• 한국전기전자재료학회논문지
• /
• 제16권12S호
• /
• pp.1237-1241
• /
• 2003

In this paper, we report a novel RF-MEMS packaging technology with lightweight, small size, and short electric path length. To achieve this goal, we used the ultra thin silicon substrate as a packaging substrate. The via holes lot vortical feed-through were fabricated on the thin silicon wafer by wet chemical processing. Then, via holes were filled and micro-bumps were fabricated by electroplating. The packaged RF device has a reflection loss under 22 〔㏈〕 and a insertion loss of -0.04∼-0.08 〔㏈〕. These measurements show that we could package the RF device without loss and interference by using the vertical feed-through. Specially, with the ultra thin silicon wafer we can realize of a device package that has low-cost, lightweight and small size. Also, we can extend a 3-D packaging structure by stacking assembled thin packages.

• Design & Manufacturing
• /
• 제11권3호
• /
• pp.19-24
• /
• 2017

In these days, increase requirement of TEM (Transmission Electro Microscope) in not only scientific field but also industrial field. Because TEM can measure inner-structure of specimen a variety of materials like metal, bio. etc. When use TEM, specimen should be thin about 50nm. So making for thin specimen, use Ion milling device that include specimen holder. The holder generally made of Aluminium Aluminium holder is worn away easily. For this reason, using time of ion milling with aluminum holder is too short. To solve the problem, we replace aluminium holer to molybdenum alloy holder. In this paper, we design molybdenum alloy holer for CAM and modify CAD modeling for effective machining process. So we array a specimen 3 by 4 and setup orientation for one-shot machining process. Next we make a CAM program for machining. we making a decision two machining strategy that chose condition of tool-path method, step-down, step-over. etc. And then conduct machining using CNC milling machining center. To make clear difference between case.1 and case.2, we fixed machining conditions like feed-rate, main spindle rpm, etc. After machining, we confirm the condition of workpiece and analysis the problems case by case. Finally, case.2 work piece that superior than case.1 cutting with WEDM because that method can not ant mechanical effect on workpiece.

• 센서학회지
• /
• 제23권6호
• /
• pp.383-387
• /
• 2014

Electrically conductive polypyrrole-polyvinylpyrrolidone (PPy-PVP) nanofiber mats with a core-shell structure have been successfully fabricated by a two-step process: the formation of FeCl3-containing PVP nanofiber mat by electrospinning, and the vapor-phase polymerization (VPP) of pyrrole monomer on the mat in a sealed chamber at room temperature. Surface morphology and chemical composition of the PPy-PVP mat were characterized by SEM, EDX and FTIR analyses. The as-prepared nonwoven mat was composed of PPy-PVP nanofibers with an average diameter of 300 nm. The sheet conductivity of the nanofiber mat was measured to be approximately 0.01 S/cm by a four-point probe. We have also investigated gas-sensing properties of PPy-PVP nanofiber mat upon exposure to methanol vapor. The PPy-PVP nanofiber sensors were observed to have excellent methanol-sensing performance. The nanofiber-based core-shell nanostructure could give an opportunity to fabricate a highly sensitive and fast response sensor due to its high surfaceto-volume ratio.

• 한국전기전자재료학회논문지
• /
• 제24권4호
• /
• pp.297-302
• /
• 2011

Recently, low temperature co-fired ceramic (LTCC) technology is widely used in sensors, actuators and microsystems fields because of its very good electrical and mechanical properties, high reliability and stability as well as possibility of making 3D micro structures. In this study, we investigated the effects of sputtering gas ratio and annealing temperature on the crystal structure of $Pb(ZrTi)O_3$ (PZT) thin films deposited on LTCC substrate. The LTCC substrate with thickness of $400\;{\mu}m$ were fabricated by laminating 4 green tapes which consist of alumina and glass particle in an organic binder. The PZT thin films were deposited on Pt / Ti / LTCC substrates by RF magnetron sputtering method. The results showed that the crystallization of the films were enhanced as increasing $O_2$ mixing ratio. At about 25% $O_2$ mixing ratio, was well crystallized in the perovskite structure. PZT thin films was annealed at various temperatures. When the annealing temperature is lower, the PZT thin films become a phyrochlore phase. However, when the annealing temperature is higher than $600^{\circ}C$, the PZT thin films become a perovskite phase. At the annealing temperature of $700^{\circ}C$, perovskite PZT thin films with good quality structure was obtained.

