• Title/Summary/Keyword: 6-DOF Stage

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Design of a 6-DOF Stage for Precision Positioning and Large Force Generation (정밀 위치 결정 및 고하중 부담 능력을 지닌 6-자유도 스테이지의 설계)

  • Shin, Hyun-Pyo
    • Journal of the Korean Society for Precision Engineering
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    • v.30 no.1
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    • pp.105-112
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    • 2013
  • This paper presents the structural design and finite element analysis of precision stage based on a double triangular parallel mechanism for precision positioning and large force generation. Recently, with the acceleration of miniaturization in mobile appliances, the demand for precision aligning and bonding has been increasing. Such processes require both high precision and large force generation, which are difficult to obtain simultaneously. This study aimed at constructing a precision stage that has high precision, long stroke, and large force generation. Actuators were tactically placed and flexure hinges were carefully designed by optimization process to constitute a parallel mechanism with a double triangular configuration. The three actuators in the inner triangle function as an in-plane positioner, whereas the three actuators in the outer triangle as an out-of-plane positioner. Finite element analysis is performed to validate load carrying performances of the developed precision stage.

Compliant Stage for Nano Patterning Machine (나노 패턴 장비용 컴플라이언스 스테이지)

  • Choi, Kee-Bong;Lee, Jae-Jong
    • Proceedings of the KSME Conference
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    • 2003.04a
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    • pp.1065-1068
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    • 2003
  • The nano imprint process is one of the next generation lithography has been mentioned as one of major nanoreplication techniques because it is simple process, low cost, high replication fidelity and relatively high throughput. This process requires a surface contact between a template with patterns and a wafer on a stage. After contact, the vertical moving the template to the wafer causes some directional motions of the stage. Thus the stage must move according to the motions of the template to avoid the damage of the transferred patterns on the wafer. This study is to develop the wafer stage with a passive compliance to overcome the damage. This stage is designed with the concept like that it has a monolithic, symmetry and planar 6-DOF mechanism.

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Launch Trajectory Analysis of a Spacecrafta (위성발사체의 발사궤적 해석)

  • 최재원;이장규;이달호
    • 제어로봇시스템학회:학술대회논문집
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    • 1988.10a
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    • pp.614-619
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    • 1988
  • In this paper, an arbitrary mission of a spacecraft from launch to orbit injection is investigated for some launch trajectories. Launch sites are selected arbitrarily from various locations in Korea. For this study, a general purpose simulation program is developed. In this program, the Earth is assumed to be a rotating ellipsold. The launch vehicle is treated as a 3-D, 6-DOF rigid body. The developed program has been evaluated by calibrating it to the 3-stage N-1 rocket developed in Japan and launched at Tanegasima. The simulated trajectory from the first-stage ignition to burnout of third-stage main engine is compared with the previously tested N-1 rocket trajectory in Japan. The result shows that the program works properly. Using the proven program, we have investigated possible launch locations in Korea, namely Marado, Sungsan and Kuryongpo. The problem of polar orbit injection is also examined.

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Study on the Air Bearings with Actively Controllable Magnetic Preloads for an Ultra-precision Linear Stage (초정밀 직선 이송계용 능동 자기예압 공기베어링에 관한 연구)

  • Ro, Seung-Kook;Kim, Soo-Hyun;Kwak, Yoon-Keun;Park, Chun-Hong
    • Journal of the Korean Society for Precision Engineering
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    • v.25 no.6
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    • pp.134-142
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    • 2008
  • In this paper, we propose a precise linear motion stage supported by magnetically preloaded air bearings. The eight aerostatic bearings with rectangular carbon porous pads were located only one side of vertical direction under the platen where four bearings are in both sides of horizontal direction as wrap-around-design, and this gives simpler configuration than which constrained by air bearings for all direction. Each of the magnetic actuators has a permanent magnet generating static magnetic flux far required preload and a coil to perturb the magnetic farce resulting adjustment of air- bearing clearance. The characteristics of porous aerostatic bearing are analyzed by numerical analysis, and analytic magnetic circuit model is driven for magnetic actuator to calculate preload and variation of force due to current. A 1-axis linear stage motorized with a coreless linear motor and a linear encoder was designed and built to verify this design concept. The load capacity, stiffness and preload force were examined and compared with analysis. With the active magnetic preloading actuators controlled with DSP board and PWM power amplifiers, the active on-line adjusting tests about the vertical, pitching and rolling motion were performed. It was shown that motion control far three DOF motions were linear and independent after calibration of the control gains.

