• Title/Summary/Keyword: 3D Sensor

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Deposition and Characteristics of TiN Thin Films by Atomic Layer Epitaxy (ALE 법에 의한 TiN 박막의 증착 및 특성)

  • Kim, Dong-Jin;Jung, Young-Bae;Lee, Myung-Bok;Lee, Jung-Hee;Lee, Yong-Hyun;Hahm, Sung-Ho;Lee, Jong-Hwa
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.37 no.6
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    • pp.43-49
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    • 2000
  • The TiN thin films were deposited by ALE(atomic layer epitaxy) on (100) silicon substrate. The TiN thin films were characterized by means of XRD, 4-point probe, AFM, AES and SEM. TEMAT(terakis(ethyl methy lamino)titanium) and $NH_3$ were injected into the reactor in sequence of TEMAT-$N_2-NH_3-N_2$ to ensure a saturated surface reaction. As a result, the depostion rate of the TiN film was controlled by self-limiting growth mechanism at temperature range form 150 to 220 $^{\circ}C$. Deposited TiN films, all of which show amorphous structure, had a fixed deposition rate of 4.5 ${\AA}$/cycle. The resistivity of 210 ~ 230 ${\mu}{\Omega}{\cdot}$cm and the surface r.m.s. roughness of 7.9 ~ 9.3 ${\AA}$ were measured. When TiN film of 2000 ${\AA}$ were deposited, a excellent step coverage were observed in a trench structure of 0.43${\mu}m$ contacts with 6:1 aspect ratio.

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Electrical Properties of 0.77(Bi1/2Na1/2)TiO3-0.23SrTiO3 (BNST23)/PVDF-TrFE Composites (스마트 페인트 센서용 0.77(Bi1/2Na1/2)TiO3-0.23SrTiO3 (BNST23)/PVDF-TrFE 복합소재 제조 및 전기적 특성에 관한 연구)

  • Sung Jae Hyoung;Eun Seo Kang;Yubin Kang;Chae Ryeong Kim;Chang Won Ahn;Byeong Woo Kim;Jae-Shin Lee;Hyoung-Su Han
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.37 no.4
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    • pp.433-438
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    • 2024
  • Piezoelectric ceramics play an important role in various electronic applications. However, traditional ceramics are difficult to be used in some complicated structures, due to their low flexibility and high brittleness. To solve this problem, this study prepared and investigated ceramic/polymer composites that can utilize a good flexibility of polymers. Polyvinylidene fluoride-trifluoroethylene (PVDF-TrFE) and 0.77(Bi1/2Na1/2)TiO3-0.23SrTiO3 (BNST23) ceramics were selected to fabricate the composites. Ceramic/polymer composites were prepared using various volume fractions of BNST23 ceramics. The distribution of piezoceramic particles in BNST23/PVDF-TrFE composites was investigated using optical microscopy (OM) and scanning electron microscopy (SEM). The dielectric and piezoelectric properties of the composites were significantly influenced by the volume fraction of the piezoelectric ceramics. As a result, the highest piezoelectric constant (d33) of 56 pC/N was obtained in a composites with 70% volume fraction of BNST23 ceramics. Accordingly, it is expected that BNST23/PVDF-TrFE composites can be applied to various sensor applications.

Effect of Total Resistance of Electrochemical Cell on Electrochemical Impedance of Reinforced Concrete Using a Three-Electrode System (3전극방식을 활용한 철근 콘크리트의 교류임피던스 측정 시 전기화학 셀저항의 영향)

  • Khan, Md. Al-Masrur;Kim, Je-Kyoung;Yee, Jurng-Jae;Kee, Seong-Hoon
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.26 no.6
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    • pp.82-92
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    • 2022
  • This study aims to investigate the effect of total electrochemical cell resistance (TECR) on electrochemical impedance (EI) measurements of reinforced concrete (RC) by electrochemical impedance spectroscopy (EIS) using a three-electrode system. A series of experimental study is performed to measure electrochemical behavior of a steel bar embedded in a concrete cube specimen, with a side length of 200 mm, in various experimental conditions. Main variables include concrete dry conditions, coupling resistance between sensing electrodes and concrete surface, and area of the counter electrode. It is demonstrated that EI values remains stable when the compliant voltage of a measuring device is sufficiently great compared to the potential drop caused by TECR of concrete specimens. It is confirmed that the effect of the coupling resistance of TECR is far more influential than other two factors (concrete dry conditions and area of the counter electrode). The results in this study can be used as a fundamental basis for development of a surface-mount sensor for corrosion monitoring of reinforced concrete structures exposed to wet-and-dry cycles under marine environment.

