• 제목/요약/키워드: 3D Film Factor

검색결과 60건 처리시간 0.028초

저온소결 세라믹을 이용한 밴더형 적층 액츄에이터의 제작 (Bending Mode Multilayer Actuator Using Low Temperature Sintering Piezoelectric Ceramics)

  • 이주영;김상종;강종윤;김현재;이상렬;윤석진
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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    • pp.68-69
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    • 2005
  • Low temperature ($\leq900^{\circ}C$) sintering piezoelectric ceramics $0.01Pb(Mg_{1/2}W_{1/2})O_3$-0.41Pb$(Ni_{1/3}Nb_{2/3})O_3-0.35PbTiO_3-0.23PbZrO_3+0.1wt%Y_2O_3+xwt%ZnO$ $(0{\leq}x{\leq}2.5)$ have been developed and investigated. The electromechanical coupling coefficient ($k_p$), piezoelectric constant ($d_{33}$), and mechanical quality factor ($Q_m$) have been measured to characterize the piezoelectric materials system. When 2.0 wt% ZnO is added, the properties of the system, $d_{33}$ = 559 pC/N, $k_p$ = 55.0 % and $Q_m$ = 73.4 are obtained which are very suitable for piezoelectric actuators. A bending mode multilayer actuator has been also developed using the materials which size is $27(L)\times9(W)\times1.07(t)mm^3$. The actuators are fabricated by multilayer ceramic (MLC) process and consist of24 layers and each layer thickness is $35{\mu}m$. At this time, the displacement of actuator was $100{\mu}m$ at 28V.

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마이크로 가공 기술을 이용한 강유전체 박막 초전형 적외선 센서 (Pyroelectric infrared microsensors made by micromachining technology)

  • 최준임
    • 전자공학회논문지D
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    • 제35D권4호
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    • pp.93-100
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    • 1998
  • Pyoelectric infrared detectors based on La-modified PbTiO3 (PLT) thin films have been fabricated by RF magnetron sputtering and micromachining technology. The detectors form Pb$_{1-x}$ La$_{x}$Ti$_{1-x}$ O$_{3}$ (x=0.05) thin film ferroelectric capacitors epitaxially grown by RF magnetron sputtering on Pt/MgO (100) substrate. The sputtered PLT thin film exhibits highly c-axis oriented crystal struture that no poling trealization for sensing applications is required. This is an essential factor to increase the yield for realization of an infrared image sensor. Micromachining technology is used to lower the thermal mass of the detector by giving maximum sensor efficiency. Polyimide is coated on top of the sensing elements to support the fragile structure and the backside of the MgO substrate is selectively eteched to reduce the heat loss. The sensing element exhibited a very high detectivity D* of 8.5*10$^{8}$ cm..root.Hz/W at room temperature and it is about 100 times higher than the case of micromachining technology is not used. a sensing system that detects the position as well as the existence of a human body is realized using the array sensor.sor.

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Correlation study of in vitro and in vivo test for SPF (Sun Protection Factor)

  • Jihyun, Jihyun-Bae;Sungyeon Ahn;Lee, Haekwang;Seongjoon Moon;Ihseop Chang
    • 대한화장품학회:학술대회논문집
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    • 대한화장품학회 2003년도 IFSCC Conference Proceeding Book II
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    • pp.407-416
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    • 2003
  • In this study, we evaluate the correlation between in vitro and in vivo determination of SPF of sunscreen products containing various ingredients depending on emulsification system. For in vitro approach, we determined SPF by the method of Diffey and Robson using an TransporeTM tape(3M Health care, USA) and SPF 290-analyzer(Optometrics Co. USA). SPF values and standard deviations are calculated and displayed after completion of the run. In vivo SPF values are determined according to KFDA (the Korea Food and Drug Administration) method in panels of Fitzpatrick's skin type II or III. We investigated the difference in SPF data of sunscreen ingredient according to emulsification system. The in vivo SPF data is high in water-in oil(W/O) emulsion than in oil-in water(O/W) emulsion samples. The difference may be due to the particular behavior in each vehicles and its presence on skin surface may produce a different sunscreen film. We obtained the corrlation coefficient between in vitro and in vivo SPF data for O/W (R-squre=0.72 )and W/O emulsion(R-squre=0.77). From these results, we suggest the improvement of methodology using Transpore$^{TM}$ tape as substrate to increase the predictability of in vitro method.d.

