• 제어로봇시스템학회논문지
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• 제14권5호
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• pp.420-425
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• 2008

PMMA light guiding plate with nano-sized pattern was fabricated using anodized aluminum oxide membrane as a template for nano imprint lithography. Nano-sized pore arrays were prepared by the self-organization processes of the anodic oxidation using the aluminum plate with 99.999% purity. Since the aluminum plate has a rough surface, the aluminum plate with thickness of 1mm was anodized after the pre-treatments of chemical polishing, and electrochemical polishing. The surface morphology of the alumina obtained by the first anodization process was controlled by the concentration of electrochemical solution during the first anodization. The surface morphology of the alumina was also changed according to temperature of the solution during chemical polishing performed after first anodization. The pore widening process was employed for obtaining the one-channel with flat surface and height of the channel because the pores of the alumina membrane prepared by the fixed voltage method shows the structure of two-channel with rough surface. It is shown from SPM results that the nano-sized pattern on PMMA light guiding plate fabricated by nano imprint lithography method was well transferred from that of anodized aluminum oxide template.

• 한국표면공학회지
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• 제51권1호
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• pp.21-26
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• 2018

The $Cu_2(btc)_3$ metal-organic frameworks (MOF) coated anodic aluminum oxide (AAO) membrane was successfully prepared by layer-by-layer technique using hand spray method. It was confirmed that the $Cu_2(btc)_3$ layer, which has the pore sized in 2-3 nm, on surface of AAO exhibited the polycrystalline thin film structure by XRD analysis. More than 100 repetitive spray cycles were required to obtain more robust and thick MOFs on AAO and it was possible to uniformly coat both the top and bottom surfaces of the AAO. It should be noted that the MOFs also could be coated on surface of pores resulting in reduce the size of pore from 52 nm to 32 nm.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.265.1-265.1
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• 2013

Nanoporous anodic aluminum oxide (AAO), a self-ordered hexagonal array has various applications for nanofabrication such as nanotemplate, and nanostructure. In order to obtain highly-ordered porous alumina membranes, Masuda et al. proposed a two-step anodization process however this process is confined to small domain size and long hours. Recently, alternative methods overcoming limitations of two-step process were used to make prepatterned Al surface. In this work, we confirmed that there is a specific tendency used a PDMS stamp to obtain a pre-patterned Al surface. Using the nanoindentaions of a PDMS stamp as chemical carrier for wet etching, we can easily get ordered nanoporous template without two-step process. This chemical etching method using a PDMS stamp is very simple, fast and inexpensive. We use two types of PDMS stamps that have different intervals (800nm, 1200nm) and change some parameters have influenced the patterning of being anodized, applied voltage, soaking and stamping time. Through these factors, we demonstrated the patterning effect of large scale PDMS stamp.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2003년도 춘계학술발표강연 및 논문개요집
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• pp.53-53
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• 2003

There has been increasing interest in the fabrication of nano-sized structures because of their various advantages and applications. Anodic Aluminum Oxide (AAO) is one of the most successful methods to obtain highly ordered nano pores and channels. Also It can be obtained diverse pore diameter, density and depth through the control of anodization condition. The three types of substrates were used for anodization; sheets of Aluminum on Si wafer and Aluminum on Mo-coated Si wafer. In Aluminum sheet, a highly ordered array of nanoholes was formed by the two step anodization in 0.3M oxalic acid solutions at 10$^{\circ}C$ After the anodization, the remained aluminum was removed in a saturated HgCl$_2$ solution. Subsequently, the barrier layer at the pore bottom was opened by chemical etching in phosphoric acid. Finally, we can obtain the through-channel membrane. In these processes, the effect of various parameters such as anodizing voltage, anodizing time, pore widening time and pre-heat treatment are characterized by FE-SEM (HITACH-4700). The pore size. density and growth rate of membrane are depended on the anodizing voltage and temperature respectively. The pore size is proportional to applied voltage and pore widening time The pore density can be controlled by anodizing temperature and voltage.

• Bulletin of the Korean Chemical Society
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• 제35권2호
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• pp.349-352
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• 2014

Anodic alumina oxide (AAO), a self-ordered hexagonal array, has various applications in nanofabrication such as the fabrication of nanotemplates and other nanostructures. In order to obtain highly ordered porous alumina membranes, a two-step anodization or prepatterning of aluminum are mainly conducted with straight electric field. Electric field is the main driving force for pore growth during anodization. However, impurities in aluminum can disturb the direction of the electric field. To confirm this, we anodized two different aluminum foil samples with high purity (99.999%) and relatively low purity (99.8%), and compared the differences in the surface morphologies of the respective aluminum oxide membranes produced in different electric fields. Branched pores observed in porous alumina surface which was anodized in low-purity aluminum and the size; dimensions of the pores were found to be usually smaller than those obtained from high-purity aluminum. Moreover, anodization at high voltage proceeds to a significant level of conversion because of the high speed of the directional electric field. Consequently, anodic alumina membrane of a specific morphology, i.e., meshed pore, was produced.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.195-195
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• 2010

