• Title/Summary/Keyword: 플라즈마

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The Effect of the Deposition Temperature and la Doping Concentration on the Properties of the (Pb, La)$\textrm{TiO}_3$ Films Deposited by ECR PECVD (증착온도와 La조성비가 ECR 플라즈마 화학기상증착법으로 증착한 (Pb, La)$\textrm{TiO}_3$박막의 물성에 미치는 영향)

  • Jeong, Seong-Ung;Park, Hye-Ryeon;Lee, Won-Jong
    • Korean Journal of Materials Research
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    • v.7 no.3
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    • pp.196-202
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    • 1997
  • Perovskite lanthanum doped lead titanate ($(Pb,La)TiO_{3}$ or PLT) thin films were successfully fabricated on Pt/TijSiO.iSi substrates at the temperatures as low as $440~500^{\circ}C$ by eleclron cyclotron resonance plasma-enhanced chemical vapor deposition (ECR PECVII). Since the volatilities of the MC sources arid oxide molecules (especially Ph oxide) increased with increasing deposition temperature, the film deposition rate and the (I'b + La)/'Ti ratio decreased Stoichiometric perovskite PL'T films with good dielectric and leakeage current properties were obtained at the temperatures of $460~480^{\circ}C$. The lanthanum content of the film was nearly directly propotional to $La(DPM)_{3}$ flow rate. As the La/Ti ratio increased from 3.0 to 9.5%, the dielectric constant increased from 360 to 650 and the leakeage current density at 100kV/cm electric field decreased from $4{\times}10^{-5}$ to $4{\times}10_{-8}A/cm^2$.

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Roles of i-SiC Buffer Layer in Amorphous p-SiC/i-SiC/i-Si/n-Si Thin Film Solar Cells (비정질 p-SiC/i-SiC/i-Si/n-Si 박막 태양전지에서 i-SiC 완충층의 역할)

  • Kim, Hyun-Chul;Shin, Hyuck-Jae;Lee, Jae-Shin
    • Korean Journal of Materials Research
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    • v.9 no.12
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    • pp.1155-1159
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    • 1999
  • Thin film solar cells on a glass/$SnO_2$ substrate with p-SiC/i-Si/n-Si heterojunction structures were fabricated using a plasma-enhanced chemical-vapor deposition system. The photovoltaic properties of the solar cells were examined with varying the gas phase composition, x=$CH_4/\;(SiH_4+CH_4)$, during the deposition of the p-SiC layer. In the range of x=0~0.4, the efficiency of solar cell increased because of the increased band gap of the p-SiC window layer. Further increase in the gas phase composition, however, led to a decrease in the cell efficiency probably due to in the increased composition mismatch at the p-SiC/i-Si layers. As a result, the efficiency of a glass/$SnO_2$/p-SiC/i-SiC/i-Si/n-Si/Ag thin film solar cell with $1cm^2$ area was 8.6% ($V_{oc}$=0.85V, $J_{sc}$=16.42mA/$cm^2$, FF=0.615) under 100mW/$cm^2$ light intensity.

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Growth of Epitaxial AlN Thin Films on Sapphire Substrates by Plasma-Assisted Molecular Beam Epitaxy (플라즈마분자선에피탁시법을 이용한 사파이어 기판 위 질화알루미늄 박막의 에피탁시 성장)

