• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.449-449
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• 2013

최근 반도체 소자의 집적회로는 점점 복잡해지고 있는 반면, 소자의 크기는 작아지고 있으며 그로 인해 패드의 크기가 작아지고 패드사이의 간격 또한 협소해지고 있다. 따라서 웨이퍼 단계에서 제조된 집적회로의 불량여부를 판단하기위한 검사 장비인 프로브카드(Probe Card)의 높은 집적도가 요구되고 있다. 하지만 기존의 MEMS 공법으로 제작되는 프로브 빔은 복잡한 제조 공정과 높은 생산비용, 낮은 집적도의 문제점을 가지고 있다. 본 연구에서는 이러한 문제점을 해결하기 위하여 간단한 제조 공정과 낮은 생산비용, 높은 집적도를 가지는 프로브 빔을 개발하기 위하여 절연절단 방식으로 BeCu (Beryllium-Copper) 프로브 빔을 제작하였다. 낮은 소비 전력으로 우수한 프로브 빔 어레이를 제작하기 위해서 가장 고려해야할 대상은 프로브 빔의 재료와 구조(형상)이다. 절연전단 방식으로 프로브 빔을 형성할 때 요구되는 Fusing current는 프로브 빔의 구조(형상)에 크게 영향을 받는다. 낮은 Fusing current는 소비 전력을 줄여주고, 절연절단으로 형성되는 프로브 빔의 단면(끝)을 날카롭게 하여 프로브 빔과 집적회로의 패드 간의 접촉 저항을 감소시킨다. 프로브 빔의 제작은 BeCu 박판을 빔 형태로 식각하여 제작하였으며, 실리콘 비아 홀(Via hole) 구조의 기판위에 정렬하여 soldering 공정을 통해 실리콘 기판과 BeCu 박판을 접합시켰다. 접합된 프로브 빔의 끝부분을 들어 올린 상태로 전류를 인가하여 stress free 상태로 만들어 내부 응력을 제거하였으며, BeCu 박판에 fusing current를 인가하여 BeCu 박판 프레임으로부터 제거를 하였다. 제작된 프로브 빔의 길이는 1.7 mm, 폭은 $50{\mu}m$, 두께는 $15{\mu}m$, 절단부의 단면적은 1$50{\mu}m^2$로 제작되었다. 그리고 프로브 빔의 절단부의 길이는 $50{\mu}m$ 부터 $90{\mu}m$까지 $10{\mu}m$ 증가시켜 제작되었다. 이후에 절연절단 공정에 요구되는 Fusing current를 측정하였고, 절연절단 후의 절단면의 형상을 SEM (Scanning Electron Microscope)장비를 통하여 확인하였다. 절단부의 길이가 $50{\mu}m$일 때 5.98A의 fusing current를 얻었으며, 절연절단 후 절단부 상태 또한 가장 우수했다. 본 연구에서 제안된 프로브 빔 제작 방법은 프로브카드 및 테스트 소켓(Test socket) 생산에 응용이 가능하리라 기대한다.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2014.11a
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• pp.27-28
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• 2014

투명전극이란 전기 전도도를 갖는 동시에 가시광선 영역에서 빛을 투과하는 성질을 가지는 소재이다. 일반적으로 가시광선 영역(380nm~780nm)에서 80%이상의 광 투과도를 가지며, 비저항이 $10^{-3}{\Omega}{\cdot}cm$ 이하, optical band gap 이 3.3 eV 이상인 물질을 TCO(Transparent Conducting oxide)라고 한다. 현재까지 국내의 TCO 관련 연구는 터치패널, 디스플레이, 태양전지 등 광전자분야에서 가장 널리 사용되고 있는 ITO(Sn:In2O3)에 치중되어 있으며, 관련 연구도 거의 디스플레이 맞춤형 연구개발이 주류를 이루어왔다. ITO가 전기전도성이 우수하고 동시에 가시광선 영역에서의 투과율도 80%이상으로 전기적, 광학적 특성이 우수하다는 장점을 가지고 있으나, In의 희소성으로 인한 고가격, 유독성, 접착력 문제 때문에 이를 대체하기 위해 제조원가가 ITO에 비하여 월등히 저렴하고 내화학성과 내마모성이 우수하면서도, 가시광선 영역에서의 광투과율이 80%이상으로 좋다는 $SnO_2$에 관한 연구가 활발히 진행되어 왔다. 적절한 dopant를 첨가하여 $SnO_2$자체의 높은 광학적 투과도를 유지하면서 전기전도성을 더 높일수 있고, 투명전극이 가져야 할 고온 안정성을 가지고 있으며 비독성이고 수소 플라즈마에 대한 내성이 더 클 뿐만 아니라 저온에서 성장이 가능하다. $SnO_2$의 전기 전도도를 높이기 위한 Al, In, Ga, B와 같은 3족 원소가 $SnO_2$의 n형 dopant로 널리 사용되고 있다. 그 중 Al은 반응성이 커서 박막 증착 중에 산화되기 쉬운 반면, 전기적 특성 및 광학적 특성의 향상을 이룰 수 있다. 본 연구에서는 Rf Sputtering법을 사용하여 quartz기판 위에 다층박막 형태의 투명전도막을 제작한 후, 열처리를 수행, 이에 의한 다층박막 내 계면간 상호확산 현상을 이용하여 투명 전도막의 특성변화를 관찰하였다. 박막의 구조적 특성은 XRD장비를 사용하여 분석하였으며, 전기적, 광학적 특성은 각각 표면저항기, 홀 측정 장비, 그리고 UV-VIS-NI를 사용하여 확인하였다.

