• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.02a
• /
• pp.486-486
• /
• 2012

반도체 식각 공정에서 이온의 플럭스와 충돌 에너지를 각각 조절하고자 Dual frequency RF source가 사용된다. 듀얼 freuqnecy RF가 인가된 Capacitively coupled plasma (CCP) 의 경우, 기판에 걸린 Low freuqency (LF) RF 소스에 의하여 이온의 에너지를 조절하고, High frequency (HF) 소스를 조절하여 이온의 플럭스를 조절하는 것이 일반적이다. 그러나 LF의 세기가 증가함에 따라서, 플라즈마의 밀도가 오히려 감소하는 문제점이 있었다. 이 경우, 약한 자장을 플라즈마에 걸어줌으로써 밀도가 감소되는 문제를 해결할 수 있다고 알려져 왔다. Inductively coupled plasma (ICP) 에서는 HF를 안테나에 가하여 이온의 플럭스를 조절하고, LF를 기판에 가하여 이온의 충돌 에너지를 조절하는 것이 일반적인데, 위와 동일한 문제가 이 경우에도 발생하는 것을 확인 하였다. CCP와 마찬가지로, 바이어스에 걸린 파워의 세기가 증가함에 따라서 플라즈마의 밀도가 감소하고 전자의 온도가 증가하는 현상을 확인하였다. 또한 이때에도, 약한 자장을 걸어줌으로써 플라즈마의 밀도가 감소하지 않고 유지될 수 있으며, 전자의 온도 또한 유지될 수 있음을 발견하였다.

• Clean Technology
• /
• v.7 no.3
• /
• pp.195-202
• /
• 2001

In this study the trace of chlorinated organic compound in aqueous solution was separated by pervaporation process using crosslinked PDMS (polydimethylsiloxane) membrane. The flux of trichloroethylene(TCE) increased linearly with feed composition but the flux of water was slightly increased. The partial flux of TCE was greater than that of tetrachloroethylene(PCE). The partial flux of TCE was not changed with operating temperature, but increased rapidly with feed flow rates. High crosslinking density causes the reduction of solubility and diffusivity for target component. The reduction of flux and selectivity for TCE is due to the chain immobilization and reduction of diffusivity with crosslinking density.

• Journal of the Korean Solar Energy Society
• /
• v.24 no.4
• /
• pp.11-18
• /
• 2004

A solar concentrator, named KIERDISH II, was built at KIER in order to investigate the feasibility of high temperature solar energy application system. The constructed concentrator is a dish type solar concentrator with a focal length of 4.68m and a diameter of 7.9m. To successfully operate KIERDISH II, optimal design of the absorber is very important and flux density distribution has to be known. The focal flux density distribution on the receiver was measured. We have observed the shape and size of flux images and evaluated percent power within radius. Flux density distribution is usually measured by a CCD(charge coupled device) camera and a radiometer. In this paper we present a flux mapping method to estimate the characteristic features of the flux density distribution in the focal region of solar concentrator. The minimum radius of receiver is found to be 0.15m and approximately 90% of the incident radiation is intercepted by receiver aperture.

• Proceedings of the KIPE Conference
• /
• 2010.07a
• /
• pp.53-54
• /
• 2010

최근에는 전동 공구(Power tools)와 가전 제품에 있어서 전자적인 전류(Commutation)를 사용하는 새로운 형태의 브러시리스 전동기인 플럭스 스위칭 전동기(Flux switching motor)에 대한 관심이 점차적으로 증가되고 있으며, 특히 팬과 펌프 시장에 있어서는 그린 정책으로 인하여 플럭스 스위칭 전동기에 대한 관심이 급격히 증가되고 있다. 플럭스 스위칭 전동기는 유도전동기에 비해서는 높은 전력 밀도(power density)와 상대적으로 높은 효율, 그리고 브러시리스 DC 전동기에 비해서는 간단한 전동기 구조와 가격 경쟁력이라는 장점을 가지고 있다. 따라서 본 논문에서는 팬 용도로 제작된 12/6 폴을 가지는 플럭스 스위칭 전동기 드라이브 구성을 위해 전용 IC를 사용하여 제작하였으며, 제작된 시스템의 타당성을 검증하기 위해서 실험결과를 제시한다.

• Membrane Journal
• /
• v.10 no.1
• /
• pp.30-38
• /
• 2000

Prediction method of permeation flux and sorption characteristics in pervaporation through a polydimethylsiloxane(PDMS) memrane was suggested. The amount of sorption and permeation flux of chloroform, toluene, methanol and n-butanol were calculated with this method and compared with this method and compared with experimetal data. The calculated values of permeation flux and the amount of sorption of good solvents, that is, toluene and chloroform were well agreed with the experimental data. The lower the density of PDMS membrane is, the more permeation flux and sorption quantity were increased. However, the experimental data of poor solvents, that is, methanol and n-butanol were no so well agreed with the calculated values. It is shown that the prediction method suggested in this study may be used without experimetnal for the prediction of permeation flux and sorption quantity of the good solvent on PDMS membrane.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
• /
• v.23 no.6
• /
• pp.89-95
• /
• 2009

A new class of electronically commutated brushless motor, the flux-switching motor(FSM) is gradually emerging in power tools and household appliances especially fan and pump application because of green policy. This motor offers advantages of high-power density and relatively high efficiency compare with induction motor, low cost and simple motor structure compare with bldc motor. This paper presents the principle of the FSM and design of the 12/6 pole FSM drive system for fan application. Finally, test results of the prototype motor are provided to verify a validity of the fan application with TMS320F2812 DSP and inverter.

