• Applied Science and Convergence Technology
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• v.23 no.4
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• pp.169-178
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• 2014

Fluid model based numerical analysis is done to simulate a low damage etch back system for 20 nm scale semiconductor fabrication. Etch back should be done conformally with very high material selectivity. One possible mechanism is three steps: reactive radical generation, adsorption and thermal desorption. In this study, plasma generation and transport steps are analyzed by a commercial plasma modeling software package, CFD-ACE+. Ar + $CF_4$ ICP was used as a model and the effect of reactive gas inlet position was investigated in 2D and 3D. At 200~300 mTorr of gas pressure, separated gas inlet scheme is analyzed to work well and generated higher density of F and $F_2$ radicals in the lower chamber region while suppressing ions reach to the wafer by a double layer conducting barrier.

• Proceedings of the Korean Operations and Management Science Society Conference
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• 2004.10a
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• pp.173-176
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• 2004

Understanding the fact that more spending for R&D is merely a necessity, not a factor of success, managing technological development efforts effectively and efficiently for higher R&D productivity and sustainable growth has become an important issue for contemporary firms. Based on a survey on small- and medium-sized manufacturing firms, this paper explores the relationships of leadership positions, technological contents and acquisition methods of korean firms. This paper has identified several findings from Korean manufacturing firms: (1) five different patterns are identified in the technology strategy of medium-sized companies; (2) a significantly positive relationship exists between a firm's leadership position and the aggressiveness in technological contents of their acquisition methods; (3) a significantly positive relationship of some technology acquisition methods to the firms' leadership position exists,

• The Transactions of the Korean Institute of Electrical Engineers D
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• v.53 no.3
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• pp.182-187
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• 2004

In this paper, we propose a PC based distributed controller for a two axis convey table using real-time micro-kernel. PC, Windows program, gives an easy way to implement wealthy GUI and micro-kernel, ${\mu}$C/OS-II, provides a real-time capability to control devices. We built a real-time distributed control system using ${\mu}$C/OS-II kernel which needs to process the tasks for two motors within the desired time to synchronize the motion. We used both semaphore and message mail box for synchronization. Unlike the previous study where we used step motors for the actuator of two axes convey table, we rebuilt the convey table with DC motors and the dedicated position servo which had built in out lab, and then we implemented a realtime distributed control system by putting the micro-kernel into between PC and position servo. Moreover we developed the PC based graphic user interfaces for generating planar drawing image control. Experimental results also presented to show the Proposed control system is useful.

• Transactions of the Korean Society of Automotive Engineers
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• v.2 no.6
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• pp.57-65
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• 1994

A collision-free path planning algorithm between an articulated robot and polyhedral obstacles using configuration space is presented. In configuration space, a robot is treated as a point and obstacles are treated as grown forbidden regions. Hence path planning problem is transformed into moving a point from start position to goal position without entering forbidden regions. For mapping to 3D joint space, slice projection method is used for first revolute joint and inverse kinematics is used for second and third revolute joint considering kinematic characteristics of industrial robot. Also, three projected 2D joint spaces are used in search of collision-free path. A proper example is provided to illustrate the proposed algorithm.

• Journal of the Korean Society for Precision Engineering
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• v.12 no.12
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• pp.38-44
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• 1995

This paper presents a method to measure the position and orientation of a Cylindrical Object(unknown the eiameter and length) lying on a floor, using a camera. The two extreme cross section of the cylinder will be viewed as distorted ellipese or circular are, while its limb edge will be shown as two straight lines. The diameter of the cylinder is determined from the geometric properties of the two straight lines, which in turn provides information regarding the length of the cylinder. From the 3-dimensional measurement, the 3D coordinates of the center points of the two extreme cross sections are determined to give the position and orientation of the cylinder. This method is used for automated pick-and-place operations of cylinder, such as sheet coils, or drums in warehouses.

• Korean Journal of Applied Biomechanics
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• v.14 no.1
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• pp.27-40
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• 2004

The purpose of this study was to provide basic data for improving athletic performances by analyzing the kinematic variables of the Double Backward Somersault on the Parallel Bars through the 3D motion analysis. The subjects in this study were 5 male gymnasts who were ranked as national athletes. The results are as follows. 1. A total time(Mean Time) of performance showed $2.72{\pm}0.82\;sec$. and flight time to landing after releasing was 0.87sec.(mean). In order to perform better stable flying movement, the flight time should be increased. 2. In the change of velocity of the center of mass, when the increasing ascension velocity of the upper point was high, the position in the top point was high on releasing. 3. In the position variable of the center of mass, the mean of upper-bottom position in horizontal posture was $242.1{\pm}6.5cm$, $232.8{\pm}6.4cm$ in releasing, and $265.0{\pm}5.6cm$ in the highest point. This result is explained that the position of center of mass can be raised by using elastic power when wrist raised the bar in the releasing movement. 4. The angle of shoulder joint was $271.1{\pm}14.0$. Such a big angle influences a negative effect on the releasing velocity, because trunk is not a position in the enough vertical direction. 5. The ankle of hip joint in hand-standing was $191.1{\pm}5.9$, $118.8{\pm}5.3$ in releasing, and $122.3{\pm}5.3$ in taking on. Therefore, the result suggests that trunk should be straightly raised in taking on.

