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http://dx.doi.org/10.3807/KJOP.2005.16.4.361

Multiple-Point-Diffraction Interferometer : Error Analysis and Calibration  

Kim, Byoung-Chang (Department of Mechanical Engineering and Automation, Kyungnam University)
Kim, Seung-Woo (Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
Publication Information
Korean Journal of Optics and Photonics / v.16, no.4, 2005 , pp. 361-365 More about this Journal
Abstract
An absolute interferometer system with multiple point-sources is devised for tile 3-D measurement of rough surface profiles. The positions of the point sources are determined to be the system parameters that influence the measurement accuracy, so they are calibrated precisely prior to performing actual measurements. For the calibration, a CCD camera composed of a two-dimensional array of photo-detectors was used. Performing optimization of the cost function constructed with phase values measured at each pixel on the CCD camera, the position coordinates of each point source is precisely determined. Measurement results after calibration performed for the warpage inspection of chip scale packages (CSPs) demonstrate that the maximum discrepancy is 9.8 mm with a standard deviation o( 1.5 mm in comparison with the test results obtained by using a Form Taly Surf instrument.
Keywords
Point light source; Absolute Interferometer; Rough surface profile; Profilometry; Calibration;
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