• 한국반도체및디스플레이장비학회:학술대회논문집
• /
• 한국반도체및디스플레이장비학회 2005년도 춘계 학술대회
• /
• pp.180-183
• /
• 2005

본 논문에서는 새로운 형태의 혼합형 5자유도 마이크로 매니퓰레이터를 제안하고 개발하고자 한다. 제안된 기구는 평면형 2자유도 XY-stage와 공간형 3자유도 병렬 기구로 구성된다. 3자유도 병렬기구는 3개의 직렬체인으로 이루어져 있으며, 공간상에서 두 방향의 회전 움직임과 Z축 방향으로의 병진운동을 생성한다. 모의실험을 통하여 개발된 기구의 작업공간과 출력단에서의 정밀도 해석을 수행한다. 개발된 기구는 조작 대상 물체의 미세 위치제어를 필요로 하는 반도체 및 기계, 생물, 의료분야 등에 적용 될 수 있다.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2007년도 추계학술대회 논문집
• /
• pp.105-106
• /
• 2007

• 제어로봇시스템학회논문지
• /
• 제12권5호
• /
• pp.464-472
• /
• 2006

This paper presents the two degree-of-freedom (DOF) planar parallel mechanism, called the $2{\underline{R}}RR-RP$ manipulator, whose degree-of-freedom is dependent on an additional passive constraining leg connecting the base and the platform. First, the kinematic analysis of the mechanism is performed: the inverse and forward kinematic problems are analytically solved, the workspace is systematically derived, and all of the singular configurations are examined. Then, in order to determine the geometric parameters the optimization of the mechanism is performed considering its dexterity, stiffness, and space utilization. Finally, the kinematic performances of the optimized mechanism are evaluated through the comparison study to the conventional 5-bar parallel manipulator.

• 한국정밀공학회지
• /
• 제34권1호
• /
• pp.53-58
• /
• 2017

A fine stage is developed for the 3-DOF error compensation of a linear axis in order to improve the positioning accuracy. This stage is designed as a planar parallel mechanism, and the joints are based on a flexure hinge to achieve ultra-precise positioning. Also, the effect of Abbe's offsets between the measuring and driving coordinate systems is minimized to ensure an exact error compensation. The mode shapes of the designed stage are analyzed to verify the desired 3-DOF motions, and the workspace and displacement of a piezoelectric actuator (PZT) for compensation are analyzed using forward and inverse kinematics. The 3-DOF error of a linear axis is measured and compensated by using the developed fine stage. A marked improvement is observed compared to the results obtained without error compensation. The peak-to-valley (PV) values of the positional and rotational errors are reduced by 92.6% and 91.3%, respectively.