• Title/Summary/Keyword: 플라즈마 전파

Search Result 38, Processing Time 0.023 seconds

High Performance InGaZnO Thin Film Transistor by Atmospheric Pressure Ar Plasma Treatment (대기압 아르곤 플라즈마 처리를 통한 IGZO TFT의 전기적 특성 향상 연구)

  • Jeong, Byung-Jun;Jeong, Jun-Kyo;Park, Jung-Hyun;Kim, Yu-Jung;Lee, Hi-Deok;Choi, Ho-Suk;Lee, Ga-Won
    • Journal of the Semiconductor & Display Technology
    • /
    • v.16 no.4
    • /
    • pp.59-62
    • /
    • 2017
  • In this paper, atmospheric pressure plasma treatment was proposed for high performance indium gallium zinc oxide thin film transistor (IGZO TFT). RF Ar plasma treatment is performed at room temperature under atmospheric pressure as a simple and cost effective channel surface treatment method. The experimental results show that field effect mobility can be enhanced by $2.51cm^2/V{\cdot}s$ from $1.69cm^2/V{\cdot}s$ to $4.20cm^2/V{\cdot}s$ compared with a conventional device without plasma treatment. From X-ray photoelectron spectroscopy (XPS) analysis, the increase of oxygen vacancies and decrease of metal-oxide bonding are observed, which suggests that the suggested atmospheric Ar plasma treatment is a cost-effective useful process method to control the IGZO TFT performance.

  • PDF

Technical Treatment of Oceanic Living-things in Ship's Ballast-water by Hydroxyl Radical of Electrical Plasma (강 전리 플라즈마 수산기에 의한 선박안정수 해양외래생물의 처리 방안)

  • 소대화;장지도;선우택
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
    • /
    • 2003.10a
    • /
    • pp.356-359
    • /
    • 2003
  • 선박이 배출하는 안정수(ballast water)는 외부로부터 유해 생물들이 유입되어 전파해 오는 주요경로로써, 해양환경 변화를 초래하는 매우 중요하고 위험한 일중의 하나이다. 그러나 이에 대한 효과적인 처리방법은 아직까지도 미흡한 상태이다. 선박 안정수에 포함되어 타 지역으로부터 옮겨지는 외래침입생물 처리 방안의 하나로, 강 전리방전 기술을 적용하여 고 밀집 산소와 물분자로부터 고농도 수산자유기(OH: hydroxyl radical)를 전리, 발생시켜서 활성입자를 신속히 확산시켜 비교적 낮은 수산기농도 하에서 유해성침입생물을 소멸 처리하는 환경 친화적 녹색 청정처리방법을 제안하였다. 제안된 기술은 대상물의 처리 후 부수적으로 발생할 수 있는 처리잔류물이 전혀 발생하지 않으며, 인공적 화학성분의 약제를 사용하지 않는 저렴한 처리방법이므로 대ㆍ소형 원양선박의 안정수에 들어있는 외래침입생물의 타 지역 해양확산을 안전하게 처리할 수 있는 자연치유적 신기술이다.

  • PDF

Wave propagation in an Inhomogeneous Anisotropic Medium through Variational Finite Element Method (변분 유한요소법에 의한 비균질 비등방성 매질에서의 전파특성)

  • 김현준;홍용인;김두경;김정기
    • The Proceeding of the Korean Institute of Electromagnetic Engineering and Science
    • /
    • v.3 no.1
    • /
    • pp.33-41
    • /
    • 1992
  • In this paper the propagation problems of waves nomally incident upon an anisotropic medium with arbitrary permittivity tensors are analyzed through the variational finite element method. First, a variational equation is derived from the new approach basd on the induction theorm, reactions, and reciprocity. Next, by using the finite element method, the propagation problems are solved from the obtained functional. Specially, the reflection and transmission coefficient and axis ratio are obtained on the case of normally incident upon a homogeneous and inhomogeneous anisotropic medium such as cold mgnetoplasma slab and showed agreement with those of the previous method.

