• Title/Summary/Keyword: 태양에너지 자원

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대면적 기판 위에서의 서브마이크로미터 주기와 크기를 갖는 홀 패턴 형성을 위한 포토리소그라피 공정 최적화

  • Kim, Do-Hyeong;Bae, Si-Yeong;Lee, Dong-Seon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.244-245
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    • 2010
  • 최근 광전자 분야에서는 미래 에너지 자원에 대한 관심과 함께 GaN 기반 발광다이오드 및 태양전지 연구가 활발히 진행되고 있다. GaN는 높은 전자 이동도와 높은 포화 속도 등의 광전자 소자에 유리한 특성을 가지고 있으나, 고 인듐 함유량과 막질의 우수한 특성을 동시에 구현하는 것은 매우 어렵다. 이를 극복하기 위한 방법으로써 선택 영역 박막 성장법(Selective Area Growth)은 마스크 패터닝을 통해 제한된 영역에서만 박막을 성장하는 방법으로써 GaN의 막질을 향상 시킬 수 있는 방법으로 주목받고 있다. 본 논문에서는 대면적 기판에서 GaN의 막질 향상뿐만 아니라 고인듐 InGaN 박막 성장을 위하여 서브마이크로미터 주기와 크기를 갖는 홀 패턴을 포토리소그라피 공정 최적화를 통해 구현할 수 있는 방법에 대해 논의한다. 그림. 1은 사파이어 기판 위에 선택 영역 박막 성장법을 이용하여 성장한 n-GaN/활성층/p-GaN의 구조를 나타낸 그림이다. 이를 통하여 서브마이크로미터 스케일의 반극성 InGaN면 위에 높은 인듐 함유량을 가지면서도 우수한 특성을 갖는 박막을 얻을 수 있다. 본 실험을 위하여 사파이어 기판 위에 SiO2를 증착한 후 포토레지스트(AZ5206)을 도포하고 포토리소그라피 공정을 진행하여 2um 크기 및 간격을 갖는 패턴을 형성했다. 그림. 2는 AZ5206에 UV를 조사(5초)하고 현상(23초)한 패턴을 윗면(그림. 2(a))과 $45^{\circ}$ 기울인 면(그림. 2(b)) 에서 본 SEM(Scanning Electron Microscope) 사진이다. 이를 통해 약 2.2um의 홀 패턴이 선명하게 형성 됨을 볼 수 있다. 그 후 수백나노 직경의 홀을 만들기 위해서 리플로우 공정을 수행한다. 그림. 3은 리플로우 온도에 따른 패턴의 홀 모양을 AFM(Atomic Force Microscope)을 이용하여 측정한 표면의 사진이다. 이를 통해 2차원 평면에서 리플로우 온도 및 시간에 따른 변화를 볼 수 있다. 그림.3의 (a)는 리플로우 공정을 진행하기 전 패턴이고, (b)는 $150^{\circ}C$에서 2분, (c)는 $160^{\circ}C$에서 2분 (d)는 $170^{\circ}C$에서 2분 동안 리플로우 공정을 진행한 패턴이다. $150^{\circ}C$$160^{\circ}C$에서는 직경에 큰 변화가 없었고, $160^{\circ}C$에서는 시료별 현상 시간 오차에 따라 홀의 크기가 커지는 경향이 나타났다. 그러나 $170^{\circ}C$에서 2분간 리플로우 한 시료 (그림. 3(d))의 경우는 홀의 직경이 ~970nm 정도로 줄어든 것을 볼 수 있다. 홀의 크기를 보다 명확히 표현하기 위해 그림.3에 대응시켜 단면을 스캔한 그래프가 그림.4에 나타나 있다. 그림.4의 (a) 및 (b)의 경우 포토레지스트의 높이 및 간격이 일정하므로, 리플로우에 의한 영향은 거의 없었다. 그림. 4(c)의 경우 포토레지스트의 높이가 그림.4(a)에 비해 ~25nm 정도 낮은 것으로 볼 때, 과도 현상 및 약간의 리플로우가 나타났을 가능성이 크다. 그림. 4(d)에서는 ~970nm의 홀 크기가 나타나서 본 연구에서 목표로 하는 나노 홀 크기에 가장 가까워짐을 확인할 수 있었다. 따라서, $170^{\circ}C$ 이상의 온도와 2분 이상의 리플로우 시간 조건에서 선택 영역 성장을 위한 나노 홀 마스크의 크기를 제어할 수 있음을 확인하였다.

