• Title/Summary/Keyword: 2탐침법

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Growth of $Al_xTa_{1-x}$ Alloy Thin Films by RE-Magnetron Sputter and Evaluation of Structural and Electrical Properties (E-Magnetron 스퍼터링에 의한 $Al_xTa_{1-x}$ 합금박막의 성장 및 구조적, 전기적 특성 분석)

  • 송대권;이종원;전종한
    • Journal of the Microelectronics and Packaging Society
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    • v.10 no.2
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    • pp.55-59
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    • 2003
  • In this study, $Al_xTa_{1-x}$(x=0.0∼1.0) alloy thin films were grown by RF-Magnetron sputtering system, and the structural, mechanical and electrical properties of samples were examined by 4-point probe, XRD, AFM and micro-Vickers hardness profiler. The electrical resistivity was maximum and the crystal quality was optimum for the samples with Al content x=0.245 (Al 24.5 at.%). Regarding the surface hillock formation, the hillock density decreased with an increase of Al content for the low Al content range, and the hillock was eliminated for the sample with Al=24.5 at.%. The hillock density increased with the further increase of Al content. The high values of micro-Vickers hardness were obtained for the samples with x=0.2∼0.45. The results obtained demonstrate that the crystal quality, electrical resistivity, surface morphology and micro-hardness are closely inter-related, and that the optimum physical properties are obtained for the sample with x=0.245.

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The $Fc{\gamma}$ receptor III genotype as a risk factor for aggressive periodontitis in Korean patients (한국인 급진성 치주염 환자의 위험요소로서 $Fc{\gamma}$ III 수용기의 유전형)

  • Kim, Myung-Hyun;Shin, Seung-Yun;Kim, Tae-Il;Seol, Yang-Jo;Lee, Yong-Moo;Rhyu, In-Chul;Chung, Chong-Pyoung;Han, Soo-Boo;Ku, Young
    • Journal of Periodontal and Implant Science
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    • v.36 no.1
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    • pp.113-123
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    • 2006
  • 연구배경 IgG에 대한 $Fc{\gamma}$ 수용기는 치주병인균에 대한 숙주 반응에 있어서 중요한 역할을 하는데, 이 중 $Fc{\gamma}RIIIa$는 NK 세포, 대식세포, 단핵구, ${\gamma}{\delta}T$세포에서 발현되며, EC2 도메인에서 158 아미노산 부위의 valine (V)-phenylalanine (F)의 유전자다형성을 보인다. $Fc{\gamma}RIIIb$는 특이적으로 중성구에 발현되는데, extracellular (ECl) Ig-like 도메인 내 4개의 아미노산 치환(substitutions)에 의한 NA1-NA2 유전자다형성을 보인다. 이 연구의 목적은 한국인에서 급진성 치주염 환자와 $Fc{\gamma}III$ 수용기의 유전자다형성과의 관련성을 알아보는 것이다. 연구방법 및 재료 치주적으로 건강한 90명 (대조군, 남자 64명, 여자 26명)과 서울대학교 치과병원 지주과에 내원하여 급진성 치주염으로 진단된 환자 43명 (aggressive periodontitis patients: AgP, 남자 30명, 여자 13명)을 대상으로 하였다. 모든 실험 대상자는 임상 실험에 대해 동의 하였고, 초진 시 전자 탐침(Florida Probe(R) Co. Gainesville, FL)을 이용하여 탐침 시 치주낭 깊이 (PPD), 임상부착수준 (CAL), 치태지수(PI), 탐침 후 출혈지수 (BOP)를 측정하였다. 또한 이들의 정맥혈에서 추출한 DNA를 PCR법, 전기영동법 등을 이용하여 $Fc{\gamma}RIIIa$, $Fc{\gamma}RIIIb$의 대립 유전자의 존재여부를 확인하였다. 이를 바탕으로 $Fc{\gamma}RIII$ 복합 유전형을 확인하여 각 군 간을 비교하였다. 연구 결과 1. $Fc{\gamma}RIIIa$에 대한 유전자다형성 연구 결과 대조군과 급진성 치주염 환자 군(AgP)사이에서는 대립 유전자 분포가 서로 유의성 있는 차이를 나타내었고 (P<0.05), $Fc{\gamma}RIIIb$에서는 유의성 있는 차이를 발견할 수 없었다. (P>0.05) 2. $Fc{\gamma}RIIIa$ 158F 대립형질이 급진성 치주염 환자에서 유의성 있게 많이 발견되어졌다. (P<0.05) 결론 이 연구를 통하여 $Fc{\gamma}RIIIa$ 유전자의 분석이 한국인의 급진성 치주염에 대한 감수성의 위험요소의 표지자로 활용할 수 있을 것으로 사료되며, 향 후 더 많은 환자를 대상으로 히는 추가 연구가 필요하다고 생각된다.