AMP-activated Kinase Regulates Adipocyte Differentiation Process in 3T3-L1 Adipocytes Treated with Selenium (AMP-activated protein kinase가 셀레늄으로 처리된 3T3-L1 지방세포의 분화과정 억제에 관한 연구)

  • Park, Song-Yi;Hwang, Jin-Taek;Lee, Yun-Kyoung;Kim, Young-Min;Park, Ock-Jin
    • Journal of Life Science
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    • v.19 no.4
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    • pp.423-428
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    • 2009
  • Selenium was investigated using human origin preadipocytes to see whether it possesses preventive or therapeutic effects for obesity. Unveiling the potential of selenium in the reduction of adipogenesis can help predict the therapeutic capabilities of selenium in obesity. In the present study, the molecular mechanism of the inhibition of adipogenesis by selenium was explored to unravel the involvement of the AMP-activated protein kinase. There is emerging evidence that AMPK, a sensor of cellular energy status, is a possible molecular target of controlling adipocyte differentiation on the basis of discovery that AMPK is responsible for the major metabolic responses to exercise, and integration of nutritional and hormonal signals to modulate feeding behavior or energy expenditure in the hypothalamus. Treatment of selenium resulted in inhibition of the adipocyte differentiation process and induction of mature apoptosis in 3T3-L1 adipocytes. We hypothesized that selenium may exert anti-adipogenic potential though modulating AMPK. We have found that selenium significantly activated AMPK and phosphorylated its substrate acetyl-CoA carboxylase ($ACC-serine^{79}$) during the inhibitory process of adipocytes. Also, the inhibition process of adipocyte differentiation by selenium was comparable to either reveratrol or a synthetic AMPK activator, AICAR (5-aminoimidazole-4-carboxamide-1-${\beta}$-D-ribofuranoside). To evaluate the involvement of AMPK in anti-lipogensis, we applied AICAR and Compound C, an AMPK inhibitor, to 3T3-L1-adipocytes and found that AMPK is required for the adipocyte differentiation blocking process. These results suggest that selenium has a potential to control adipogenesis and that this effect is mediated by AMPK, an essential kinase for both inhibition of adipocyte differentiation and apoptosis of mature adipocytes.

A study on monitoring for process time and process properties by measuring vibration signals transmitted to the mold during injection molding (사출성형공정에서 금형에 전달되는 진동 신호 측정을 이용한 성형 단계별 공정시간과 공정특성의 모니터링에 대한 연구)

  • Lee, Jun-han;Kim, Jong-Sun
    • Design & Manufacturing
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    • v.14 no.3
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    • pp.8-16
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    • 2020
  • In this study, the vibration signal of the mold was measured and analyzed to monitoring the process time and characteristics during injection molding. A 5 inch light guide plate mold was used to injection molding and the vibration signal was measured by MPU6050 acceleration sensor module attached the surface of fixed mold base. Conditions except for injection speed and packing pressure were set to the same value and the change of the vibration signal of the mold according to injection speed and packing pressure was analyzed. As a result, the vibration signal had a large change at three points: "Injection start", "V/P switchover", and "Packing end". The time difference between "injection start" and "V/P switchover" means the injection time in the injection molding process, and the time difference between "V/P switchover" and "Packing end" means the packing time. When the injection time and packing time obtained from the vibration signal of the mold are compared with the time recorded in the injection molding machine, the error of the injection time was 2.19±0.69% and the error of the packing time was 1.39±0.83%, which was the same level as the actual value. Additionally, the amplitude at the time of "injection start" increased as the injection speed increased. In "V/P switchover", the amplitude tended to be proportional to the pressure difference between the maximum injection pressure and the packing pressure and the amplitude at the "packing end" tended to the pressure difference between the packing pressure and the back pressure. Therefore, based on the result of this study, the injection time and packing time of each cycle can be monitored by measuring the vibration signal of the mold. Also, it was confirmed that the level and trend of process variables such as the injection speed, maximum injection pressure, and packing pressure can be evaluated as the change of the mold vibration during injection molding.

