• JSTS:Journal of Semiconductor Technology and Science
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• v.11 no.1
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• pp.1-5
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• 2011

To enter next process control, numerous approaches, including run-to-run (R2R) process control and fault detection and classification (FDC) have been suggested in semiconductor manufacturing industry as a facilitation of advanced process control. This paper introduces a novel type of optical plasma process monitoring system, called plasma eyes chromatic system (PECSTM) and presents its potential for the purpose of fault detection. Qualitatively comparison of optically acquired signal levels vs. process parameter modifications are successfully demonstrated, and we expect that PECSTM signal can be a useful indication of onset of process change in real-time for advanced process control (APC).

• The Journal of Korean Institute of Communications and Information Sciences
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• v.36 no.12B
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• pp.1509-1521
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• 2011

WfMC, which is one of the international standardization organizations leading the business process and workflow technologies, has been officially released the BPAF1.0 that is a standard format to record process instances' event logs according as the business process intelligence mining technologies have recently issued in the business process and workflow literature. The business process mining technologies consist of two groups of algorithms and their analysis techniques; one is to rediscover flow-oriented process-intelligence, such as control-flow, data-flow, role-flow, and actor-flow intelligence, from process instances' event logs, and the other has something to do with rediscovering relation-oriented process-intelligence like process-driven social networks and process-driven affiliation networks from the event logs. The current standardized format of BPAF1.0 aims at only supporting the control-flow oriented process-intelligence mining techniques, and so it is unable to properly support the relation-oriented process-intelligence mining techniques. Therefore, this paper tries to extend the BPAF1.0 so as to reasonably support the relation-oriented process-intelligence mining techniques, and the extended BPAF is termed BPAF2.0. Particularly, we have a plan to standardize the extended BPAF2.0 as not only the national standard specifications through the e-Business project group of TTA, but also the international standard specifications of WfMC.

• Korean Journal of Medicinal Crop Science
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• v.22 no.3
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• pp.223-230
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• 2014

This study was performed to enhance contents of low molecular ginsenoside using steaming and fermentation process in low quality fresh ginseng. For increase in contents of Rg2, Rg3, Rh2 and CK in low quality fresh ginseng, a steaming process was applied at $90^{\circ}C$ for 12 hr which was followed by fermentation process at Lactobacillus rhamnosus HK-9 incubated at $36^{\circ}C$ for 72 h. The contents of ginsenoside Rg1, Rb1, Rc, Re and Rd were decreased with the steaming associated with fermentation process but ginsenoside Rg2, Rg3, Rh2 and CK increased after process. It was found that under the steaming associated with fermentation process, low molecule ginsenosides such as Rg2, Rg3, Rh2 and CK were increased as 3.231 mg/g, 2.585 mg/g and 1.955 m/g and 2.478 mg/g, respectively. In addition, concentration of benzo[${\alpha}$]pyrene in extracts of the low quality fresh ginseng treated by the complex process was 0.11 ppm but it was 0.22 ppm when it was treated with the steaming process. This result could be caused by that the most efficiently breakdown of 1,2-glucoside and 1,4-glucoside linkage to backbone of ginsenosides by steaming associated with fermentation process. This results indicate that steaming process and fermenration process can increase in contents of Rg2, Rg3, Rh2 and CK in low quality fresh ginseng.

• Industry Promotion Research
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• v.1 no.2
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• pp.1-6
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• 2016

By using the high tensile steel plate (SPFH590) 1 Primary normal shear process clearance was studied through an experiment for the effect of the second shaving process in this study. Experiment result, Shaving process in the case of processed 15% of the Primary normal shear process clearance was some residual surface does not remove it completely. and Shaving process of shearing products by the general shearing process clearance of 10% it was found that the wider the size of shear surface. The shear surface of 93% occurred in case of the clearance of general shearing process is 10% and the Shaving clearance is 2%, The shear surface of 87% were to occur in case of the Shaving clearance is 3%.

