• 반도체디스플레이기술학회지
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• 제14권3호
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• pp.1-5
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• 2015

In photolithography process, resolution enhancement techniques such as optical proximity correction (OPC) and phase shift mask (PSM) have been applied to improve resolution. Especially, sub-resolution assist feature (SRAF) is one of the most important OPC to enhance image quality including depth of focus (DOF). However, imaging performance of the mask could be varied with the diffraction order amplitude changed by inserting SRAF. Therefore, in this study, we investigated the imaging properties and process margin of attenuated PSM with SRAF. Reflectivities of attenuated PSMs at 13.5 nm were 3, 6, 9% and simulation was performed by $PROLITH^{TM}$. As a result, aerial image properties and DOF as well as diffraction efficiency were improved by increasing the reflectivity of attenuated PSM. Additionally, printed critical dimension variations depending on SRAF width and space error were also reduced for attenuated PSM with high reflectivity. However, SRAF could be printed when reflectivity of attenuated PSM is high enough. In conclusion, optimization of reflectivity of attenuated PSM and SRAF to prevent side-lobe from being printed is needed to be considered.

• 한국지진공학회논문집
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• 제15권3호
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• pp.1-9
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• 2011

자기부상열차가 중 저속 및 초고속 주행 시 차량의 주행특성 및 교량의 동적 응답 결과를 제시하고자 한다. 수직 자유도 및 회전 자유도를 포함한 10자유도 자기부상열차에 대한 운동방정식을 유도하고, 모드 중첩법을 이용하여 교량의 운동방정식을 구성하였다. 또한 제어 방법으로 UTM01제어기법을 적용하여 수치해석을 수행하였다. 해석 예제로 노면조도, 가이드웨이의 처짐비, 차량 속도 등이 교량의 처짐과 차량의 부상공극 및 여러 가지 변수에 미치는 영향을 파악하였다. 부상공극은 조도의 조건에 따라 그 차이가 확연히 드러나고 또한 자기부상열차의 속도가 증가함에 따라 부상공극이 증가함을 알 수 있었다. 그리고 자기부상열차가 중, 저속 주행 시에는 교량에 대한 영향이 미비하지만 초고속 주행 시 교량에 대한 동적확대계수가 큰 값을 보여주었다.

• 대한조선학회논문집
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• 제60권5호
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• pp.320-331
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• 2023

In this study, a model test was conducted using the soft-mooring technique to evaluate the added resistance of the ship in waves. The study also examined the specific factors that should be considered during the soft-mooring test. The main purpose of soft-mooring is to prevent drifting caused by waves by providing horizontal restoring forces. However, it can also create undesired restoring forces in the vertical direction. Therefore, we examined the restoring force of the ship's 6-DOF motion based on the arrangement of the soft-mooring and the height of the mooring connection point. We also checked the corresponding resonance period and drift distance. The soft-mooring test was conducted twice, once with self-propulsion and once without self-propulsion, allowing us to review the advantages and disadvantages of each test technique. The main parameters measured in these model tests were 6DOF motion and added resistance on the ship. We compared these measurements obtained from two different techniques (with and without self-propulsion). Additionally, we also compared the measurements based on the types of measuring sensors used (2D load cells on FP, AP, and 1D load cells on each mooring line) as well as the height of the mooring connection point.

• Journal of Mechanical Science and Technology
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• 제16권12호
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• pp.1643-1651
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• 2002

Magnetic levitation systems are required to have a large operating range in many applications. As one method to solve this problem, Time Delay Control (TDC) is applied to a single-axis magnetic levitation system in this paper A reduced-order observer is utilized to estimate states excluding measurable states in the control law. The system consists of a square air-core solenoid and a circular permanent magnet attached on a plastic ball. Theoretical magnetic forces of the system are obtained on the basis of the location of the magnet around the solenoid. The magnetic levitation force is obtained by the experiment, and then compared with the theoretical one. As the results of the control experiments, the nonlinear controller (TDC : 1-2 ㎜) has a larger operating range than the linear controller (PD control : 1-1.4 ㎜), and is superior to linear. control in the robustness to the modeling uncertainty and the performance of the disturbance rejection.

