• Journal of the Korean Society for Precision Engineering
• /
• v.28 no.7
• /
• pp.851-858
• /
• 2011

Nanopositioning technologies play an important role in the progress of electronics, optics, bio-engineering and various nano-scale technologies. As a result, various practical nanopositioning methods have been successfully introduced. Flexure mechanism is a valuable method in nanopositioning because of smooth and friction-free motion and the infinitesimal movement near to sub-nm. In this study a modularized nanopositioner based on parallelogram four-bar linkage structure with right-circular flexure hinge was developed. The positioning performance of a single axis nanopositioner and a XY nanopositioner which was extended from single axis one were demonstrated using control experiments. Consequently, it was shown that the developed single axis nanopositioner possessed high performance and could be extended to various multi-axis nanopositioners.

• Transactions of the Korean Society of Machine Tool Engineers
• /
• v.17 no.2
• /
• pp.13-22
• /
• 2008

For the accuracy correction of the micro-positioning industrial robot, micro-manipulator has been devised. The compliant mechanisms using piezoelectric actuators is necessary geometrically and structurally to be developed by the optimization approaches. The overall geometric advantage as the mechanical efficiencies of the mechanism are considered as objective functions, which respectively art the ratio of output displacement to input force, and their constraints are the vertical notion of supporting leg and the structural strength of manipulation. In optimizing the compliant mechanical amplifier, the sequential linear programming and an optimality criteria method are used for the geometrical dimensions of compliant bridges and flexure hinges. This paper presents the integrated design process which not only can maximize the mechanism feasibilities but also can ensure the positioning accuracy and sufficient workspace. Experiment and simulation are presented for validating the design process through the comparisons of the kinematical and structural performances.