, 실외 공간의 위치와 방향을 계산하여 안내 Object의 크기와 가시화 여부를 결정하고 보여줌으로 사용자가 실외 공간의 위치를 찾아갈 수 있도록 하는 나침반을 설계 구현하였다.

• Korean Journal of Construction Engineering and Management
• /
• v.18 no.2
• /
• pp.21-29
• /
• 2017

Recently, with having a great interest of the general public for the AR (Augmented Reality) technology, there have been lots of study to improve efficiency of a construction equipment with applying the AR technology to a construction equipment. The clear extrinsic calibration is essential to applying AR technology at the construction site without any error which came from superimposition between 'Real world' and 'Virtual world'. However, on the construction site, the clear extrinsic calibration is not possible, because of lack of time and budget for the specific survey, also, the huge error of the outdoor tracking system such as gyro, GPS system and so on. In this study, we do research about seamless superposition with unclear extrinsic calibration and the image process method for making AR navigator operating in the excavator. Based on this study, we figure that we can fully develop the AR navigator for the excavator. Furthermore, thereby operating AR navigator at many construction sites, we expect that the efficiency of the excavator will be improved. In addition, we can develop AR navigator for not only a excavator but all about construction equipment.

• Proceedings of the Korea Contents Association Conference
• /
• 2017.05a
• /
• pp.7-8
• /
• 2017

증강현실(AR)의 기술력은 우리들의 생활속에 깊숙이 침투하여 혁신적인 변화를 가져오고 있다. 증강현실(AR)의 기술동향을 살펴보고, E-교과서 분야에 증강현실(AR)이 적용됐을 때 교육적 효과가 극대화 될 것으로 기대를 모으게 된다. 이에 증강현실(AR) 기술동향과 E-교과서 사례를 분석하여 증강현실(AR) 디자인 기술을 적용한 E-교과서 콘텐츠 기획에 관해 연구하고자 한다.

• Journal of the Semiconductor & Display Technology
• /
• v.20 no.4
• /
• pp.96-101
• /
• 2021

The SLAM market is growing rapidly with advances in Machine Learning, Drones, Augmented Reality technologies. However, due to the absence of an open source-based SLAM library for developing AR content, most SLAM researchers are required to conduct their own research and development to customize SLAM. In this paper, we propose an opensource-based Mobile Markerless AR System by building our own pipeline based on Visual SLAM. To implement the Mobile AR System of this paper, it uses ORB-SLAM3 and Unity Engine and We experimented with running our system in a real environment and confirming it in the Unity Engine's Mobile Viewer. Through this experimentation, we can verify that the Unity Engine and the SLAM System are tightly integrated and communicate smoothly. Also, we expect to accelerate the growth of SLAM technology through this research.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
• /
• 2017.05a
• /
• pp.297-299
• /
• 2017

Recently, the application fields of augmented reality(AR) are rapidly increasing, and related contents are also increasing in demand. In this way, object-based marker recognition is required for service of AR contents in mobile environment. At this time, in order to provide information corresponding to the marker, a technique of generating and servicing a virtual object corresponding to a specific marker is used. However, when a virtual object corresponding to a marker is held on the AR screen, a phenomenon occurs that an object of the marker unstably shakes due to various reasons such as camera shake and camera movement. As described above, the AR service based on the mobile device has a problem that it is difficult to represent objects stably. In this paper, we propose a stable marker recognition and tracking technique by applying the filtering technique according to the physical state change of the device when recognizing fixed markers in mobile AR environment.