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SF6 and O2 Effects on PR Ashing in N2 Atmospheric Dielectric Barrier Discharge

  • Jeong, Soo-Yeon;Kim, Ji-Hun;Hwang, Yong-Seuk;Kim, Gon-Ho
    • Transactions on Electrical and Electronic Materials
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    • v.7 no.4
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    • pp.204-209
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    • 2006
  • Photo Resist (PR) ashing process was carried out with the atmospheric pressure- dielectric barrier discharge (ADBD) using $SF_6/N_2/O_2$. Ashing rate (AR) was sensitive to the mixing ratio of the oxygen and nitrogen of the blower type of ADBD asher. The maximum AR of 5000 A/min was achieved at 2% of oxygen in the $N_2$ plasma. With increasing the oxygen concentration to more than 2% in the $N_2$ plasma, the discharge becomes weak due to the high electron affinity of oxygen, resulting in the decrease of AR. When adding 0.5% of SF6 to $O_2/N_2$ mixed plasma, the PR AR increased drastically to 9000 A/min and the ashed surface of PR was smoother compared to the processed surface without $SF_6$. Carbon Fluorinated polymer may passivate the PR surface. It was also observed that the glass surface was not damaged by the fluorine.

A study on the Application of STS wire Mesh air Cleaner for the 2-Wheel Automotive (2륜 자동차 공기청정기의 STS적용에 관한 연구)

  • Yi, C.S.;Lee, Y.H.;Suh, J.S.;Chung, H.S.;Jeong, H.M.
    • Journal of Power System Engineering
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    • v.6 no.4
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    • pp.30-35
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    • 2002
  • This study represents the effects of the material of the air cleaner on the performance in a 4-stroke spark-ignition engine for motorcycles. This study is mainly focused on the possibility of the adopting the STS wire mesh air cleaner of a S.I engine. For investigating the possibility of that, the engine power, the fuel consumption and the exhaust gas analysis were carried out for the synthetic fiber air cleaner and the different size of 200 mesh, 250 mesh, 300 mesh of STS wire mash air cleaner. As the results of this study, the performance of STS wire air cleaner was similar to the fiber air cleaner at 9000 rpm but 300 mesh of STS air cleaner had a high engine power and torque at 9500 rpm. In the case of the synthetic fiber air cleaner the concentration of CO was low at 6500 rpm and in the case of the 300 mesh in STS wire mesh air cleaner the concentration of HC was lowest at all experimental regions.

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A study of synthesis method Lean DFSS and Advanced Product Quality Planning of ISO/TS16949 (ISO/TS16949 APQP 프로세스와 Lean DFSS 프로세스의 통합에 관한 연구)

  • Kwon, Sok;Lee, Kang-Koon;Ree, Sang-Bok
    • Proceedings of the Korean Society for Quality Management Conference
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    • 2006.04a
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    • pp.456-460
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    • 2006
  • 많은 6시그마 혁신을 하는 기업 중에서 ISO9000 시리즈나 ISO/TS16949 인증을 받고 있다. 그럼에도 불구하고 6시그마 도입 초기부터 ISO/TS16949와 통합운영을 생각하고 추진하는 곳은 많지 않다. ISO/TS16949에서는 기업전반의 프로세스에 많은 중점을 두고 있다. 그 중에서도 APQP(Advanced Product Quality Planning)은 제품 초기에서부터 명확한 품질계획 업무 프로세스를 가지고 활동을 하라는 필수 프로세스를 요구하고 있다. 그러나 구체적인 Flow나 단계는 각 기업체의 특성에 맞기고 있다. 6시그마의 Lean DFSS는 이러한 제품개발 프로세스의 구체적인 전계단계를 제공하고 있다 여기에 APQP에서 요건으로 명시한 각 프로세스 단계마다 Input요소, Output요소, Target, 그 프로세스를 책임질 구성원, 핵심성공요인, 핵심성공지수, 단계마다의 FMEA(Failure Mode Effect Analysis) 분석을 대응하면 도입 초기에서부터 상호 유기적이면서 효과적인 System이 된다.

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Six Sigma and the Cost of(Poor) Quality

  • Aca;U, Jichao-X
    • International Journal of Quality Innovation
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    • v.3 no.2
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    • pp.159-173
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    • 2002
  • Any organization's Six Sigma program may be at high risk without heeding the lessons learned from the past and that tries to operate without a robust business foundation. A foundation that preferably should consist of stepping-stones such as a 5-S house-keeping program, an effective Integrated Management System (IMS), which includes a strong focus on planning for quality to fully capture the Voice of the Customer (VOC), and an organization-wide training scheme, as well as a reliable Cost of Poor Quality (COPQ) system. That's the best advise I can give to any organization that wishes to embark on a Six Sigma improvement program and hope to be successful. The paper will elaborate on the above issues and provide suggested solutions based on the review of published historical information and the experiences encountered over the last four decades by the author, as a quality practitioner and consultant, in industries that produced safety-critical product. This author maintains that few fundamentally new or useful things have been created in the field of Quality during the last couple of decades. Nevertheless, this paper deliberates on a number of relatively “newer” issues including the concept of “three types of customers”, the CTC, “Critical To Customer” term, the eight Quality Management Principles of the new ISO 9000 family, the growth of industry-specific standards, the adoption of Integrated Management Systems, the rebirth of AS2561 COQ standard, the spread of Six Sigma as well as related ASQ certification and the need for a robust business foundation to ensure Six Sigma survival.

