• Analytical Science and Technology
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• v.19 no.5
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• pp.394-399
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• 2006

The polishing performance and the relationships of electrochemistry depending upon oxidizers and additives in the tungsten CMP slurry used in semiconductor industry were investigated. Hydrogen peroxide, ferric nitrate and potassium iodate were used as oxidizers and they showed different oxidation reactions on tungsten film depending on the kind of oxidizers and pH of slurry. The differences influenced the polishing performance. Etching reaction was predominated in the hydrogen peroxide. However, passivation reaction was prevailed in ferric nitrate and potassium iodate. TMAH and KOH raised the potential energy and removal rate of tungsten, and improved a dispersion characteristic of slurry by increasing absolute value of zeta potential. Addition of 100 ppm of poly(acrylic acid) of M.W. 250,000 improved dispersion ability.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2014.11a
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• pp.94-94
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• 2014

본 연구는 탈질용 폐 SCR 촉매로부터 유가금속인 바나듐과 텅스텐을 회수하기 위하여 고온 소다배소, 수침출, 침전 및 용매추출 실험 순으로 진행하였다. 소다배소는 $Na_2CO_3$ 첨가량 5당량, 폐촉매 평균 입자크기 $54{\mu}m$, 배소온도 $850^{\circ}C$, 배소시간 120분의 조건이 적절하였고, 소다배소 산물의 수침출 실험은 배소산물 입자크기 $-45{\mu}m$, 침출온도 $40^{\circ}C$, 침출시간 30분 및 광액밀도 10%의 조건이 적절하였다. 이와 같은 조건하에서 소다배소 및 수침출 실험을 수행한 결과, 바나듐 성분 약 46%와 텅스텐 성분 약 92%가 침출 되었다. 수침출 공정에서 얻어진 바나듐과 텅스텐이 함께 침출된 침출용액으로부터 바나듐 성분을 선택적으로 침전시키기 위하여 MgCl2를 사용하여 침전실험을 수행하였으나, 바나듐 성분이 침전될 때 텅스텐 성분이 함께 침전되어 큰 손실율을 나타내었다. 또한, 침출용액 내의 바나듐과 텅스텐 성분을 분리하기 위하여 용매추출 실험을 수행하였다. 아민계열의 추출제인 Alamine 336 및 Aliquat 336을 사용한 용매추출 실험에서 바나듐과 텅스텐 성분 모두 90% 이상 추출되었다. 이후 수행된 탈거실험에서 대부분의 역추출제에 의해 바나듐과 텅스텐은 동시에 탈거되었다. 그러나 Alamine 336을 추출제로 사용한 유기상의 탈거실험에서 NaCl 및 NH4Cl 용액을 탈거용액으로 사용하였을 경우에 바나듐과 텅스텐이 선택적으로 탈거될 수 있는 가능성을 나타내었다. 반면에 Aliquat 336을 추출제로 사용한 유기상의 탈거실험의 경우, NaOH 용액이 가장 선택적인 탈거용액임을 확인하였다.

• Resources Recycling
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• v.26 no.6
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• pp.91-96
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• 2017

Tungsten (W) recovery from tungsten carbide (WC) was researched by alkali melt followed by water leaching. The experiments of alkali melt were carried out with the change of the sort of alkali material, heating temperature, and the heating duration. Water leaching of W was performed in the fixed conditions ($25^{\circ}C$, 2 hr., slurry density: 10 g/L). From the mixture of WC and sodium nitrate ($NaNO_3$) in the molar ratio of 1:2, treated at $400^{\circ}C$ for 6 hours, only 63.3% of W might be leached by water leaching. With the increase of sodium hydroxide (NaOH) as a melting additive, the leachability increased. Finally it reached to 97.8 % with the melted mixture of ($WC:NaNO_3:NaOH$) in the ratio of (1:2:2). This imply that NaOH may play a role as a reaction catalyst by lowering Gibb's free energy for alkali melt reaction for WC.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1995.06b
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• pp.38-46
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• 1995

Bonded film을 형성시키기 위한 대표적인 고체윤활제들로는 이황화-몰리브데늄, 이황화-텅스텐(WS$_{2}$), 보론-나이트라이드(BN), 흑연(Graphite) 등을 들 수 있으며, 이들 고체윤활제를 표면에 효과적으로 부착시키기 위하여 사용되는 수지류는 페놀 및 에폭시계수지 등이 사용되고 있아. Bonded film의 마찰마모특성은 이와 간이 피막 내에 첨가된 고체윤활제 및 수지의 종류, 고체윤활 입자들의 크기 및 순도,그리고 이들 상호간의 배합비율 등에 의하여 크게 좌우되며, 아울러 피막 내에 소량으로 첨가될 수 있는 여러 가지 보조첨가제들에 의해서도 크게 영향을 받는 것으로 알려져 있다. 고체윤활제 성분들의 조성과 더불어, 재료표면의 물리화학적인 전처리 조건도 매우 중요한 요인이 될 수 있다. 따라서 본 논문에서는 이와 같은 윤활피막내 고체윤활제들의 배합, 고체윤활피막의 표면전처리 방법들을 변화하고 이들에 따른 상기 고체윤활피막들의 마찰 및 마모 특성에 관하여 시험을 행하였다.

