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Poly-Si MFM (Multi-Functional-Memory) with Channel Recessed Structure

  • Park, Jin-Gwon;Jo, Won-Ju
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.156-157
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    • 2012
  • 단일 셀에서 비휘발성 및 고속의 휘발성 메모리를 모두 구동할 수 있는 다기능 메모리는 모바일 기기 및 embedded 장치의 폭발적인 성장에 있어 그 중요성이 커지고 있다. 따라서 최근 이러한 fusion기술을 응용한 unified RAM (URAM)과 같은 다기능 메모리의 연구가 주목 받고 있다. 이러한 다목적 메모리는 주로 silicon on insulator (SOI)기반의 1T-DRAM과 SONOS기술 기반의 비휘발성 메모리의 조합으로 이루어진다. 하지만 이런 다기능 메모리는 주로 단결정기반의 SOI wafer 위에서 구현되기 때문에 값이 비싸고 사용범위도 제한되어 있다. 따라서 이러한 다기능메모리를 다결정 실리콘을 이용하여 제작한다면 기판에 자유롭게 메모리 적용이 가능하고 추후 3차원 적층형 소자의 구현도 가능하기 때문에 다결정실리콘 기반의 메모리 구현은 필수적이라고 할 수 있겠다. 본 연구에서는 다결정실리콘을 이용한 channel recessed구조의 다기능메모리를 제작하였으며 각 1T-DRAM 및 NVM동작에 따른 memory 특성을 살펴보았다. 실험에 사용된 기판은 상부 비정질실리콘 100 nm, 매몰산화층 200 nm의 SOI구조의 기판을 이용하였으며 고상결정화 방법을 이용하여 $600^{\circ}C$ 24시간 열처리를 통해 결정화 시켰다. N+ poly Si을 이용하여 source/drain을 제작하였으며 RIE시스템을 이용하여 recessed channel을 형성하였다. 상부 ONO게이트 절연막은 rf sputter를 이용하여 각각 5/10/5 nm 증착하였다. $950^{\circ}C$ N2/O2 분위기에서 30초간 급속열처리를 진행하여 source/drain을 활성화 하였다. 계면상태 개선을 위해 $450^{\circ}C$ 2% H2/N2 분위기에서 30분간 열처리를 진행하였다. 제작된 Poly Si MFM에서 2.3V, 350mV/dec의 문턱전압과 subthreshold swing을 확인할 수 있었다. Nonvolatile memory mode는 FN tunneling, high-speed 1T-DRAM mode에서는 impact ionization을 이용하여 쓰기/소거 작업을 실시하였다. NVM 모드의 경우 약 2V의 memory window를 확보할 수 있었으며 $85^{\circ}C$에서의 retention 측정시에도 10년 후 약 0.9V의 memory window를 확보할 수 있었다. 1T-DRAM 모드의 경우에는 약 $30{\mu}s$의 retention과 $5{\mu}A$의 sensing margin을 확보할 수 있었다. 차후 engineered tunnel barrier기술이나 엑시머레이저를 이용한 결정화 방법을 적용한다면 device의 특성향상을 기대할 수 있을 것이다. 본 논문에서는 다결정실리콘을 이용한 다기능메모리를 제작 및 메모리 특성을 평가하였다. 제작된 소자의 단일 셀 내에서 NVM동작과 1T-DRAM동작이 모두 가능한 것을 확인할 수 있었다. 다결정실리콘의 특성상 단결정 SOI기반의 다기능 메모리에 비해 낮은 특성을 보여주었으나 이는 결정화방법, high-k절연막 적용 및 engineered tunnel barrier를 적용함으로써 해결 가능하다고 생각된다. 또한 sputter를 이용하여 저온증착된 O/N/O layer에서의 P/E특성을 확인함으로써 glass위에서의 MFM구현의 가능성도 확인할 수 있었으며, 차후 system on panel (SOP)적용도 가능할 것이라고 생각된다.