  • PDF

Experiment on the Sterilization Performance of Airborne Bacteria in Indoor Spaces using the Variation of Ozone Concentration Generated According to the Discharge Time of a Plasma Module with a Dielectric Barrier Discharge Technology (유전체 장벽방전 플라즈마 방전시간에 따른 오존 발생 농도변화의 값을 통한 실내 공간 내 부유세균 살균성능에 대한 실험)

  • Su Yeon Lee;Chang Soo Kim;Gyu Ri Kim;Jong Eon Im
    • Journal of the Society of Disaster Information
    • /
    • v.19 no.2
    • /
    • pp.344-351
    • /
    • 2023
  • Purpose: This study aimed to evaluate the effectiveness of a dielectric barrier discharge (DBD) plasma module for sterilizing airborne bacteria in indoor spaces and measure the concentration of ozone generated during plasma discharge. Method: The DBD plasma module was installed in a 76m3 space, and air samples were collected under various discharge times to compare the reduction of airborne bacteria. Result: The results showed a significant decrease in airborne bacteria, ranging from 92.057% to 99.999%, with an average ozone concentration of 0.04 ppm, below the reference value. Conclusion: The study suggests that plasma discharge can be used as a means of preventing the spread of airborne bacteria and viruses, while ensuring safety for human exposure.

Immobilization and Grafting of Acrylic Acid on Polyethylene Surface by Ar-plasma Treatment (알곤 플라즈마처리에 의한 폴리에틸랜 표면상의 아크릴산 고정화와 그라프팅)

  • 김민정;서은덕
    • Polymer(Korea)
    • /
    • v.26 no.2
    • /
    • pp.279-286
    • /
    • 2002
  • For surface modification of polymers with hydrophilic functional groups, acrylic acid was grafted and immobilized on the surface of polyethylene(PE) by cold-plasma treatment using Ar gas. The modifications were identified by analysis of ATR-IR spectrum and by the measurement of contact angles. Compared to virgin PE significant decreases in contact angle were observed for both the grafted PE and the immobilized PE. The decreases of contact angle were in the range of 47~$53^{\circ}$ for grafted PE and 23~$26^{\circ}$ for immobilized PE. The degree of hydrophilicity depended strongly on the plasma-treating time and discharge power. For the case of grafting it has show that the longer plasma-treating time, the higher hydrophilic character. For the case of immobilization, whereas, higher discharge power and longer exposure to plasma have shown the detrimental effect for the preparation of hydrophilic PE surface due to the decrease of carboxyl group by ablation effect. The decrease in adhesion strength of immobilized PE. compared to grafted PE, was also attributed to the ablation of carboxyl group.

Analysis of ionospheric payloads for Mars exploration (화성 전리층 관측 탑재체 성능 분석)

  • Kim, Eojin;Seo, Haingja;Kim, Joo Hyeon;Lee, Joo-Hee
    • Aerospace Engineering and Technology
    • /
    • v.12 no.1
    • /
    • pp.94-104
    • /
    • 2013
  • In solar system, Mars which has the most similar environment with the Earth has been steadily studied for the purpose of habitable environment for the future manned exploration and settlement. During the daytime, Martian ionosphere can be used for the ground-ground communications between lander and rover through the reflection of the radio wave from ionosphere. In addition, researches about Martian ionosphere provide the link of revolution of water and atmosphere. Martian ionospheric observations were performed by the occultation experiments onboard Mariner, Mars, Viking series during early Martian explorations as well as recent Mars Global Surveyor. Low frequency radar and plasma analyzer are on board Mars Express and Viking-1, 2 lander obtained the only vertical plasma density profile during their entry phase. In this paper, we studied the characteristics of scientific payloads observing Martian ionosphere and then analyzed the usability of ionospheric research according to the communication and climate on Mars.

