• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.75-75
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• 2000

플라즈마 화학증착법(Plasma Enhanced Chemical Vapor Deposition, PECVD)을 이용하여 양질의 Si3N4 금속-유전막-금속(Metal-Insulator-Metal, MIM) 커페시터를 구현하였다. Fig.1에 나타낸 바와 같이 p형 실리콘 웨이퍼의 열 산화막 위에 1%의 실리콘을 함유하는 알루미늄을 스퍼터링으로 증착하여 전극을 형성하고 두 전극사이에 Si3N4 박막을 증착하여 MIM구조의 박막 커패시터를 제조하였다. Si3N4 유전막은 150Watt의 RF 출력하에서 반응 가스 N2/SiH4/NH3를 각각 300/10/80 sccm로 흘려주어 전체 압력을 1Torr로 유지하면서 40$0^{\circ}C$에서 플라즈마 화학증착법을 이용하여 증착하였으며, Al과 Si3N4 층의 계면에는 Ti과 TiN을 스퍼터링으로 증착하여 확산 장벽으로 이용하였다. 각 시편의 커패시턴스 및 바이어스 전압에 따른 누설 전류의 변화는 LCR 미터를 이용하여 측정하였고 각 시편의 커패시턴스 및 바이어스 전압에 따른 누설 전류의 변화는 LCR 미터를 이용하여 측정하였고 각 시편의 유전 특성의 차이점을 미세구조 측면에서 이해하기 이해 극판과 유전막의 단면 미세구조를 투과전자현미경(Transmission Electron Microscope, TEM)을 이용하여 분석하였다. 유전체인 Si3N4 와 전극인 Al의 계면반응을 억제시키기 위해 TiN을 확산 장벽으로 사용한 결과 MIM커패시터의 전극과 유전체 사이의 계면에서는 어떠한 hillock이나 석출물도 관찰되지 않았다. Fig.2와 같은 커패시턴스의 전류-전압 특성분석으로부터 양질의 MIM커패시터 특성을 f보이는 Si3N4 의 최소 두께는 500 이며, 그 두께 미만에서는 대부분의 커패시터가 전기적으로 단락되어 웨이퍼 수율이 낮아진다는 사실을 알 수 있었다. TEM을 이용한 단면 미세구조 관찰을 통해 Si3N4 층의 두께가 500 미만인 커패시터의 경우에 TiN과 Si3N4 의 계면에서 형성되는 슬릿형 공동(slit-like void)에 의해 커패시터의 유전특성이 파괴된다는 사실을 알게 되었으며, 이러한 슬릿형 공동은 제조 공정 중 재료에 따른 열팽창 계수와 탄성 계수 등의 차이에 의해 형성된 잔류응력 상태가 유전막을 기준으로 압축응력에서 인장 응력으로 바뀌는 분포에 기인하였다는 사실을 확인하였다.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.18 no.3
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• pp.452-459
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• 2017

In recent years, to reduce self-weight of structural elements, the use of SCP (Steel Concrete Plate) instead of prestressed concrete is increasing. Because SCP has a complicated sectional shape and includes a large number of studs, the use of high-fluidity concrete is required. Therefore, in this study, to prevent the restrained shrinkage behavior by the stud, the effects of using an expansive agent (EA) and shrinkage reducing agent (SRA) were investigated, and the optimal mixture proportions to maximize the filling capacity were determined based on the fine aggregate ratio. The test results indicated that the combined use of EA and SRA exhibited the smallest shrinkage. The ratio of the crushed sand and washed sea sand was determined to be 5:5, and the proper fine aggregate ratio was found to be 55.6%, because when the ratio was too high, a decrease in strength and an increase in shrinkage strain were expected. The high-fluidity concrete effectively filled the large-sized SCP module.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.21 no.4
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• pp.175-180
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• 2011