• 한국재료학회:학술대회논문집
• /
• 한국재료학회 2012년도 춘계학술발표대회
• /
• pp.81.2-81.2
• /
• 2012

To fabricate a metal mold for injection molding, hot-embossing and imprinting process, mechanical machining, electro discharge machining (EDM), electrochemical machining (ECM), laser process and wet etching ($FeCl_3$ process) have been widely used. However it is hard to get precise structure with these processes. Electrochemical etching has been also employed to fabricate a micro structure in metal mold. A through mask electrochemical micro machining (TMEMM) is one of the electrochemical etching processes which can obtain finely precise structure. In this process, many parameters such as current density, process time, temperature of electrolyte and distance between electrodes should be controlled. Therefore, it is difficult to predict the result because it has low reliability and reproducibility. To improve it, we investigated this process numerically and experimentally. To search the relation between processing parameters and the results, we used finite element simulation and the commercial finite element method (FEM) software ANSYS was used to analyze the electric field. In this study, it was supposed that the anodic dissolution process is predicted depending on the current density which is one of major parameters with finite element method. In experiment, we used stainless steel (SS304) substrate with various sized square and circular array patterns as an anode and copper (Cu) plate as a cathode. A mixture of $H_2SO_4$, $H_3PO_4$ and DIW was used as an electrolyte. After electrochemical etching process, we compared the results of experiment and simulation. As a result, we got the current distribution in the electrolyte and line profile of current density of the patterns from simulation. And etching profile and surface morphologies were characterized by 3D-profiler(${\mu}$-surf, Nanofocus, Germany) and FE-SEM(S-4800, Hitachi, Japan) measurement. From comparison of these data, it was confirmed that current distribution and line profile of the patterns from simulation are similar to surface morphology and etching profile of the sample from the process, respectively. Then we concluded that current density is more concentrated at the edge of pattern and the depth of etched area is proportional to current density.

• 한국가스학회지
• /
• 제2권4호
• /
• pp.34-41
• /
• 1998

순철과 스테인리스강 위에 $A1_2O_3,\;Ta_2O_5$ 및 $ZrO_2$의 산화물을 RF스파터링법으로 피복시켜, 피막과 모재와의 밀착성 평가, 피복강에 대한 부식거동 및 피막결함률에 대하여 고찰을 실시하였다. 미소경도시험에서 밀착성지수 $\chi$를 이용하여 산화물피막의 밀착성을 평가할 수 있었다. 임계부동화전류밀도법은 세라믹피복강재의 결함률을 평가하는데 유용한 수단임을 알 수 있었다.

• Design & Manufacturing
• /
• 제13권2호
• /
• pp.1-5
• /
• 2019

In this study, micro cellular injection molding of automobile head lamp housing with uneven thickness structure was performed to obtain improvement on deformation and light-weight of the part. The thickness of the presented model was uniformly modified to control the deformation of the molded part. In order to maximize the lightweight ratio, the model having an average thickness of 2.0 mm were thinly molded to an average thickness of 1.6 mm. GFM(Gas Free Molding) and CBM(Core Back Molding) technology were applied to improve the problems of the conventional foam molding method. Equal Heat & Cool system was also applied by 3D cooling core and individual flow control system. Warpage of the molded parts with even cooling was minimized. To improve the mechanical properties of foamed products, complex resin containing nano-filler was used and variation of mechanical properties was evaluated. It was shown that the weight reduction ratio of products with light-weighted injection molding was 8.9 % and the deformation of the products was improved from the maximum of 3.6 mm to 2.0 mm by applying Equal Heat & Cool mold cooling system. Also the mechanical strength reduction of foamed product was less than 12% at maximum.