  • Lee, Hyo-Sung;Han, Seok-Kyu;Lim, Dong-Seok;Shin, Eun-Jung;Lim, Se-Hwan;Hong, Soon-Ku;Jeong, Myoung-Ho;Lee, Jeong-Yong;Yao, Takafumi
    • Korean Journal of Materials Research
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    • v.21 no.11
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    • pp.634-638
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    • 2011
  • We report growth of epitaxial AlN thin films on c-plane sapphire substrates by plasma-assisted molecular beam epitaxy. To achieve two-dimensional growth the substrates were nitrided by nitrogen plasma prior to the AlN growth, which resulted in the formation of a two-dimensional single crystalline AlN layer. The formation of the two-dimensional AlN layer by the nitridation process was confirmed by the observation of streaky reflection high energy electron diffraction (RHEED) patterns. The growth of AlN thin films was performed on the nitrided AlN layer by changing the Al beam flux with the fixed nitrogen flux at 860$^{\circ}C$. The growth mode of AlN films was also affected by the beam flux. By increasing the Al beam flux, two-dimensional growth of AlN films was favored, and a very flat surface with a root mean square roughness of 0.196 nm (for the 2 ${\mu}m$ ${\times}$ 2 ${\mu}m$ area) was obtained. Interestingly, additional diffraction lines were observed for the two-dimensionally grown AlN films, which were probably caused by the Al adlayer, which was similar to a report of Ga adlayer in the two-dimensional growth of GaN. Al droplets were observed in the sample grown with a higher Al beam flux after cooling to room temperature, which resulted from the excessive Al flux.

Bactericidal Efficacy of Non-thermal DBD Plasma on Staphylococcus aureus and Escherichia coli (비열 유전체장벽방전 플라즈마의 포도상구균 및 대장균 살균효과)

  • Kim, Keyyoung;Paik, Namwon;Kim, Yonghee;Yoo, Kwanho
    • Journal of Korean Society of Occupational and Environmental Hygiene
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    • v.28 no.1
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    • pp.61-79
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    • 2018
  • Objectives: The objective of this study was to examine the effect of non-thermal dielectric barrier discharge(DBD) plasma on decontamination of Staphylococcus aureus(S. aureus) and Escherichia coli(E. coli) as common pathogens. Methods: This experiment was carried out in a chamber($0.64m^3$)designed by the authors. The plasma was continuously generated by a non-thermal DBD plasma generator(Model TB-300, Shinyoung Air tech, Korea). Suspensions of S. aureus and E. coli of 0.5 McFarland standard($1.5{\times}10^8CFU/mL$) were prepared using a Densi-Check photometer(bio $M{\acute{e}}rieux$, France). The suspensions were diluted1:1000 in sterile PBS solutions(approximately$10^{4-5}CFU/mL$) and inoculated on tryptic soy agar(TSA) in Petri dishes. The Petri dishes(80mm internal diameter)were exposed to the non -thermal DBD plasma in the chamber. Results: The results showed that 95% of S. aureus colonies were killed after a six-hour exposure to the DBD plasma. In the case of E. coli, it took two hours to kill 100% of the colonies. The gram-negative E. coli had a greater reduction than the gram-positive S. aureus. This difference may be due to the structure of their cell membranes. The thickness of gram-positive bacteria is greater than that of gram-negative bacteria. The S. aureus is more resistant to DBD plasma exposures than is E. coli. It should be noted that average concentrations of ozone, a byproduct of the DBD plasma generator, were monitored throughout the experiment and the results were well below the criteria, 50 ppb, recommended by the Korean Ministry of the Environment. Thus, non-thermal DBD plasma is deemed safe for use in hospital and public facilities. Conclusions: There was evidence that non-thermal DBD plasma can effectively kill S. aureus and E. coli. The results indicate that DBD plasma technology can greatly contribute to the control of infections in hospitals and other public and private facilities.

Improvement of Polycarbonate Properties by Coating of TiO2 and SiO2 Thin Film (TiO2/SiO2 박막 코팅에 의한 폴리카보네이트 특성 개선)