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Image Conversion in Digital Design (디지털디자인에서 이미지의 變換)

  • Kim, Hun
    • Archives of design research
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    • v.15 no.1
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    • pp.309-318
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    • 2002
  • An expression of image in visual communication design traditionally has a dose relationship with the mechanical part of several expression media. Especially, an image conversion becomes easter by converging various forms of image such as a pictorial expression, a drawing up a plan, an optical expression and a reflected image into digital data in the image expression using digital mode. In addition, synthesis between various forms of visual ,images is activated by the integration of all expression media into digital mode and thus the extent of the image expression becomes diversified. Moreover, there is a tendency that a various dimensional expression such as 3D and 4D is generalized in the image expression of digital design. A partial or whole image conversion has often occurred during the generalization process of several image forms. Such conversion summarized into two factors, a formative side and a technical side. We described the existing pictorial expression as a formative side, an optical expression as a photography, a materialization of image conversion theory of computer graphic image conversion according to data form as a technical side and specific content according to dimension. We summarized objective and demonstrative resets through a simple simulation using a computer for the contents required a technical and qualitative measure and presented an application program of the particular results from the study to the visual communication design work by a case.

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The Reactivity of Different Polyols for Paint to Polyisocyanate (도료용 폴리올 종류에 따른 폴리이소시아네이트와의 반응성)

  • Seo, Seok-Hwan;Suh, Cha-Soo;Park, Jin-Hwan
    • Applied Chemistry for Engineering
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    • v.19 no.4
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    • pp.388-396
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    • 2008
  • 2 Components polyurethane coatings are widely used for the industrial coating in general because of its excellent film performance and the workability which were brought by the 3 dimensional cross linked chain structures being formed after the reaction between polyol and polyisocyanate. 2 components polyurethane can be classified into alkyd polyol, polyester polyol, acrylic polyol and polyester modified acrylic polyol depending on where it is used. This research was conducted under the conditions below; different chemical compositions of resin for paint, set the same conditions of viscosity, thinner and acid value, set alternative polyols, OH values and catalysts, set alternative polyisocyanate hardeners of the paint, measure the reaction rates and dynamic mechanical characteristics using RPT-3000, Rotation Rheometer, DMA and FTIR. The research found that the reactivity between polyol and isocyanate influences the film performance and workability depending on the catalysts, OH values and chemical compositions. We find out that different reaction rate of acrylic polyol and polyester modified acrylic polyol with poly-isocyanate is not influenced on temperature and catalyst. In addition, reaction speed of high hydroxyl content polyol is faster than low hydroxyl equivalent. These results can improve difficult working condition to apply urethane coating.

Bearing Capacity of Strip Footing Adjacent on Cohesionless Slopes (비점착성 사면에 인접한 대상기초의 지지력)

  • Yu, Nam-Jae;Kim, Yeong-Gil;Jeon, Yeon-Jong
    • Geotechnical Engineering
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    • v.13 no.4
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    • pp.37-54
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    • 1997
  • This paper is to investigate the bearing capacity and the failure mechanism of slope subjected to strip surcharges adjassent to embankment slope of sandy soil. Parametric model tests under plain strain condition were performed by changing width of footing, relative density of slope materials, and position of footing from the crest of slopes. For model tests, Jumunjin standard sand was used as the slope material and its relative density was 45% and 70%, respectively. The angle of slope was formed with 1 : 1.5 and 1 2. Rigid model footings, made of aluminuu were used with their widths of 4, 7, 10 and 12cm. For the position of model footing, position ratios, distance of model footing from the crest of slope divided by footing width, were 0, 0.5, 1, 2, 3, 4, 5. Failure mechanism was observed by using ink colored sands and markers inserted in model slopes. Ultimate bearing capacity obtained from tests was analyzed and compared with limit equilibrium method, limit analysis method and empirical equation. Characteristics of load-settlement curves and failure mechanism were also analyzed and compared with the existing theories. Thus, their effects on ultimate bearing capacity of model footing adjacent to slope were assessed.