• 한국전기전자재료학회논문지
• /
• 제21권4호
• /
• pp.354-361
• /
• 2008

The dielectric characteristics of low-k interlayer dielectric materials was fabricated by plasma enhanced chemical vapor deposition (PECVD). BTMSM precursor was evaporated and introduced with the flow rates from 16 sccm to 25 sccm by 1sccm step in the constant flow rate of 60 sccm $O_2$ in process chamber. Manufactured samples are analyzed components by measuring FT/IR absorption lines. Decomposition each Microscopic structures through two-dimensional correlation analysis about mechanisms for the formation of SiOCH in $SiOCH_3$, Si-O-Si and Si-$CH_3$ bonding group and analyzed correlation between the micro-structure of each group. It is a tendency that seems to be growing of Si-O-Ci(C) bonding group and narrowing of Si-O-$CH_3$ bonding group relative to the increasing flow-rate BTMSM. The order of changing sensitivity about changes of flow-rate in Si-O-Si(C) bonding group is cross link mode$(1050cm^{-1})$ $\rightarrow$ open link mode$(1100cm^{-1})\rightarrow$ cage link mode $(1140cm^{-1})$.

• Proceedings of the National Institute of Ecology of the Republic of Korea
• /
• 제2권3호
• /
• pp.144-152
• /
• 2021

Sanankerto is one of pilot projects for tourism villages in Indonesia due to its natural tourism potential with a 24-ha bamboo forest located in Boon Pring Andeman area. However, the distribution of existing bamboo has never been identified or mapped. Thus, the mana gement is facing difficulty in planning and developing tourism potential as well as spatial management in the area. Therefore, the objectives of this study were to identify and analyze the structure of bamboo vegetation in the Boon Pring Tourism village an d to perform vegetation mapping. The type of research was descriptive exploratory with a cluster sampling technique (i.e., a two-stage cluster) covering an area of ± 10 ha. Bamboo vegetation analysis was performed by calculating diversity index (H'), evenness index (E), and Species Richness index (R). Data were collected through observation and interviews with local people and the manager to determine zonation division. Mapping of bamboo vegetation based on zoning was processed into thematic maps using ArcG is 10.3. Micro climatic factors were measured with three replications for each sub -cluster. Data were analyzed descriptively and quantitatively. Nine species of bamboo identified. Diversity, evenness, and species richness indices differed at each location. Activities of local communities, tourists, and manager determined the presence, number, and distribution of bamboo species. These bamboo distribution maps in three zoning (utilization, buffer, and core) can be used by manager for planning and developing natural tourism potential.

• 한국해양학회지:바다
• /
• 제10권2호
• /
• pp.113-123
• /
• 2005

영산강 하구(목포항)해역에서 해수층의 염분 변화가 1차 생산자와 상위 소비자와의 연계성에 미치는 영향을 조사하기 위하여 2003년 10월부터 2004년 9월까지 매월 8개 조사정점에서 수문 개폐 여부에 따라 개방시와 비개방시로 나누어서 현장조사를 실시하였다. 영산강 하구둑으로부터 배출되어지는 담수 유입량은 강우가 집중되었던 (여름철인) 6월과 7월에 가장 많은 양의 담수가 항내로 유입되었다. 수문 개방시 표층 염분 분포는 $6\~28.9$ psu로 수문비 개방시의 $24.4\~30.3psu$ 보다 큰 차이를 보였으며, 광소멸 계수$(K_d)$ 또한 수문 개방시에 높아 탁도가 높음을 확인 할 수 있었다. 조사 기간 동안 대발생(bloom)은 하구언 수문을 개방하지 않은 2월, 5월, 7월에 내항에서 발생하였으며, 대형식물플랑크톤이 $70\%$이상의 점유율을 보이며 우점하였다. 중형과 소형식물플랑크톤이 하구언 수문 개방일인 2003년 10월, 11월, 2004년 6월, 8월, 9월에 전체 식물플랑크톤에 대하여 높은 기여율을 보여 수문 개폐에 따라 크기 구조가 변화되었다. 수문 개방시 소형과 중형동물플랑크톤은 수문을 개방하지 않았을 때 보다 낮은 생체량 분포를 보였으며, 공간적으로는 외항보다 내항에서 다소 높은 생체량 분포를 보였다. 동물플랑크톤의 분포는 전반적으로 식물플랑크톤의 생체량 분포와 비슷한 경향을 보였다 따라서 수문 개폐에 따른 염분, 영양염 유입, 탁도 혹은 광량등의 환경인자가 1차생산자의 생체량 및 크기 구조에 영향을 주고 상위소비자인 동물플랑크톤의 생체량 분포에도 영향을 미치어 결국 두 생물들간의 연계성 변화를 초래할 수 있음을 시사한다.