• Air Cleaning Technology
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• v.15 no.1 s.56
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• pp.77-83
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• 2002

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.15 no.9
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• pp.751-761
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• 2003

We performed the numerical analysis on the airflow characteristics in the two type of cleanroom systems, which are the axial fan type (AFT) and the fan filter unit (FFU). A computational fluid dynamic model was applied to investigate and compare the nonuniformity, the deflection angle and the air ventilation effectiveness of the two designs of cleanrooms when dampers are adjusted and not adjusted. And the flow-resistance models of the various components were used in this simulation. We know that the airflow characteristics of the cleanrooms are largely affected by damper adjusting And we also find out that the FFU system is superior to the AFT system through the comparison of the cleanroom performance indices.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.37 no.7
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• pp.709-716
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• 2013

A fan filter unit (FFU) is a device which supplies clean air from the ceiling in a clean room. With an increase in its size, velocity variation occurs within the exhaust plane and this damage the product quality or productivity. Hence, a guide vane is installed inside the device to enhance the velocity uniformity. Because the vane reduces the flow rate for a given pumping power, an optimum design is required to achieve velocity uniformity while minimizing the flow rate reduction at the same time. To find a geometry that satisfies these requirements, a series of numerical simulations has been conducted while changing the angle and length of the guide vanes. By changing the geometry of the side guide vane, the velocity uniformity increased by 3.7% and the flow rate decreased by 1.5%. For the center guide vane, the velocity uniformity increased by 2.9% and the flow rate decreased by 0.7%.

• Proceedings of the SAREK Conference
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• 2009.06a
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• pp.1507-1512
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• 2009

Flow field in a roller conveyor system, induced from the movement of a cassette in which glasses for flat panel display are loaded, is numerically studied in this paper. Contamination on the glass surface by dust particles produced from mechanical friction between roller and cassette is predicted from the analysis results of flow fields. Results show that a large swirl flow is formed under the moving cassette with constant speed. This swirl flow is confined only under the cassette because two main streams from the backward and the fan filter unit on the top ceiling are sufficiently strong. Therefore, it can be said that possibility of the contamination by the particles originated from the friction is relatively low. It is also revealed that flow direction between glass plates is changed according to the speed of the cassette movement due to the shear force of glass plates.