• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.08a
• /
• pp.63-63
• /
• 2012

편광분석법(ellipsometry)은 대상 물질의 유전율 함수의 실수부와 허수부를 Kramers-Kronig 관계식의 도움 없이 그 물질상수를 정확히 측정할 수 있는 매우 우수한 기술이다. 이 기술의 큰 장점 중 하나는 빛의 편광상태의 변화를 이용한 비파괴적인 방법으로써 실시간 측정이 가능하며, 박막의 두께측정의 오차범위는 0.1 nm 이하로써 매우 정확하다는 것이다. 본 연구자는 이러한 우수한 측정 기술인 편광분석법을 고진공의 분자살박막증착장치(MBE) 와 결합하여 AlSb, AlP의 유전율 함수를 측정하였다. Al 계열을 포함하는 반도체 화합물은 Al의 산소친화력이 강해 대기 중에서 순수한 유전율 함수를 얻기가 불가능하다. 하지만 본 연구실에서 초고진공 상태의 MBE 챔버에서 시료를 성장시키는 동시에 실시간으로 편광분석기를 이용하여 측정하였고, 지금까지 발표된 결과들 중 가장 순수한 상태의 AlSb 유전율 함수를 얻어낼 수 있었다. 또한 순수한 AlP의 유전함수를 측정할 수 있었고, 이는 편광분석기를 이용한 최초의 실험결과로써 이차미분을 이용한 전이점 분석결과 이론적인 전자밴드구조에서 E1, E1+${\Delta}1$, E2에 해당하는 밴드갭들을 확인할 수 있었다. 또한 표면의 원자배열 구조와 실시간으로 일어나는 그들의 역학적인 현상들에 관한 정보를 얻을 수 있는 surface photoabsorption (SPA)를 metalorganic chemical vapor deposition (MOCVD)에 장착하여 실시간 모니터링이 가능하도록 하였다. SPA를 이용하여 GaAs/AlGaAs 양자우물구조의 성장을 원자층 수준으로 실시간 모니터링을 할 수 있었다. 그리고 SPA를 이용하여 MOCVD 안에서 InP에 As가 흡착 및 탈착되는 현상을 분석하여, As의 흡착이 두 단계에 의해 이루어짐을 분석하였다. 그리고 편광분석법의 빠르고 정확한 측정 기술을 규칙적인 구조체에서 전자기파의 회절을 구할 수 있는 Rigorous Coupled-Wave Analysis (RCWA) 계산방법과 결합하여 나노구조의 기하학적인 모양을 정확하고 빠르게 구할 수 있었다. 본 연구를 위해 규칙적인 3차원 Si 구조체 제작하여 편광분석기로 측정하고 $SiO_2$와 표면 거칠기를 고려하여 RCWA로 분석한 결과, 규칙적인 Si 구조와 산화막 층까지 정확하게 분석할 수 있음을 확인하였다. 또한 규칙적인 나노구조분석 연구를 넘어 불규칙적인 나노구조에 대한 분석 가능성을 보이기 위해 InAs 양자점을 증착하여 분석하였고, 이를 통해 편광분석법과 RCWA를 이용하여 불규칙적인 나노구조의 모양과 크기, 분포의 분석이 가능함을 보였다.

• Korean Journal of Optics and Photonics
• /
• v.8 no.2
• /
• pp.128-133
• /
• 1997

The effects of twist induced birefringence on the polarization properties of Er and Nd fiber laser with a linear type cavity were experimentally observed and theoretically analyzed. As the twist rate increases, the polarization states of the polarization eigenmodes are found to be always linear, and their frequencies gradually coincide with each other, and their polarization directions rotate at about half of twist rate at large twist rates.

• Proceedings of the Optical Society of Korea Conference
• /
• 2009.10a
• /
• pp.272-273
• /
• 2009

• Journal of the Institute of Electronics Engineers of Korea SD
• /
• v.38 no.3
• /
• pp.174-184
• /
• 2001

Wavelength tunable fiber ring laser can be tuned by causing a resonance on the optical path having the least loss which is controlled by a polarization adjustment. It is observed that lasing wavelengths having 1 nm FSR(Free Spectral Range) can be tuned over the range of 1540~1560 nm when a polarization controller and an intra-cavity polarizer are adjusted. The tuning mechanism can be expected by analyzing the characteristics of the laser output using an optical path model and the concept of a birefringence loss. It is found that the constructive interference between longitudinal modes of different optical paths may cause wavelength tuning in the fiber ring laser.

