• 제목/요약/키워드: AAO film

검색결과 44건 처리시간 0.025초

A Study of Pore Formation of AAO Film on Si Substrate with Optimizing Process (Si 기판에 제작된 AAO 박막의 기공 형성 최적화에 관한 연구)

  • Kwon, Soon-Il;Yang, Kea-Joon;Song, Woo-Chang;Lee, Jae-Hyeong;Lim, Dong-Gun
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • 제21권5호
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    • pp.415-420
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    • 2008
  • AAO films were fabricated on two kinds of substrates such as $Al/SiO_2/Si$ and Al/Ni/Ti/Si. To obtain well-aligned AAO film, we optimized process condition for buffer layer, electrolyte and voltage. In the case of oxalic acid, the AAO film with pore size of approximately 45 nm was obtained at voltage of 40 V, temperature of $10^{\circ}C$, oxalic acid of 0.3 M and widening time of 60 min. Then the thickness of barrier is less than 600 nm. In the case of sulfuric acid, the AAO film has pore size of 40 nm and barrier thickness of 400 nm with optimum conditions such as voltage of 25 V, temperature of $8^{\circ}C$, sulfuric acid of 0.3 M and widening time of 60 min.

Mechanical property measurements of AAO nanohoneycomb structure on the porosity (AAO 나노 허니컴 구조물의 porosity 에 따른 기계적인 물성 측정)

  • Kim, Young-Deuk;Lee, Hun-Kee;Jung, Bong-Bu;Park, Hyun-Chul
    • Proceedings of the KSME Conference
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    • 대한기계학회 2008년도 추계학술대회A
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    • pp.1837-1841
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    • 2008
  • The purpose of this study is to investigate the properties of the AAO nanohoneycomb structure. Especially the Elastic modulus and hardness play important role in determining the mechanical deformation of ceramic materials. The mechanical properties of the AAO nanononeycomb structure were investigated using indentation test.

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Improvement of Electrical Properties by Controlling Nickel Plating Temperatures for All Solid Alumina Capacitors

  • Jeong, Myung-Sun;Ju, Byeong-Kwon;Oh, Young-Jei;Lee, Jeon-Kook
    • Proceedings of the Materials Research Society of Korea Conference
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    • 한국재료학회 2011년도 추계학술발표대회
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    • pp.25.2-25.2
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    • 2011
  • Recently, thin film capacitors used for vehicle inverters are small size, high capacitance, fast response, and large capacitance. But its applications were made up of liquid as electrolyte, so its capacitors are limited to low operating temperature range and the polarity. This research proposes using Ni-P alloys by electroless plating as the electrode instead of liquid electrode. Our substrate has a high aspect ratio and complicated shape because of anodic aluminum oxide (AAO). We used AAO because film thickness and effective surface area are depended on for high capacitance. As the metal electrode instead of electrolyte is injected into AAO, the film capacitor has advantages high voltage, wide operating temperature, and excellent frequency property. However, thin film capacitor made by electroless-plated Ni on AAO for full-filling into etched tunnel was limited from optimizing the deposition process so as to prevent open-through pore structures at the electroless plating owing to complicated morphological structure. In this paper, the electroless plating parameters are controlled by temperature in electroless Ni plating for reducing reaction rate. The Electrical properties with I-V and capacitance density were measured. By using nickel electrode, the capacitance density for the etched and Ni electroless plated films was 100 nFcm-2 while that for a film without any etch tunnel was 12.5 nFcm-2. Breakdown voltage and leakage current are improved, as the properties of metal deposition by electroless plating. The synthesized final nanostructures were characterized by scanning electron microscopy (SEM).

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A Study on the Growth and Burning of Anodic Oxide Films on Al6061 Alloy During Anodizing at Constant Voltages (Al6061 합금의 정전압 아노다이징 피막의 형성거동 및 버닝에 대한 연구)

  • Moon, Sanghyuck;Moon, Sungmo;Song, Pungkeun
    • Journal of the Korean institute of surface engineering
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    • 제53권1호
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    • pp.15-21
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    • 2020
  • In this study, growth and burning behavior of 6061 aluminum alloy was studied under constant anodic voltages at various temperatures and magnetic stirring rates in 20% sulfuric acid solution by analysing I-t curves, measuring thickness and hardness of aluminum anodic oxide (AAO) films, observations of surface and cross-sectional images of AAO films. AAO films were grown continuously at lower voltages than 18.5V but burning occurred when a voltage more than 19V was applied in 20% H2SO4 solution at 20±0.5℃ and 200 rpm of magnetic stirring. The burning was always related with an extremely large increase of anodic current density with anodizing time, suggesting that high heat generation during anodizing causes deteriorations of AAO films by chemical reaction with acidic solutions. The burning resulted in decreases of film thickness and hardness, surface color brightened and formation of porous defects in the AAO films. The burning voltage was found to decrease with increasing solution temperature and decreasing magnetic stirring rate. The decreased burning voltages seem to be closely related with increased chemical reactions between AAO films and hydrogen ions.

