• 제목/요약/키워드: AFM(Atomic Force Microscope)

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PLD를 이용한 (100) $LaAlO_3$ 기판위의 ZnO 에피택셜 박막 성장 (Epitaxial Growth of ZnO Thin Films on (100) $LaAlO_3$ Substrate by Pulsed Laser Deposition)

  • 조대형;김지홍;문병무;조영득;구상모
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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    • pp.256-256
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    • 2008
  • We report epitaxial growth of ZnO thin films on (100) single-crystalline $LaAlO_3$ (LAO) substrates using pulsed laser deposition (PLD) at different substrate temperatures (400~$800^{\circ}C$). The structural and electrical properties of the films have been investigated by means of X-ray diffraction (XRD), atomic force microscope (AFM), transmission line method (TLM). The poly-crystalline of $\alpha$- and c-axis oriented ZnO film was formed at lower deposition temperature ($T_s$) of $400^{\circ}C$. At higher $T_s$, however, the films exhibit single-crystalline of $\alpha$-axis orientation represented by ZnO[$\bar{1}11$ || LAO <001>. The electrical properties of ZnO thin films depend upon their crystalline orientation, showing lower electrical resistivity values for $\alpha$-axis oriented ZnO films.

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펨토초 레이저를 이용한 은 나노 와이어 필름 전기적 절연 (Electrical Isolation of Ag Nanowire Film using Femtosecond Laser)

  • 윤지욱;박정규;다니엘뵈머;세바스찬잰더;조성학
    • 한국정밀공학회지
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    • 제29권3호
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    • pp.334-338
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    • 2012
  • Electrical isolation of Ag nanowire, which is one of the candidates as electrode for display devices, on polymer with femtosecond pulse laser has been investigated. Line patterning to Ag nanowire with various pulse energy and scan speed were experimented. Duo to the results of the line patterning experiment, we fabricated the isolated squares and measured electrical resistance. The profile of the selectively ablated area was analyzed with AFM(Atomic Force Microscope). The width of the patterned line was $1.8\;{\mu}m$ and the depth was $1.6\;{\mu}m$. We demonstrated electrical isolation of the Ag nanowire using femtosecond laser by evaluating the electrical resistance of the sample between isolated and opened area.

컴퓨터 하드디스크 드라이브의 레이저 텍스쳐 디스크와 미케니칼 텍스쳐 디스크의 마모거동에 관한 연구 (A Tribological Investigation on Laser Textured Disk and Mechanically Textured Disk of Computer Hard Disk Drive)

  • 김우석;김도형;황평;김장교
    • 한국윤활학회:학술대회논문집
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    • 한국윤활학회 1998년도 제28회 추계학술대회
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    • pp.106-114
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    • 1998
  • Tribological investigation of ultra thin film magnetic storage disks which have two different kinds of start/stop zone of laser textured bump disk and mechanically textured disk for before CSS test and after CSS test. To measure surface roughness, height reduction before/after CSS test and obtain accurate topographies, AFM(Atomic Force Microscope) which is most powerful recently has been used. The result of statistical analysis showed that both laser textured bump height and mechanically textured zone height have been reduced about 4~7nm after 15000 cycle CSS test. Using commercial Nano-Indenter, ramping load scratch test has been performed to investigate friction characteristic for laser textured zone and mechanically textured zone before/after CSS test.

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Comparison of Tribological Characteristics of ZnO Coatings Prepared by Sputtering and Sol-gel Methods

  • Lin, Li-Yu;Kim, Dae-Eun
    • KSTLE International Journal
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    • 제10권1_2호
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    • pp.23-26
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    • 2009
  • In this work the tribological characteristics were compared between ZnO coatings on glass substrate prepared by sputtering and sol-gel methods. In order to assess the effects of processing method on the tribological characteristics, the friction and wear properties of the coatings were measured by using a reciprocating type of micro-tribotester. The sputtered ZnO coatings were prepared on a glass substrate at room temperature, $150^{\circ}$, and $300^{\circ}$. The ZnO coatings prepared by sol-gel method were heat-treated in air atmosphere at $550^{\circ}$ for one hour. The crystal structure and surface morphology of the coatings were measured by X-ray diffraction (XRD) and Atomic Force Microscope (AFM), respectively. The experimental results showed that overall the sputtered coatings exhibited better friction and wear properties than coatings prepared by sol-gel method. The sputtered coating grown at room temperature had a relatively low friction coefficient of 0.14 and superior wear resistance compared with the other coatings. Nevertheless, sol-gel method of coating ZnO on glass is beneficial for economical coating of a large surface area.