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Network Performance Verification for Next-Generation Power Distribution Management System Using FRTU Simulator (FRTU 시뮬레이터를 이용한 차세대 배전지능화시스템 네트워크 성능검증)

  • Yeo, Sang-Uk;Son, Sung-Yong
    • The Journal of Korea Institute of Information, Electronics, and Communication Technology
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    • v.13 no.6
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    • pp.523-529
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    • 2020
  • Power distribution management system is essential for the efficient management and operation of power distribution networks. The power distribution system is a system that manages the distribution network based on IT, and has been evolving along with the development of the power industry. The current power distribution system is designed to operate at a relatively low network transmission speed based on the independent operation of the main equipment. However, due to distributed resources such as photovoltaic or energy storage devices, which are rapidly increasing in popularity in recent years, the operation of future distribution environments is becoming more complex, and various information needs to be collected in real time. In this study, the requirements of the next-generation power distribution system were derived to overcome the limitations of the existing power distribution system, and based on this, the communication network system and performance requirements for the distribution system were defined. In order to verify the performance of the designed system, a software-based terminal device simulator was developed because it takes excessive time and cost to introduce a large-scale system such as a power distribution system. Using the simulator, a test environment similar to the actual operation was established, and the number of terminal devices was increased up to 1,000. The proposed system was shown to satisfy the requirements to support the functions of the next-generation power distribution system, recording less than 10 % of the communication network bandwidth.

Analysis of the effect of improving human thermal environment by road directions and street tree planting patterns in summer (여름철 도로 방향과 가로수 식재 방식에 의한 인간 열환경 개선효과 분석)

  • Jeonghyeon Moon;Yuri Choi;Eunja Choi;Jueun Yang;Sookuk Park
    • Journal of the Korean Association of Geographic Information Studies
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    • v.27 no.2
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    • pp.1-18
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    • 2024
  • This study aimed to identify the optimal street tree planting method to improve the summer thermal environment in Seoul, Republic of Korea. The effects of road direction and street tree planting patterns on urban thermal environments using ENVI-met simulations were analyzed. The 68 scenarios were analyzed based on four road directions and 17 planting patterns. The results showed that tree planting had a reducing air temperature, mean radiant temperature, human thermal sensation (PET and UTCI). The most effective planting pattern among all scenarios was low tree height (6m), wide crown width (9m), high leaf area index (3.0), and narrow planting interval (8m). The largest improvement in the thermal environment was the northern sidewalk of the east-west road. Since this study used computer simulations, the difference from real urban spaces should be considered, and further research is needed through field measurement and consideration of more variables.

Analysis of Human Thermal Environment in an Apartment Complex in Late Spring and Summer - Magok-dong, Gangseo-gu, Seoul- (아파트 단지의 늦봄·여름철 인간 열환경 분석 - 서울특별시 강서구 마곡동 -)

