• Composites Research
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• v.20 no.5
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• pp.49-55
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• 2007

Nanocomposite blade for dicing semiconductor wafer is investigated for micro/nano-device and micro/nano-fabrication. While metal blade has been used for dicing of silicon wafer, polymer composite blades are used for machining of quartz wafer in semiconductor and cellular phone industry in these days. Organic-inorganic material selection is important to provide the blade with machinability, electrical conductivity, strength, ductility and wear resistance. Maintaining constant thickness with micro-dimension during shaping is one of the important technologies fer machining micro/nano fabrication. In this study the fabrication of blade by wet processing of mixing conducting nano ceramic powder, abrasive powder phenol resin and polyimide has been investigated using an experimental approach in which the thickness differential as the primary design criterion. The effect of drying conduction and post pressure are investigated. As a result wet processing techniques reveal that reliable results are achievable with improved dimension tolerance.

• Journal of the Korean Electrochemical Society
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• v.6 no.1
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• pp.41-47
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• 2003

For the development of low temperature anode-supported planar solid oxide fuel cell, the planar anode supports with the thickness of 0.8 to 1 mm and the area of 25, 100 and $150\;cm^2$ were fabricated by the tape casting method. The strength, porosity, gas permeability and electrical conductivity of the planar anode support were measured. The porosity of anode supports sintered at $1400^{\circ}C$ and then reduced in$H_2$ atmosphere was increased from $45.8\%\;to\;53.9\%$. The electrical conductivity of the anode support was $900 S/cm\;at\; 850^{\circ}C$ and its gas permeability was 6l/min at 1 atm in air atmosphere. The electrolyte layer and cathode layer were fabricated by slurry dip coating method and then had examined the thickness of $10{\mu}m$ and the gas permeability of 2.5 ml/min at 3 atm in air atmosphere. As preliminary experiment, cathode multi-layered structure consists of LSM-YSZ/LSM/LSCF. At single cell test using the electrolyte layer with thickness of 20 to $30{\mu}m$, we achieved $300\;mA/cm^2$ and 0.6V at $750^{\circ}C$