• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.88-88
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• 2011

ZnO는 직접 천이형 반도체로써, 상온에서 3.4eV에 해당하는 띠틈을 가지고 있다. 뿐만 아니라 60meV의 큰 엑시톤 결합에너지를 가지고 있어 단파장 광전 소자 영역의 LED(Light Emitting Diode)나 LD(Laser Diode)에 널리 사용되고 있다. 하지만 일반적으로 격자틈새 Zn(Zni2+)이온이나 O 빈자리(V02+)이온과 같은 자연적인 도너 이온이 존재하여 n-형 전도성을 나타낸다. 그러므로 ZnO계 LED와 LD의 개발에 있어서 가장 중요한 연구 과제는 재현성 있고 안정된 고농도의 p-형 ZnO박막을 성장시키는 것이다. 하지만, 자기보상효과나 얕은 억셉터 준위, 억셉터의 낮은 용해도로 인하여 어려움을 가지고 있다. 본 연구에서는 고품질의 p-형 ZnO박막을 제작하기 위해 AlN를 도핑시킨 ZnO박막을 RF 마그네트론 스퍼터링 법을 이용하여 Ar과 O2분위기에서 성장시켰다. ZnO와 AlN타겟을 동시에 사용하였으며, ZnO타겟에 걸어준 RF 파워는 80W, AlN타겟에 걸어준 RF 파워는 5~20W로 변화시켰다. 박막의 전기적, 광학적 특성은 XPS (X-ray Photoelectron Spectroscopy), REELS (Reflection Electron Energy Loss Spectroscopy), XRD (X-ray Diffraction), SIMS (Secondary Ion Mass Spectrometry), AES (Auger Electron Spectroscopy), Hall measurement를 이용하여 연구하였다. XPS측정결과, AlN를 도핑시킨 ZnO박막의 Zn2p3/2와 O1s피크는 undoped ZnO박막의 피크보다 낮은 결합에너지에서 측정되었다. 모든 박막이 결정화 되었으며, (002)방향으로 우선적으로 성장된 것을 확인할 수 있었다. 홀 측정 결과, 기판을 $200^{\circ}C$로 가열하면서 성장시킨 박막이 p-형을 나타내었으며, 비저항(Resistivity)이 $5.51{\times}10^{-3}{\Omega}{\cdot}m$, 캐리어 농도(Carrier Concentration)가 $1.96{\times}1018cm^{-3}$, 이동도(Mobility)가 $481cm^2$/Vs이었다. 또한 QUEELS -Simulation에 의한 광학적 특성분석 결과, 가시광선영역에서 투과율이 90%이상으로 투명전자소자로의 응용이 가능하다는 것을 보여주었다.

• Journal of the Microelectronics and Packaging Society
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• v.26 no.3
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• pp.51-57
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• 2019

To protect the Cu surface from oxidation in air, a two-step plasma process using Ar and $N_2$ gases was studied to form a copper nitride passivation as an anti-oxidant layer. The Ar plasma removes contaminants on the Cu surface and it activates the surface to facilitate the reaction of copper and nitrogen atoms in the next $N_2$ plasma process. This study investigated the effect of Ar plasma on the formation of copper nitride passivation on Cu surface during the two-step plasma process through the full factorial design of experiment (DOE) method. According to XPS analysis, when using low RF power and pressure in the Ar plasma process, the peak area of copper oxides decreased while the peak area of copper nitrides increased. The main effect of copper nitride formation in Ar plasma process was RF power, and there was little interaction between plasma process parameters.