New fabrication methods of step-edge Josephson junctions on SrTiO$_3$, MgO, LaAlO$_3$ single crystal substrates for YBa$_2$Cu$_3$O$_7$ thin films by using ion milling technique

  • Moon, Sunk-Yung;Ahn, Jong-Rok;Hwang, Yun-Seok;Lee, Soon-Gul;Choi, Hee-Seok;Kim, Jin-Tae
    • 한국초전도학회:학술대회논문집
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    • 한국초전도학회 2000년도 High Temperature Superconductivity Vol.X
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    • pp.146-150
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    • 2000
  • Two methods have been investigated to fabricate good quality step-edge Josephson junctions on STO, MgO, and LAO single crystal substrates. One is the annealing of substrates at 1050$^{\circ}$C in 1 atmospheric oxygen after Ar-ion milling. The other is the cleaning of step-edge by using Ar ion milling. The step-edge is characterized with atomic force microscope (AFM) images. And YBCO thin films are deposited by using pulsed laser. The I-V properties of step-edge junctions are characterized. The yield rate of step-edge junction is increased by new fabrication methods.

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ITO 박막의 $O_2$ 플라즈마 처리에 의한 휴지전기발광소자의 특성 향상 (Improvement of Organic Electroluminescent Device Performance by $O_2$ Plasma Treatment of ITO Surface)

  • 양기성;김두석;김병상;신훈규;권영수
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 춘계학술대회 논문집 반도체 재료 센서 박막재료 전자세라믹스
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    • pp.137-140
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    • 2004
  • We treated $O_2$ plasma on ITO thin film using RIE (Reactive Ion Etching) system, and analyzed the ingredient of ITO thin film according to change of processing conditions. The ingredient analysis of ITO thin film was used by EDS (Energy Dispersive Spectroscopy) and XPS (X-ray Photoelectron Spectroscopy) to compare and analyze the ingredient of bulk and surface. We measured electrical resistivity using Four-Point-Probe and calculated sheet resistance, and ITO surface roughness was measured by using AFM (Atomic Force Microscope). Finally, we fabricated OLEDs (Organic Light-Emitting Diodes) device using substrate that was treated optimum ITO surface. The result of the study for electrical and optical properties using I V L System (Flat Panel Display Analysis System), we confirmed that electrical properties (I-V) and optical properties (L-V) were improved.

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O2 플라즈마 바이어스 파워에 따른 유기 박막의 표면 특성 변화 연구 (Study on the variation of surface characteristics of organic films as a function of bias power by O2 plasma)

  • 함용현;백규하;도이미;신홍식;박석형;권광호
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 춘계학술대회 논문집
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    • pp.57-57
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    • 2009
  • In this work, we carried out the variation of surface characteristics of organic polymer films by O2 plasma. The plasma diagnostics were performed by DLP(Double Langmuir Probe) and OES(Optical Emission Spectroscopy) measurements. Moreover, variation of surface characteristics were measured by AFM(Atomic Force Microscope), XPS(X-ray Photoelectron Spectroscopy), and contact angle goniometer. It was found that the etch rate of organic films was controlled by O radicals flux and dc bias voltage. And O radical density and dc bias voltage increased with increasing bias power. So, it was changed surface energy as a function of surface roughness and O/C ratio in organic films.

