• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.33-33
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• 2011

반도체 산업기술이 발달함에 따라 고청정 공정 환경이 요구되고 있으며, 반도체 공정용 장비에 이용되는 부품 중 양극산화피막법(Anodizing)으로 피막을 성장시킨 anodic aluminum oxide (AAO)부품은 플라즈마에 의해 화학적, 물리적 침식이 발생하여 코팅막과 모재에 손상을 일으키며 코팅막이 깨지거나 박리되면서 다량의 Particle이 생성됨으로써 공정상의 여러 가지 문제를 야기 시킨다고 알려져 있다. 하지만 코팅막을 평가하는 방법은 거의 전무하며 기본물성 측정방법인 피막두께, 내전압, 임피던스, 내식성 측정방법을 통하여 여러 기본물성측정방법으로 부품의 평가기술을 연구하였다. 본 연구에서는 이러한 진공 부품의 하나인 anodic aluminum oxide (AAO)부품샘플을 누설전류 및 내전압 측정하여 샘플의 전기적 특성을 측정하였고, 표면 미세구조의 변화를 관찰하였다. 부식실험으로는 HCl 가스를 발생시켜 부식정도를 알아봤으며, 부식처리와 플라즈마 처리 모두 코팅 막의 손상과 전기적 특성의 감소를 보였다. 진공장비 전극 부품평가의 유익한 평가 항목으로서 플라즈마 데미지를 주는 도중에 실시간으로 부품평가에 따른 Particle을 측정함으로써 ISPM 장비를 이용하여 진공 장비용 코팅부품이 플라즈마공정에서 발생하는 오염입자를 측정할 수 있는 방법을 연구하였다. 이러한 결과를 이용하여 진공공정에서 사용되는 코팅부품이 플라즈마에 의한 손상정도를 정량화 하고 평가방법을 개발하여 진공장비용 공정 중 실시간으로 부품의 성능평가가 가능하고 코팅부품 신뢰성 향상이 가능할 것으로 본다.

• Macromolecular Research
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• 제17권12호
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• pp.995-1002
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• 2009

Luminescent polynorbornene (PNB)/quantum dot (CdSe@ZnS; QD) composite nanorods and nanotubes were successfully prepared using anodic aluminum oxide (AAO) membranes of various pore sizes as templates. To protect QDs with high quantum yield from quenching during the phosphoric acid treatment used to remove the AAO templates, chemically stable and optically clear norbornene-maleic anhydride copolymers (P(NB-r-MA)) were employed as a capping agent for QDs. The amine-terminated QDs reacted with maleic anhydride moieties in P(NB-r-MA) to form PNB-grafted QDs. The chemical- and photo-stability of QDs encapsulated with PNB copolymers were investigated by photoluminescence (PL) spectroscopy. By varying the pore size of the AAO templates from 40 to 380 urn, PNB/QD composite nanorods or nanotubes were obtained with a good dispersion of QDs in the PNB matrix.

• 한국재료학회지
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• 제14권9호
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• pp.664-669
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• 2004

Anodic aluminum oxide (AAO) with pores of various diameter, density, and thickness values was obtained through control of the anodization parameters including voltage, temperature, pore widening time, anodization time, etc. The pore diameter was controlled by a pore widening in an etchant, and alumina templates having stepped nano-channels were fabricated by repetition of anodization and pore widening processes. Stepped carbon nanotubes (CNTs) were then grown on the stepped AAO templates by pyrolysis of acetylene without using the catalyst. High-resolution transmission electron microscopy images revealed that CNTs have a multi-wall structure made of graphite flakes of several nm sizes. The current-voltage characteristic of the sloped and linear CNTs were also examined.

• 소성∙가공
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• 제20권1호
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• pp.23-28
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• 2011

For the fabrication of nano patterned products manufacturing a nano patterned mold is needed in advance. The nano patterned stamper was fabricated by electroforming the AAO master with nickel. The surface of nickel-plated stamper had nano-patterned holes with the diameter of 73 nm and the depth of 83 nm. Hot embossing was used for forming P3HT sheet and the process factors of hot embossing were closer as pressure, temperature and time. In the present paper hot embossing experiments were performed to find the main process conditions to affect the replication ratio of nano patterns on surface of P3HT sheet. As a result, main contributing factors for the replication ratio of hot embossed pattern could be sequentially enumerated as pressure, temperature and time.

• 정보저장시스템학회논문집
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• 제9권2호
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• pp.67-71
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• 2013

The fabrication method of plasmonic nanodots on silicon substrate has been developed to improve the efficiency of thin film solar cells. Nanoscale metallic nanodots arrays are fabricated by anodic aluminum oxide (AAO) template mask which can have different structural parameters by varying anodization conditions. In this paper, the structural parameters of gold nanodots, which can be controlled by the diverse structures of AAO template mask, are investigated to enhance the optical properties of a-Si thin film solar cells. It is found that optical properties of the thin film solar cells are improved by finding optimization values of the structural parameters of the gold nanodot array.