Modeling and Simulation for the Initial Dynamics of a High Speed Underwater Vehicle Ejected from a Submerged Mother Ship (수중모함에서 사출되는 고속 수중운동체의 초기 거동 모델링 및 시뮬레이션)

  • Yoon, Hyeon Kyu;Cho, Hyeonjin
    • Journal of the Korea Institute of Military Science and Technology
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    • v.19 no.2
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    • pp.227-235
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    • 2016
  • Heavy-weight high speed underwater vehicle(HSUV) is launched from the submerged mother ship. For the safety point of view, it is important to confirm whether the HSUV would touch the launching mother ship. In this paper, the hydrodynamic force and moment were modeled by the polynomials of motion variables and the simple lift and drag acting on a plate and cylinder which consist of the HSUV's several parts. The mother ship was assumed as the Rankine half body to consider the flow field near the moving ship. Such hydrodynamic force and moment were included in the 6 DOF equations of motion of the HSUV and the dynamic simulations for the various conditions of the HSUV until the propeller activation were performed. Developed simulation program is expected to reduce the number of expensive sea trial test to develop safety logic of the HSUV at the initial firing stage.

On the mitigation of surf-riding by adjusting center of buoyancy in design stage

  • Yu, Liwei;Ma, Ning;Gu, Xiechong
    • International Journal of Naval Architecture and Ocean Engineering
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    • v.9 no.3
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    • pp.292-304
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    • 2017
  • High-speed vessels are prone to the surf-riding in adverse quartering seas. The possibility of mitigating the surf-riding of the ITTC A2 fishing vessel in the design stage is investigated using the 6-DOF weakly non-linear model developed for surf-riding simulations in quartering seas. The longitudinal position of the ship's center of buoyancy (LCB) is chosen as the design parameter. The adjusting of LCB is achieved by changing frame area curves, and hull surfaces are reconstructed accordingly using the Radial Basis Function (RBF). Surf-riding motions in regular following seas for cases with different LCBs and Froude numbers are simulated using the numerical model. Results show that the surf-riding cannot be prevented by the adjusting of LCB. However, it occurs with a higher threshold speed when ship's center of buoyancy (COB) is moved towards stem compared to moving towards stern, which is mainly due to the differences on wave resistance caused by the adjusting of LCB.

A Study on Response Analysis of 6-DOF Pneumatic Vibration Isolation Table Loaded by Transient Movements of Carriage on It (상판 위 질량의 순간적인 움직임에 의해 가진되는 6-자유도 공압제진대의 진동 응답에 대한 연구)

  • Sun, Jong-Oh;Shin, Yun-Ho;Kim, Kwang-Joon
    • Transactions of the Korean Society for Noise and Vibration Engineering
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    • v.17 no.6 s.123
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    • pp.515-523
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    • 2007
  • As environmental vibration requirements on precision equipments get more stringent, use of pneumatic vibration isolators becomes more crucial and, hence, their dynamic performance needs to be further improved. Dynamic behavior of those pneumatic vibration Isolation tables is very important to both manufacturer and customer as performance specifications. Together with conventional transmissibility, transient response characteristics are another critical performance index especially when movements of components, e.g., x-y tables, of the precision equipments are very dynamic. In this paper, analysis on transient response of a pneumatic vibration isolation table loaded by a mass moving on it is presented. This is a conventional dynamics problem on a rigid body with 6 degree of freedom and a mass with another degree of freedom. How to obtain transient responses of the isolation table is described when the movements of the mass are prescribed relative to the table.