• Journal of the Korean Society for Marine Environment & Energy
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• v.17 no.2
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• pp.146-152
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• 2014

Design procedure of WEC (wave energy converter) using the heaving motion of a floating cylinder-type buoy coupled with LEG (linear electric generator) system is introduced. It is seen that the maximum power can actually be obtained at the optimal conditions ($c_{PTO}=b_T$, ${\omega}={\omega}_N$). Then, based on the developed theory, several design strategies are proposed to further enhance the maximum PTO (power take off), which includes the intentional mismatching with the heave natural frequency, which is 15% higher value than the peak frequency of input velocity spectrum. By using the intentional mismatching strategy, the generated power is actually increased and the corresponding draft as well as the required PTO damping value is significantly reduced, which is a big advantage in manufacturing the WEC with practical LEG (linear electric generator) system.

• Journal of Advanced Marine Engineering and Technology
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• v.30 no.5
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• pp.629-635
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• 2006

Manufacture of motor by laser has been studying realization that was demands on market for lightening and miniaturization. Moreover. early in the 1980s. manufacture of parts for automobiles by laser welding was already successfully introduced. The purpose of this study was to develop production technology of the high quality laminated stator core for motor by pulsed Nd:YAG laser heat source. In the event of adjusting defocus and voltage to control humping in laser welding of the laminated core. sound bead could be obtained. but deep penetration was not. Therefore. explosive evaporating plasma was controlled by adjustment of peak power on pulse width. Particularly, because explosive evaporating plasma induced high peak power, made molten metal in keyhole scatter. a suitable adjustment of peak power was required to obtain sound bead. As a results of experiment. sound bead and deep penetration could be obtained.

• The Journal of the Acoustical Society of Korea
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• v.19 no.5
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• pp.35-40
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• 2000

In this paper, the relation between the radiated sound and the vibration due to piezoelectric ESWL(Extracorporeal Shock Wave Lithotripter) is examined and the results of the experiments are represented. Next, the relation between the focal point and the vibration of the objects is examined. The same experiments with the objects that can be broken are done and the relation between the vibration and the break efficiency of the phantom is experimentally investigated. These results show that the relativity between the power of the peak frequency and the break efficiency can be confirmed.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.220-220
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• 2010

펄스 직류 $BCl_3$ 플라즈마를 이용하여 GaAs와 AlGaAs의 건식식각을 연구하였다. 공정의 주요 변수는 펄스 직류 전압(350~550V), 펄스 직류 시간($0.4{\sim}1.2{\mu}sec$.), 펄스 직류 주파수(100~250kHz)이었다. 식각 실험 후 샘플의 식각률, 식각 선택도, 표면 형상을 비교, 분석하였다. 또한, 광학 발광 분석기(Optical Emission Spectroscopy)를 이용하여 식각하는 동안 플라즈마 방전 특성을 분석하였다. 표면 단차 측정기(Alpha-step IQ, Tencor)로 식각 깊이를 측정해 식각률을 계산하였다. 표면 거칠기 또한 단차 측정기의 표면 거칠기 프로그램을 이용하여 분석하였다. 식각 벽면과 표면 상태는 주사전자현미경(Field-emission scanning electron microscopy)을 이용하여 관찰하였다. 분석 결과는 1) 펄스 직류의 전압이 증가하면 전극에 걸리는 파워가 올라가고 GaAs와 AlGaAs의 식각률도 증가하였다. 2) 76 mTorr 공정 압력, $0.7{\mu}sec$. 펄스 직류 시간과 200 kHz 주파수 일 때 10 sccm $BCl_3$ 펄스 직류 플라즈마에서 GaAs와 AlGaAs 둘 다 약 $0.4{\mu}m/min$ 이상의 식각 속도를 보여주었다. 3) 식각 선택도는 펄스 직류의 전압이 높아지면 증가하였고, 펄스 직류 주파수의 증가도 공정 파워와 GaAs와 AlGaAs의 식각률을 증가시켰다. 4) 그러나 펄스 직류 주파수가 150kHz 이하일 때에는 GaAs와 AlGaAs가 거의 식각되지 않았다. 5) 표면 거칠기는 펄스 직류 주파수가 증가하면 미세하게 좋아졌고 플라즈마는 펄스 직류 주파수가 100~250kHz 일 때 생성되었다. 6) 펄스 직류 시간의 증가는 공정 파워, 식각률, 식각 선택도 모두의 증가를 가져왔다. 7) 광학발광분석기(OES) 데이타는 $BCl_3$ 플라즈마에서 넓은 범위(450~700nm)에서의 염소(Cl) 분자 피크를 나타내었다. 8) 전자 현미경 사진은 펄스 직류 전압이 400 V보다 550 V 일 때보다 더 이방성(Anisotropic)측면과 부드러운 표면을 나타냈지만, 조금의 홈(Trench)이 발견되었다. 결론적으로 펄스 직류 $BCl_3$ 플라즈마는 GaAs와 AlGaAs의 건식식각에서 우수한 결과를 나타냈었다.