  • Park, Sookuk;Hyun, Cheolji;Kang, Hoon
    • Journal of the Korean Institute of Landscape Architecture
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    • v.50 no.1
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    • pp.68-77
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    • 2022
  • The human thermal environment in an apartment complex located in Seoul was quantitatively analyzed to devise methods to modify human heat-related stresses in landscape and urban planning. Microclimatic data (air temperature, relative humidity, wind speed, and short- and long-wave radiation) were collected at 6 locations [Apt-center, roof (cement), roof (grass), ground, playground, and a tree-lined road] in the late spring and summer, and the data were used to estimate the human thermal sensation, physiological equivalent temperature (PET) and universal thermal climate index (UTCI). As a result, the playground location had the highest thermal environment, and the roof (grass) location had the lowest. The mean difference between the two locations was 0.8-1.1℃ in air temperature, 1.8-4.0% in relative humidity, and 7.5-8.0℃ in mean radiant temperature. In open space locations, the wind speed was 0.4-0.5 ms-1 higher than others. Also, a wind tunnel effect happened at the Apt-center location during the afternoon. For the human thermal sensation, PET and UTCI, the mean differences between the playground and roof (grass) locations were: 5.2℃ (Max. 11.7℃) in late spring and 5.4℃ (Max. 18.1℃) in summer in PET; and 3.0℃ (Max. 6.1℃) in late spring and 2.6℃ (Max. 9.8℃) in summer in UTCI. The mean differences indicated a level change in PET and 1/2 level in UTCI, and the maximum differences showed greater changes, 2-3 levels in PET, and 1-1.5 levels in UTCI. Moreover, the roof (grass) location gave 4.6℃ PET reduction and a 2.5℃ UTCI reduction in late spring, and a 4.4℃ PET reduction and a 2.0℃ UTCI reduction in the summer when compared with the roof (cement) location, which results in a 2/3 level change in PET and a 1/3 level in UTCI. Green infrastructure locations [roof (grass), ground, and a tree-lined road] were not statistically significant in the reduction of PET and UTCI in thermal environment modifying effects. The implementation of green infrastructure, such as rooftop gardens, grass pavement, and street tree planting, should be adopted in landscape planning and be employed for human thermal environment modification.

Analysis of Thermal Environment Improving Effects of Green Curtain in Summer (Green Curtain 형식의 벽면녹화시스템을 통한 여름철 건물 실내 열환경 비교 분석)

  • Lee, Sunyoung;Jo, Sangman;Park, Sookuk
    • Journal of the Korean Institute of Landscape Architecture
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    • v.50 no.5
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    • pp.80-89
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    • 2022
  • In order to solve the limitations of horizontal thermal environment improvement, this study compared the thermal environment of the indoor and outdoor of a building in summer according to the presence or absence of a green curtain, a vertical greening method. In the summer of 2021, the air temperature, relative humidity, wind speed, and shortwave and longwave radiation were measured at a central point inside a building and the grass field outside of the building to determine the human thermal sensation index, PET and UTCI. As a result, the green curtain showed an average 1.6℃ cooler air temperature during the daytime, but it did not have an effect at night. For relative humidity, it showed higher humidity indoors by an average of 5.6% and 1.0% during the daytime and at night, respectively. Wind speed was 1.4-1.8 ms-1 and 1.4-1.5 ms-1 higher outdoors on average during the daytime and at night, respectively, showing a high value outdoors regardless of whether a green curtain was installed. The green curtain showed an average indoor mean radiant temperature reduction effect of 4.7℃ during the daytime, but it did not have an effect at night. In PET and UTCI, the green curtain reduced the indoor PET by about a 1/3 level, an average of 2.1℃, and the indoor UTCI by about a 1/6 level, an average of 1.1℃, during the daytime. However, no effects appeared in PET and UTCI at night. For landscape planning, a green curtain can effectively modify the thermal environment during the daytime in summer.

Synthesis of Visible-working Pt-C-TiO2 Photocatalyst for the Degradation of Dye Wastewater (염료폐수 분해를 위한 가시광 감응형 Pt-C-TiO2 광촉매의 합성)

  • Hahn, Mi Sun;Yun, Chang Yeon;Yi, Jongheop
    • Clean Technology
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    • v.11 no.3
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    • pp.123-128
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    • 2005
  • Among various metal oxides semiconductors, $TiO_2$ is the most studied semiconductor for environmental clean-up applications due to its unique ability in photocatalyzing various organic contaminants, its chemical inertness, and nontoxicity. $TiO_2$, however, has a few drawbacks to be solved such as reactivity mainly working under ultraviolet irradiation (${\lambda}$ < 387 nm) and electron - hole recombination on $TiO_2$. In this study, to extend the absorption range of $TiO_2$ into the visible range and enhance electron - hole separation, we synthesized platinum (Pt) deposited $C-TiO_2$. The presence of Pt as an electron sink has been known to snhance the separation of photogenerated electron-hole pairs and induce the thermal decomposition. The characterization of as-synthesized $Pt-C-TiO_2$ was performed by Transmission Electron Microscopic (TEM), the Brunuer-Emmett-Teller (BET) method, X-ray Diffractometer (XRD), UV-vis spectrometer (UV-DRS), and X-ray Photoelectron Spectroscopy (XPS). In order to estimate the photocatalytic activity of the synthesized materials, the photoelectron Spectroscopy (XPS). In order to estimate the photocatalytic activity of the synthesized materials, the photodegradation experiment of an azo dye (Acid Red 44; $C_{10}H_7N=NC_{10}H_3(SO_3Na)_2OH$)was carried out by using an Xe arc lamp (300 W, Oriel). A 420 nm cut-off filter was used for visible light irradiation. From the results, Pt-deposited $C-TiO_2$ showed a far superior phothdegradation activity to Degussa P25, the commercial product under the irradiation of visible light and enhanced photocatalytic activity of visible-working $C-TiO_2$. This is a useful result into the application for the purification system of dye wastewater using visible energy of sun light.