• Korean Journal of Optics and Photonics
• /
• v.12 no.1
• /
• pp.5-9
• /
• 2001

A wavemeter was realized using the phenomena that the phase lag between principal polarization states in an optical retarder is a function of wavelength. The change in the polarization state of the optical beam as it passes through the optical retarder is dependent on wavelength. The wavelength of the optical beam is determined by comparing the power difference between principal polarization states. A prototype wavemeter was successfully implemented using a polarization maintaining fiber with birefringence $3\times10^{-4}$ and length 100 mm as the optical retarder. The measurement resolution was 0.08 nm over a wavelength region of 1554.38 nm-1557.l9 nm, which agreed well with theoretically calculated results. In addition, the dependence of operating characteristics on temperature was analyzed theoretically and experimentally.mentally.

• Korean Journal of Optics and Photonics
• /
• v.32 no.4
• /
• pp.172-179
• /
• 2021

A near-normal-incidence ellipsometer (NNIE) is suggested as an optical critical dimension (OCD) measurement system that is highly sensitive to the bottom defect of a sample with high-aspect-ratio structured patterns. Incident light passes through a polarizer and a phase retarder in sequence, and the reflected light from the sample also passes through them, but in reverse order. The operating principle of this NNIE, where a single polarizer and a single phase retarder are shared by the incident and reflected light, is studied, and a method to determine the ellipsometric constants from the measured intensities at proper combinations of the azimuthal angles of polarizer and retarder is presented.

• Proceedings of the Optical Society of Korea Conference
• /
• 2002.07a
• /
• pp.184-185
• /
• 2002

고속의 광 통신망을 구축하기 위해서는 대용량의 광 스위치가 요구된다. 이러한 대용량의 광 스위칭 시스템을 구성하는 단위 스위치는 작은 크기, 작은 손실, 높은 소멸비 등과 같은 특징을 가지고 있어야 하며 또한 편광에 따른 성능의 변화가 작아야한다. 최근 융합 수직 방향성 결합기(Fused Vertical Coupler, FVC)의 연구를 통하여 매우 짧은 소자 길이를 가지며 매우 높은 소멸비를 얻을 수 있는 수직 방향성 결합기 스위치가 제안되었다. (중략)

• Korean Journal of Optics and Photonics
• /
• v.14 no.4
• /
• pp.355-358
• /
• 2003

We report experimental results on the wavelength and polarization selective coupling properties of fiber-to-planar waveguide coupler having a thin metal intermediate layer. The influence of the metal layer thickness and the refractive index of the superstrate on the device properties has been measured and explained. The proposed device exhibited various application possibilities including polarizers, modulators, and sensors.

• Korean Journal of Optics and Photonics
• /
• v.22 no.5
• /
• pp.219-222
• /
• 2011

Integrated optical waveguide polarization converters are among the essential components for constructing various functional optical integrated circuits. The RM materials have been widely used in liquid crystal displays for fabricating waveplates. In this work, the polarization converters are fabricated by using a solution of Reactive Mesogen(RM) dissolved in liquid crystal(LC). In the middle of the polymer waveguide, a groove is defined by an oxygen plasma etching in a direction perpendicular to the optical waveguide. The solution of RM-LC is inserted to fill up the groove, and then liquid crystal is aligned in a certain direction by applying an electric field. After the alignment, RM materal is crosslinked by UV light so as to form a permanent waveplate. The phase retardation of the waveplate is determined by the width of the groove, and by the birefringence and the degree of alignment of the LC. Polarization conversion efficiency of 90% is obtained for the wavelength of 1550 nm.

• Journal of Korean Ophthalmic Optics Society
• /
• v.10 no.1
• /
• pp.9-15
• /
• 2005

The polariscope to measure the microscopic stress in CR lens consists of light source polarizer, model, polarizer, CCD, computer, chrome conversion orderly and the principal-stressed difference, (${\sigma}_1-{\sigma}_2$) and the fringe order n were measured by analyzing two components of light wave $E_1$ and $E_2$ following each polarizer's steps. The two-dimensional model could be determined from the fact that the optical axes of sample concide with the principal-stress directions. The bi-refringence acted to a light wave and the phase retardation were in proportion to the principal-stressed difference(${\sigma}_1-{\sigma}_2$) and the intensity of final light wave was proportioned to $sin2({\Delta}/2)$ and when ${\Delta}/2=n{\pi}$ (n=0, 1, 2, ${\ldots}$) the extinction occurs. Photoelastic's image by microscopic stress could analyzed using chrome conversion, and the image showed clearly.