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Magnetization structure of Aogashima Island using vector magnetic anomalies obtained by a helicopter-borne magnetometer (항공 벡터 자기이상 자료를 이용한 아오가시마섬(청도)의 자화구조 연구)

  • Isezaski, Nobuhiro;Matsuo, Jun
    • Geophysics and Geophysical Exploration
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    • v.12 no.1
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    • pp.17-26
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    • 2009
  • On Aogashima Island, a volcanic island located in the southernmost part of the Izu Seven Islands Chain, vector magnetic anomalies were obtained in a helicopter-borne magnetic survey. The purpose of this study was to understand the volcanic structure of Aogashima Island in order to mitigate future disasters. Commonly, to obtain the magnetic structure of a volcanic island, total intensity anomalies (TIA) have been used, even though they have intrinsic errors that have not been evaluated correctly. Because the total intensity magnetic anomaly (TIA) is not a physical value, it does not satisfy Maxwell's Equations, Laplace's Equation, etc., and so TIA is not suitable for any physical analyses. In addition, it has been conventionally assumed that TIA is the same as the projected total intensity anomaly vector (PTA) for analyses of TIA. However, the effect of the intrinsic error ($\varepsilon_T$ = TIA.PTA) on the analysis results has not been taken into account. To avoid such an effect, vector magnetic anomalies were measured so that a reliable analysis of Aogashima Island magnetization could be carried out. In this study, we evaluated the error in TIA and used vector anomalies to avoid this erroneous effect, in the process obtaining reliable analysis results for 3D, vector magnetization distributions. An area of less than 1 A/m magnetization was found in the south-west part of Aogashima Island at the depth of 1.2 km. Taking the location of fumarolic activity into consideration, the lower-magnetization area was expected to be the source of that fumarolic activity of Aogashima Island.

Three-dimensional Algal Dynamics Modeling Study in Lake Euiam Based on Limited Monitoring Data (제한된 측정 자료 기반 의암호 3차원 조류 예측 모델링 연구)

  • Choi, Jungkyu;Min, Joong-Hyuk;Kim, Deok-Woo
    • Journal of Korean Society on Water Environment
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    • v.31 no.2
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    • pp.181-195
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    • 2015
  • Algal blooms in lakes are one of major environmental issues in Korea. A three-dimensional, hydrodynamic and water quality model was developed and tested in Lake Euiam to assess the performance and limitations of numerical modeling with multiple algal groups using field data commonly collected for algal management. In this study, EFDC was adopted as the basic model framework. Simulated vertical profiles of water temperature, dissolved oxygen and nutrients monitored at five water quality monitoring stations from March to October 2013, which are closely related to algal dynamics simulation, showed good agreement with those of observed data. The overall spatio-temporal variations of three algal groups were reasonably simulated against the chlorophyll-a levels of those estimated from the limited monitoring data (chlorophyll-a level and cell numbers of algal species) with the RMSEs ranging from 2.6 to $17.5mg/m^3$. Also, note that $PO_4-P$ level in the water column was a key limiting factor controlling the growth of three algal groups during most of simulation period. However, the algal modeling results were not fully attainable to the levels of observation during short periods of time showing abrupt increase in algae throughout the lake. In particular, the green algae/cyanobacteria and diatom simulations were underestimated in late June to early July and early October, respectively. The results shows that better understanding of internal algal processes, neglected in most algal modeling studies, is necessary to predict the sudden algal blooms more accurately because the concentrations of external $PO_4-P$ and specific algal groups originated from the tributaries (mainly, dam water releases) during the periods were too low to fully capture the sharp rise of internal algal levels. In this respect, this study suggests that future modeling efforts should be focused on the quantification of internal cycling processes including vertical movement of algal species with respect to changes in environmental conditions to enhance the modeling performance on complex algal dynamics.

Fluid Drag of a Trawl Net and Otter Board Spread in a Midwater Trawl (중층트롤 어구의 그물저항과 전개판 간격)

  • PARK Hae-Hoon;YOON Gab-Dong
    • Korean Journal of Fisheries and Aquatic Sciences
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    • v.34 no.3
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    • pp.238-244
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    • 2001
  • A method of estimating the fluid drag of a fishing gear and otter board spread in a midwater trawl on full scale was described by implementing a three-dimensional semi-analytic treatment of the towing cable (warp) of a trawl system with the field experiments obtained with the SCANMAR system. The shape of hand rope, bridle and float(or ground) rope attached behind otter boards in a horizontal plane was assumed to be of form $y_r=Ax_r^B$. The distance between otter boards (otter board spread) obtained by the three dimensional analysis of a towing cable must be equal to that obtained by the functional equation of the shape of ropes behind otter boards, The angle of attack of ropes which can be obtained from the functional equation enables one to estimate the fluid drag of trawl net (net drag) by subtracting the fluid drag of the hand rope and bridles from the drag component of the tension of hand rope attached just behind the otter boards.

