Calculation of Sputter Yield using Monte Carlo Techniques (몬테카를로 방식에 의한 스퍼터율 계산에 관한 연구)
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- Journal of the Korean Institute of Telematics and Electronics D
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- v.35D no.12
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- pp.59-67
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- 1998
In this paper, a rigorous three-dimensional Monte Carlo approach to simulate the sputter yield as a function of the incident ion energy and the incident angle as well as the atomic ejection distribution of the target is presented. The sputter yield of the target atom (Cu, Al) has been calculated for the different species of the incident atoms with the incident energy range of 10 eV ~ 100 KeV, which coincides with the previously reported experimental results. According to the simulation results, the calculated sputter yield tends to increase with the amount of the energy of the incident atoms. Our simulation revealed that the maximum sputter yield can be obtained for the incident atom with 10 KeV for the heavy ion, while the maximum sputter yield for the light ion is for the incident atoms with an energy less than 1 KeV. The sputter yield increases with angle of incidence and seems to have the maximum value at 68
The purpose of this study was the implementation of a simulation for a subsea production system. This subsea production system is installed under environments with high pressure and low temperature. Most of the processes for oil and gas production occur in the subsea equipment. Therefore, an understanding and study of subsea production systems is very difficult because people cannot directly observe the processes occurring in the subsea production system. A simulation system can be a useful solution for this difficult problem. In this research, information models and a 3-D graphic model of the subsea equipment were built using the object-oriented technology and 3-D CAD. The entire system was implemented with the help of simulation software, 3-DVIA Virtools. The simulation system for the subsea production system was tested using several production process scenarios. The results of the tests showed that the simulation system is very useful for understanding a subsea production system and could be a good educational tool.
Numerical simulation in exploration geophysics provides important insights into subsurface wave propagation phenomena. Although elastic wave simulations take longer to compute than acoustic simulations, an elastic simulator can construct more realistic wavefields including shear components. Therefore, it is suitable for exploration of the responses of elastic bodies. To overcome the long duration of the calculations, we use a Graphic Processing Unit (GPU) to accelerate the elastic wave simulation. Because a GPU has many processors and a wide memory bandwidth, we can use it in a parallelised computing architecture. The GPU board used in this study is an NVIDIA Tesla C1060, which has 240 processors and a 102 GB/s memory bandwidth. Despite the availability of a parallel computing architecture (CUDA), developed by NVIDIA, we must optimise the usage of the different types of memory on the GPU device, and the sequence of calculations, to obtain a significant speedup of the computation. In this study, we simulate two- (2D) and threedimensional (3D) elastic wave propagation using the Finite-Difference Time-Domain (FDTD) method on GPUs. In the wave propagation simulation, we adopt the staggered-grid method, which is one of the conventional FD schemes, since this method can achieve sufficient accuracy for use in numerical modelling in geophysics. Our simulator optimises the usage of memory on the GPU device to reduce data access times, and uses faster memory as much as possible. This is a key factor in GPU computing. By using one GPU device and optimising its memory usage, we improved the computation time by more than 14 times in the 2D simulation, and over six times in the 3D simulation, compared with one CPU. Furthermore, by using three GPUs, we succeeded in accelerating the 3D simulation 10 times.
Relative navigation system is presented using measurements from a single-channel global positioning system (GPS) simulator. The objective of this study is to provide real-time relative navigation results as well as absolute navigation results for two formation flying satellites separated about 1km in low earth orbit. To improve the performance, more accurate dynamic model and modified relative measurement model are developed. This modified method prevents non-linearity of the measurement model from degrading precision by applying linearization about the states from absolute navigation algorithm not about a priori states. Furthermore, absolute states are obtained using ion-free GRAPHIC pseudo-ranges and precise relative states are provided using double differential carrier-phase data based on Extended Kalman Filter. The software-based simulation is performed and achieved meter-level precision for absolute navigation and millimeter-level precision for relative navigation. The absolute and relative accuracies at steady state are about 0.77m and 4mm respectively (3D, r.m.s.). In addition, Integer ambiguity algorithm (LAMBDA method) improves simulation performances.
In the current age of the information oriented society in which we live, many people use PCs and are dependant on the databases provided by the network server. However, online data can be missed during the occurrence of a blackout and furthermore, power failure can greatly effect Power Quality. This has resulted in the trend of using interruption-free live-line work when trouble occurs in a power system. However, 83% of the population receives an electric shock experience when a laborer is performing interruption-free live-line work. In the interruption-free method, education and training problems have been pinpointed. However, there are few instructors to implement the necessary training. Furthermore, the trainees undergo only a short training period of just 4 weeks. In this paper, to develop a method with no restrictions on time and place and to ensure a reduction in the misuse of materials, immersion type virtual reality (or environment) technology is used. The users of a 3D immersion type VR training system can interact with the system by performing the equivalent action in a safe environment. Thus, it can be valuable to apply this training system to such dangerous work as 'Interruption-free live-line work exchanging COS (Cut-Out-Switch)'. In this program, the user carries out work according to instructions displayed through the window and speaker and cannot perform other tasks until each part of the task is completed in the proper sequence. The workers using this system can utilize their hands and viewpoint movement since they are in a real environment but the trainee cannot use all parts and senses of a real body with the current VR technology. Despite these weak points, when we consider the trends of improvement in electrical devices and communication technology, we can say that 3D graphic VR application has high potentiality.