The doping effect of Cu in the Sr-doped lanthan manganites (LSM) has been investigated in terms of structural analysis and thermal expansion coefficient (TEC). The $La_{0.8}Sr_{0.2}Mn_{1-x}Cu_xO_3$ ($0{\leq}x{\leq}0.3$) were prepared by solid state reaction method and their crystal structure and TEC were measured. A decrease in the lattice parameters and the TEC were observed with increase eu content, whereas they were decreased for x = 0.3. For $0{\leq}x{\leq}0.2$, the decrease of the lattice parameter and the TEC with increase Cu content were attributed to the reduction of ionic radius of Cu ions due to the presence of $Cu^{3+}$ ions. For x = 0.3, however, the increase was originated from the formation of oxygen vacancies due 10 the presence of $Cu^{2+}$ and $Mn^{4+}$.

• Journal of the Korean Electrochemical Society
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• v.5 no.3
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• pp.125-130
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• 2002

An attempt was made for the application of porous reticular metal to a heat dissipation material in semiconductor process. For this aim, the electrodeposition of Fe/Ni alloy on the porous reticular Cu has been performed to minimize the thermal expansion mismatch between Cu skeleton and electronic chip. Preliminary tests for the electrodeposition of Fe/Ni alloy layer were conducted by using standard Hull Cell to examine the effect of current density on the composition of alloy layer. It seemed that mass transfer affected significantly the composition of Fe/Ni layer due to anomalous codeposition in the electrodeposition of Fe/Ni alloy. A paddle type stirring bath, which was employed to control the mass transfer of electrolyte in the work, was found to allow the electrodeposition Fe/Ni with a precise composition. result showed that the thermal expansion of Fe/Ni alloy layer was much lower than that of pure copper. From the tests of heat dissipation by using the apparatus designed in the work the heat dissipation material fabricated in the work showed the excellent heat dissipation capacity, namely, more than two times as compared to that of pure copper plate.

• International Journal of Highway Engineering
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• v.12 no.2
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• pp.71-79
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• 2010

The influence of fines of the frost susceptibility of subgrade soils were established by laboratory freezing system test simulating closely the thermal conditions in the field. During the winter season, the climate is heavily influenced by the cold and dry continental high pressure. Because of siberian air mass, the temperature of January is $-6{\sim}-7^{\circ}C$ on average. This chilly weather generate the frost heaving by freezing the moisture of soil and damage potential of the road structure. In the freezing soil, the ice lenses increase the freeze portion of soil by absorbing the ground water with capillary action. However, the capillary characteristics differ from the sort of soil on the state of freezing condition. In the current design codes for anti-freezing layer, the thickness of anti freezing layer is calculated by freezing depth against the temperature condition. Therefore, they have a tendency of over-design and uniform thickness without the considerations of thermal stability, bearing capacity and frost susceptibility of materials. So, it is essential for studying the appropriateness and bearing capacity besides the seasonal and mechanical properties of pavement materials to take a appropriate and reasonable design of the road structure. In this Paper, the evaluation of frost susceptibility was conducted by means of the mechanical property test and laboratory freezing system apparatus. The temperature, heaving amount, heaving pressure and unfrozen water contents of soil samples, the subgrade soils of highway construction site, were measured to determine the frost susceptibility.

• Applied Microscopy
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• v.18 no.1
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• pp.92-102
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• 1988

The ototoxic effects of salicylate on the ultrastructure of spiral ganglion cells were examined. Sodium salicylate($50{\sim}60\/kg$ body weight, once a day for 7 days) were injected subcutaneously to $5{\sim}6$ week-old fifteen Sprague-Dawley rats. Animals were sacrificed 24 hours (group 1), 6 weeks (group 2) or 10 weeks (group 3) after the last injection. In group 1 animals, distention of membranous cisternae was found in the cytoplasm of ganglion cells, satellite cells and Schwann cells in which enlargement or multicystic cytosome formation of the mitochondria were shown. In group 2 animals, membranous cisternae became larger or fused to form larger vacuoles or cysts. Shrinkage of spiral ganglion cell cytoplasm and loosening of myelin sheath were seen. In group 3 animals, extensive swelling or loss of nerve fibers were shown along with the folding or partial loss of myelin sheath which caused leakage of ganglion cell cytoplasm. It was concluded that the ototoxicity of salicy-late caused the ultrastructral changes of the spiral ganglion cells which became more severe in group 2 and 3 animals. The possibility of retrograde degeneration following the sensory cell changes was suggested.

