• Journal of the Korean Society for Precision Engineering
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• v.17 no.1
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• pp.129-137
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• 2000

In this paper, a new method of noncontact measurement has been developed for a 3 dimensional topography in semiconductor wafer, implementing a new optical probe based on the precision defocus measurement. The developed technique consists of the new optical probe, precision stages, and the measurement/control system. The basic principle of the technique is to use the reflected slit beam from the specimen surface, and to measure the deviation of the specimen surface. The defocusing distance can be measured by the reflected slit beam, where the defocused image is measured by the proposed optical probe, giving very high resolution. The distance measuring formula has been proposed for the developed probe, using the laws of geometric optics. The precision calibration technique has been applied, giving about 10 nanometer resolution and 72 nanometer of four sigma uncertainty. In order to quantitize the micro pattern in the specimen surface, some efficient analysis algorithms have been developed to analyse the 3D topography pattern and some parameters of the surface. The developed system has been successfully applied to measure the wafer surface, demonstrating the line scanning feature and excellent 3 dimensional measurement capability.

• Journal of the Korean Society for Precision Engineering
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• v.33 no.6
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• pp.459-467
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• 2016

Using a line scan camera and a Galvano mirror, we constructed a high-speed line-scanning microscope that can generate 2D images ($8000{\times}8000pixels$) without any moving parts. The line scanner consists of a Galvano mirror and a cylindrical lens, which creates a line focus that sweeps over the sample. The measured resolutions in the x (perpendicular to line focus) and y (parallel to line focus) directions are both $2{\mu}m$, with a 2X scan lens and a 3X relay lens. This optical system is useful for measuring defects, such as spalling, chipping, delamination, etc., on the surface of carbon fiber reinforced plastic (CFRP) holes after machining in conjunction with adjustments in the angle of LED lighting. Defects on the inner wall of holes are measured by line confocal laser scanning. This confocal method will be useful for analyzing defects after CFRP machining and for fast 3D image reconstruction.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.3
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• pp.99-106
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• 1998

Recently, scientists introduced a new type of microscope capable of investigating nonconducting surfaces in an atomic scale, which is called AFM (Atomic Force Microscope). It was an innovative attempt to overcome the limitation of STM (Scanning Tunnelling Microscope) which has been able to obtain the image of conducting surfaces. Surfaces of samples are imaged with atomic resolution. The AFM is an imaging tool or a profiler with unprecedented 3-D resolution for various surface types. The AFM technology, however, leaves a lot of room for improvement due to its delicate and fragile probing mechanism. One of the room for improvements is gap control between probe tip and sample surface. Distance between probe tip and sample surface must be kept in below one Angtrom in order to measure the sample surface in Angstrom resolution. In this paper, AFM system modeling, experimental system identification and control scheme based on system identification are performed and finally sample surface is measured by home-built AFM with such a control scheme.

• The Journal of Advanced Prosthodontics
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• v.14 no.2
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• pp.88-95
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• 2022

PURPOSE. This study investigated the accuracy of full-arch intraoral scans obtained by various scan strategies with the segmental scan and merge methods. MATERIALS AND METHODS. Seventy intraoral scans (seven scans per group) were performed using 10 scan strategies that differed in the segmental scan (1, 2, or 3 segments) and the scanning motion (straight, zigzag, or combined). The three-dimensional (3D) geometric accuracy of scan images was evaluated by comparison with a reference image in an image analysis software program, in terms of the arch shape discrepancies. Measurement parameters were the intermolar distance, interpremolar distance, anteroposterior distance, and global surface deviation. One-way analysis of variance and Tukey honestly significance difference post hoc tests were carried out to compare differences among the scan strategy groups (α = .05). RESULTS. The linear discrepancy values of intraoral scans were not different among scan strategies performed with the single scan and segmental scan methods. In general, differences in the scan motion did not show different accuracies, except for the intermolar distance measured under the scan conditions of a 3-segmental scan and zigzag motion. The global surface deviations were not different among all scan strategies. CONCLUSION. The segmental scan and merge methods using two scan parts appear to be reliable as an alternative to the single scan method for full-arch intraoral scans. When three segmental scans are involved, the accuracy of complete arch scan can be negatively affected.

• Proceedings of the KIEE Conference
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• 1997.07d
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• pp.1573-1576
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• 1997

Thin films of $BaTiO_3$ system were prepared by radio frequency (rf)/dc magnetron sputtering method. We have investigated crystal structure, surface morphology and PTCR(positive-temperature coefficient of resistance) characteristics of the specimen depending on second heat - treatment temperatures. Scanning electron microscope(SEM) image of $BaTiO_3$ thin films shows that the specimen heat treated in between 900 and 1100[$^{\circ}C$] shows a grain growth. At 1100[$^{\circ}C$], the specimen stops grain-growing and becomes a crystal. A resistivity-temperature characteristics of the specimen depends on the doping concentrations of Mn.