• Resources Recycling
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• v.26 no.5
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• pp.61-66
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• 2017

Vanadium Dioxide has been investigated for use as a "spectrally-selective" window coating to block infrared transmission and reduce the loss of building interior heat through windows. The preparation of thermochromic $VO_2$ powder by the reductive reaction with hydrogen was studied. The reductive reaction method has many advantages of easy and mass production of $VO_2$ powder according to controlled reaction without semi-conductor equipments like sputter and beam evaporator. The reaction temperature, time, concentration of reductive gas, post-annealing condition and W addition as dopant would affect the characterization of $VO_2$ powder and its thermochromism. Many applications for electrical device and energy-saving technologies is expected.

• Electrical & Electronic Materials
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• v.3 no.4
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• pp.325-331
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• 1990

본 연구는 텅스텐 소결에 저온 활성제로 작용하는 Ni-P 공정합금을 미량첨가하여 제조공정의 간단화를 통한 새로운 W-Cu계 전기접점제조를 목표로 하였다. 이를 위해 1회 용침공정을 통해 제조한 W(Ni-P)-Cu 합금에 대한 전기접점특성을 조사하여 접점의 미세구조 관점에서 논의하였다. Ni-P 합금첨가한 접점은 기존의 순수 W-Cu 합금에 비해 낮은 접촉저항 및 낮은 아크소모를 나타내는 우수한 접점성능을 보여주었다. 이것은 Ni-P합금이 Cu용침이 개시되기전 짧은 승온단계에서 분말간의 강한 결합과 Cu용침에 유리한 기공통로를 갖는 W 분말 골격체의 형성을 유도하기 때문인 것으로 판단된다.

• Clean Technology
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• v.27 no.4
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• pp.315-324
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• 2021

In this study, a vanadium catalyst study was conducted on the various characteristics of the exhaust gas in the Selective-Catalytic-Reduction (SCR) method in which nitrogen oxides emitted from cogeneration using biogas are removed by using ammonia as a reducing agent and a catalyst. V/W/TiO₂, a commercial catalyst, was used as the catalyst in this study, and the effect was confirmed according to the tungsten content under various operating conditions. As a result of the NH₃-SCR experiment, the denitrification performance was confirmed at 380 ~ 450 ℃ more than 95%, and durability to trace amounts of SO₂ was confirmed through the SO₂ durability experiment and TGA analysis. As a result of H₂-TPR analysis, the higher the tungsten content, the better the redox properties. Accordingly, enhanced oxidizing properties were confirmed in the oxidation test for a trace amount of carbon monoxide emitted from the cogeneration. In NH₃-DRIFTs analysis, it was confirmed that the higher the tungsten content, the higher both the Bronsted/Lewis acid sites and the better the thermal durability when tungsten is added to the catalyst. Based on the experiments under various operating conditions, it is considered that a catalyst with a high tungsten content is suitable to be applied to cogeneration using biogas.

• Journal of the Korean Society of Marine Environment & Safety
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• v.22 no.2
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• pp.253-258
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• 2016

The $MnO_x-WO_3-TiO_2$ nanoscale powders were synthesized by sol-gel method in order to prevent the biological fouling on the ships and offshore structures. Powder characteristics and antifouling performance were investigated with respect to the crystalline, microstructure and surface property for application in self-polishing copolymer resins. The high antifouling activity of $TiO_2$-system biocide was attributed to its redox potential and soluble metal ions originating from tungsten oxides according to the improvements in the powder characteristics. Based on their physio-chemical characterizations, the specific surface areas of powders were about $90m^2/g$ and the grain size was in the region 100 ~ 150 nm. Powder characteristics and surface properties were improved by the addition of $WO_3$. Antifouling performance were analyzed according to their surface properties and static immersion tests to determine the effects of the $TiO_2$-system compounds. The surface of 2 wt. % added sample was clean for 5 month. This may be attributed to the ability of $MnO_x-WO_3-TiO_2$ powders to act as a promoter in antifouling agents.

• Journal of the Korean Ceramic Society
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• v.34 no.3
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• pp.281-288
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• 1997

The effects of 0 to 6 mol% excess 91PbO-9WO3 addition on the microstructure and the dielectric pro-perties in 40Pb(Mg1/3Nb2/3)O3-30PbTiO3-30Pb(Mg1/2W1/2)O3 ternary system were investigated. Excess 91PbO-9WO3 addition enhanced densification at relatively lower temperature due to the formation of liquid phase. The dielectric constant of the specimen with standard composition was 16,400 and that of specimen with 1 mol% excess additive was the maximum of 18,500. And more than 2 mol% excess addition decreased dielec-tric constant. Specimens with 2~4 mol% 91PbO-9WO3 addition showed dual peak maxima in the tem-perature dependence of dielectric constant. In the specimens which have more than 5 mol% excess addition a new phase with W-rich composition was formed at grain boundary.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.2
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• pp.156-161
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• 2004

We investigated the effects of oxidizer additive on the performance of Cu-CMP process using commonly used tungsten slurry. In order to compare the removal rate and non-uniformity as a function of oxidizer contents, we used alumina-based tungsten slurry and copper blanket wafers deposited by DC sputtering method. According to the CMP removal rates and particle size distribution, and the microstructures of surface layer by SEM image as a function or oxidizer contents were greatly influenced by the slurry chemical composition of oxidizers. The difference in removal rate and roughness of copper surface are believed to cause by modification in the mechanical behavior of $Al_2$O$_3$abrasive particles in CMP slurry.