• Fire Science and Engineering
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• v.23 no.5
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• pp.153-160
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• 2009

This study aims to review the propagation characteristics of fire alarm sound in building through computer simulation. In order to achieve this goal, the sound power level of existing three different emergency alarms were measured in an anechoic chamber. Sound power level of alarm bell was 98.6dB and electronic-siren speaker was 95.7dB, and electronic-siren phon was 101.8dB at the voltage of DC 24V in the condition of anechoic chamber. As the results of acoustic simulation, it was shown that sound levels at the corridor of the building were relatively high and even. But, there were large difference in sound level at all the frequency bands between corridor and lecture rooms. This mean that alarm sound couldn't be recognized sometimes in lecture rooms. Through the computer simulation, the propagation characteristics of fire alarm sound could be forecasted and compared due to plans of buildings.

• Journal of the Korean Society for Marine Environment & Energy
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• v.18 no.4
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• pp.291-297
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• 2015

The wave spectrum was generated from wave data measured at the Chagwi-do site in Jeju, where a 10MW class floating wave-offshore wind hybrid power generation system will be installed. The latching control technology (Sheng et al.[2015]) was applied in order to improve the extracted power from WEC (Wave Energy Converter), which is heaving in corresponding irregular waves. The peak period as a representative value of irregular waves was used when we determined the latching duration. From the numerical results in the time-domain analysis, the latching control technology can significantly improve the extracted power about 50%.

• Journal of Navigation and Port Research
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• v.41 no.1
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• pp.1-8
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• 2017

The estimation of non-linear ship motion is one of the most important issues in recent studies of ship stability. In this paper, bispectral analysis and bicoherence analysis were introduced in order to analyze the non-linear ship motion. In addition to the previously observed non-linear pitching motion in following seas, this study observed the non-linear phase coupling of pitching motion in following & quartering seas, and starboard beam seas. By comparing phase coupling between each frequency quantitatively via the bicoherence analysis, it was confirmed that non-linear phase coupling was much stronger in frequency regions other than the peak frequencies of a power spectrum. Furthermore, it was found out that the results of bicoherence calculation were analagous to each other, although the different normalization methods were applied.

• The Journal of the Korea institute of electronic communication sciences
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• v.17 no.5
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• pp.767-774
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• 2022

In this paper raw spectrum data were analyzed to suggest the moving forward of performance evaluation and quality control of wind profilers of four manufacturers operating in South Korea. For the analysis, the profile of the spectrum averaged by season and the profile of four statistical values (minimum, average, median, and maximum) calculated by Power Spectrum Density (PSD) were used. The quality of spectrum data was the best for LAP-3000, followed by YKJ3, PCL-1300, and CLC-11-H. In Cheorwon and Chupungnyeong, where PCL-1300 was installed, the variability of the spectrum due to ground clutter and non-meteorological signals was large, so ground clutter removal and signal processing such as moving average and multi-peak were required. In Gunsan and Paju, where CLC-11-H was installed, DC (Direct Current) bias and propagation folding were found, so it is necessary to remove the DC bias and limit the effective altitude for observation.