A Numerical Analysis on the Rotordynamic Characteristics of a Hybrid Journal Bearing with Pair-Type Angled Injection Orifices (짝(Pair) 형태의 경사 공급구를 갖는 하이브리드 저널 베어링의 로터 동특성에 관한 수치해석)

  • 김창호;이용복
    • Tribology and Lubricants
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    • v.13 no.3
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    • pp.63-72
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    • 1997
  • The stability of a rotor-bearing system supported by swirl-controlled hybrid journal bearing with pair-type angled injection orifices is investigated for improvement of the whirl frequency ratio by allowing effective control of the tangential flow inside the bearing clearance, i.e., by achieving more freedom in controlling strength and direction of the supply tangential flow inside the bearing clearance. It is suggested that the system instability can be improved through the change of bearing dynamic characteristic parameters with the swirl control. The orifice diameter $d_0$ and recess injection angle $\alpha$ along with combinations of swirl/anti-swirl supply pressures and directions (3.0~3.0 MPa, 4.0~2.0 MPa, 2.0~4.0 MPa) are selected for design parameters for swirl-controlled effective factors dependent on journal speeds (3000, 9000, 15000, 21000 rpm). It has been found that the orifice diameter $d_0$ shows strong effects on effective maneuverability of direct-stiffness and direct damping values, while recess injection angle $\alpha$ results in substantial effects on the magnitude and direction of cross-stiffness. Specifically, recess injection parameters which are functions of angle of orifice feeding flow and recess dimensions showed very feasible effect on the stability control of swirl-controlled rotor-bearing system.

A comprehensive study of spin coating as a thin film deposition technique and spin coating equipment

  • Tyona, M.D.
    • Advances in materials Research
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    • v.2 no.4
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    • pp.181-193
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    • 2013
  • Description and theory of spin coating technique has been elaborately outlined and a spin coating machine designed and fabricated using affordable components. The system was easily built with interdisciplinary knowledge of mechanics, fluid mechanics and electronics. This equipment employs majorly three basic components and two circuit units in its operation. These include a high speed dc motor, a proximity sensor mounted at a distance of about 15 mm from a reflective metal attached to the spindle of the motor to detect every passage of the reflective metal at its front and generate pulses. The pulses are transmitted to a micro-controller which process them into rotational speed (revolution per minute) and displays it on a lead crystal display (LCD) which is also a component of the micro-controller. The circuit units are a dc power supply unit and a PWM motor speed controlling unit. The various components and circuit units of this equipment are housed in a metal casing made of an 18 gauge black metal sheet designed with a total area of 1, $529.2cm^2$. To illustrate the use of the spin-coating system, ZnO sol-gel films were prepared and characterized using SEM, XRD, UV-vis, FT-IR and RBS and the result agrees well with that obtained from standard equipment and a speed of up to 9000 RPM has been achieved.

Comparative performance evaluation of 10kV IGCTs in 3L NPC and ANPC Converter in PMSG MV Wind Turbines (PMSG 풍력발전기용 3L NPC와 ANPC 컨버터에서의 10kV IGCT 성능 비교 평가)

  • Lyngdoh, Amreena Lama;Suh, Youngsug;Park, Byoung-Gun;Kim, Jiwon
    • Proceedings of the KIPE Conference
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    • 2018.11a
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    • pp.86-88
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    • 2018
  • The three level(3L) neutral point clamped (NPC) voltage source converter (VSC) topology is widely used for grid interface in high power wind energy due to its superior performance as compared to the two level(2L) VS. However, one of the major drawbacks of this topology is the unequal dispersion of loss and therefore the junction temperature among the power devices. The 3L ANPC topology derived from the NPC topology was proposed to resolve this drawback of unequal loss profile of 3L NPC. The 3L ANPC can work under various switching strategies. In this paper a comparative study of the various switching strategies of 3L ANPC using the recently developed 10kV IGCTs which has the capability to raise the current and voltage rating of the wind turbines is carried out. The comparison is performed using ABB make 10kV IGCT 5SHY17L9000 and PLECs simulations.