Estimation of Thermal Conductivity of Weathered Granite Soils (화강풍화토의 열전도도 산정에 대한 연구)

  • Park, Hyunku;Park, Hansol;Lee, Seung-Rae;Go, Gyu-Hyun
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.32 no.2C
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    • pp.69-77
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    • 2012
  • In general, geothermal energy pile and horizontal ground heat exchangers are installed in shallower depths than conventional vertical ground coupled heat pumps. Consequently their heat exchange performance is strongly governed by thermal conductivity of soil layer. Previous studies have shown that the thermal conductivity of soil above ground water table significantly affects the heat exchange rate because of partially saturated condition in soil and consequent variation of soil thermal conductivity. This paper presents a study result on the prediction of thermal conductivity of weathered granite soils. For weathered granite soils sampled from 5 locations, thermal conductivity tests were conducted with varying porosity and degree of saturation. The existing thermal conductivity models in literatures appeared inappropriate to the weathered granite soils. Hence, an empirical equation was proposed in this paper and its validity was examined by applying it to thermal conductivity test results obtained for weathered granite soils in this study and from literatures.

Influences of Structural Features on Electrical Properties and Heating Characteristics of Al-Ta Alloy Thin Films (Al-Ta 합금박막의 구조적 인자가 전기적 특성 및 발열 특성에 미치는 영향)

  • Song Daegwon;Lee Jongwon;Park In Yong;Kim Kyujin
    • Journal of the Microelectronics and Packaging Society
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    • v.11 no.4 s.33
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    • pp.23-27
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    • 2004
  • The $Al_xTa_{1-x} (x=0.0{\~}1.0)$ alloy thin films were deposited by RF-magnetron sputtering system, and the crystal quality, surface morphology, and electrical properties were examined using XRD, AFM, 4-point probe techniques in this study. The thin films were grown according to the alloy compositions first, and the effects of film thickness and mask patterns were investigated afterwards. Also, the heating characteristics were examined by heat controller. The obtained results showed that the high electrical resistivity was obtained for Al content $x=6.63at\%$, and the even higher resistivity was accomplished for the samples with smaller thickness and narrower width. The heating temperature demonstrated the identical trend to the electrical properties, and the highest heating temperature ($400^{\circ}C$) and output power ($12.6W/cm^2$) were obtained for the sample with Al content $x=6.63\%$, film thickness d=500 nm, film width w=1.5 mm.

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Measurement do Water Content in Sandy-Gravelly Soils using Time Domain Reflectometry (TDR(Time Domain Reflectometry)에 의한 사력토(Sandy-Gravelly Soil)의 함수량 측정)

  • Kim, Dong-Ju;Kim, Jeong-Seok
    • Journal of Korea Water Resources Association
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    • v.32 no.3
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    • pp.215-223
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    • 1999
  • Recently, measurement of soil moisture contents using TDR (time domain reflectometry) has been proven to be viable technique. The first empirical model proposed by Topp et al. (1980) has been widely used to determine moisture contents of soils from the TDR-measured dielectric constants. However, applicability of the model was limited to medium-textured soils. In this study, we investigate the applicability of the model to sandy-gravelly soils. Calibration experiments consisted of measurement on travel time of electromagnetic waveform along the parallel TDR rods inserted into samples and gravimetric determination of soil moisture contents. The experiments are performed for two sets of samples different in the length and each set consisted of seven different particle size distributions with various gavel contents. The calibration results show that the Topp equation overestimated the measured moisture content for a given dielectric constant by 3 to 8%. We therefore propose new empirical relationships valid for sandy-gravelly soils.

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Fabrication of Microwave PECVD with Linear Antenna for large-scale deposition processing, and Analysis of Ar plasma characteristics using Electrostatic Probe and Temperature Characteristics (대면적 증착용 선형 초고주파 플라즈마 장치 제작 및 정전 탐침법을 이용한 Ar 플라즈마 특성 분석과 온도 특성 분석)

  • Han, Moon-Ki;Seo, Kwon-Sang;Kim, Dong-Hyun;Lee, Ho-Jun
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.64 no.3
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    • pp.422-428
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    • 2015
  • A 2.45GHz microwave plasma source with a linear antenna has been developed for low temperature large scale deposition processing. Microwave power is transmitted through WR340 waveguide and a copper rod, linear antenna, is located in a quartz tube. The power matching is effectively achieved by a linear antenna is located at ${\lambda}_g/4$ or $3{\lambda}_g/4$ from the end of WR340 waveguide. The Ar plasma was generated along the surface of quartz tube and a clear standing wave pattern with nearly 10cm wavelength was observed at Ar pressure of 200mTorr and 200W input power. The electron density and electron temperature were investigated by using the electrostatic probe. The electron density and electron temperature were highly measured near the surface of quartz tube. Ar plasma density along the quartz tube is mostly uniform despite standing wave set-up and antenna of long length. A uniform temperature was measured at 10~40cm distance from the end quartz tube and 5cm distance from the surface of quartz tube.

