The Effect of the Deposition Temperature and la Doping Concentration on the Properties of the (Pb, La)$\textrm{TiO}_3$ Films Deposited by ECR PECVD
(증착온도와 La조성비가 ECR 플라즈마 화학기상증착법으로 증착한 (Pb, La)$\textrm{TiO}_3$ 박막의 물성에 미치는 영향)
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- Korean Journal of Materials Research
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- v.7 no.3
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- pp.196-202
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- 1997