Size, Shape, and Crystal Structure of Silica Particles Generated as By-products in the Semiconductor Workplace (반도체 작업환경 내 부산물로 생성되는 실리카 입자의 크기, 형상 및 결정 구조)
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- Journal of Korean Society of Occupational and Environmental Hygiene
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- v.25 no.1
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- pp.36-44
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- 2015