• 제목/요약/키워드: 3D micro-structure

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극소 광 조형기술을 이용한 3차원 구조물의 제작 (Fabrication of 3D structures using micro-stereolithography technology)

  • 이인환;조동우
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1997년도 추계학술대회 논문집
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    • pp.1080-1083
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    • 1997
  • Micro-stereolithography is a newly proposed technology as a means that can fabricate 3D micro-structures of free form. It makes a 3D structure by dividing the shape into many slices of relevant thickness along honzontal surfaces, hardening each layer of slice with a laser, and stacking them up to a des~red shape. Scale effect becomes important in this micro-fabrication process, d~fferently from the conventional stereolithography. To realize this micro-stereolithography technology, we developed an equipment using Ar+ laser, xyz stages, controllers and all the optic devices. Using the equipment, a number of micro-structures were successfully fabricated including a winecup of several tens of micrometers.

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3 차원 형상의 미소제품 제작을 위한 마이크로 광 조형시스템의 개발 (Development of micro-stereolithography system for the fabrication of three-dimensional micro-structures)

  • 이인환;조윤형;조동우;이응숙
    • 한국정밀공학회지
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    • 제21권2호
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    • pp.186-194
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    • 2004
  • Micro-stereolithography is a newly proposed technology as a means that can fabricate a 3D micro-structure of free form. It makes a 3D micro-structure by dividing the shape into many slices of relevant thickness along horizontal surfaces, hardening each layer of slice with a focused laser beam, and stacking them up to a desired shape. In this technology, differently from the conventional stereolithography, scale effect is dominant. To realize micro-stereolithography technology, we developed the micro-stereolithography apparatus which is composed of an Ar+ laser, x-y-z stages. controllers. optical devices and scan path generation software. Related processes were developed, too. Using the system, a number of micro-structures were successfully fabricated. Some of these samples are shown for prove this system. Laser scan path generation algorithm and software considering photopolymer solidification phenomena as well as given 3D model were developed. Sample fabrication of developed software shows relatively high dimensional accuracy compared to the uncompensated result.

마이크로 3차원 입체형상부품 제조기술 연구 (A Study on Micro Manufacturing Technology for 3-Dimensional Micro Parts)

  • 제태진;최두선;이응숙;황경현;신보성;이종찬
    • 소성∙가공
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    • 제15권9호
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    • pp.673-678
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    • 2006
  • Demands for micro parts have increased with recent advances in IT and machinery industries. However, the present technology loaves much to be desired to effectively produce parts with the volume of $1mm^{3}$ and less by mechanical method in large quantities. This paper provides a method for efficient quantity production of complete micro 3D structure using micro end-milling cutting process. The possibility has proven via manufacturing experiment of a multistage micro complex gear structure of $500{\mu}m$ in length, $500{\mu}m$ in maximum external diameter and a volume of $1mm^{3}$ and less.

금속 분말을 이용한 마이크로 광 조형 기술의 개발 (Development of Micro-stereolithography Technology using Metal Powder)

  • 이진우;이인환;조동우
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.1155-1158
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    • 2005
  • Micro-stereolithography is a newly proposed technology as a means that can fabricate a 3D micro structure of free form. It makes a 3D micro-structure by dividing the shape into many slices of relevant thickness along horizontal surfaces, hardening each layer of slice with a focused laser beam, and stacking them up to a desired shape. However, we do not anticipate the electric conductivity of the final product at the existing micro-stereolithography. The reason is that this technology uses polymer to make the product. Thus the new suspension which was mixed conventional photopolymer with metal powder was developed in this study. The developed suspensions were based on SL5180 which is commercialized resin and IMS03 that is made in our laboratory. And Triton X-100 was added at the suspension for getting the scattering effect and stabilizing effect. The layer recoating device was developed to be flat the mixed high viscosity suspension. A 3D micro structure was manufactured by using recoating system and micro-stereolithography system. The fabricated product was sintered to get the electric conductivity. After sintering, a pure copper product was made. In this study, new process was developed by making metal micro structure having an electric conductivity. This technology broadened the realm of the micro-stereolithography technology. And it will be applied to make the 3D micro structure of free form which has a high hardness and an electric conductivity in the near future.

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듀얼 디퓨저 리소그래피를 이용한 3 차원 마이크로 구조의 제작 (Fabrication of 3D Micro Structure by Dual Diffuser Lithography)

  • 한동호;;류헌열;조시형;박진구
    • 한국재료학회지
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    • 제23권8호
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    • pp.447-452
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    • 2013
  • Recently, products that a have 3-dimensional(3D) micro structure have been in wide use. To fabricate these 3D micro structures, several methods, such as stereo lithography, reflow process, and diffuser lithography, have been used. However, these methods are either very complicated, have limitations in terms of patterns dimensions or need expensive components. To overcome these limitations, we fabricated various 3D micro structures in one step using a pair of diffusers that diffract the incident beam of UV light at wide angles. In the experiment, we used positive photoresist to coat the Si substrate. A pair of diffusers(ground glass diffuser, opal glass diffuser) with Gaussian and Lambertian scattering was placed above the photomask in the passage of UV light in the photolithography equipment. The incident rays of UV light diffracted twice at wider angles while passing through the diffusers. After exposure, the photoresist was developed fabricating the desired 3D micro structure. These micro structures were analyzed using FE-SEM and 3D-profiler data. As a result, this dual diffuser lithography(DDL) technique enabled us to fabricate various microstructures with different dimensions by just changing the combination of diffusers, making this technology an efficient alternative to other complex techniques.