Virtual Reality is the technique which makes the man experience the similar interaction behavior to the experience in the real world through virtual space. The users participating in the 3D virtual space using virtual reality technique can have the various experiences in the space desired without restrictions on time and space and then it has been applied in many application areas such as video industry, entertainment simulator, medical treatment, construction and design. The area of video among them has been highlighted as a high-added value industry. Therefore this study classifies video industry into four including movie, broadcasting, advertisement and internet and is to examine their characteristics, application cases and developmental potential. In the industry using virtual reality technique in video industry, it is implied for special elect in the area of movie and for providing the various graphic virtual word to audiences with the introduction of virtual studio and character in the area of broadcasting. It can give audiences a synergy effect by inserting 3D advertisement into virtual space in the area of advertisement. Also the implementation of 3D virtual reality such as virtual museum, virtual model house, virtual home shopping and entertainment on the web is possible with the emergence of Virtual Reality Modeling Language (VRML) and it plays the roles of more entertainments. Accordingly, this study is to seek the application methods using virtual reality technique in video industry.
Recently, one of the critical issues in the etching processes of the nanoscale devices is to achieve ultra-high aspect ratio contact (UHARC) profile without anomalous behaviors such as sidewall bowing, and twisting profile. To achieve this goal, the fluorocarbon plasmas with major advantage of the sidewall passivation have been used commonly with numerous additives to obtain the ideal etch profiles. However, they still suffer from formidable challenges such as tight limits of sidewall bowing and controlling the randomly distorted features in nanoscale etching profile. Furthermore, the absence of the available plasma simulation tools has made it difficult to develop revolutionary technologies to overcome these process limitations, including novel plasma chemistries, and plasma sources. As an effort to address these issues, we performed a fluorocarbon surface kinetic modeling based on the experimental plasma diagnostic data for silicon dioxide etching process under inductively coupled C4F6/Ar/O2 plasmas. For this work, the SiO2 etch rates were investigated with bulk plasma diagnostics tools such as Langmuir probe, cutoff probe and Quadruple Mass Spectrometer (QMS). The surface chemistries of the etched samples were measured by X-ray Photoelectron Spectrometer. To measure plasma parameters, the self-cleaned RF Langmuir probe was used for polymer deposition environment on the probe tip and double-checked by the cutoff probe which was known to be a precise plasma diagnostic tool for the electron density measurement. In addition, neutral and ion fluxes from bulk plasma were monitored with appearance methods using QMS signal. Based on these experimental data, we proposed a phenomenological, and realistic two-layer surface reaction model of SiO2 etch process under the overlying polymer passivation layer, considering material balance of deposition and etching through steady-state fluorocarbon layer. The predicted surface reaction modeling results showed good agreement with the experimental data. With the above studies of plasma surface reaction, we have developed a 3D topography simulator using the multi-layer level set algorithm and new memory saving technique, which is suitable in 3D UHARC etch simulation. Ballistic transports of neutral and ion species inside feature profile was considered by deterministic and Monte Carlo methods, respectively. In case of ultra-high aspect ratio contact hole etching, it is already well-known that the huge computational burden is required for realistic consideration of these ballistic transports. To address this issue, the related computational codes were efficiently parallelized for GPU (Graphic Processing Unit) computing, so that the total computation time could be improved more than few hundred times compared to the serial version. Finally, the 3D topography simulator was integrated with ballistic transport module and etch reaction model. Realistic etch-profile simulations with consideration of the sidewall polymer passivation layer were demonstrated.
The wall shear stress in the vicinity of end-to end anastomoses under steady flow conditions was measured using a flush-mounted hot-film anemometer(FMHFA) probe. The experimental measurements were in good agreement with numerical results except in flow with low Reynolds numbers. The wall shear stress increased proximal to the anastomosis in flow from the Penrose tubing (simulating an artery) to the PTFE: graft. In flow from the PTFE graft to the Penrose tubing, low wall shear stress was observed distal to the anastomosis. Abnormal distributions of wall shear stress in the vicinity of the anastomosis, resulting from the compliance mismatch between the graft and the host artery, might be an important factor of ANFH formation and the graft failure. The present study suggests a correlation between regions of the low wall shear stress and the development of anastomotic neointimal fibrous hyperplasia(ANPH) in end-to-end anastomoses. 30523 T00401030523 ^x Air pressure decay(APD) rate and ultrafiltration rate(UFR) tests were performed on new and saline rinsed dialyzers as well as those roused in patients several times. C-DAK 4000 (Cordis Dow) and CF IS-11 (Baxter Travenol) reused dialyzers obtained from the dialysis clinic were used in the present study. The new dialyzers exhibited a relatively flat APD, whereas saline rinsed and reused dialyzers showed considerable amount of decay. C-DAH dialyzers had a larger APD(11.70
The wall shear stress in the vicinity of end-to end anastomoses under steady flow conditions was measured using a flush-mounted hot-film anemometer(FMHFA) probe. The experimental measurements were in good agreement with numerical results except in flow with low Reynolds numbers. The wall shear stress increased proximal to the anastomosis in flow from the Penrose tubing (simulating an artery) to the PTFE: graft. In flow from the PTFE graft to the Penrose tubing, low wall shear stress was observed distal to the anastomosis. Abnormal distributions of wall shear stress in the vicinity of the anastomosis, resulting from the compliance mismatch between the graft and the host artery, might be an important factor of ANFH formation and the graft failure. The present study suggests a correlation between regions of the low wall shear stress and the development of anastomotic neointimal fibrous hyperplasia(ANPH) in end-to-end anastomoses. 30523 T00401030523 ^x Air pressure decay(APD) rate and ultrafiltration rate(UFR) tests were performed on new and saline rinsed dialyzers as well as those roused in patients several times. C-DAK 4000 (Cordis Dow) and CF IS-11 (Baxter Travenol) reused dialyzers obtained from the dialysis clinic were used in the present study. The new dialyzers exhibited a relatively flat APD, whereas saline rinsed and reused dialyzers showed considerable amount of decay. C-DAH dialyzers had a larger APD(11.70