• Journal of the Korean Geotechnical Society
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• v.37 no.2
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• pp.19-31
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• 2021

Micropiles are cast-in-place piles with small diameters. The advantage of micropile is low construction expense and simple procedures, so it is widely applied to existing buildings and structures for the reinforcement of foundation and seismic performances. The base expansion structure has been developed following the original mechanism of horizontal expansion steps under compressive loading. This kind of structure can be installed at the pile end to improve the bearing capacity by tip area enlargement and horizontal force increment to the pile surface area. However, 'Micropile with base expansion structure' cannot be put into practical use, because detailed verification for the developed technique has not been conducted so far. In this research, 3-D numerical analysis was conducted to figure out the bearing mechanism of base expansion micropile and to verify the bearing capacity improvement compared to the general micropiles. 3-D modelling of micropile with base expansion structure was carried out and input parameter was determined. Bearing mechanism induced by base expansion structure was analyzed by lab-scale modelling, and bearing capacity improvement was verified by field-scale analysis.

• Journal of the Korean Geosynthetics Society
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• v.7 no.3
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• pp.17-24
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• 2008

This study is conducted to investigate the possibility of the utilization of the mixed soil formed by mixing stone sludge, bentonite, and residual soil as a soil sealant sustaining both stability and capacity in the barrier system. A series of tests were performed on the mixed soils to evaluate basic properties such as compaction, compressive strength, permeability and CBR of these materials. The results indicates that as the stone sludge content increases, the optimum moisture content increases a little, but the maximum dry density decreases. The compressive strength and CBR decrease, and the cohesion, internal friction angle and expansion ratio increase. When the bentonite content increases, the maximum dry density decreases, and the optimum moisture content, compressive strength and cohesion, internal friction angle, CBR and expansion ratio increase. Mixing ratio of the mixed soil contained with the stone dust more than 10% and the bentonite less than 10% satisfies the standard of the permeability coefficient as the soil sealant.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.28 no.1
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• pp.38-43
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• 2018

Ceramic membrane has been widely used for water treatment due to its advantages of eco-friendly property and low energy consumption. However, high porosity of ceramic membrane higher than 40 % may cause a problem of strength, when it is applied to a water treatment module. In order to solve this problem, the strength of the membrane edge was improved by using the ceramic glaze. Four different glaze compositions for low temperature sintering was selected to minimize the deformation of the membrane microstructure. After coating with low temperature glaze, cracks were observed due to differences in thermal expansion coefficient between the membrane and glaze. Thus, the thermal expansion coefficient of glaze was controlled by addition of cordierite and petalite. As a results, the compressive strength of the ceramic membrane, which was coated with the optimized glaze composition, was increased from $27N/m^2$ to $117N/m^2$, indicating that the glaze coating can improve the disadvantages of the fragile ceramic membrane.

• Journal of the Korean Geosynthetics Society
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• v.11 no.3
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• pp.27-35
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• 2012

In this paper, the frost heaving and thawing characteristics of flexible pavement structure were evaluated in the large scale freezer which have a specification of temperature range $-20^{\circ}C{\sim}10^{\circ}C$ and $3.2m(L){\times}3.2m(B){\times}2.4m(H)$ in size. The insulated steel box with the size of $0.9m(L){\times}0.9m(B){\times}0.9m(H)$ was used to simulate actual pavement road structure. The variation of temperature, frost heave amount and frost heave pressure were measured through the instrument of TDS-602 data logger. LFWD (light falling weight deflectometer) was used to determine the change of deflection due to the frost heaving and thawing. Furthermore, the influence of aggregate layer to the freezing of the subgrade soil was studied to verify the function and effectiveness of the anti-freezing layer.