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Numerical Modeling of Dehydration of Subducting Slab and Behavior of Expelled Water: A Preliminary Study (섭입해양판의 탈수 및 탈수된 물의 거동 수치모델링: 선행 연구)

  • Lee, Changyeol
    • Geophysics and Geophysical Exploration
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    • v.21 no.3
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    • pp.198-206
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    • 2018
  • In this preliminary study, dehydration of the subducting slab and behavior of the expelled water are numerically modeled using 2-dimensional model scheme. The hydrated minerals in the oceanic crust of the subducting slab experience dehydration by increases in temperature and pressure and expel their water into the overlying mantle wedge. Behavior of the expelled water is governed by both the corner flow in the mantle wedge and porous flow of the expelled water through the pores of the mantle minerals. The effects of convergence rate and age of the subducting slab as well as grain size of the minerals on the dehydration of the subducting slab and behavior of the expelled water are evaluated. The water solubility of the oceanic crust measured from the laboratory experiments is considered for modeling dehydration of the oceanic crust. The model calculations show most of the hydrated minerals in the oceanic crust is dehydrated by a depth of 100 km and the effects of the convergence rate and age of the subducting slab on the dehydration of the subducting slab and behavior of the expelled water are not significant. The larger grain size allows faster porous flow of the expelled water through the oceanic crust, mantle wedge and overlying continental crust and reduces the volume fraction of the expelled water there. The developed technique will be used for future studies on arc volcanism and has a potential implication for the other fields such as seismic tomographic study.

Quality Characteristics of White Pan Bread by Lotus (Nelumbo nucifera) Seeds Powder (연자육 분말을 첨가한 식빵의 품질 특성)

  • Lee, Byung-Gu;Byun, Gwang-In;Cha, Woen-Suep
    • Food Science and Preservation
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    • v.16 no.1
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    • pp.68-74
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    • 2009
  • This study investigated the quality characteristics of breads made with addition of lotus(Nelumbo nucifera) seeds powder. Breads were prepared with 0, 5, 10, 15 and 20%(w/w) lotus seed powder instead of wheat flour. The moisture, crude protein, crude fat, crude ash and crude fiber contents of the breads increased as the proportion of lotus seed powder increased. The pH of the breads increased as lotus seed powder levels increased. The weight of breads increased with increasing lotus seed powder levels, whereas volume decreased. The specific volumes of breads with lotus seed powder were in the range of $3.59{\sim}4.68\;mL/g$, whereas the control value was 5.12 mL/g. The baking loss rates of breads prepared with 5%, 15% and 20% lotus seed powder were 8.95%, 8.17% and 7.67%, respectively. Lightness (L value) of breads was decreased by addition of lotus seed powder, whereas redness (a value) and yellowness (b value) increased in crumb and crust. Texture measurements showed that hardness and gumminess increased with increased lotus seed powder levels, but springiness decreased. In sensory evaluation, the highest scores for flavor, taste and overall preference were obtained when lotus seed powder content was 10%, and color and texture were the best when 5% of lotus seed powder was added. Thus, addition of $5{\sim}10%$ lotus seed powder may have a role in functional bread preparation, resulting in improved quality.

