• Korean Journal of Optics and Photonics
• /
• v.12 no.4
• /
• pp.334-338
• /
• 2001

A Fizeau interferometer without beam splitter was constructed. Single-mode optical fiber was used as a spherical wave source and the face of fiber end was polished and coated to be a reflecting surface. The reflecting surface was angled so that interference fringe could be detected by CCD camera. Beam splitter in front of a spherical wave source could distort the wave front and that was one of the component error sources. With the proposed configuration there was no need to place beam splitter in the system. Improvement of phase measuring accuracy was evaluated quantitatively by comparing the result of this setup with that of a conventional Fizeau interferometer. Wave front of the angled end-face optical fiber source was also measured to verify its sphericity by PS/PDI (Phase Shifting/Point Diffraction Interferometer). The principle of this technique was presented and the experimental results and its applications were discussed. ussed.

• Korean Journal of Optics and Photonics
• /
• v.34 no.1
• /
• pp.22-30
• /
• 2023

The use of segmented mirrors is one of the ways to make the primary mirror of a spaceborne satellite larger, where several small mirrors are combined into a large monolithic mirror. To align multiple segmented mirrors as one large mirror, there must be no discontinuity in the x, y-axis (tilt) and axial alignment error (piston) between adjacent mirrors. When the tilt and piston are removed, we can collect the light in one direction and get an expected clear image. Therefore, we need a precise wavefront sensor that can measure the alignment error of the segmented mirrors in nm scale. The tilt error can be easily detected by the point spread image of the segmented mirrors, while the piston error is hard to detect because of the absence of apparent features, but makes a downgraded image. In this paper we used an optical testing interferometer such as a Fizeau interferometer, which has various advantages when aligning the segmented mirror on the ground, and focused on measuring the axial displacement error of a segmented mirror as the basic research of measuring the piston errors between adjacent mirrors. First, we calculated the relationship between the axial displacement error of the segmented mirror and the surface defocus error of the interferometer and verified the calculated formula through experiments. Using the experimental results, we analyzed the measurement uncertainty and obtained the limitation of the Fizeau interferometer in detecting axial displacement errors.

• Proceedings of the Optical Society of Korea Conference
• /
• 2001.02a
• /
• pp.88-89
• /
• 2001

작은 영역에서 고정밀도의 가공과 측정을 필요로 했던 과거와는 달리 점점 그 영역은 확대되고 있고 정밀도 또한 그에 못지 않게 높은 사양을 요구하고 있다. 노광 장비를 구성하는 많은 광학 렌즈와 미러의 경우 웨이퍼의 크기가 커지면서 영역은 넓어지고 광원의 파장이 짧아지면서 요구되는 형상오차가 더욱 엄밀해지고 있다. 인공위성에 설치되는 우주망원경의 렌즈와 미러도 그 영역이 갈수록 커지고 높은 형상 정밀도를 필요로 한다. (중략)

• Journal of the Korean Society for Precision Engineering
• /
• v.25 no.8
• /
• pp.21-28
• /
• 2008

Fizeau interferometer is used for inspecting the lens surface profile accurately. This study is focused on the design and optical measuring techniques for large optical components, such as a reflection mirror for large area lithography or astronomical purpose. A tower type Fizeau interferometer is designed and set up in horizontally with a 45$^{\circ}$ fold mirror which makes easy to align the optical path of heavy interferometer system. To align the optical path, a five-axes stage for the interferometer is required. This study shows a method of the 45$^{\circ}$ fold mirror alignment by using a three-axis stage instead of adjusting the interferometer itself or measuring object. This system will be installed on the large optics polishing machine during the manufacturing process as an on-machine inspection system.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.30 no.12 s.255
• /
• pp.1649-1657
• /
• 2006

Fizeau interferometer is well known optical instrument for measuring the lens profile accurately. The object of this study is focused on the design and optical measuring techniques for large optical components, such as a reflection mirror for astronomical purpose. Measuring of large optical lens, the object could not be moved as small one but the measuring instrument must be moved for the alignment, because of the geometric conditions and the accuracy of the stage. Therefore, a five axis stage is designed to align the Interferometer instead of the measuring object. This instrument will be used for an on machine measuring system in polishing machine for large optical lens.