• Tunnel and Underground Space
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• v.28 no.5
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• pp.387-399
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• 2018

Mine reclamation project is closely related to human's past mining activities and the current human's living environment. It is a reason for the national management. In order to efficiently carry out mine reclamation projects, a precise investigation and analysis of the underground space of the abandoned mine is required. Korea MINE RECLAMATION Corp. is developing a practical technology that is effective in investigating and actually measuring underground cavities. MIRECO EYE system is an exploration equipment for 3D digitization and figuration of underground cavities. As combining a laser, sonar and image acquisition technology, it enables access to information about inaccessible underground cavities and effective management of subsidence risk of mined area. and currently it is also utilized for various purposes in related areas such as investigating urban sinkholes. This article is precise numerical and geometric information analysis obtained through MIRECO EYE system.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.28 no.2C
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• pp.125-131
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• 2008

Ground stiffness(shear wave velocity) is one of the key parameters in geotechnical earthquake engineering. An In-situ seismic technique has its own advantages and disadvantages over the others in stiffness measurements. By combining the crosshole and seismic cone techniques and utilizing favourable features of bender elements, a new hybrid probe has been developed in order to enhance data quality and easiness of testing. The basic structure of the probe, called "MudFork" is a fork composed of two blades, on each of which source and receiver bender elements were mounted respectively. To evaluate the disturbance caused by the penetration of the probe, shear wave velocity measurements were carried out in the Kaolinite slurry in the laboratory. Finally, the probe was penetrated in coastal mud near Incheon, Korea, using SPT(standard penetration test)rods pushed with a routine boring machine and shear wave velocity measurements were carried out. The results were verified with data from laboratory and cone testing. The performance of the probe turns out to be excellent in terms of data quality and testing convenience.

• Korean Journal of Optics and Photonics
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• v.25 no.6
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• pp.334-339
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• 2014

In this paper, the optical properties of a miniature telecentric camera are studied analytically and experimentally. By means of optical properties, the luminous intensity of retro-reflection of a miniature telecentric optical system is investigated. First, from a simulation the theoretical value of the coefficient of luminous intensity of retro-reflection of a miniature telecentric system is estimated. Second, a miniature telecentric camera device is designed, and the value of the coefficient of luminous intensity of retro-reflection of the actual device is measured through experiment. From simulation and experiment, we found that both the estimated and observed values of the coefficient of luminous intensity of retro-reflection range from 0.002 to $0.03m^2/sr$ (P384200CPH: $0.0042-0.018m^2/sr$, P285200CPH: $0.0045-0.0297m^2/sr$, P321450S: $0.0021-0.00963m^2/sr$) at 1.4 to 4.9 arcminute. The results prove the significance of the mechanisms used to design the miniature telecentric camera, and the experimental method. Accordingly, with these significant results, this study contributes to the development of theory and practice in optical engineering science.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.11 no.9
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• pp.3161-3167
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• 2010

Hall sensors of BLDC(brushless DC) motor are used to detect a position information for a control mechanism, which implements an algorithm for velocity and position control. Actual azimuth and altitude were measured to evaluate a control precision. The measurement revealed comparatively good accuracy that the measured values were $2.02^{\circ}$ and $1.01^{\circ}$ respectively, and the maximum error falls within $1.86^{\circ}$. The developed monitoring system of photovoltaic generation plants is a LCU(Local Control Unit) based on an integrated monitoring system which supports 1:N method for multiple simultaneous connections, remote control and real-time system state monitoring.

