• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2015.11a
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• pp.203-203
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• 2015

반도체 제조 공정 중에 CMP(Chemical Mechanical Planarization)는 디바이스의 집적도(degree of integration)에 크게 영향을 미치고 있으므로, 20nm급 이하의 디바이스에서 CMP 공정 안정화는 양질의 소자 특성을 확보하기 위해서는 시급한 문제가 되고 있다. CMP 공정 안정화를 위해서는 여러 가지 해결되어야 할 문제가 있는데, 그 중에서도 W plug 연마 공정 중에 관찰되고 있는 W missing은 전기 배선의 신뢰성에 직접 영향을 주고 있으므로 공정 엔지니어에게는 도전적인 과제이다. 본 연구에서는 W missing 현상을 전기화학적인 입장에서 해석하고 몇 가지 해결책을 제기하고자 한다.

• Journal of the Korean Ceramic Society
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• v.37 no.11
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• pp.1078-1083
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• 2000

정전안정화 및 입체안정화를 동시에 적용한 복합안정화기구에 의하여 25 부피%의 나노 $Al_2$O$_3$슬러리를 제조하고, 이로부터 얻은 주입성형체, 원심성형체, 진공성형체의 기공구조 분석을 통하여 입자충전거동을 살펴보았다. 나노 알루미나 분말의 습식 성형체의 충전구조는 성형방법에 의하여 가해지는 외력의 영향을 크게 받지만, 반발력을 제공하는 표면장벽층의 상호작용에 의해서도 현저한 차이를 보이는 것으로 나타났다. 예비소결실험을 통하여 나노분말에서도 기공크기가 작고, 크기분포가 좁으며, 높은 밀도를 가진 균일성형체의 미세구조가 소결미세구조를 균일하게 하는데 필수적인 조건임을 확인하였다.

• Journal of Adhesion and Interface
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• v.5 no.3
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• pp.10-17
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• 2004

We investigated the effect of stabilization processing parameters on the thermal shrinkage, thermal stability and microstructure of rayon fabrics stabilized under various conditions such as heating rate, stabilization temperature, atmosphere gas, and chemical treatment. The presence and absence of phosphoric acid treatment and the heating rate have most importantly influenced the thermal shrinkage and the weight change of rayon fabrics. Especially, the phosphoric acid treatment decreases the reduction of thickness, length, and weight of the fabrics by about 80%, 20%, and 26%, respectively, in comparison with the untreated counterparts, showing the protective effectiveness of the thermal shrinkage involved. The thermal stability of stabilized rayon fabrics is also affected by all the processing conditions used: stabilization temperature, phosphoric acid treatment, atmosphere gas, and heating rate. In addition, the surface and diameter of the stabilized fiber significantly depend on the treatment of phosphoric acid prior to stabilization process.

• Journal of Conservation Science
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• v.32 no.2
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• pp.155-165
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• 2016

This study aimed at verifying the effect of hydroxypropyl cellulose(HPC) treatment on polyethylene glycol(PEG)-treated waterlogged wood for surface stabilizing. This research investigated macroscopic and microscopic appearance, color change, weight change, and dimensional change. And effect of HPC was verified through variance analysis (ANOVA) and least significant difference test(LSD). HPC formed thin layer on the surface of wood specimen, and blocked the pore of tracheid and the gap between the crack. Specimens without deterioration showed no invisible change except HPC 1,000,000 treatment group. Whitening was appeared at the sound surface of HPC 1,000,000 treated wood. Specimens with deterioration showed a little color difference change by external moisture adsorption. Thin layer of HPC on the surface of wood specimen was maintained after the deterioration, and this HPC layer significantly suppressed the weight and dimensional change by moisture adsorption.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2003.10a
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• pp.81-81
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• 2003

• Proceedings of the Korean Nuclear Society Conference
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• 1996.05c
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• pp.39-45
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• 1996