Friction Behavior of Oil-enriched Nanoporous Anodic Aluminum Oxide Film (오일 함침된 나노 기공 산화알루미늄 필름의 마찰 거동)

  • Kim, Hyo-Sang;Kim, Dae-Hyun;Hahn, Jun-Hee;Ahn, Hyo-Sok
    • Tribology and Lubricants
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    • 제27권4호
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    • pp.193-197
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    • 2011
  • Friction behavior of nanoporous anodic aluminum oxide(AAO) film was investigated. A 60 ${\mu}m$ thick AAO film having nanopores of 45 nm diameter with 105 nm interpore-diatance was fabricated by mild anodization process. The AAO film was then saturated with paraffinic oil. Reciprocating ball-on-flat sliding friction tests using 1 mm diameter steel ball as the counterpart were carried out with normal load ranging from 0.1 N to 1 N in an ambient environment. The morphology of worn surfaces were analyzed using scanning electron microscopy. The friction coefficient significantly increased with the increase of load. The boundary lubrication layer of paraffinic oil contributed to the lower friction at relatively low load (0.1 N), but it is less effective at high load (1 N). Plastic deformed layer patches were formed on the worn surface of oil-enriched AAO at relatively low load (0.1 N) without evidence of tribochemical reaction. On the other hand, thick tribolayers were formed on the worn surface of both oil-enriched and as-prepared AAO at relatively high load (1 N) due to tribochemical reaction and material transfer.

Preparation of Cu2(btc)3-AAO Hybrid Membrane by Layer-by-layer Technique (Layer-by-layer 기법을 통한 Cu2(btc)3-AAO 하이브리드 분리막의 제조)

  • Yoo, Hyeonseok;Choi, Jinsub
    • Journal of the Korean institute of surface engineering
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    • 제51권1호
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    • pp.21-26
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    • 2018
  • The $Cu_2(btc)_3$ metal-organic frameworks (MOF) coated anodic aluminum oxide (AAO) membrane was successfully prepared by layer-by-layer technique using hand spray method. It was confirmed that the $Cu_2(btc)_3$ layer, which has the pore sized in 2-3 nm, on surface of AAO exhibited the polycrystalline thin film structure by XRD analysis. More than 100 repetitive spray cycles were required to obtain more robust and thick MOFs on AAO and it was possible to uniformly coat both the top and bottom surfaces of the AAO. It should be noted that the MOFs also could be coated on surface of pores resulting in reduce the size of pore from 52 nm to 32 nm.

Formation Behavior of Anodic Oxide Films on Al 6061 Alloy in Sulfuric Acid Solution (황산 용액에서 Al6061 합금의 아노다이징 피막 형성거동)

  • Moon, Sungmo;Jeong, Kihun;Lim, Sugun
    • Journal of the Korean institute of surface engineering
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    • 제51권6호
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    • pp.393-399
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    • 2018
  • Formation behavior of aluminum anodic oxide (AAO) films on Al6061 alloy was studied in view of thickness, morphology and defects in the anodic films in 20 vol.% sulfuric acid solution at a constant current density of $40mA/cm^2$, using voltage-time curve, observation of anodized specimen colors and surface and cross-sectional morphologies of anodic films with anodization time. With increasing anodizing time, voltage for film formation increased exponentially after about 12 min and its increasing rate decreased after 25 min, followed by a rapid decrease of the voltage after about 28 min. Surface color of anodized specimen became darker with increasing anodizing time up to about 20 min, while it appeared to be brighter with increasing anodizing time after 20 min. The darkened and brightened surfaces with anodizing time are attributed to an increase in thickness of porous anodic oxide film and a chemical damage of the films due to heat generated by increased resistance of the film, respectively. Cross-sectional observation of AAO films revealed the formation of defects of crack shape at the metal/oxide interface after 15 min which prevents the growth of AAO films. Width and length of the crack-like defect increased with anodizing time up to 25 min of anodizing, and finally the outer part of AAO films was partly dissolved or detached after 30 min of anodizing, resulting in non-uniform surface structures of the AAO films.

Thin film process of anodic aluminum oxidation for optoelectronic nano-devices (나노 광소자 응용을 위한 알루미늄 양극산화박막 공정)

  • Choi, Jae-Ho;Baek, Ha-Bong;Kim, Keun-Joo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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    • pp.106-107
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    • 2007
  • We fabricated anodic aluminium oxides (AAO) on Si and sapphire substrates from the electrochemical reactions of thin AI films in an aqueous solution of oxalic acid. The thin AI films have deposited on Si and Sapphire substructure by using E-beam evaporation and thermal evaporation, respectively. The formation of AAO structures has investigated from FE-SEM measurement image and showed randomly distributed phase of nanoholes instead of the periodic lattice of photonic crystals. The AAO structure on sapphire shows the double layers of nanoholes.

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