• Title/Summary/Keyword: 형상 측정기

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Multiple-Point-Diffraction Interferometer : Error Analysis and Calibration (거친 표면 형상측정을 위한 점광원 절대간섭계의 오차해석과 시스템 변수의 보)

  • Kim, Byoung-Chang;Kim, Seung-Woo
    • Korean Journal of Optics and Photonics
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    • v.16 no.4
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    • pp.361-365
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    • 2005
  • An absolute interferometer system with multiple point-sources is devised for tile 3-D measurement of rough surface profiles. The positions of the point sources are determined to be the system parameters that influence the measurement accuracy, so they are calibrated precisely prior to performing actual measurements. For the calibration, a CCD camera composed of a two-dimensional array of photo-detectors was used. Performing optimization of the cost function constructed with phase values measured at each pixel on the CCD camera, the position coordinates of each point source is precisely determined. Measurement results after calibration performed for the warpage inspection of chip scale packages (CSPs) demonstrate that the maximum discrepancy is 9.8 mm with a standard deviation o( 1.5 mm in comparison with the test results obtained by using a Form Taly Surf instrument.

Development of a Tensile Force Measurement Device for Long-term (인장력 장기 측정기 개발에 관한 연구)

  • Shin, Kyung Jae;Lee, Swoo Heon
    • Journal of Korean Society of Steel Construction
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    • v.18 no.6
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    • pp.759-768
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    • 2006
  • The turn-buckle inserted between tension members is a device adjusting a tensile force in tension member. However, the measurement of designed tensile force is impossible and the tensile force is determined based on the experience of field workers. The conventional turn-buckle might be used without any adjustment even though the tensile force has been changed for long term. To improve the disadvantages of conventional turn-buckles a turn-buckle which is measurable the tensile force is developed. In this study, the displacement to the lateral direction is induced by the deformation of curved elements if the tensile force is applied to the new type of turn-buckle that the straight elements are slightly curved. The total lateral displacement could be measured by using the micrometer or vernier-calipers. Trial devices for a measurable turn-buckle were made and tested. An theoretical study was also conducted to show the applicability, and parametric studies were conducted. The appropriate shape and capacity were determined by the parametric study.

펄스 직류 $BCl_3$ 플라즈마를 이용한 GaAs와 AlGaAs의 건식식각

  • Lee, Seong-Hyeon;Park, Dong-Gyun;Park, Ju-Hong;Choe, Gyeong-Hun;Song, Han-Jeong;Lee, Je-Won
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.220-220
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    • 2010
  • 펄스 직류 $BCl_3$ 플라즈마를 이용하여 GaAs와 AlGaAs의 건식식각을 연구하였다. 공정의 주요 변수는 펄스 직류 전압(350~550V), 펄스 직류 시간($0.4{\sim}1.2{\mu}sec$.), 펄스 직류 주파수(100~250kHz)이었다. 식각 실험 후 샘플의 식각률, 식각 선택도, 표면 형상을 비교, 분석하였다. 또한, 광학 발광 분석기(Optical Emission Spectroscopy)를 이용하여 식각하는 동안 플라즈마 방전 특성을 분석하였다. 표면 단차 측정기(Alpha-step IQ, Tencor)로 식각 깊이를 측정해 식각률을 계산하였다. 표면 거칠기 또한 단차 측정기의 표면 거칠기 프로그램을 이용하여 분석하였다. 식각 벽면과 표면 상태는 주사전자현미경(Field-emission scanning electron microscopy)을 이용하여 관찰하였다. 분석 결과는 1) 펄스 직류의 전압이 증가하면 전극에 걸리는 파워가 올라가고 GaAs와 AlGaAs의 식각률도 증가하였다. 2) 76 mTorr 공정 압력, $0.7{\mu}sec$. 펄스 직류 시간과 200 kHz 주파수 일 때 10 sccm $BCl_3$ 펄스 직류 플라즈마에서 GaAs와 AlGaAs 둘 다 약 $0.4{\mu}m/min$ 이상의 식각 속도를 보여주었다. 3) 식각 선택도는 펄스 직류의 전압이 높아지면 증가하였고, 펄스 직류 주파수의 증가도 공정 파워와 GaAs와 AlGaAs의 식각률을 증가시켰다. 4) 그러나 펄스 직류 주파수가 150kHz 이하일 때에는 GaAs와 AlGaAs가 거의 식각되지 않았다. 5) 표면 거칠기는 펄스 직류 주파수가 증가하면 미세하게 좋아졌고 플라즈마는 펄스 직류 주파수가 100~250kHz 일 때 생성되었다. 6) 펄스 직류 시간의 증가는 공정 파워, 식각률, 식각 선택도 모두의 증가를 가져왔다. 7) 광학발광분석기(OES) 데이타는 $BCl_3$ 플라즈마에서 넓은 범위(450~700nm)에서의 염소(Cl) 분자 피크를 나타내었다. 8) 전자 현미경 사진은 펄스 직류 전압이 400 V보다 550 V 일 때보다 더 이방성(Anisotropic)측면과 부드러운 표면을 나타냈지만, 조금의 홈(Trench)이 발견되었다. 결론적으로 펄스 직류 $BCl_3$ 플라즈마는 GaAs와 AlGaAs의 건식식각에서 우수한 결과를 나타냈었다.

