Characteristic of Mirror Surface ELID Grinding of Large Scale Diametrical Silicon Wafer with Rotary Type Grinding Machine (로타리 연삭에 의한 대직경 Si-wafer의 ELID 경면 연삭특성)
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- Proceedings of the Korean Society of Machine Tool Engineers Conference
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- 2002.04a
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- pp.660-665
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- 2002