• Proceedings of the KSRS Conference
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• 2004.10a
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• pp.633-636
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• 2004

Airborne laser scanning thechnology has been studied in many applications, DSM(Digital Surface Model) development, building extraction, 3D virtual city modeling. In this paper, we will evaluate the possibility of airborne laser scanning technology for transportation application, especially for recognizing moving vehicles on road. First, we initially segment the region of roads from all LiDAR DATA using the GIS map and intensity image. Secondly, the segmented region is divided into the roads and vehicles using the height threshold value of local based window. Finally, the vehicles will be classified into the several types of vehicles by MDC(Minimum Distance Classification) method using the vehicle's geometry information, height, length, width, etc

• 제어로봇시스템학회:학술대회논문집
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• 1996.10b
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• pp.644-647
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• 1996

In this study the theoretical minimum resolution analysis of an active vision system using laser range finder is performed for surrounding recognition and 3D data acquisition in unknown environment. The laser range finder consists of a slitted laser beam generator, a scanning mechanism, CCD camera, and a signal processing unit. A laser beam from laser source is slitted by a set of cylindrical lenses and the slitted laser beam is emitted up and down and rotates by the scanning mechanism. The image of laser beam reflected on the surface of an object is engraved on the CCD array. In the result, the resolution of range data in laser range finder is depend on distance between lens center of CCD camera and light emitter, view and beam angles, and parameters of CCD camera.

• Journal of Gastric Cancer
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• v.3 no.4
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• pp.195-200
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• 2003

Purpose: Advancement of computed tomography (CT) hardware and software has allowed thin section scanning and reconstruction of fascinating 2-dimentional (2D) and 3- dimentional (3D) images. Especially, the reconstruction of 3D images of gastrointestinal tract has been used in the detection and diagnosis of pre-malignant and malignant diseases. To compare the efficacy of CT gastrography with conventional upper gastrointenstinal series (UGIs) in gastric cancer patients. Materials and Methods: During Nov. 2002 and Mar. 2003, twenty-seven patients who had gastric cancer received both double contrast upper GI series and CT gastrography prior to radical surgery. Among these patients, nineteen had early gastric cancer (EGC) and 8 had advanced gastric cancer (AGC). Fifteen patients were male and 12 were female. The mean age was 54 yrs (range, $27\∼75$ yrs). The patients were placed on NPO and Stomach was distended with gas in fasting state prior to CT scanning. Double contrast upper GI series were performed as routine manual. CT scan was conducted in all patients using 8 or 16-channel multidetector CT in this study. The collimation and reconstruction for CT scanning were set at 2.5 mm and 1.25 mm, respectively. CT scanning was performed in the supine position. For image processing, CT gastrography, in which raysum and surface rendering images were constructed, virtual and 2D image in coronal and sagittal images were performed. The detectability of gastric cancer was assessed between UGIs and CT gastrography. Results: In AGCs, the detection rate of cancer using CT gastrography and virtual gastroscopy was higher than EGC cases. However, CT gastrography and virtual gastroscopy showed less favorable results than UGIs. Even though only a small number of cases had been studied, we might conclude that CT gastrography and virtual gastroscopy could replace UGIs in the detection of AGC cases. Conclusion: The detection rate used with CT gastrography and Virtual gastroscopy is not better than that of UGIs in early gastric cancer, however, in advanced gastric cancer cases, it is nearly equal to that of UGIs.

• Journal of Conservation Science
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• v.22
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• pp.31-42
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• 2008

A stone cultural heritage often lacks design drawing and detailed geometric informations, thus it becomes more difficult to conservation and restoration. Even though there is active database of detail shape information and numerical measurement for stone monuments, most of the data is in hard-to-utilize two-dimensional images. The new technology developed to overcome this problem is three-dimensional image scanning system. The multi-storied stone pagoda of the Daewonsa temple was analysed with 3D scanning image data then survey map with orientation displacement was evaluated. The difference of each side became apparent with the members of the stone properties was measured, also horizontal and vertical displacement occurred. Horizontal displacement occurred in increasing severity from left to right and from body section to upper part. The 8th roof stones are leaning toward northwest direction due to lateral displacement. The evaluation and measurement of displacement could cause a little errors due to the characteristics uneven surface of stone monuments, computer program and mistakes from the researcher. In future, more precise measurement and stability studies should be done to suggest that accurate data for conservation and understanding of damage condition can be provided.

• Journal of Korea Multimedia Society
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• v.10 no.7
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• pp.846-855
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• 2007

Significant feature extraction in cancer cell image analysis is an important process for grading cell carcinoma. In this study, we propose a method for 3D quantitative analysis of cell nuclei based upon digital image cytometry. First, we acquired volumetric renal cell carcinoma data for each grade using confocal laser scanning microscopy and segmented cell nuclei employing color features based upon a supervised teaming scheme. For 3D visualization, we used a contour-based method for surface rendering and a 3D texture mapping method for volume rendering. We then defined and extracted the 3D morphological features of cell nuclei. To evaluate what quantitative features of 3D analysis could contribute to diagnostic information, we analyzed the statistical significance of the extracted 3D features in each grade using an analysis of variance (ANOVA). Finally, we compared the 2D with the 3D features of cell nuclei and analyzed the correlations between them. We found statistically significant correlations between nuclear grade and 3D morphological features. The proposed method has potential for use as fundamental research in developing a new nuclear grading system for accurate diagnosis and prediction of prognosis.