수소처리와 후성장층의 특성이 다이아몬드 박막의 전계방출 특성에 미치는 영향

  • 심재엽;송기문;이세종;백홍구
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.96-96
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    • 2000
  • 화학증착법으로 증착된 다이아몬드 박막은 우수한 전기적 특성과 뛰어난 화학적, 열적 안정성 때문에 전계방출소재로 많은 관심을 불러 일으키고 있다. 다이아몬드 박막의 전계방출은 저전계에서 일어나는 것으로 알려져 있으며, 저전계방출의 원인을 규명하려는 많은 연구가 진행되어 왔다. 한편, 다이아몬드 박막의 전계방출전류는 금속기판의 사용에 의한 기판/다이아몬드 접촉의 개선, 다이아몬드 박막내의 흑연성분의 조절에 의한 구조변화, 보론이나 인 (P), 질소의 도핑, 수소 플라즈마나 cesium 등의 금속을 이용한 표면처리 등의 여러 방법에 의하여 향상된다는 것이 입증되었다. 그 외에 메탄과 대기 분위기 처리, 암모니아 분위기에서의 레이저 조사도 전계방출특성을 향상시키는 것으로 보고되었다. 그러나, 다이아몬드 박막의 성장후 구조적 특성이 다른 박막의 후성장이나 열분해된 운자수소 처리가 다이아몬드 박막의 전계방출특성에 미치는 영향에 관한 연구는 지금까지 이루어지지 않았다. 본 연구에서는 수소처리와 후성장이 다이아몬드 박막의 전계방출특성에 미치는 영향을 고찰하고 이로부터 그 원인을 규명하고자 하였다. 다이아몬드 박막은 hot-filament 화학증착법을 이용하여 증착하였다. 후성장한 다잉아몬드 박막내의 흑연성분과 박막의 두께를 체계적으로 조절하여 후성장 박막의 구조적 특성과 그 두께의 영향을 확인할 수 있었다. 후성장층내의 흑연성분과 두께가 증가할수록 전계방출특성은 향상되다가 저하되었다. 한편, 다이아몬드 박막을 성장시킨 후 수소분위기 처리를 함에 따라 전계방출특성은 향상되었지만 수소처리시간이 5분 이상으로 증가함에 따라 그 특성은 저하되었다. 본 연구에서는 수소처리와 후성장시 나타나는 전계방출특성의 변화 원인을 규명하고자 한다.기판위에서 polymer-like Carbon 구조는 향상되는 경향을 보였다.0 mm인 백금 망을 마스크로 사용하여 실제 3차원 미세구조를 제작하여 보았다. 그림 1에서 제작된 구조물의 SEM 사진을 보여주었으며, 식각된 면의 조도가 매우 뛰어나며 모서리의 직각성도 우수함을 확인할 수 있다. 이와 같이 도출된 시험 조건을 기초로 하여 리소그래피 후에 전기 도금을 이용한 금속 몰드 제작 및 이온빔 리소그래피 장점을 최대한 살릴수 있는 미세구조 제작에 대한 연구를 계속 추진할 계획이다. 비정질 Si1-xCx 박막을 증착하여 특성을 분석한 결과 성장된 박막의 성장률은 Carbonfid의 증가에 따라 다른 성장특성을 보였고, Silcne(SiH4) 가스량의 감소와 함께 박막의 성장률이 둔화됨을 볼 수 있다. 또한 Silane 가스량이 적어지는 영역에서는 가스량의 감소에 의해 성장속도가 둔화됨을 볼 수 있다. 또한 Silane 가스량이 적어지는 영역에서는 가스량의 감소에 의해 성장속도가 줄어들어 성장률이 Silane가스량에 의해 지배됨을 볼 수 있다. UV-VIS spectrophotometer에 의한 비정질 SiC 박막의 투과도와 파장과의 관계에 있어 유리를 기판으로 사용했으므로 유리의투과도를 감안했으며, 유리에 대한 상대적인 비율 관계로 투과도를 나타냈었다. 또한 비저질 SiC 박막의 흡수계수는 Ellipsometry에 의해 측정된 Δ과 Ψ값을 이용하여 시뮬레이션한 결과로 비정질 SiC 박막의 두께를 이용하여 구하였다. 또한 Tauc Plot을 통해 박막의 optical band gap을 2.6~3.7eV로 조절할 수 있었다. 20$0^{\circ}C$이상으로 증가시켜도 광투과율은 큰 변화를 나타내지 않았다.부터

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