  • Won, Dong So;Lee, Won Gyu
    • Applied Chemistry for Engineering
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    • v.25 no.1
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    • pp.41-46
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    • 2014
  • The property improvement of polycarbonate coated with a multilayer film composed of an inorganic $SiO_2$ film and a photocatalytic $TiO_2$ film was studied. The $SiO_2$ film as a binder had an excellent light transmission characteristic. After the treatment with atmospheric pressure plasma, the surface of $SiO_2$ film showed the hydrophilicity, which increased the film coating uniformity with a $TiO_2$-containing aqueous solution. When $TiO_2$ film was over 200 nm thick, the absorption effect of UV rays in the range of 180~400 nm suppressed the yellowing phenomena of polycarbonate substrate. The inorganic film improved the heat resistance of polycarbonate substrates. $TiO_2$ film in the outmost under the exposure of UV rays promotes the catalytic oxidation characteristics and yields the capability to the decomposition of organic contaminants, and also increases the self-cleaning properties due to the increase of hydrophilicity. Structural stability of the polycarbonate substrate coated with inorganic $TiO_2$ and $SiO_2$ film was shown. The role of $SiO_2$ film between $TiO_2$ and polycarbonate substrate suppressed the peeling of $TiO_2$ film by inhibiting the photocatalytic oxidation effect of $TiO_2$ film on the polycarbonate substrate.

Effect of Working Pressure on the Electrical and Optical Properties of ITZO Thin Films Deposited on PES Substrate with SiO2 Buffer Layer (공정압력이 SiO2 버퍼층을 갖는 PES 기판위에 증착한 ITZO 박막의 전기적 및 광학적 특성에 미치는 영향)

  • Joung, Yang-Hee;Choi, Byeong-Kyun;Kang, Seong-Jun
    • The Journal of the Korea institute of electronic communication sciences
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    • v.14 no.5
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    • pp.887-892
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    • 2019
  • In this study, after 20nm-thick $SiO_2$ thin film was deposited by PECVD method on the PES substrate, which is known to have the highest heat resistance among plastic substrates, as a buffer layer, ITZO thin films were deposited by RF magnetron sputtering method to investigate the electrical and optical properties according to the working pressure. The ITZO thin film deposited at the working pressure of 3mTorr showed the best electrical properties with a resistivity of $8.02{\times}10^{-4}{\Omega}-cm$ and a sheet resistance of $50.13{\Omega}/sq.$. The average transmittance in the visible region (400-800nm) of all ITZO films was over 80% regardless of working pressure. The Figure of merit showed the largest value of $23.90{\times}10^{-4}{\Omega}^{-1}$ in the ITZO thin film deposited at 3mTorr. This study found that ITZO thin films are very promising materials to replace ITO thin films in next-generation flexible display devices.

Application of cold plasma treatment as a method to improve the physical properties of defatted mustard meal-based edible films (탈지 겨자씨 소재 가식성 필름의 물리적 특성 향상을 위한 콜드 플라즈마의 적용)

  • Jeong, Ha Eun;Oh, Yoon Ah;Min, Sea Cheol
    • Korean Journal of Food Science and Technology
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    • v.53 no.5
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    • pp.634-639
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    • 2021
  • This study investigated the effects of cold plasma (CP) treatment on the properties of biopolymer films prepared with defatted mustard meal (DMM films). CP treatments using N2, O2, He, Ar, and dry air did not affect the tensile properties, water vapor permeability, color, and morphology of DMM films, whereas the treatments using He and Ar improved their printability. The tensile strength (TS) of O2- or air-CP-treated DMM films and the elastic modulus (EM) of O2-, He-, Ar-, or air-CP-treated films were lower than those of the untreated films. An increase in the power of Ar-CP treatment resulted in an increase in EM. The optimum treatment power and time for minimizing yellowness changes by Ar-CP treatment were 420 W and 40 min, respectively. The results demonstrated the potential application of CP treatment to improve the film properties of DMM films and possibly other agricultural by-product-based biopolymer films, making the films more applicable to food packaging.

