• Transactions of the Korean Society of Mechanical Engineers
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• v.13 no.5
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• pp.862-874
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• 1989

A phase evil method and spectrum analysis were instrument error which is originated from measurement system and the form error of standard specimens. An instrument with a rotating table supported by an air bearing is calibrated using standard specimens. The phase of standard specimens was measured 12 times on the rotating table with rotating 30 in turn and its measurement magnification was set by 100000 times. As a result of data analysis of all the observations, read out at each of 144 orientations(per 2.5) from recorded datafiles, the error of the performance of the instrument and those of the standard specimens are evaluated and a systematic deviation of the instrument is determined. In the particular instrument used in the present experiment, the deviation of the instrument is determined with the accuracy of 15nm and those of standard specimens with the accuracy of 23, 13 n, respectively. The reproducibility of the instrument is investigated, too. If the instrument is calibrated by using the above standard specimens, then the accuracy of the measurement of roundness error can be improved to about 15nm.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.10a
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• pp.468-473
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• 2002

This paper presents the methodology for measuring eccentricity of the cylindricaliy machined part using CCS(Cylindrical Capacity Spindle Sensor) signal in the CNC turning process. In order to investigate the relationships between CCS orbits and eccentricities, the initial conditions for various eccentricity state and machining process is applied to the experimental strategy. AS a result, it is considered the linearities of CCS signal and magnitude of eccentricity of machined cylindrical surfaces based on the possibility as a automatic detection apparatus for the CNC lathe.

• Transactions of the Korean Society of Mechanical Engineers
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• v.16 no.4
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• pp.649-657
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• 1992

Transmission error for a stepping motor-timing belt drive system is investigated experimentally and analytically. From FFT analysis of the experimental results, it is found that the transmission error consists of three periodic errors : (1) error by the stepping motor per one resolution angle theta.$_{m}$, (2) error by the pulley eccentricity per one revolution theta.$_{e}$, and (3) error by the meshing effect between the belt and the pulley teeth per one pitch revoltion theta.$_{p}$. In order to investigate the effects of some design parameters on the transmission error, the dynamic models of the stepping motor-timing belt drive system are derived by Bondgraph. According to the simulation results, as the belt total tension increases, theta.$_{m}$ and theta.$_{e}$ decrease due to the nonlinearity of the belt. In adition, the numerical and experimental results show that theta.$_{m}$ and theta.$_{e}$ of the loaded case are larger than those of the unloaded case. The analytical results are in good accordance with the experimental results.sults.s.sults.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.22 no.6
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• pp.148-155
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• 2008

This study presents a process control of the wafer edge exposure (WEE) used in 300[mm] wafer environment. WEE, as a key module of the overall track system (coater and developer) for making patterns on wafer, is a system to expose the UV-ray on the wafer to remove a photo resist around edge of the wafer. It can measure, memorize and control the distance and angles from wafer center to edge. Recently in the 300[mm] semiconductor fabrication, the track system strongly requires that WEE station has a controller with high throughput and accuracy to increase process efficiency. We have designed and developed the controller, and present here a WEE control algorithm and experimental results.

• Journal of Korean Association for Spatial Structures
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• v.11 no.3
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• pp.85-93
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• 2011

Membrane materials are very flexible, thus wrinkling, uniaxial state, can be occurred. The wrinkling are due to lots of various factors as eccentric force, construction errors, and fabrication errors. These wrinkled membrane elements are in status of uniaxial stress. In the paper, a method which be able to check the wrinkling is proposed. The stress-deformation analysis of membrane structures for given external load will be carried out, and here the membrane elements are regarded as wrinkled state if the principal stress 2 is smaller than 0. With proposed method, two existed construction examples, Suwon auditorium and Okinawa 75 Expo, are analyzed.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.9
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• pp.145-150
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• 2000

Out-of-sphericity is degree of deformation of an air bearing sphere deviated from a perfect sphere. This paper investigates numerically the effect of out-of-sphericity error on the radial stiffness of an air bearing Three types of out-of-sphericity modes are considered. in this study the stiffness is calculated from pressure distribution at the bearing surface which is obtained by solving th Reynolds equation. in some cases large out-of-sphericity errors are found to improve the stiffnesses of air bearings. This implies that an air bearing of perfect hemispheres is not necessarily of the best performance. Thus much labor and cost in manufacturing air bearings can be saved, In addition the radial stiffness of an air bearing depends greatly on the application direction.

• Journal of Welding and Joining
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• v.8 no.4
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• pp.76-82
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• 1990

Lots of research works have been done to improve the accuracy of the hole drilling method to measure residual stress by many investigators. In this study, first, size effect of specimen was analyzed based on the solution of hole in a strip under tension. If the ratio of hole diameter tothe strip width is less than 0.2, the stress distribution around hold may be given from the solution of hole in an infinite plate. Second, the residual stress above $0.6{\sigma}_y$(yield stress) may be measured less than the actual stress by 10-15 percent. Third, eccentricity of hole relative to the rosette center effects on the accuracy of residual stress measurements by 10 percent. The error due to eccentricity of hole can be corrected by the iteration method or the direct method.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.11a
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• pp.579-585
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• 2003

This paper investigates the whirling, tilting and flying motion of a HDD spindle system supported by FDB experimentally. Experimental setup is built to measure the flying, whirling and tilting motion of the HDD spindle system, and three capacitance probes fixed on the xyz-micrometers measure the displacement of a HDD spindle system in the xyz-directions. This research shows that the tilting and whirling motion is mostly dependent on the centrifugal force and the gyroscopic moment due to the unbalanced mass of a HDD spindle. It also shows that the rotating HDD spindle starts to float to the equilibrium position in the z-direction until the weight of the rotating spindle is equal to the supporting pressure generated in the upper and lower thrust bearing.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.300-306
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• 2005

This paper presents the methodology for measuring eccentricity of the machined cylindrical part using CCS(cylindrical capacitance spindle sensor) signal in the CNC turning process. We use capacitance type sensor to take full advantage of averaging effect by using large capacitance area to encompass the whole side of a sensor. The intentionally proposed initial eccentricity is applied to the experimental testpieces, and their resultant relationships between CCS orbits and eccentricities are investigated. As a result, the possibility as a automatic detection apparatus for the CNC lathe is considered based on the linearities of CCS signal and magnitude of eccentricity of machined cylindrical surfaces.

• Journal of IKEEE
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• v.24 no.4
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• pp.1104-1108
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• 2020

This paper propose a variable proportional resonant feedforward algorithm for reducing the speed ripple of a three-phase permanent magnet synchronous motor. In general, the torque ripples can be generated by electrical pulsation due to current measurement errors and dead time and mechanical pulsation because of rotor eccentricity and eccentric load. These torque pulsations can cause speed pulsations of the motor and degrade the operating performance of the motor drive system. Therefore, in this paper, the factors of the speed ripple is analyzed and an algorithm to reduce the speed ripple is proposed. The proposed algorithm applied a variable proportional resonant controller in order to reduce the specific operating frequency included in the speed pulsation, and utilized a feedforward compensation controller structure to perform the compensation operation. The proposed algorithm is verified through various experiments.