Study on frequency response of implantable microphone and vibrating transducer for the gain compensation of implantable middle ear hearing aid (이식형 마이크로폰과 진동체를 갖는 인공중이의 이득 보상을 위한 주파수 특성 고찰)

  • Jung, Eui-Sung;Seong, Ki-Woong;Lim, Hyung-Gyu;Lee, Jang-Woo;Kim, Dong-Wook;Lee, Jyung-Hyun;Kim, Myoung-Nam;Cho, Jin-Ho
    • Journal of Sensor Science and Technology
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    • v.19 no.5
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    • pp.361-368
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    • 2010
  • ACROSS device, which is composed of an implantable microphone, a signal processor, and a vibrating transducer, is a fullyimplantable middle ear hearing device(F-IMEHD) for the recovery of patients with hearing loss. And since a microphone is implanted under skin and tissue at the temporal bones, the amplitude of the sound wave is attenuated by absorption and scattering. And the vibrating transducer attached to the ossicular chain caused also the different displacement from characteristic of the stapes. For the gain control of auditory signals, most of implantable hearing devices with the digital audio signal processor still apply to fitting rules of conventional hearing aid without regard to the effect of the implanted microphone and the vibrating transducer. So it should be taken into account the effect of the implantable microphone and the vibrating transducer to use the conventional audio fitting rule. The aim of this study was to measure gain characteristics caused by the implanted microphone and the vibrating transducer attached to the ossicle chains for the gain compensation of ACROSS device. Differential floating mass transducers (DFMT) of ACROSS device were clipped on four cadaver temporal bones. And after placing the DFMT on them, displacements of the ossicle chain with the DFMT operated by 1 $mA_{peak}$ current was measured using laser Doppler vibrometer. And the sensitivity of microphones under the sampled pig skin and the skin of 3 rat back were measured by stimulus of pure tones in frequency from 0.1 to 8.9 kHz. And we confirmed that the microphone implanted under skin showed poorer frequency response in the acoustic high-frequency band than it in the low- to mid- frequency band, and the resonant frequency of the stapes vibration was changed by attaching the DFMT on the incus, the displacement of the DFMT driven with 1 $mA_{rms}$ was higher by the amount of about 20 dB than that of cadaver's stapes driven by the sound presssure of 94 dB SPL in resonance frequency range.

Multiple Reference Network Data Processing Algorithms for High Precision of Long-Baseline Kinematic Positioning by GPS/INS Integration (GPS/INS 통합에 의한 고정밀 장기선 동적 측위를 위한 다중 기준국 네트워크 데이터 처리 알고리즘)

  • Lee, Hung-Kyu
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.29 no.1D
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    • pp.135-143
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    • 2009
  • Integrating the Global Positioning System (GPS) and Inertial Navigation System (INS) sensor technologies using the precise GPS Carrier phase measurements is a methodology that has been widely applied in those application fields requiring accurate and reliable positioning and attitude determination; ranging from 'kinematic geodesy', to mobile mapping and imaging, to precise navigation. However, such integrated system may not fulfil the demanding performance requirements when the baseline length between reference and mobil user GPS receiver is grater than a few tens of kilometers. This is because their positioning/attitude determination is still very dependent on the errors of the GPS observations, so-called "baseline dependent errors". This limitation can be remedied by the integration of GPS and INS sensors, using multiple reference stations. Hence, in order to derive the GPS distance dependent errors, this research proposes measurement processing algorithms for multiple reference stations, such as a reference station ambiguity resolution procedure using linear combination techniques, a error estimation based on Kalman filter and a error interpolation. In addition, all the algorithms are evaluated by processing real observations and results are summarized in this paper.

Development of Digital Filter and Damper for Improving Accuracy of Measurement of Application Amount of Disinfectants of Disinfection Vehicle (방역차량의 약제 살포량 측정 정확성 개선을 위한 디지털 필터와 댐퍼 개발)