핵비확산 목적으로 원심분무방법으로 저농축 우라늄 고밀도의 U$_3$Si$_2$구형분말 분산핵연료를 개발하는 일환으로 융점이 높은 U$_3$Si$_2$원심분무용 도가니와 nozzle에 적합한 재료를 선정하고자 zirconia계 물질과 yttria물질에 대한 양립성을 시험하였다. ZrO$_2$계 세라믹은 U$_3$Si$_2$와 우수한 양립성을 나타냈는데 부분 안정화시킨 Zirconia가 Crack 발생이 없어 완전 안정화시킨 것보다 내열충격이 더 양호한 것으로 보인다. Zirconia 도가니는 흑연과 반응하여 표면에 carbide를 형성하여 박리 되는 현상이 발생되었는데 부분 안정화 zirconia가 약간 더 많이 형성됨을 나타냈다. Yttria는 180$0^{\circ}C$이상에서 흑연과 반응하여 액상으로 형성되고 U$_3$Si$_2$와도 반응하여 사용에 부적합한 것으로 판명되었다. 내열충격이 비교적 우수한 부분 안정화 zirconia로 tundish를 제조하여 U$_3$Si$_2$를 원심분무한 결과 nozzle확장되지 않아서 입도분포가 협소한 분말을 얻는데 성공하였다.

• Korean Journal of Soil Science and Fertilizer
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• v.44 no.6
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• pp.1063-1070
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• 2011

In this study, total of 5 different chemical amendments were evaluated for determining kinetic parameters and stabilization efficiency of heavy metals in aqueous phase. Standard solution of Cd and Pb ($100mg\;L^{-1}$) was mixed with various ratio of amendments (1, 3, 5, 10%) and heavy metal stabilization efficiency was monitored for 24hrs. All examined amendments showed over 90% of removal efficiency for both Cd and Pb except zerovalent iron (ZVI) for Cd (43-63%). Based on result of heavy metal stabilization efficiency, it was ordered as $CaCO_3$ > Dolomite > Zeolite > Steel slag > ZVI for both Cd and Pb in aqueous phase. For kinetic study, first order kinetic model was adapted to calculate kinetic parameters. In terms of reaction rate constants (k), zeolite showed the fastest reaction rate (k value from 0.4882 for 1% to 2.0105 for 10%) for Cd and ZVI (k value from 0.2304 for 1% to 0.5575 for 10%) for Pb. Considering reaction rate constant and half life for heavy metal stabilization, it was ordered as Zeolite > $CaCO_3$ > Dolomite > Steel slag > ZVI for Cd and $CaCO_3$ > Dolomite > Steel slag > Zeolite > ZVI for Pb. Overall result in this study can be interpreted that lime containing materials are more beneficial to remove heavy metals with high efficiency and less time consuming than absorbent materials.

• Journal of Navigation and Port Research
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• v.39 no.3
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• pp.185-192
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• 2015

In this study, the adsorption efficiency of mixed heavy metals in aqueous solution was investigated using modified activated carbon. Moreover, the heavy-metal stabilization treatment of contaminated marine sediment was achieved using modified activated carbon as stabilizing agents. From the experimental results, it was shown that the adsorption equilibrium was attained after 120 mins. Heavy metal adsorption was characterized using Freundlich and Langmuir equations. The equilibrium adsorption data were fitted well to the Langmuir model in modified activated carbon. The adsorption uptake of $As^{3+}$ (28.47 mg/g) was higher than $Cr^{6+}$ (13.28 mg/g). In case of the $Cr^{6+}$, the results showed that adsorption uptake decreased with increasing pH from 6 to 10. However, adsorption of $As^{3+}$ slightly increased in the increasing change of pH. The modified activated carbon was applied for a wet-curing duration of 120 days. From the sequential extraction results, the exchangeable, carbonate, and oxides fractions of Cr and As in sediment decreased by 5.8% and 7.6%, respectively.

• Proceedings of the Korean Nuclear Society Conference
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• 1996.05c
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• pp.435-440
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• 1996

삼중수소 제거 공정에 이용되는 소수성 고분자촉매의 담체인 스티렌-디비닐벤젠 공중합체의 제조 특성을 실험하였다. 스티렌-디비닐벤젠 고분자담체의 제조시 담체의 표면 특성에 대한 중합용액의 안정화 영향을 실험한 결과 약 40~55$^{\circ}C$의 범위에서 2시간 이상 용액을 안정화 시키는 것이 가장 바람직하였다. 또한 후처리 방법은 담체를 건조시키기 전에 용매를 제거하는 방법이 가장 우수한 기공 특성을 나타내었다. 담체의 입자 크기는 계면활성제의 농도가 낮을수록 더 크게 생성되었지만 용액의 점도가 증가하면 계면활성제의 영향이 감소됨을 알 수 있었다.

• Proceedings of the Korean Vacuum Society Conference
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• 2004.02a
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• pp.57-57
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• 2004