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ZnO films grown on GaN/sapphire substrates by pulsed laser deposition

  • Suh, Joo-Young;Song, Hoo-Young;Shin, Myoung-Jun;Park, Young-Jin;Kim, Eun-Kyu
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2010년도 제39회 하계학술대회 초록집
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    • pp.207-207
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    • 2010
  • Both ZnO and GaN have excellent physical properties in optoelectronic devices such as blue light emitting diode (LED), blue laser diode (LD), and ultra-violet (UV) detector. The ZnO/GaN heterostructure, which has a potential to achieve the cost efficient LED technology, has been fabricated by using radio frequency (RF) sputtering, pyrolysis, metal organic chemical vapor deposition (MOCVD), direct current (DC) arc plasmatron, and pulsed laser deposition (PLD) methods. Among them, the PLD system has a benefit to control the composition ratio of the grown film from the mixture target. A 500-nm-thick ZnO film was grown by PLD technique on c-plane GaN/sapphire substrates. The post annealing process was executed at some varied temperature between from $300^{\circ}C$ to $900^{\circ}C$. The morphology and crystal structural properties obtained by using atomic force microscope (AFM) and x-ray diffraction (XRD) showed that the crystal quality of ZnO thin films can be improved as increasing the annealing temperature. We will discuss the post-treatment effect on film quality (uniformity and reliability) of ZnO/GaN heterostructures.

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Alignment of Nematic Liquid Crystals on Polyimide Surface Bombarded by $Ar^+$ Beam

  • Gwag, Jin-Seog;Lee, Seo-Hern;Park, Kyoung-Ho;Park, Won-Sang;Han, Kwan-Yougn;Yoon, Tae-Hoon;Kim, Jae-Chang;Kim, Hee;Cho, Seong-Jin
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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    • pp.409-412
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    • 2002
  • We found that polyimide surfaces bombarded by a low energy argon ion beam align liquid crystals. The pretilt angle of the liquid crystals is controlled by ion beam parameters, such as the energy of the incident ions, the angle of incidence, exposure time and current density. The alignment direction of liquid crystal on substrates corresponded to ion beam direction. By argon ion beam the pretilt angle of the liquid crystals was controlled between $0.5^{\circ}$ and $4^{\circ}$for SE-3140 under the proper conditons. By the atomic force microscope (AFM), polyimide surfaces before and after bombarded by ion beam are compared.

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P3HT:PCBM-based on Polymer Photovoltaic Cells with PEDOT:PSS-pentacene as a Hole Conducting Layer

  • Kim, Hyun-Soo;Hwang, Jong-Won;Park, Su-Jin;Chae, Hyun-Hee;Choe, Young-Son
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2010년도 제39회 하계학술대회 초록집
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    • pp.313-313
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    • 2010
  • The performance of polymer photovoltaic cells based on blends of poly(3-hexylyhiophene) (P3HT) and phenyl-C61-butyric acid methyl ester (PCBM) is strongly influenced by blend composition and thickness. Polymer photovoltaic cells based on bulk-heterojunction have been fabricated with a structure of ITO/poly(3, 4-ethylenedioxythiophene)-poly(styrenesulfonate) (PEDOT:PSS)-pentacene/poly (3-hexylthiophene) (P3HT):phenyl-C61-butyric acid methyl ester (PCBM)/Al. We have prepared PEDOT:PSS by dissolving pentacene in N-methylpyrrolidine (NMP) and mixing with PEDOT:PSS. Pentacene was added a maximum concentration of approximately 5.5mg to the PEDOT:PSS solution and sonicated for 10 min. Active layer (P3HT:PCBM) (1:1) was strongly influenced by PEDOT:PSS-pentacene. We have investigated the performance of photovoltaic device with different concentration of P3HT:PCBM (1:1) 2.0wt%, 2.2wt%, 2.4wt% and 2.6wt%, respectively. The photocurrent and power conversion efficiency (PCE) showed a maximum between 2.0wt% and 2.2wt% concentration of P3HT:PCBM. This implied that both morphology and electron transport properties of the layer influenced the performance of the present photovoltaic cells. As the concentration of P3HT:PCBM blends as an active layer was increased, the power conversion efficiency was decreased. P3HT:PCBM layer and PEDOT:PSS-pentacene layer were characterized by work function, UV-visible absorption, atomic force microscopy (AFM), X-ray diffraction (XRD) and scanning electron microscope (SEM).

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