Study on the Measurement Technology of Fluid Film Thickness with Nanometer Scale by Dichromatic Incident Light (Dichromatic 투사광선에 따른 나노 미터 해상도의 점접촉 유막 두께 측정 연구)
-
- Proceedings of the Korean Society of Precision Engineering Conference
- /
- 2003.06a
- /
- pp.686-689
- /
- 2003