  • Baek, Seunghwan;Park, Donghyeok;Park, Hana;Lee, Chungu;Rhee, Joongyong
    • Proceedings of the Korean Society for Agricultural Machinery Conference
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    • 2017.04a
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    • pp.148-148
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    • 2017
  • 방역 차량의 약액탱크, 차량의 연료, 워셔액 등의 탱크 내부에는 잔존량을 측정하기 위해 기둥과 floating box로 이루어진 부력식 수위레벨센서가 사용되고 있으나 액체레벨에 따라 float이 상하로 움직이는 측정원리상 차량 주행 중 정확성이 매우 떨어진다(Park et al. 2016). 방역차량이 주행 중 분사할 때, 슬로싱 현상과 방역소독기의 노즐과 펌프에서 발생하는 진동으로 인해 기존의 부력식 센서를 이용한 약제 살포량 측정방법은 정확성이 매우 떨어지는 경향이 있다. 본 연구의 목적은 방역차량이 주행하면서 분사할 때, 수위레벨 센서를 이용한 약제살포량 측정의 정확성을 개선하는 것으로 디지털 칼만필터, Low pass filter와 댐퍼를 제작하여 이용했다. 본 연구에서는 압력식 레벨센서를 이용해 약액탱크의 높이당 단면적과 수위를 측정하여 약제살포량을 계산했다. Python 2.7을 이용해 디지털 칼만필터와 Low pass filter(LPF)를 구현하였으며 3D프린터를 이용해 댐퍼를 제작했다. 실내에서 슬로싱 현상을 인공적으로 만들어 필터와 댐퍼의 수위 측정 정확성 개선효과를 확인 후 실제 방역차량에 부착하여 비포장도로에서 주행하면서 분사할 때 필터와 댐퍼의 효과를 확인하였다. 댐퍼의 공극률(p)을 바꿔가며 수위 측정 정확성 개선효과를 확인하였다. 실내, 현장 실험 결과, 칼만필터가 LPF보다 개선효과가 더 크지만 데이터 50개 처리에 1.71초의 시간지연이 발생했다. 댐퍼는 수위센서를 고정시키고 유체의 운동을 방해하여 이상치와 큰 오차제거에 효과적이었다. 칼만필터와 댐퍼를 동시에 이용할 경우, 수위 측정정확성 $R^2$는 0.9985, 0.9981로 ${\pm}4.3cm$의 범위내에서 수위를 측정할 수 있었다. 필터의 시간지연과 수위 측정정확성을 고려하여 데이터 기록간격을 3초로 설정하면 ${\pm}3cm$이내에서 약탱크 내 수위를 측정할 수 있었다. 공극률(p)가 0.294, 0.291, 0.17에서 측정정확성 $R^2$는 각각 0.9897, 0.9858, 0.9872 로 p가 0.294에서 개선효과가 가장 좋았으나 개선효과의 차이는 크지 않았다.

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Development and Application of Slime Meter for Evaluation of Slime Thickness in Borehole (굴착공 내 슬라임 두께 평가를 위한 슬라임미터의 개발 및 적용)

  • Hong, Won-Taek;Woo, Gyuseong;Lee, Jong-Sub;Song, Myung Jun;Lim, Daesung;Park, Min-Chul
    • Journal of the Korean Geotechnical Society
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    • v.34 no.10
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    • pp.29-38
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    • 2018
  • The slime formed at the bottom of the borehole causes the excessive displacement and loss of the bearing capacity of the drilled shaft. In this study, the slime meter is developed for the evaluation of the slime based on the electrical properties of the fluid and the slime in the borehole. The slime meter is composed of a probe instrumented with electrodes and temperature sensor and a frame with rotary encoder, so that the slime meter profiles the electrical resistivity compensated with temperature effect along the depth. For the application of the slime meter, three field tests are conducted at a borehole with a diameter of 3 m and a depth of 46.9 m with different testing time and locations. For all the tests, the experimental results show that while electrical resistivities are constantly measured in the fluid, the electrical resistivities sharply increase at the surface of the slime. Therefore, the slime thicknesses are estimated by the differences in the depths of the slime surface and the ground excavation. The experimental results obtained at the same testing point with different testing time show that the estimated thickness of the slime increases by the elapsed time. Also, the estimated slime at the side of the borehole is thicker than that at the center of the borehole. As the slime meter estimates the slime in the borehole by measuring the electrical resistivity with simple equipment, the slime meter may be effectively used for the evaluation of the slime formed at the bottom of the borehole.

Classification of Multi-temporal SAR Data by Using Data Transform Based Features and Multiple Classifiers (자료변환 기반 특징과 다중 분류자를 이용한 다중시기 SAR자료의 분류)

  • Yoo, Hee Young;Park, No-Wook;Hong, Sukyoung;Lee, Kyungdo;Kim, Yeseul
    • Korean Journal of Remote Sensing
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    • v.31 no.3
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    • pp.205-214
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    • 2015
  • In this study, a novel land-cover classification framework for multi-temporal SAR data is presented that can combine multiple features extracted through data transforms and multiple classifiers. At first, data transforms using principle component analysis (PCA) and 3D wavelet transform are applied to multi-temporal SAR dataset for extracting new features which were different from original dataset. Then, three different classifiers including maximum likelihood classifier (MLC), neural network (NN) and support vector machine (SVM) are applied to three different dataset including data transform based features and original backscattering coefficients, and as a result, the diverse preliminary classification results are generated. These results are combined via a majority voting rule to generate a final classification result. From an experiment with a multi-temporal ENVISAT ASAR dataset, every preliminary classification result showed very different classification accuracy according to the used feature and classifier. The final classification result combining nine preliminary classification results showed the best classification accuracy because each preliminary classification result provided complementary information on land-covers. The improvement of classification accuracy in this study was mainly attributed to the diversity from combining not only different features based on data transforms, but also different classifiers. Therefore, the land-cover classification framework presented in this study would be effectively applied to the classification of multi-temporal SAR data and also be extended to multi-sensor remote sensing data fusion.