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Effects of Port Shape on Steady Flow Characteristics in an SI Engine with Semi-Wedge Combustion Chamber (2) - Velocity Distribution (2) (반 쐐기형 연소실을 채택한 SI 기관에서 포트형상이 정상유동 특성에 미치는 영향 (2) - 유속분포 (2))

  • Yoon, Inkyoung;Ohm, Inyong
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.41 no.2
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    • pp.97-107
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    • 2017
  • This study is the second investigation on the steady flow characteristics of an SI engine with a semi-edge combustion chamber as a function of the port shape with varying evaluation positions. For this purpose, the planar velocity profiles were measured from 1.75B, 1.75 times of bore position apart from the bottom of head, to 6.00B positions using particle - image velocimetry. The flow patterns were examined with both a straight and a helical port. The velocity profiles, streamlines, and centers of swirl were almost the same at the same valve lift regardless of the measuring position, which is quite different from the case of the pent-roof combustion chamber. All the eccentricity values of the straight port were out of distortion criterion 0.15 through the lifts and the position. However, the values of the helical port exceeded the distortion criterion by up to 4 mm lift, but decreased rapidly above the 3.00B position and the 5 mm lift. There always existed a relative offset effect in the evaluation of the swirl coefficient using the PIV method due to the difference of the ideal impulse swirl meter velocity profile assumption, except for the cylinder-center-base estimation that was below 4 mm of the straight port. Finally, it was concluded that taking the center as an evaluation basis and the assumption about the axial velocity profile did not have any qualitative effect on swirl evaluation, but affected the value owing to the detailed profile.

Land Preview System Using Laser Range Finder based on Heave Estimation (Heave 추정 기반의 레이저 거리측정기를 이용한 선행지형예측시스템)

  • Kim, Tae-Won;Kim, Jin-Hyoung;Kim, Sung-Soo;Ko, Yun-Ho
    • Journal of the Institute of Electronics Engineers of Korea SC
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    • v.49 no.1
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    • pp.64-73
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    • 2012
  • In this paper, a new land preview system using laser range finder based on heave estimation algorithm is proposed. The proposed land preview system is an equipment which measures the shape of forward topography for autonomous vehicle. To implement this land preview system, the laser range finder is generally used because of its wide measuring range and robustness under various environmental condition. Then the current location of the vehicle has to be known to generate the shape of forward topography and sensors based on acceleration such as IMU and accelerometer are generally utilized to measure heave motion in the conventional land preview system. However the drawback to these sensors is that they are too expensive for low-cost vehicle such as mobile robot and their measurement error is increased for mobile robot with abrupt acceleration. In order to overcome this drawback, an algorithm that estimates heave motion using the information of odometer and previously measured topography is proposed in this paper. The proposed land preview system based on the heave estimation algorithm is verified through simulation and experiments for various terrain using a simulator and a real system.