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A Remote-Monitoring System of Pets using a Wearable Device (웨어러블 디바이스를 이용한 반려동물 원격 모니터링 시스템)

  • Jeong, Hanjo;Lee, Jeong-Hun;Lee, Ji-Hyeong;Kim, Se-Yun;Jung, Ji-Won
    • Proceedings of the Korean Society of Computer Information Conference
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    • 2020.07a
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    • pp.281-282
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    • 2020
  • 2019년 통계청의 보고에 의하면 1인 가구 수는 전체 가구 수 중 29.9퍼센트인 603만 9000가구로 600만 가구를 돌파하였고, 계속해서 상승 추세에 있다. 1인 가구 비율이 상승함에 따라 반려동물 사육 가정의 비율 또한 상승하고 있다. 본 논문에서는 반려동물을 사육하는 1인 가구를 위해 반려동물의 생체데이터, 활동량 등을 웨어러블 기기를 통해 측정하고, 센싱된 데이터를 원격으로 모니터링할 수 시스템을 제안한다. 아두이노를 이용하여 반려동물의 온도 등의 생체데이터와 활동량 체크를 위한 가속도 센서 데이터를 측정하고 와이파이 통신을 이용하여 데이터베이스 서버로 전송하는 기기를 구성하고, 센싱된 데이터를 사용자가 다운받아서 데이터를 분석, 모니터링할 수 있는 모바일 앱 인터페이스를 제공한다.

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A Study of the Flow Phenomenon of Water in a Channel with Flat Plate Obstruction Geometry at the Entry

  • Khan, M.M.K.;Kabir, M.A.;Bhuiyan, M.A.
    • Journal of Mechanical Science and Technology
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    • v.17 no.6
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    • pp.879-887
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    • 2003
  • The flow in a parallel walled test channel, when obstructed with a geometry at the entrance, can be forward, reverse and stagnant depending on the position of the obstruction. This interesting flow phenomenon has potential benefit in the control of energy and various flows in the process industry In this experiment, the flat plate obstruction geometry was used as an obstruction at the entry of the test channel. The parameters that influence the flow inside and around the test channel were the gap (g) between the test channel and the obstruction geometry, the length (L) of the test channel and the Reynolds number (Re). The effect of the gap to channel width ratio (g/w) on the magnitude of the velocity ratio (V$\_$i/ / V$\_$o/ : velocity inside/ velocity outside the test channel) was investigated for a range of Reynolds numbers. The maximum reverse flow observed was nearly 20% to 60% of the outside velocity for Reynolds number ranging from 1000 to 9000 at g/w ratio of 1.5. The maximum forward velocity inside the test channel was found 80% of the outside velocity at higher g/w ratio of 8. The effect of the test channel length on the velocity ratio was investigated for different g/w ratios and a fixed Reynolds number of 4000. The influence of the Reynolds number on the velocity ratio is also discussed and presented for different gap to width ratio (g/w). The flow visualisation photographs showing fluid motion inside and around the test channel are also presented and discussed.

Influence of tooth position within the field of view on the intensity of cone-beam computed tomographic imaging artifacts when assessing teeth restored with various intracanal materials

  • de Oliveira Pinto, Martina Gerlane;Melo, Saulo Leonardo Sousa;Cavalcanti, Yuri Wanderley;de Lima, Elisa Diniz;Bento, Patricia Meira;de Melo, Daniela Pita
    • Imaging Science in Dentistry
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    • v.50 no.2
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    • pp.141-151
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    • 2020
  • Purpose: This study aimed to quantify the influence of tooth position within the field-of-view (FOV) on cone-beam computed tomography (CBCT) imaging artifacts' intensity when assessing teeth restored with various intracanal materials. Materials and Methods: Seventy single-rooted teeth were divided into 7 groups (10 teeth per group): NiCr post (NC), AgPd post (AP), metal core fiberglass post (MCFG), fiberglass post (FG), anatomical fiberglass post (AFG), fiberglass post cemented with core build-up cement (FGCo), and anatomical fiberglass post cemented with core build-up cement (AFGCo). All posts were cemented using a regular dual-curing resin cement (Allcem), except FGCo and AFGCo which were cemented with a core build-up dual-curing resin cement (AllcemCore). Each tooth was scanned on a CS9000 in 5 positions within the FOV: a central position, anterior horizontal peripheral, peripheral superior, peripheral inferior, and posterior horizontal peripheral position. Hyperdense, hypodense, remaining teeth areas and ROI areas were quantitatively analyzed using ImageJ software. Results: Posterior horizontal peripheral position increased the intensity of artifacts on FGCo and AFGCo post groups (P<0.05), and specifically the hypodense artifact intensity on FG and AFG post groups (P<0.05). NC and AP groups presented greater intensity of artifacts than any other post groups(P<0.05). Conclusion: Artifact intensity increases in the presence of high atomic number materials and when the object is not centered within the FOV. The impact of positioning within the FOV on artifact was greater for fiberglass posts cemented with core build-up dual-curing cement than for metal posts and fiberglass posts cemented with regular dual-curing cement.