마이크로 방전 밀링을 이용한 미세 구조물 제작 (Fabrication of 3D Micro Structure Using Micro Electrical Discharge Milling)

  • 이병욱;이상민;김보현;주종남
    • 한국정밀공학회지
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    • 제21권9호
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    • pp.41-47
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    • 2004
  • As mechanical structures are minimized, the demand on micro dies and molds has increased. Machining complex 3D shapes requires fabrication procedures for preparing the electrodes. Micro electrical discharge milling using a simple shape electrode can produce 3D micro structure. In this paper the machining characteristics of micro electrical discharge milling according to depth of cut and capacitance are investigated. The machining time is diminished when simple tool-paths and algorithms for changing the feedrate are applied. But a distorted bottom shape and a tapered wall shape are inevitable after machining. The distorted bottom shape and the taper angle of wall are reduced by finish machining.

해양 지중저장층내 초임계 $CO_2$ 유동에 대한 전산모사 (Numerical Simulation of Supercritical $CO_2$ Flow in a Geological Storage Reservoir of Ocean)

  • 최항석
    • 대한환경공학회지
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    • 제33권4호
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    • pp.251-257
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    • 2011
  • 이산화탄소의 해양 지중저장에 대한 전산모사를 위해 실제 이산화탄소가 저장되는 해양 지중 저장층에 대한 3차원 전산모형을 개발하였다. 특히, 실제 저장층의 3차원 구조를 모사하기 위하여 공극의 크기를 불규칙(random)적으로 부여하는 수치적 방법을 고안하여 3차원 전산모형을 구성하였고, 이를 균일한 공극 구조의 경우와 비교하였다. 이렇게 구성된 3차원 공극모형 내의 초임계 이산화탄소 유동을 시뮬레이션하기 위하여 전산유체역학을 사용하였다. 이러한 초임계 이산화탄소의 시뮬레이션에는 실제 저장층의 환경 즉 온도 및 압력을 동일하게 모델링하여 적용하였다. 공극 구조가 $CO_2$의 유동에 미치는 영향을 살펴보기 위해, 세 가지 형태의 3차원 전산모형의 공극 구조 내부를 흐르는 초임계 이산화탄소 유동에 대한 수치해석을 수행하였으며, 특히 3차원 전산모형의 내부유동에 대한 압력강하 및 투수율을 계산하여 본 모형이 해양 지중저장의 전산모사에 적합한지를 판단하고, 이산화탄소 유량 증가에 따른 초임계 이산화탄소 유동의 특성을 살펴보았다.

이광자 흡수 광중합에 의한 3차원 마이크로 쉘 구조물 제작 (Fabrication of Three-Dimensional Micro-Shell Structures Using Two-Photon Polymerization)

  • 박상후;임태우;양동열
    • 대한기계학회논문집A
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    • 제29권7호
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    • pp.998-1004
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    • 2005
  • A nano-stereolithography (NSL) process has been developed for fabrication of 3D shell structures which can be applied to various nano/micro-fluidic devices. By the process, a complicated 3D shell structure on a scale of several microns can be fabricated using lamination of layers with a resolution of 150 nm in size, so it does not require the use of my sacrificial layer or any supporting structure. A layer was fabricated by means of solidifying liquid-state monomers using two-photon absorption (TPA) induced using a femtosecond laser processing. When the polymerization process is finished, unsolidified liquid state resins can be removed easily by dropping several droplets of ethanol fur developing the fabricated structure. Through this work, some 3D shell structures, which can be applied to various applications such as nano/micro-fluidic devices and MEMS system, were fabricated using the developed process.

미세 방전을 이용한 3차원 미세 구조물 및 미세 공구 제작 (Fabrication of 3-D Micro Structure and Micro Tool Using MEDM)

  • 김보현;이상민;주종남;강영훈;최태훈;박훈재;이영수
    • 소성∙가공
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    • 제14권3호
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    • pp.251-256
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    • 2005
  • 3-D micro structures and micro tools were fabricated using Micro Electrical Discharge Machining (MEDM). To make micro structures, micro electrical discharge milling process was applied. During micro electrical discharge milling, electrode (tool) worn in the both axial and radial direction. To compensate tool wear which has significant influence on machining accuracy, machining path overlapping was proposed. Machining characteristics of micro electrical discharge milling was investigated in considering of depth of cut and capacitance of discharge circuit. Micro complex shaped tools were also fabricated using REDM (reverse electrical discharge machining). Sacrificial electrodes were machined through electrical discharge milling process and were used as electrode to make micro tools. Using this process several micro tools shape of 'ㄷ', 'ㅁ' and 'o' were fabricated. With these complex shaped tools, micro machining was successfully applied repeatedly.