Spring-back in GFR / CFR Unsymmetric Hybrid Composite Materials (유리섬유 / 탄소섬유 강화 비대칭 하이브리드 복합재료의 스프링 백)

  • Jung Woo-Kyun;Ahn Sung-Hoon;Won Myung-Shik
    • Composites Research
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    • v.18 no.6
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    • pp.1-8
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    • 2005
  • The fiber-reinforced composite materials have been advanced for various applications because of their excellent mechanical and electromagnetic properties. On their manufacturing processes, however, thermo-curing inherently produces the undesired thermal deformation mainly from temperature drop from the process temperature to the room temperature, so called spring-back. The spring-back must be understood especially in the hybrid composites in order to design and fabricate desired shape. In this research, (glass fiber / epoxy) + (carbon fiber / epoxy) unsymmetric hybrid composites were fabricated under various conditions such as cure cycle, laminate thickness, stacking sequence and curing sequence. Coupons were made and spring-back were measured using coordinate measuring machine (CMM). Using the Classical Lamination Theory (CLT) and finite element analysis (ANSYS), the behavior of spring-back were predicted and compared with the experimental data. The results from CLT and FEA agreed well with the experimental data. Although, the spring-back could be reduced by lowering curing temperature, at any case, the spring-back could not be removed completely.

ITO, PR, 격벽 재료의 레이저 직접 미세가공

  • Lee, Cheon;Lee, Gyung-Chul;Ahn, Min-Young;Lee, Hong-Gyu
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.80-80
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    • 1999
  • 플라즈마 디스플레이 패널(PDP)의 공정을 간단히 하기 위하여 포토레지스트, ITO, 격벽재료를 Ar+ laser(λ-514 nm, CW)와 Nd:YAG laser(λ=532, 266nm, pulse)로 직접 패터닝 하였다. 레이저에 의한 포토레지스트의 패턴결과, 아르곤 이온 레이저의 포토레지스트 가공의 반응 메카니즘은 레이저 빔의 열에 의한 시료 표면의 국부적인 온도상승에 의한 용융작용이며, 그 결과 식각 후 형성된 패턴의 단면 모양도 레이저빔의 profile과 같은 가우시안 형태를 나타낸다. Nd:YAG 레이저의 4고조파(532nm)를 이용한 경우 200$\mu\textrm{m}$/sce의 주사속도에서 포토레지스트를 패턴하기 위한 임계에너지(threshold energy fluence) 값은 25J/cm2이며, 약 40J/cm2의 에너지 밀도에서 하부기판의 손상이 발생하기 시작하였다. 글미 1은 Nd:YAG 레이저 4고조파를 이용하여 포토레지스트를 식각한 경우 SEM 표면사진(위)과 단차특정기에 의한 단면형상(아래)이다. ITO 막의 레이저에 의한 직접 패턴 결과, ITO 막은 레이저 펄스에 의한 급속 가열 및 증발에 의한 메커니즘으로 식각이 이루어지며, 레이저 파장에 따른 광흡수 정도의 차이에 의해 2고조파 (532nm)에서 ITO 막의 가공 품질이 4고조파(266nm)에 비해 우수하며 패턴의 폭도 출력에 따라 제어가 용이하였다. 그림 2는 Nd:YAG 레이저 2고조파를 이용하여 ITO를 식각한 경우 SEM표면 사진(위)과 단차측정기에 의한 단면형상(아래)이다. 격벽 재료의 레이저에 의한 직접 패턴 결과, Ar+ 레이저(514nm)는 출력 밀도 32NW/cm2에서 격벽을 유리 기판의 경계면까지 식각하였다. Nd:YAG 레이저(532nm)는 laser fluence가 6.5mJ/cm2에서 격벽을 식각하기 시작하였으며, 19.5J/cm2에서 유리기판의 rudraus(격벽 두께 130$\mu\textrm{m}$)까지 식각하였다.