• Journal of the Korean Society for Railway
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• v.11 no.1
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• pp.54-60
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• 2008

In the trackbed design using elastic multilayer model, the stress-dependent resilient modulus $(E_R)$ is an important input parameter, that is, reflects substructure performance under repeated traffic loading. However, the evaluation method for resilient modulus using repeated loading triaxial test is not fully developed for practical purpose, because of costly equipment and the significantly fluctuated values depending on the testing equipment and laboratory personnel. The this study, the paper will present an indirect method to estimate the resilient modulus using dynamic properties. The resilient modulus of crushed stone, which is the typical material of sub-ballast, was calculated with the measured dynamic properties and the range of stress level of the sub-ballast, and approximated with the power model combined with bulk and deviatoric stresses. The resilient modulus of coarse grained material decreases with increasing deviatoric stress at a confining pressure, and increases with increasing bulk stress. Sandy soil (SM classified from Unified Soil Classification System) of subgrade was also evaluated and best fitted with the power model of deviatoric stress only.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.15 no.4
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• pp.243-248
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• 2022

The purpose of this paper is to etching SUS MASK by adding an additive (F300) to FeCl3. The equipment used in the experiment is a self-made automatic liquid management system. The automatic liquid management system is a device capable of controlling the Oxidation Reduction Potential (ORP) and specific gravity in real time and supplying FeCl3 and additives in a quantitative manner. SUS MASK was etched in units from 10 sheets up to 200 sheets for 1 minute. It was confirmed that when the initial SUS MASK was 10 sheets, the ORP value started with 628 mV and measured at 611 mV from the time of 40 sheets being injected, and maintained close to 610 mV up to 200 sheets. The specific gravity was maintained near 1.640. And the SUS MASK was measured close to 0.4 mm from 50 sheets to 200 sheets. The experimental conditions of ORP had a specific gravity of 610 mV, 1.463, an etching pressure of 3.0 kg/cm2, an additive (F300) ratio of 1.2%, and the hole size was measured by up to 200 sheets of 10 sheets at once etching. As a result, the diameter approached 0.4 mm from 20 sheets. Even if the number of SUS MASK was increased, the ORP and specific gravity were well controlled, and it was confirmed that the experimental target value was close to 0.4 mm.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.36 no.6
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• pp.655-662
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• 2012

Gas leakage in an oil refinery causes damage to the environment and unsafe conditions. Therefore, it is necessary to develop a technique that is able to detect the location of the leakage and to filter abnormal gas-leakage signals from normal background noise. In this study, the adaptation filter of the finite impulse response (FIR) least mean squares (LMS) algorithm and a cross-correlation function were used to develop a leakage-predicting program based on LABVIEW. Nitrogen gas at a high pressure of 120 kg/$cm^2$ and the assembled equipment were used to perform experiments in a reverberant chamber. Analysis of the data from the experiments performed with various hole sizes, pressures, distances, and frequencies indicated that the background noise occurred primarily at less than 1 kHz and that the leakage signal appeared in a high-frequency region of around 16 kHz. Measurement of the noise sources in an actual oil refinery revealed that the noise frequencies of pumps and compressors, which are two typical background noise sources in a petrochemical plant, were 2 kHz and 4.5 kHz, respectively. The fact that these two signals were separated clearly made it possible to distinguish leakage signals from background noises and, in addition, to detect the location of the leakage.

• Korean Chemical Engineering Research
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• v.47 no.6
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• pp.715-719
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• 2009

The phase change electrode board for the bio-information detection through electrical property response of phase change material was developed in this study. We manufactured the electrode board using Aluminum first that is widely used in conventional semiconductor device process. Without further treatment, these aluminum electrodes tend to contain voids in PETEOS(plasma enhanced tetraethyoxysilane) material that are easily detected by cross-sectional SEM(Scanning Electron Microscope). The voids can be easily attacked and transformed into holes in between PETEOS and electrodes after etch back and washing process. In order to resolve this issue of Al electrode board, we developed a electrode board manufacturing method using low resistivity TiN, which has advantages in terms of the step-coverage of phase change($Ge_2Sb_2Te_5$, GST) thin film as well as thermodynamic stability, without etch back and washing process. This TiN material serves as the top and bottom electrode in PRAM(Phase-change Random Access Memory). The good connection between the TiN electrode and GST thin film was confirmed by observing the cross-section of TiN electrode board using SEM. The resistances of amorphous and crystalline GST thin film on TiN electrodes were also measured, and 1000 times difference between the amorphous and crystalline resistance of GST thin film was obtained, which is well enough for the signal detection.