• Journal of Environmental Science International
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• v.15 no.3
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• pp.193-201
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• 2006

Advanced oxidation processes involving $O_3/H_2O_2$ and $O_3/catalyst$ were used to compare the degradability and the effect of pH on the oxidation of 1,4-dioxane, Oxidation processes were carried out in a bubble column reactor under different pH. Initial hydrogen peroxide concentration was 3.52 mM in $O_3/H_2O_2$ process and 115 g/L (0.65 wt.%) of activated carbon impregnated with palladium was packed in $O_3/catalyst$ column. 1,4-dioxane concentration was reduced steadily with reaction time in $O_3/H_2O_2$ oxidation process, however, in case of $O_3/catalyst$ process, about $50{\sim}75%$ of 1,4-dioxane was degraded only in 5 minutes after reaction. Overall reaction efficiency of $O_3/catalyst$ was also higher than that of $O_3/H_2O_2$ process. TOC and $COD_{cr}$ were analyzed in order to examine the oxidation characteristics with $O_3/H_2O_2\;and\;O_3/catalyst$ process. The results of $COD_{cr}$ removal efficiency and ${\Delta}TOC/{\Delta}ThOC$ ratio in $O_3/catalyst$ process gave that this process could more proceed the oxidation reaction than $O_3/H_2O_2$ oxidation process. Therefore, it was considered that $O_3/catalyst$ advanced oxidation process could be used as a effective oxidation process for removing non-degradable toxic organic materials.

• Journal of the Korea Society of Computer and Information
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• v.25 no.12
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• pp.73-82
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• 2020

Most process date such as semiconductor and petrochemical processes, autocorrelation often exists between observed data, but when the existing SPC(Statistical process control) is applied to these processes, it is not possible to effectively detect the average change of the process. In this paper, when the average change of a certain size occurs in the process data following a specific time series model, the average of the residuals changes according to the passage of time, and the change pattern of the average is introduced around the ARMA(1,1) process. Based on this result, the reference value required in the design process of the CUSUM (Cumulative sum) control chart is appropriately considered by considering the type of the time series model of the process data of the CUSUM control chart that can detect small mean changes in the process and the width of the process mean change of interest. It was confirmed through simulation that it should be selected and used.

• Transactions of Materials Processing
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• v.31 no.1
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• pp.5-10
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• 2022

In multi-stage cold forging process, to enhance the productivity and product quality, in-site process monitoring technique by implanting sensors such as piezo-sensor and acoustic emission sensor has been continuously studied. For accurate analysis of the process, the selection of appropriate sensors and implantation positions are very important. Until now, in a multi-state forging machine, wedge parts located at the end of punch-set are used but it is difficult to analyze minute changes in die block-set. In this study, we also implanted sensors to the die part (die spacer) and compared signals from both sensors and found that sensing signals from die part showed enhanced process monitoring results.

• Communications for Statistical Applications and Methods
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• v.14 no.1
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• pp.141-146
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• 2007

In this paper, we consider a Box-Cox transformed threshold GARCH(1,1) process and find a sufficient condition under which the process is geometrically ergodic and has the ${\beta}$-mixing property with an exponential decay rate.

• Korean Chemical Engineering Research
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• v.50 no.6
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• pp.988-993
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• 2012

Energy and cost analysis of the preprocessing for carbon capture and storage transportation such as supercritical compression and liquefaction is done using chemical simulation model. Direct compression to supercritical phase (process 1-1), liquefaction and pumping (process 1-2), carbon dioxide compression and expansion as a refrigerant itself (process 2), usage of other refrigerant with compression and expansion (process 3-1), with absorption chiller (process 3-2), cascade refrigeration (process 3-2) have been simulated and evaluated. The specific cost is about 4 to 7 $/ton.

• Journal of Environmental Health Sciences
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• v.26 no.3
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• pp.69-75
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• 2000

This study was carried out to investigate the removal of nitrogen and phosphorus in municipal sewage according to the variation of volumetric ratio in the reactor. It also was performed to provide basic data necessary to the development and improvement of the process which is Anaerobic-Anoxic-Oxic(A2O). In the removal of BOD and COD, the best efficiency of the process showed in the condition of using the media, 1Q of internal recycle rate and 1:3:2 of the volumetric ratio in Anaerobic-Anoxic-Oxic process. In most cases, nitrogen and phosphorus removal efficiency of the process using the cilia media was superior to that of the process which didn't use the media. In the removal of T-N and T-P, the best efficiency of the process showed in the condition of using the media, 1Q of internal recycle rate and 1:3:2 of the volumetric ratio in Anaerobic-Anoxic-Oxic process.