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Realistic 3D model generation of a real product based on 2D-3D registration (2D-3D 정합기반 실제 제품의 사실적 3D 모델 생성)

  • Kim, Gang Yeon;Son, Seong Min
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.14 no.11
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    • pp.5385-5391
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    • 2013
  • As on-line purchases is activated, customers' demand increases for the realistic and accurate digital information of a product design. In this paper, we propose a practical method that can generate a realistic 3D model of a real product using a 3D geometry obtained by a 3D scanner and its photographic images. In order to register images to the 3D geometry, the camera focal length, the CCD scanning aspect ratio and the transformation matrix between the camera coordinate and the 3D object coordinate must be determined. To perform this 2D-3D registration with consideration of computational complexity, a three-step method is applied, which consists of camera calibration, determination of a temporary optimum translation vector (TOTV) and nonlinear optimization for three rotational angles. A case study for a metallic coated industrial part, of which the colour appearance is hardly obtained by a 3D colour scanner has performed to demonstrate the effectiveness of the proposed method.

Experimental Study on Mixing Efficiency of Exhaust Gas and Reductant According to SCR Mixer Shape (SCR 믹서형상에 따른 배기가스와 환원제 혼합 효율에 관한 실험적 연구)

  • Choe, Munseok
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.22 no.3
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    • pp.74-79
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    • 2021
  • This study examined the mixing efficiency of exhaust gas and urea according to the mixer shape in the SCR system. For the experiment, an SCR simulation system was manufactured, and a uniformity detector was attached to the catalyst location to measure the uniformity. The experiment was conducted by setting the exhaust-gas flow rate, temperature, mixer type, and catalyst distance as variables. The experimental results confirmed the swirl angle analysis, urea number distribution, and uniformity. The swirl angle experiment of Models A and B confirmed that the swirl angle of Model A was formed approximately 7 to 8 degrees higher over the entire RPM range. When there was no mixer in the SCR system, the urea and water were concentrated to one side. Mixer Model A showed an even distribution overall, and Model B showed a slightly concentrated tendency at the beginning but then showed a stable distribution of urea. The mixing efficiency of 90%, which was the uniformity target, could be satisfied in Model A and Model B. In particular, Model A showed excellent results that satisfied 90% efficiency at 10 cm of the catalyst position.

Evaluation of Ultrasonic Multiple Scattering Method to Improve the Accuracy of Fine Dust Measurement (비산먼지 측정 정확도 개선을 위한 시뮬레이션 초음파 다중 산란 알고리즘 검증)

  • Woo, Ukyong;Choi, Hajin
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.24 no.6
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    • pp.119-128
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    • 2020
  • An ultrasonic multiple scattering simulation using cross-section of fine dust particles were proposed. These days, along with awareness of air pollution, social interest in fine dust is increasing. In the construction field, awareness of fine dust is increasing, and research on preparing various countermeasures is underway. The light scattering method fine dust meter currently in use is affected by environmental factors such as relative humidity, and reliability problems in terms of accuracy are continuously reported. However, the transmission of ultrasonic waves can directly reflect the physical change of the medium based on the mechanical wave. Using these advantages of ultrasonic waves, fine dust measurement simulation was performed using the scattering cross section and ultrasonic multiple scattering theory. The shape data of the fine dust particles were collected using a SEM (Scanning Electron Microscope), and a cross-section according to the fine dust particles was derived through numerical analysis. As a result of signal processing, the error for the number density corresponding to each cross-section is minimum 19, maximum 3455.