• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.455-458
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• 2002

In recent years, precision positioning stage is demanded fur some industrial fields such as semi conductor lithography, ultra precision machining and fabricating of nano structure. In this research, precision multi-axis positioning stage, which consists of pzt actuator, flexure, and capacitance gauge, is designed and developed. The performance of it such as 3-axis positioning, characteristic of motion and resolution is verified.

• Journal of the Korean Magnetics Society
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• v.3 no.1
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• pp.29-33
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• 1993

Magnetoresistance was studied for the ferromagnetic tunneling junction in $Permalloy/Al_{2}O_{3}/Co$ prepared by evaporation in a vacuum of $1{\times}10^{-6}$Torr. We measured voltage-current characteristic and magnetic valve effect of prepared ferromagnetic tunneling junction sample. We investigated field-dependency of tunnel resistance by Wheat-stone bridge method and measured magnetic hysteresis curve by vibrating sample magnetometer. The tunneling is confirmed by measuring voltage-current characteristic. The hysteresis curve of magnetoresistance corresponds well with that of magnetization. The magnetoresistance ratio ${\Delta}R/R$ is 0.6% at room temperature.