• Transactions of the Korean Society of Mechanical Engineers
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• v.18 no.10
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• pp.2554-2566
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• 1994

Robot position/force control has been a difficult task owing to the interaction between a robot and an environment with a rather high stiffness. In addition to the dynamic instability, the interaction causes the following problem : 1) chattering at steady-state, 2) dynamic coupling effect of robot, and 3) performance degradation due to a titled environment. To solve the problem, the Time Delay Control(TDC), which has been known to be quiet robust to plant uncertainties and disturbances, has been applied. In conjunction to TDC, the following three ideas were also used : 1) To reduce the amplitude of the chattering at the steady state, a novel scheme was adopted to enhance the resolution type solution of A/D conversion for the force sensor. 2) To reduce the dynamic coupling, a trajectory type position command was tried on a comparative basis to the step command, as well as a more accurate mass matrix was used instead of the constant mass matrix. 3) And finally to improve the performance in the tilted environment, force derivatives instead of position derivatives were used in the TDC law. Computer simulations and experiments resulted in obvious improvements on the quality of the hybrid control, thereby clearly demonstrating the effectiveness of TDC with the proposed ideas.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.11a
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• pp.220-223
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• 2003

This paper is aimed at determining the e-field distribution by apply voltage of air void, which can be generate air void in the XLPE cable for ultra high voltage. E-field distribution had an effect in XLPE due to the type and position of void, compared and studied. This method of analysis is based on the quasi-static electromagnetic 3D simulation program by boundary element method (BEM): Applied AC 3[kV], discretization of 2000 elements, 4 angular periodicity, The result of experiment indicate that E-field distribution appeared the highest levels on the void position of electrode 2[nm] outer boundary and shape of the smallest inner angle in the void. This will serve to explain the XLPE cable degradation studied of possible, connected cable variation of position and shape of void effects to e-field concentration.

• Journal of the Institute of Electronics Engineers of Korea SP
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• v.48 no.6
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• pp.88-95
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• 2011

An embedded mobile device mostly has lower computation power than a general purpose computer because of its relatively lower system specifications. Consequently, conventional face tracking and face detection methods, requiring complex algorithms for higher recognition rates, are unsuitable in a mobile environment aiming for real time detection. On the other hand, by applying a real-time tracking and detecting algorithm, we would be able to provide a two-way interactive multimedia service between an user and a mobile device thus providing a far better quality of service in comparison to a one-way service. Therefore it is necessary to develop a real-time face and eye tracking technique optimized to a mobile environment. For this reason, in this paper, we proposes a method of tracking horizontal face position of a user on a T-DMB device for enhancing the quality of 3D DMB content. The proposed method uses the orientation of edges to estimate the left and right boundary of the face, and by the color edge information, the horizontal position and size of face is determined finally to decide the horizontal face. The sobel gradient vector is projected vertically and candidates of face boundaries are selected, and we proposed a smoothing method and a peak-detection method for the precise decision. Because general face detection algorithms use multi-scale feature vectors, the detection time is too long on a mobile environment. However the proposed algorithm which uses the single-scale detection method can detect the face more faster than conventional face detection methods.

• Journal of Animal Environmental Science
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• v.8 no.3
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• pp.165-170
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• 2002

This study was carried out to measure the 3D-distance of a cow model teat for an application possibility on Robotic Milking System(RMS). A teat recognition algorithm was made to find 3D-distance of the model by using Gonzalrez's theory. Some of the results are as follows. 1 . In the distance measurement experiment on the test board, as the measured length, and the length between the center of image surface and the measured image point became longer, their error values increased. 2. The model teat was installed and measured the error value at the random position. The error value of X and Y coordinates was less than 5㎜, and that of Z coordinates was less than 20㎜. The error value increased as the distance of camera's increased. 3. The equation for distance information acquirement was satisfied with obtaining accurate distance that was necessary for a milking robot to trace teats, A teat recognition algorithm was recognized well four model cow teats. It's processing time was about 1 second. It appeared that a teat recognition algorithm could be used to determine the 3D-distance of the cow teat to develop a RMS.