• Journal of Wetlands Research
• /
• v.11 no.1
• /
• pp.105-113
• /
• 2009

Heat energy exchange is very important processes in the coastal wetland ecosystems. We observed and analyzed the net radiation flux, the sensible heat flux, the latent heat flux and the soil heat flux, which are balanced in the heat energy balance, over a reclaimed land covered with reeds at Goheung, Jeonllanamdo where is horizontally plane. The atmospheric turbulence had been measured in order to estimate the heat transfer during 5 intensive observation periods (IOPs). It was considered that the soil consists of water, fine particles, and vegetation canopy that changes color and density according to the season. We examined the characteristics of the heat flux and the vegetation effect on the air temperature control. It was noted that the heat was transported mainly by latent heat flux in the summer season and the vegetation canopy decreased the daily temperature range due to the heat storage. The air temperature was lower at the IOPs site than near urban area. This showed that the coastal wetland covered with the vegetation control the thermal environment.

• 한국신재생에너지학회:학술대회논문집
• /
• 2005.06a
• /
• pp.422-426
• /
• 2005

This experimental study represents the results of an analysis on the characteristics of flux density distribution in the focal region of solar concentrator. The characteristics of flux density distributions are investigated to optimally design and position a cavity receiver. This was deemed very useful to find and correct various errors associated with a dish concentrator. We estimated the flux density distribution on the target placed along with focal lengths from the dish vertex to experimentally determine the focal length. It is observed that the actual focal point exists when the focal length is 2.17m. The total integrated power and percent power was 2467W and $85.8\%$, respectively, in the case of small dish, and also 2095W and $79\%$, respectively, in the case of KIERDISH II. As a result of the percent power within radius, approximately $90\%$ of the incident radiation is intercepted by about 0.06 m radius. The minimum radius of receiver in KIERDISH II is found to be 0.15m and approximately $90\%$ of the incident radiation is intercepted by receiver aperture.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
• /
• v.24 no.2
• /
• pp.92-100
• /
• 2010

A new class of electronically commutated brushless motor, the flux-switching motor(FSM) is gradually emerging in power tools and household appliances especially fan and pump application because of green policy. This motor offers advantages of high-power density and relatively high efficiency compare with induction motor, low cost and simple motor structure compare with bldc motor. This paper presents the principle of the FSM and design of the 12/6 pole FSM drive system for fan application. Finally, test results of the prototype motor are provided to verify a validity of the fan application with TMS320F2812 DSP and inverter.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.02a
• /
• pp.402-402
• /
• 2012

최근 반도체 공정 중 fluorocarbon (CxHyFz) 가스와 함께 플라즈마 밀도가 큰 유도결합형 플라즈마을 사용한 식각장비가 많이 사용되고 있다. 특히 저 유전상수 값을 가지는 박막을 밀도가 큰 플라즈마와 함께 fluorocarbon 가스를 이용하여 식각을 하게 되면 매우 복잡한 현상이 생긴다. 따라서 식각률에 대한 모델을 세우고 적용하는 일이 매우 어렵다. 본 연구에서는 CF4가스를 Ar가스와 함께 혼합하고 기판 플라즈마와 유도결합형 플라즈마를 동시에 가진 식각장비를 사용하여, 저 유전상수 값을 갖는 박막을 식각하였다. 또한, 간단한 식각모델인 Langmuir adsorption model를 이용하여 식각률(Etch rate)에 대한 합리적인 이해를 얻기 위해, 기판과 유도결합형 플라즈마의 파워에 따른 식각률을 계산하고, 식각모델에서 사용되는 매개변수인 이온플럭스(Ion Flux)와 식각수율(Etch yield)을 연구하였다. 기판의 플라즈마 파워가 20에서 100 W 증가하면서 식각률이 269에서 478 nm/min로 증가하였으며, 식각수율이 0.4에서 0.59로 증가하는 것을 관찰하였다. 반면에 기판의 플라즈마 파워 증가에 따라 이온 플럭스는 3.8에서 $4.7mA/cm^2$로 변화가 크지 않았다. 또한, 유도결합형 플라즈마의 파워가 100에서 500 W 증가하면서, 식각률이 117에서 563 nm/min로 증가하였으며, 이온플럭스가 1.5에서 $6.8mA/cm^2$으로 변화하였다. 그러나, 식각수율은 0.46에서 0.48로 거의 변화하지 않았다. 그러므로 저 유전상수 값을 가지는 박막 식각의 경우, 기판의 플라즈마는 식각수율을 증가시키며 유도결합형 플라즈마는 이온 플럭스를 증가시켜 박막 식각에 기여하는 것으로 사료된다.