• 대한금속재료학회지
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• 제50권1호
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• pp.59-63
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• 2012

Studying the long-range ordering of nanopores on the anodic aluminum oxide (AAO) membranes under a hard anodization (HA) approach is crucial in producing well-aligned nanopores on the AAO membranes. Electro-polishing in a mixture of ethanol and perchloric acid for 5 min removed marks formed by rolling and produced flat surfaces on aluminum substrates. The AAO was formed by the first HA process, providing seeds for the subsequent production of uniform AAO nanopores. The second HA process carried out on the seeds produced well-aligned, uniform AAO nanopores. The AAO nanopores, varying in size and shape, were observed with voltages applied for HA. This study provides a route for controlling the size and shape of AAO nanopores by changing the applied voltages.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.33-33
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• 2010

Recently, a self-organizing process that occurs during the anodization of aluminum in acidic electrolytes has attracted a vast amount of research attentions, coupled with the ever-increasing demand for the development of effective, inexpensive and technologically simple methods for the synthesis of low-dimensional nanostructures over a macroscopic area overcoming many of the drawbacks of conventional lithographic techniques. In this presentation, recent progress in the fabrication of ordered nanoporous anodic aluminum oxide (AAO), including conventional anodization techniques, newly developed pulse anodization, hard anodization processes, and generic approaches to three-dimensional pore structures with periodically modulated diameters. Discussion will also cover the applications of AAO for the development of structurally well-defined extended arrays of low-dimensional nanostructures, such as nanodots, nanotubes, and nanowires, which could be model systems in investigating a diverse range of research problems in chemistry and physics and also be starting materials in realizing advanced electronic devices.

• Journal of Electrical Engineering and Technology
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• 제1권2호
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• pp.246-250
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• 2006

Highly ordered gold nanodot arrays have been successfully obtained by vacuum evaporation using an anodic aluminum oxide (AAO) as a shadow mask. An AAO mask with the thickness of 300 um was prepared through an anodization process. The structure of the nanodot arrays was studied by a field- emission scanning electron microscope (FE-SEM) equipped with an energy dispersive spectrometer (EDS). A tapping mode atomic force microscope (AFM) was employed for studies of height and phase feature. The nanodot arrays were precisely reproduced corresponding to the hexagonal structure of the AAO mask in a large area. In the gold nanodot arrays, the average diameter of dots is approximately the same as the AAO pore size in the range from 70 um to 80 nm and 100 nm center-to-center spacing. EDS analysis indicated that the gold dots were almost entirely consisted of gold, a highly demanded material.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2006년도 춘계학술대회 논문집
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• pp.251-253
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• 2006

본 연구에서는 Anodic Aluminum Oxide(AAO) 템플레이트 제조 시 알루미늄의 결정방위가 세공 형성에 미치는 영향을 연구하였다. 시료는 직경 20mm 두께 2mm의 세가지 단결정 시편을 사용 하였으며 이는 XRD 장비로 $2{\theta}$ 측정결과를 통해 확인 하였다. 양극 산화전 평활한 면을 얻기 위해 다이아몬드분말로 미세연마하였으며 양극산화는 세가지 시편 모두 동일한 조건에서 2단계공정까지 진행하여 반복 실험 하였다. 결과는 전계방출주사전자현미경(FE-SEM)으로 표면의 세공형태를 관찰 하였다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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• pp.87-88
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• 2005

AAO(Anodic Aluminum Oxide)는 양극산화 방법을 이용하여 얻을 수 있는 알루미늄의 다공성 산화막이다. 기존의 방법에서는 DC전압을 이용하여 AAO를 성장시켰는데 본 연구에서는 AC전압을 이용하여 AAO의 성장 특성을 제어하였다. 전압원으로 DAQ를 사용하였는데 출력전압을 증폭하기 위하여 2 단 차동증폭기를 제작하였다. 실험 결과는 AAO 기판의 SEM 사진을 촬영, 분석함으로써 얻을 수 있었다. SEM 시진을 분석한 결과 pore size는 전압의 변화에 큰 영향을 받지 않음을 알 수 있었던 반면 성장 길이는 AC전압의 주기가 증가함에 따라 길어지는 성향을 확인할 수 있었다. 또한 주기와 AAO 성장 길이와의 관계를 로그스케일 그래프로 나타내보면 선형적인 특성을 나타내었다. 이를 통해 인가한 전압의 주파수에 따라 AAO의 성장 길이를 예측할 수 있었다.