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PLD 방법으로 Si(100) 기판위에 증착한 Y2-xGdxO3:Eu3+/ 박막의 형광특성 (Luminescence Characteristics of Y2-xGdxO3:Eu3+ Thin film Grown by Pulsed Laser Ablation)

  • 이성수
    • 한국전기전자재료학회논문지
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    • 제17권1호
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    • pp.112-117
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    • 2004
  • $Y_2$$_{-x}$G $d_{x}$ $O_3$:E $u^{3+}$(x=0.0, 0.3, 0.6, 1.0, 1.4) luminescent thin films have been grown on Si (100) substrates using pulsed laser deposition. The films grown under different deposition conditions have been characterized using microstructural and luminescent measurements. The crystallinity, the surface morphology and photoluminescence (PL) of the films are highly dependent on the amount of Gd. The photoluminescence (PL) brightness data obtained from $Y_2$$_{-x}$G $d_{x}$ $O_3$:E $u^{3+}$ films grown under optimized conditions have indicated that Si (100) is one of promised substrates for the growth of high quality $Y_2$$_{-x}$G $d_{x}$ $O_3$:E $u^{3+}$ thin film red phosphor. In particular, the incorporation of Gd into $Y_2$ $O_3$ lattice could induce a remarkable increase of PL. The highest emission intensity was observed with $Y_{1.35}$G $d_{0.60}$ $O_3$: $E^{3+}$, whose brightness was increased by a factor of 1.95 in comparison with that of $Y_2$ $O_3$:E $u^{3+}$ films.3+/ films.films.lms.

저전력, 고주파, 고효율 자성박막 변압기 설계 및 제작에 대한 연구 (Design and Fabrication of Low-Power, High-Frequency, High-Performance Magnetic Thin Film Transformer)

  • 윤의중;정명희
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제50권11호
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    • pp.555-561
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    • 2001
  • In this paper, the low power (1.5 W) solenoid-type magnetic thin-film transformers utilizing a $Ni_{81}Fe_{19)$ core material were designed and fabricated for 5 MHz-drive DC-DC converter application. The $20\mum$ thick copper films were used as the coils. The transformers fabricated in this work have the sizes of $3.08 mm\times25.5 mm\; and\; 6.15 mm\times12.75 mm.$ The optimum design of solenoid-type magnetic thin film transformers was performed utilizing the conventional equations, a Maxwell computer simulator (Ansoft HFSS V7.0 for PC), and parameters obtained from the magnetic properties of NiFe magnetic core materials. frequency characteristics of inductance, dc resistance (R), coupling factor (k) and gain of developed transformers were measured using HP4194A impedance and gain-phase analyzer. The fabricated transformers with the size of $6.15 mm\time12.75 mm$ exhibit the inductance of $0.83 \muH$, the dc resistance of $2.3\Omega$$\Omega$, the k of 0.91 and the gain of -1 dB at 5 MHz, which show the comparable results to those reported in the recent literatures. The measured high-frequency characteristics for the fabricated transformers agreed well with those obtained by theoretical calculations .

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저가형 유기 SOP 적용을 위한 저온 공정의 $BaTiO_3$ 임베디드 커페시터 설계 및 제작 (Design and Fabrication of Low Temperature Processed $BaTiO_3$ Embedded Capacitor for Low Cost Organic System-on-Package (SOP) Applications)

  • 이승재;박재영;고영주
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2006년도 제37회 하계학술대회 논문집 C
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    • pp.1587-1588
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    • 2006
  • Tn this paper, PCB (Printed Circuit Board) embedded $BaTiO_3$ MIM capacitors were designed, fabricated, and characterized for low cost organic SOP applications by using 3-D EM simulator and low temperature processes. Size of electrodes and thickness of high dielectric films are optimized for improving the performance characteristics of the proposed embedded MIM capacitors at high frequency regime. The selected thicknesses of the $BaTiO_3$ film are $12{\mu}m$, $16{\mu}m$, and $20{\mu}m$. The fabricated MIM capacitor with dielectric constant of 30 and thickness of $12{\mu}m$ has capacitance density of $21.5p\;F/mm^2$ at 100MHz, maximum quality factor of 37.4 at 300 MHz, a quality factor of 30.9 at 1GHz, self resonant frequency of 5.4 GHz, respectively. The measured capacitances and quality factors are well matched with 3-D EM simulated ones. These embedded capacitors are promising for SOP based advanced electronic systems with various functionality, low cost, small size and volume.

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Carbon Monoxide Sensor Based on a B2HDDT-doped PEDOT:PSS Layer

  • Memarzadeh, R.;Noh, Hui-Bog;Javadpour, S.;Panahi, F.;Feizpour, A.;Shim, Yoon-Bo
    • Bulletin of the Korean Chemical Society
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    • 제34권8호
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    • pp.2291-2296
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    • 2013
  • An efficient carbon monoxide (CO) sensor was developed based on poly(3,4-ethylenedioxy)thiophenepoly(styrenesulfonate) (PEDOT:PSS) modified with a new pyrimidine-fused heterocyclic compound, bis(2-hydroxyphenyl)dihydropyrido[2,3-d:6,5-d]dipyrimidine-tetraone (B2HDDT). B2HDDT remains stable in the polymer matrix through interactions with functional groups of the polymer. It created prominent sites that captured CO gas, and the experimental parameters, including the amount of doped B2HDDT in the PEDOT:PSS film, were optimized. The sensor probe was also examined to verify its reliability for detecting CO in the presence of atmospheric gases in a discriminating manner. NMR, AFM, and FT-IR spectra were obtained to evaluate the structure and morphology of the B2HDDT-doped PEDOT:PSS (PEDOT:PSS/B2HDDT) film. The content of 35 vol % B2HDDT (7.0 mM) in PEDOT:PSS provided the largest response factor (${\Delta}R/R_o$) for the CO gas. The sensor response was reproducible, with a relative standard deviation < 5% (n = 5). The detection limit was determined to be $0.44{\pm}0.05$ vol %.