In recent years, Anodic aluminum oxide(AAO) has become popular and attractive materials. It can be easily fabricated and self-organized pore structures. It has been widely used as a biosensor membrane, photonic crystal for optical circuit and template for nanotube growth etc. In previous papers, the theory was developed that AAO shows anisotropic optical properties, since it has anisotropic structure with numerous cylindrical pores. It gives rise to the anisotropy of the refractive index called as birefringence. It can be used as conventional polarizing elements with high efficiency and low cost. Therefore, we would like to compare the theory and experimental results in this study. One method which can measure effective refractive index of thin film is the prism coupling technique. It can give accurate results fast and simply. Furthermore, we can also measure separately the refractive index with different polarization using polarization of the laser (TE mode and TM mode). We calculated the effective refractive index with effective medium approximations (EMAs) by pore size in the SEM image. EMAs are physical models that describe the macroscopic system as the homogeneous and typical method of all mean field theories.

• 한국전기전자재료학회논문지
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• 제27권6호
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• pp.394-398
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• 2014

We fabricated the electrolyte-dielectric-metal (EDM) sensor on the base of AAO (anodic aluminum oxide) template with variation of the anodizing temperature. When a surface is immersed or created in an aqueous solution, a discontinuity is formed at the interface where such physicochemical variables as electrical potential and electrolyte concentration change significantly from the aqueous phase to another phase. Because of the different chemical potentials between the two phases, charge separation often occurs at the interfacial region [1]. This interfacial region, togeter with the charged surface, is usually known as the electrical double layer (EDL) [2]. The structural and electrochemical properties of AAO sensor were investigated for applications in capacitive pH sensors. To change the thickness of the AAO template, the anodizing temperature was varied from $5^{\circ}C$ to $20^{\circ}C$, the thickness of the AAO template invreased from 300 nm to 477 nm. The pH sensitivity of sensors with the anodizing temperature of $20^{\circ}C$ showed the highest value of 56.4 mV/pH in the pH range of 3 to 11. The EDM sensor with the anodizing temperature of $20^{\circ}C$ exhibited the best long-term stability of 0.037 mV/h.

• 한국진공학회지
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• 제15권4호
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• pp.427-433
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• 2006

자발적인 미세상 분리에 의해 실린더형의 규칙적인 배열을 형성하는 고분자 공중합체와 알루미늄의 양극산화에 의해 실린더형 기공 배열이 형성되는 알루미나 템플레이트를 이용하여 다양한 물질의 나노점 배열을 형성하였다. 펄스형 레이저 기상 증착법을 이용하여 은, 니켈, 산화아연, 실리콘, 코발트 / 백금 나노점 배열을 얻었는데, 나노점의 크기와 배열은 템플레이트의 기공 크기와 배열을 보여주었다. 이러한 템플레이트 기법을 이용하면 나노점의 밀도는 고 분자 공중합체와 알루미나의 경우 각각 $6{\times}10^{11}/cm^2$ 와 $1{\times}10^{10}/cm^2$ 이다. 이중 에르븀이 도핑된 실리콘 나노점과 ZnO 나노점 배열은 PL 측정을 통하여 물질의 광학성질에 관해 알아보았다. 에르븀이 도핑된 실리콘 나노점 배열은 $1.54{\mu}m$에서 강한 빛을 내며 ZnO 나노점 배열은 380 nm 에서 강한 PL 세기를 나타낸다.

• Bulletin of the Korean Chemical Society
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• 제29권4호
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• pp.758-760
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• 2008

Nanoporous AAO (Anodic Aluminum Oxide) membranes have many advantages as a template for variety of magnetic materials. Materials can be embedded into the pores by electrodeposition, sputtering or magnetic-field-assisted infiltration of magnetic nanoparticles. This work focuses on the fabrication of the magnetic structures in the AAO templates by electrodeposition. Our method allows the controlled growth of Co nanostructures within the porous alumina membrane in the form of dots, rods and long wires. The shape of Co nanostructures has been investigated by field emission scanning electron microscope (FESEM). The magnetic hysteresis loops of Co nanostructures were measured using SQUID at 5 K and 300 K. The magnetic properties of the Co nanostructures are proportional to their aspect ratios and can be controlled by changing the aspect ratios.

• 한국표면공학회지
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• 제54권1호
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• pp.25-29
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• 2021

The fabrication of nanopore membrane by deposition of Al2O3 film using electron-beam evaporation, which is fast, cost-effective, and negligible dependency on substance material, is investigated for potential applications in water purification and sensors. The decreased nanopore diameter owing to increased wall thickness is observed when Al2O3 film is deposited on anodic aluminum oxide membrane at higher deposition rate, although the evaporation process is generally known to induce a directional film deposition leading to the negligible change of pore diameter and wall thickness. This behavior can be attributed to the collision of evaporated Al2O3 particles by the decreased mean free path at higher deposition rate condition, resulting in the accumulation of Al2O3 materials on both the surface and the edge of the wall. The reduction of nanopore diameter by Al2O3 film deposition can be applied to the nanopore membrane fabrication with sub-100 nm pore diameter.