Spectroscopic Analysis of the Remote-plasma-polymerized Methyl Methacrylate Film (원격 플라즈마 중합된 메틸메타크릴레이트 필름의 분광학적 분석)

  • Seomoon, Kyu
    • Applied Chemistry for Engineering
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    • v.32 no.1
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    • pp.49-54
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    • 2021
  • Plasma-polymerized methyl methacrylate (MMA) thin films were synthesized by remote plasma, and effects of plasma power, reaction pressure and direct-indirect plasma on the growth rate and chemical bonding were investigated with alpha-step, FT-IR, XPS and Langmüir probe method. As the plasma power and pressure increased, the tendency of growth rate showed maximum value at a certain range. FT-IR and XPS analyses revealed that composition ratio of C/O and hydrocarbon (C-C) % in the deposited films increased with plasma power, but ester (COO) C % decreased with it. Direct plasma method was effective for fast growth rate, but indirect plasma method was favorable for maintaining the chemical structure of MMA.

The transparent and conducting tin oxide thin films by the pulse laser deposition (펄스레이저증착에 의한 투명전도성 산화주석 박막)

  • 윤천호;박성진;이규왕
    • Journal of the Korean Vacuum Society
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    • v.6 no.2
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    • pp.114-121
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    • 1997
  • The transparent conductiong thin films of tin oxides were prepared on pyrex glass substrates by the pulse laser deposition. In the atmospheres of vacuum, O2, and $Sn(CH_3)_4$ a polycrystalline $SnO_2$ target was ablated by Nd-YAG laser beam to deposit thin films on the substrates at room temperature, and as-deposited films were subsequently heat-treated in the air for 2 h at 230, 420 and $610^{\circ}C$, respectively. The characteristics of the thin films were examined by UV-VIS-NIR spectrometry and X-ray diffractometry, and the electrical properties were measured by four-point probe method along with film thickness monitored by the stylus method. It was observed that in the presence of $Sn(CH_3)_4$, $SnO_2$ phases were grown even at room temperature. This suggests that the microplasma producted during the laser ablation plays an important role in the dissociaation of precursor molecules.

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The Effect of Particle Contamination on the Plasma Properties in a Capacitively Coupled RF Plasma Reactor (RF 용량결합 플라즈마 발생장치에서 입자오염이 플라즈마 물성에 미치는 영향)

  • 연충규;양일동;황기웅
    • Journal of the Korean Vacuum Society
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    • v.3 no.2
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    • pp.179-185
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    • 1994
  • 음극에 DLC 필름이 놓여져 있는 용량결합형의 RF 플라즈마 장치에서 Ar가스에 의한 방전에서 발생된 입자의 분포를 레이져 산란에 의하여 관측하였다. 발생된 입자들은 플라즈마와 sheath의 경계면 에서 높은 밀도의 구름을 이루었으며 시간에 따라 주기적인 분포의 변화가 반복되었다, 입자 구름의 발 생은 플라즈마 물성의 변화를 야기하였으며 그 결과로 심한 self-bias 전위의 감소현상이 관측되었다. 입자 구름분포의 시간에 따른 변화와 같은 주기의 self-bias 플라즈마전위의 진동현상이 가열된 fast-scanning langmuir 탐침에 의하여 관측되었다. 이결과는 입자 표면에로의 음전하 누적에 따른 전체 음전하의 이동도 감소에 의한 것으로 해석된다. 또한 방출 분광법에 의하여 입자오염상태의 Ar 플라즈 마와 정상상태의 Ar 플라즈마의 방출 선세기의 변화를 관측하였는데 입자구름 오염시의 2차전자 차폐 현상에 의해 높은 문턱 에너지를 가진 Ar II 선의 세기 감소현상이 나타났다.

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Size Verification of Small and Large Bubbles in a Bubble Column (기포탑에서 작은기포와 큰기포의 크기 구별)

  • Seo, Myung Jae;Jin, Hae-Ryong;Lim, Dae Ho;Lim, Ho;Kang, Yong;Jun, Ki-Won
    • Korean Chemical Engineering Research
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    • v.50 no.2
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    • pp.304-309
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    • 2012
  • Size verification of small and large bubbles in a bubble column was investigated by employing the dynamic gas disengagement (DGD) method and dual electrical resistivity probe (DRP) method, simultancously. The holdups of large and small bubbles in the bubble column in a given operating condition were obtained by means of the DGD method by measuring the pressure drop variation in the column with a variation of time after stopping the gas input into the column. The size and frequency of bubbles were measured by the DRP method in the same operating condition, from which the bubble holdup of each range of size was obtained. The verification of size in determining the large or small bubbles was decided by comparing the holdups of large or small bubbles measured by the DGD method with that measured by the DRP method. Filtered compressed air and tap water were used as a gas and a continuous liquid medium. The diameter and height of the bubble column were 0.102 m and 1.5 m, respectively. The demarcation size between the large and the small bubbles in the bubble column was 4.0~5.0 mm; the demarcation size was about 5.0 mm when the gas velocity was in the relatively low range, but about 4.0 mm when the gas velocity was in the relatively high range, within this experimental conditions.