• Korean Journal of Optics and Photonics
• /
• v.13 no.2
• /
• pp.98-104
• /
• 2002

We present a new self-calibration method to remove the systematic error of a 2-axis lateral shearing interferometer that has been specially designed for optical testing of aspheric optics. The method takes multiple measurements by rotating the test optics and extracts the systematic error by fitting the measured wavefronts into the Zernike polynomials. The method works with arbitrary azimuthal angles for test optics rotation, which offers an advantage of correcting the error induced by the non-orthogonality of the two axes of wavefront shearing as well as the error caused by the optical components of the interferometer system itself.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 1995.10a
• /
• pp.384-387
• /
• 1995

Two axes lateral-shearing interferometer(LSI) specially devised for production line inspection lenses is presented. The interferometer composed with four prisms and a dove prism can test the lens performance including asymmetric aspheric lens. The dove prism which rotates the input image with respect to optical axis makes it possible. The wavefront passing through the test lens is reconstsucted by the phase derivative obtained form the two axes LSI system. Zernike-polynomials fitting of this wavefront is presented for determinating quantitative aberration of aspherical lenses.