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A Study on An Integrated GEO/TES with Geothermal Heat Exchanger and Thermal Ice Storage (지중열 교환기와 빙축열조(Thermal Ice Storage)를 연계시킨 통합 지중열-빙축열조 시스템(Integrated GEO/TES))

  • Lohrenz ED.;Hahn Jeongsang;Han Hyuk Sang;Hahn Chan;Kim Hyoung Soo
    • Economic and Environmental Geology
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    • v.38 no.6 s.175
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    • pp.717-729
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    • 2005
  • Peak cooling load of large buildings is generally greater than their peak heating load. Internal and solar heat gains are used fur selection of adquate equipment in large building in cold winter climate like Canada and even Korea. The cost of geothermal heat exchanger to meet the cooling loads can increase the initial cost of ground source heat pump system to the extend less costly conventional system often chosen. Thermal ice storage system has been used for many years in Korea to reduce chiller capacity and shift Peak electrical time and demand. A distribution system designed to take advantage of heat extracted from the ice, and use of geothermal loop (geothermal heat exchanger) to heat as an alternate heat source and sink is well known to provide many benifits. The use of thermal energy storage (TES) reduces the heat pump capacity and peak cooling load needed in large building by as much as 40 to $60\%$ with less mechanical equipment and less space for mechanical room. Additionally TES can reduce the size and cost of the geothermal loop by 1/3 to 1/4 compared to ground coupled heat pump system that is designed to meet the peak heating and cooling load and also can eliminate difficuties of geothermal loop installation such as space requirements and thermal conditions of soil and rock at the urban area.

A Study on the Design of the Grid-Cell Assessment System for the Optimal Location of Offshore Wind Farms (해상풍력발전단지의 최적 위치 선정을 위한 Grid-cell 평가 시스템 개념 설계)

  • Lee, Bo-Kyeong;Cho, Ik-Soon;Kim, Dae-Hae
    • Journal of the Korean Society of Marine Environment & Safety
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    • v.24 no.7
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    • pp.848-857
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    • 2018
  • Recently, around the world, active development of new renewable energy sources including solar power, waves, and fuel cells, etc. has taken place. Particularly, floating offshore wind farms have been developed for saving costs through large scale production, using high-quality wind power and minimizing noise damage in the ocean area. The development of floating wind farms requires an evaluation of the Maritime Safety Audit Scheme under the Maritime Safety Act in Korea. Floating wind farms shall be assessed by applying the line and area concept for systematic development, management and utilization of specified sea water. The development of appropriate evaluation methods and standards is also required. In this study, proper standards for marine traffic surveys and assessments were established and a systemic treatment was studied for assessing marine spatial area. First, a marine traffic data collector using AIS or radar was designed to conduct marine traffic surveys. In addition, assessment methods were proposed such as historical tracks, traffic density and marine traffic pattern analysis applying the line and area concept. Marine traffic density can be evaluated by spatial and temporal means, with an adjusted grid-cell scale. Marine traffic pattern analysis was proposed for assessing ship movement patterns for transit or work in sea areas. Finally, conceptual design of a Marine Traffic and Safety Assessment Solution (MaTSAS) was competed that can be analyzed automatically to collect and assess the marine traffic data. It could be possible to minimize inaccurate estimation due to human errors such as data omission or misprints through automated and systematic collection, analysis and retrieval of marine traffic data. This study could provides reliable assessment results, reflecting the line and area concept, according to sea area usage.