A Study on Attention Mechanism in DeepLabv3+ for Deep Learning-based Semantic Segmentation (딥러닝 기반의 Semantic Segmentation을 위한 DeepLabv3+에서 강조 기법에 관한 연구)

  • Shin, SeokYong;Lee, SangHun;Han, HyunHo
    • Journal of the Korea Convergence Society
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    • v.12 no.10
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    • pp.55-61
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    • 2021
  • In this paper, we proposed a DeepLabv3+ based encoder-decoder model utilizing an attention mechanism for precise semantic segmentation. The DeepLabv3+ is a semantic segmentation method based on deep learning and is mainly used in applications such as autonomous vehicles, and infrared image analysis. In the conventional DeepLabv3+, there is little use of the encoder's intermediate feature map in the decoder part, resulting in loss in restoration process. Such restoration loss causes a problem of reducing segmentation accuracy. Therefore, the proposed method firstly minimized the restoration loss by additionally using one intermediate feature map. Furthermore, we fused hierarchically from small feature map in order to effectively utilize this. Finally, we applied an attention mechanism to the decoder to maximize the decoder's ability to converge intermediate feature maps. We evaluated the proposed method on the Cityscapes dataset, which is commonly used for street scene image segmentation research. Experiment results showed that our proposed method improved segmentation results compared to the conventional DeepLabv3+. The proposed method can be used in applications that require high accuracy.

Evaluation of Titanium-nitride Coated Crown: Surface Hardness, Corrosion Resistance and Color Sustainability (타이타늄-질소 코팅된 금속관에 대한 평가: 표면 경도, 부식 저항성, 색조 안정성)

  • Kim, Hyojin;Lim, Sumin;Kim, JinYoung
    • Journal of the korean academy of Pediatric Dentistry
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    • v.48 no.3
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    • pp.344-351
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    • 2021
  • The purpose of this study was to compare surface hardness between titanium-nitride coated crowns (TiNCs) and stainless steel crowns (SSCs), and to evaluate the corrosion resistance and color sustainability of TiNCs. Ten TiNCs and 10 SSCs were used for the hardness test. Measurement was performed 30 times for each type of crowns, and the mean values were compared. Metallic raw material plates (before being processed into crowns) of TiNCs and SSCs were prepared for the corrosion resistance test. The total amounts of metal ion releases in the test solution were detected by inductively coupled plasma-optical emission spectrometry. Five TiNCs were subjected to the color sustainability test by applying repetitive brushing forces. The mean hardness values of TiNC group and SSC group were 395.53 ± 105.90 Hv and 278.70 ± 31.45 Hv respectively. Hardness of TiNCs were significantly higher than that of SSCs. The total amounts of metal ion releases from the materials of TiNCs and SSCs satisfied the criterion in International Organization for Standardization 22674. The results mean that TiNCs and SSCs were not harmful in an acidic environment. The golden coating was stable against the repetitive physical stimulations for a given period time.

Modified HOG Feature Extraction for Pedestrian Tracking (동영상에서 보행자 추적을 위한 변형된 HOG 특징 추출에 관한 연구)

  • Kim, Hoi-Jun;Park, Young-Soo;Kim, Ki-Bong;Lee, Sang-Hun
    • Journal of the Korea Convergence Society
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    • v.10 no.3
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    • pp.39-47
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    • 2019
  • In this paper, we proposed extracting modified Histogram of Oriented Gradients (HOG) features using background removal when tracking pedestrians in real time. HOG feature extraction has a problem of slow processing speed due to large computation amount. Background removal has been studied to improve computation reductions and tracking rate. Area removal was carried out using S and V channels in HSV color space to reduce feature extraction in unnecessary areas. The average S and V channels of the video were removed and the input video was totally dark, so that the object tracking may fail. Histogram equalization was performed to prevent this case. HOG features extracted from the removed region are reduced, and processing speed and tracking rates were improved by extracting clear HOG features. In this experiment, we experimented with videos with a large number of pedestrians or one pedestrian, complicated videos with backgrounds, and videos with severe tremors. Compared with the existing HOG-SVM method, the proposed method improved the processing speed by 41.84% and the error rate was reduced by 52.29%.