Growth of $Al_xTa_{1-x}$ Alloy Thin Films by RE-Magnetron Sputter and Evaluation of Structural and Electrical Properties
(E-Magnetron 스퍼터링에 의한 $Al_xTa_{1-x}$ 합금박막의 성장 및 구조적, 전기적 특성 분석)
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- Journal of the Microelectronics and Packaging Society
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- v.10 no.2
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- pp.55-59
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- 2003