Design and Analysis of Plasmonic Grating-Assisted Directional Coupler based on Silicon Waveguide (실리콘 도파로에 기초한 플리즈마 격자 구조형 방향성 결합기의 설계 및 분석)

  • Ho, Kwang-Chun
    • The Journal of the Institute of Internet, Broadcasting and Communication
    • /
    • v.12 no.5
    • /
    • pp.55-60
    • /
    • 2012
  • Longitudinal transmission-line modal theory is applied to analyze maximum power transfer in plasmonic grating-assisted directional couplers (P-GADC) based on silicon waveguide. By defining a coupling efficiency amenable to rigorous analytical solutions and interference between even and odd modes, the power exchange of TE modes as a function of propagation distance is evaluated. The numerical result reveals that maximum power transfer occurs at a grating period ${\Lambda}_{eq}=10.26{\mu}m$, in which the insertion loss of supermodes is equal to each other. That is, it is generally different from conventional phase-matching condition or minium gap condition of GADC.

A study on fatigue properties of plasma carburized low carbon Cr-Mo steel (플라즈마 침탄한 저탄소 Cr-Mo강의 피로특성에 관한 연구)

  • Park, Kyeong-Bong;Sin, Dong-Myung;Lee, Chang-Youl;Lee, Ktung-Sub
    • Korean Journal of Materials Research
    • /
    • v.10 no.7
    • /
    • pp.505-514
    • /
    • 2000
  • The carburizing behavior and fatigue properties of the plasma carburized low carbon Cr-Mo steel(0.176C-1.014Cr-0.387Mo) have been investigated. The effective case depth in plasma carburized steel increased up to 50% in comparison with that of gas carburizing, and this case depth increased with the increasing surface carbon content. With increasing time in plasma carburizing, the surface carbon content increased but its increasing rate decreased. Fatigue properties were studied in terms of microstructure, case depth, retained austenite and residual stress near the surface. The fatigue limit of the plasma carburized steel was higher than that of gas carburized one. The initiation of microcracks and initial crack propagation were retarded due to a relatively little surface and internal oxidation layer in plasma carburized steel. Fractography showed the crack initiated at the surface, and transgranular fracture at surface layer was more predominant in plasma carburized steel compared to that of gas carburized steel.

  • PDF

Realization of Plasmonic Adaptive Coupler using Curved Multimode Interference Waveguide (곡면형 다중모드 간섭 도파로를 사용한 플라즈마 적응 결합기의 구현)

  • Ho, Kwang-Chun
    • The Journal of the Institute of Internet, Broadcasting and Communication
    • /
    • v.16 no.2
    • /
    • pp.165-170
    • /
    • 2016
  • Nano-scale power splitter based on curved plasmonic waveguides are designed by utilizing the multimode interference (MMI) coupler. To analyze easily the adaptive properties of plasmonic curverd multimode interference coupler(PC-MMIC), the curved form transforms equivalently into a planar form by using conformal transformation method. Also, effective dielectric method and longitudinal modal transmission-line theory are used for simulating the light propagation and optimizing the structural parameters at 3-D guiding geometry. The designed $2{\times}2$ PC-MMIC does not work well for quasi-TM mode case due to the bending structure, and it does not exist 3dB coupling property, in which the power splitting ratio is 50%:50%, for quasi-TE mode case. Further, the coupling efficiency is better when the signal is incident at channel with large curvature radius than small curvature radius.

An Overview of Interplanetary Scintillation Method for Studying Solar Wind Physics (행성간 공간 섬광을 이용한 태양풍 연구에 대한 간단한 고찰)

  • 김수용;명노훈;최용석;김현구;김두환
    • Journal of Astronomy and Space Sciences
    • /
    • v.5 no.2
    • /
    • pp.123-127
    • /
    • 1988
  • Interplanetary scintillation is the fluctuation produced in the apparent brightness of a radio source, due to refractive effects in the apparent brightness of a radio source, due to refractive effects in the turbulent solar wind flowing from the sun. If this medium is illuminated coherently, analysis of the spatial and temporal properties of the radiation reaching the earth allows the stochastic properties of the medium to be understood. Here, a brief review of method of interplanetary scintillation to study solar wind behavior will be introduced.

  • PDF