재조합 인간 상피세포성장인자(DWP401)의 흰쥐에서의 in vivo와 in vitro 대사 (In vivo and In vitro Metabolism of Recombinant Human Epidermal Growth Factor (DWP401) in Rats)

  • 고여욱;남권호;정주영;박승국;유영효;김재환;한건;박명환;심창구
    • 약학회지
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    • 제41권3호
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    • pp.381-388
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    • 1997
  • Metabolism of DWP401, recombinant juman epidermal growth factor, was examined in vivo and in vitro in rats. When $^{125}I$-labeled DWP401 was administered at a dose of 50 ${\mu}g$/kg by i.v. injection. $^{125}I$-labeled DWP401 was rapidly degraded within 30 minytes above 93%. Thin layer chromatography analysis of urine collected for 24 hr after i.v. administration of $^{125}I$-labeled DWP401 showed ohly one spot on a X-ray film which was considered as diiodo-tyrosine. This result suggests tha $^{125}I$-labeled DWP401 was completely digested into free amino acids without any specific intermediate polypeptides. About 42.1% of the administered iodine was recovered in 24 hr. For in vitro degradation study, $^{125}I$-labeled DWP401 was added to plama and tissue homogenates of rats and incubated at $37^{\circ}C$. Almost 98% of the added radioactivity recovered from the protein fraction of the liver, kidey, small intestine, stomach and spleen decreased rapidly. For examplem the recovery rates of $^{125}I$-labeled DWP401 were 58.6, 63.2, 39.9, 52.9 and 66.8% after 4hrs of incubation in respective organ homogenates.

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Preparation of Low-Temperature Fired PZT Thick Films on Si by Screen Printing

  • Cheon, Chae-Il;Lee, Bong-Yeon;Kim, Jeong-Seog;Bang, Kyu-Seok;Kim, Jun-Chul;Lee, Hyeung-Gyu
    • Transactions on Electrical and Electronic Materials
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    • 제4권2호
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    • pp.20-23
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    • 2003
  • Piezoelectric powder with the composition of PbTiO$_3$-PbZrO$_3$-Pb(Mn$\_$1/3/Nb$\_$2/3/)O$_3$ and small particle size of 0.3 $\mu\textrm{m}$ was investigated for low-temperature firing of PZT thick films. PbTiO$_3$-PbZrO$_3$-Pb(Mn$\_$1/3/Nb$\_$2/3)O$_3$ ceramics showed dense microstructure and superior piezoelectric properties, electromechanical coupling factor (k$\_$p/) of 0.501 and piezoelectric constant (d$\_$33/) of 224. The PZT paste was made of the powder and organic vehicles, and screen-printed on Pt(450nm)/YSZ(110nm)/SiO$_2$(300nm)/Si substrates and fired at 800∼900$^{\circ}C$. Any interface reaction between the PZT thick film and the bottom electrode was not observed in the PZT thick films. The PZT thick film fired at 800$^{\circ}C$ showed moderate electrical properties, the remanent polarization(p$\_$r/) of 16.0 ${\mu}$C/$\textrm{cm}^2$, the coercive field(E$\_$c/) of 36.7 ㎸/cm, and dielectric constant ($\varepsilon$$\_$r/) of 531. Low-temperature sinterable piezoelectric composition and high activity of fine particles reduced the sintering temperature of the thick film. This PZT thick film could be utilized for piezoelectric microactuators or microsensors that require Si micromachining technology.

가스 감응용 3차원 구조체 TiO2 박막 성장기구 (Growth mechanism of three dimensionally structured TiO2 thin film for gas sensors)

  • 문희규;윤석진;박형호;김진상
    • 센서학회지
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    • 제18권2호
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    • pp.110-115
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    • 2009
  • Polystyrene (PS) microspheres were used to good advantage as a template material to prepare macroporous $TiO_2$ thin films. This is enabled to run the thermal decomposition of the PS without the collapsing of the 3-D macroporous framework during the calcination step. $TiO_2$ thin films were deposited onto the colloidal templated substrates at room temperature by RF sputtering, and then samples were thermally treated at $450^{\circ}C$ for 40.min in air to remove the organic colloidal template and induce crystallization of the $TiO_2$ film. The macroporous $TiO_2$ thin film exhibited a quasi-ordered partially hexagonal close-packed structure. Burst holes, estimated to be formed during PS thermal decomposition, are seen as the hemisphere walls. the inner as well as the outer surfaces of the hollow hemispheres formed by the method of thermal decomposition can be easily accessed by the diffusing gas species. As a consequence, the active surface area interacting with the gas species is expected to be enlarged about by a factor of fourth as large as compared to that of a planar films. Also the thickness at neighboring hemisphere could be controlled a few nm thickness. If the acceptor density becomes as large that depletion width reaches those thickness, the device is in the pinch off-situation and a strong resistance change should be observed.