Analysis and Design of a New 6-DOF Haptic Device Using a Parallel Mechanism (병렬구조를 이용한 새로운 6 자유도 역감제시장치의 설계 및 해석)

  • Yoon, Jung-son;Ryu, Je-Ha
    • Journal of Institute of Control, Robotics and Systems
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    • v.7 no.1
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    • pp.1178-1186
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    • 2001
  • This paper presents design and analysis of a 6 degree-of-freedom new haptic device using a par-allel mechanism for interfacing with virtual reality. The mechanism is composed of three pantograph mecha-misms that, driven by ground-fixed servomotors. stand perpendicularly to the base plate. Three spherical joints connect the top of the pantograph with connecting bars, and three revolute joint connect connecting bars with a mobile joystick handle. Forward and inverse kinematic analyses have been performed and the Jacobian matrix is derived by using the screw theroy. Performance indices such as GPI(Global Payload Index), GCI(Global Conditioning index), Traslation and Orientation workspaces, and Sensitivity are evaluated to find optimal pa-rameters in the design stage. The proposed haptic mechanism has better load capability than those of the ex-isting haptic mechanisms due to the fact that motors are fixed at the base. It has also wider orientation work-space mainly due to RRR type spherical joints.

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A study on response analysis of 6-DOF pneumatic vibration isolation table loaded by transient movements of carriage on it (상판 위 질량의 순간적인 움직임에 의해 가진되는 6-자유도 공압제진대의 진동 응답에 대한 연구)

  • Sun, Jong-Oh;Shin, Yun-Ho;Kim, Kwang-Joon
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2007.05a
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    • pp.97-102
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    • 2007
  • As environmental vibration requirements on precision equipments get more stringent, use of pneumatic vibration isolators becomes more crucial and, hence, their dynamic performance needs to be further improved. Dynamic behavior of those pneumatic vibration isolation tables is very important to both manufacturer and customer as performance specifications. Together with conventional transmissibility, transient response characteristics are another critical performance index especially when movements of components, e.g., x-y tables, of the precision equipments are very dynamic. In this paper, analysis on transient response of a pneumatic vibration isolation table loaded by a mass moving on it is presented. This is a conventional dynamics problem on a rigid body with 6 degree of freedom and a mass with another degree of freedom. How to obtain transient responses of the isolation table is described when the movements of the mass are prescribed relative to the table.

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PREDICTION OF SEPARATION TRAJECTORY FOR TSTO LAUNCH VEHICLE USING DATABASE BASED ON STEADY STATE ANALYSIS (정상 해석 기반의 데이터베이스를 이용한 TST 비행체의 분리 궤도 예측)

  • Jo, J.H.;Ahn, S.J.;Kwon, O.J.
    • Journal of computational fluids engineering
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    • v.19 no.2
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    • pp.86-92
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    • 2014
  • In this paper, prediction of separation trajectory for Two-stage-To-Orbit space launch vehicle has been numerically simulated by using an aerodynamic database based on steady state analysis. Aerodynamic database were obtained for matrix of longitudinal and vertical positions. The steady flow simulations around the launch vehicle have been made by using a 3-D RANS flow solver based on unstructured meshes. For this purpose, a vertex-centered finite-volume method was adopted to discretize inviscid and viscous fluxes. Roe's finite difference splitting was utilized to discretize the inviscid fluxes, and the viscous fluxes were computed based on central differencing. To validate this flow solver, calculations were made for the wind-tunnel experiment model of the LGBB TSTO vehicle configuration on steady state conditions. Aerodynamic database was constructed by using flow simulations based on test matrix from the wind-tunnel experiment. ANN(Artificial Neural Network) was applied to construct interpolation function among aerodynamic variables. Separation trajectory for TSTO launch vehicle was predicted from 6-DOF equation of motion based on the interpolated function. The result of present separation trajectory calculation was compared with the trajectory using experimental database. The predicted results for the separation trajectory shows fair agreement with reference[4] solution.