Experimental Results of $O_2$ Plasma Time and Power Treated on PDMS Surface for Improvement of Adhesion between Silicon and PDMS
(Si-PDMS 접착력 개선을 위한 PDMS 표면의 $O_2$ plasma 처리 시간 및 Power 실험 결과)
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- Proceedings of the KIEE Conference
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- 2008.07a
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- pp.1462-1463
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- 2008