• 전자공학회논문지D
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• 제35D권8호
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• pp.62-68
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• 1998

Optical broadband second harmonic genration (SHG) in thin film waveguide structure was investigated. The copolymer poly(MMA-co-DR1MA) which was consiste dof PMMA (polymethylmethacrylate) and DR 1 (disperse red 1) was spin coated on the pyrex substrate. The green and near UV SHG were observe dfrom the fundamental beam even though the poled polymer has the absorption in second harmonic wavelength range. It was able to genrate SHG by cerenkov type phase matching. Th epoled polymer film thickness was decided by theoretical analysis. The green (532nm) and near UV SHG (370nm) were observed from the Q-switched Nd-YAG laser (1064nm) and Ti-sapphire laser (740nm). It was in good agreement with the experimental results.

• 한국항공운항학회지
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• 제19권1호
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• pp.1-6
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• 2011

The free-wing tilt-body aircraft is researched in the flight performance characteristics such as short take-off and landing capability, and reduced sensitivity to gust and center of gravity (CG) change. Due to the main wing separating from the fuselage, the high tiltable empennage, and the stub-wing strongly influencing from the propeller wake, the resulting vehicle aerodynamics and flight dynamics are quite different from those of a conventional fixed-wing aircraft. Using the governing flight dynamics model was studied previously, all of speed and body tilt angle is simulated to determine the flight envelope by a non-linear 3-DOF flight simulation analysis. Though flight performance and trimmability are studied, the flight model of free-wing tilt-body aircraft is to reduce the hidden risk and to achieve the successful flight test. It is analyzed the flight characteristics that distinguishes free-wing tilt-body aircraft from the conventional aircraft.

• 제어로봇시스템학회논문지
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• 제11권1호
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• pp.34-40
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• 2005

In this paper, we describe the modeling for the 3D robot laser scanning system consisting of a laser stripe projector, camera, and 5-DOF robot and propose its calibration method. Nonlinear radial distortion in the camera model is considered for improving the calibration accuracy. The 3D range data is calculated using the optical triangulation principle which uses the geometrical relationship between the camera and the laser stripe plane. For optimal estimation of the system model parameters, real-coded genetic algorithm is applied in the calibration process. Experimental results show that the constructed system is able to measure the 3D position within about 1mm error. The proposed scheme could be applied to the kinematically dissimilar robot system without losing the generality and has a potential for recognition for the unknown environment.

• 제어로봇시스템학회논문지
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• 제15권1호
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• pp.1-7
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• 2009

As designing PID control on aircraft, we consider a gain scheduling on altitude and velocity. If pitot tube is not installed in the unpowered air vehicle, the control performance is reduced by the difference between ground speed and air speed with a wind considered. In this paper, a simple guidance controller (LOS: Line of Sight) and the wind estimator using Kalman filter are designed. And we minimize the wind effect through the estimator. Finally, we perform the 6-DOF nonlinear simulation with the wind model to verify the performance of the controller with the wind estimator.

• 한국해양공학회지
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• 제35권2호
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• pp.99-112
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• 2021

The prediction of maneuverability is very important in the design process of an underwater vehicle. In this study, we predicted the steady turning ability of a symmetrical underwater vehicle while considering interactions between the yaw rate and drift/rudder angle through a simulation-based methodology. First, the hydrodynamic force and moment, including coupled derivatives, were obtained by computational fluid dynamics (CFD) simulations. The feasibility of CFD results were verified by comparing static drift/rudder simulations to vertical planar motion mechanism (VPMM) tests. Turning motion simulations were then performed by solving 2-degree-of-freedom (DOF) equations with CFD data. The turning radius, drift angle, advance, and tactical diameter were calculated. The results show good agreement with sea trial data and the effects on the turning characteristics of coupled interaction terms, especially between the yaw rate and drift angle.

• Earthquakes and Structures
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• 제23권1호
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• pp.1-11
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• 2022

This study implements a hybrid Genetic Algorithm to detect, locate, and quantify structural damage for multistory shear buildings using partial modal data. Measuring modal responses at multiple locations on a structure is both challenging and expensive in practice. The proposed method's objective function is based on the building's dynamic properties and can also be employed with partial modal information. This method includes initial residuals between the numerical and experimental model and a damage penalization term to avoid false damages. To test the proposed method, a numerical example of a ten-story shear building with noisy and partial modal information was explored. The obtained results were in agreement with the previously published research. The proposed method's performance was also verified using experimental modal data of an 8-DOF spring-mass system and a five-story shear building. The predicted results for numerical and experimental examples indicated that the proposed method is reliable in identifying the damage for multistory shear buildings.