• Journal of the Semiconductor & Display Technology
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• v.10 no.1
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• pp.1-6
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• 2011

In this paper, the air flow induced by the rotating flat disk is numerically investigated in a hope to better understand the air flow structures inside the wax spin coater for a silicon wafer polishing station. Due to the complex inner geometry of actual spin coater such as the casing around the rotating ceramic block and servo motor, recirculation of air flow is inevitably found on the coating target if the internal space of spin coater is closed at the bottom and it could be the possible source of contamination on the wax coating. By numerical flow simulation, we found that it is necessary to install the air vent at the bottom and to apply the sufficient air suction in order to control the path of air flow and to eliminate the air recirculation zone above the spinning surface of coating target.

• Journal of the Korean Society for Precision Engineering
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• v.33 no.8
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• pp.611-616
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• 2016

Computational fluid dynamic simulation based on the ABAQUS software was conducted to observe the inside flow of slot-die nozzle. The slot-die nozzle was modeled as 3-dimensional structure and three significant parameters were determined: inlet velocity of fluid, reservoir angles, number of strips none of which have been mentioned previously in the literature. The design of experiment, full factorial analysis was performed within determined design and process levels. The simulation result shows the inlet fluid velocity is most significant factor for the flows of inside nozzle. As an interaction effect, reservoir angle is closely related with number of strip that should address when the nozzle is designed. Moreover, the optimized values of each determined parameter were obtained as 35 mm/s of inlet velocity, 3 of strip numbers, and $22^{\circ}$ of reservoir angles. Based on these parameters, the outlet velocity was obtained as 0.53% of outlet uniformity which is improved from 8.67% of nominal results.

• Clean Technology
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• v.24 no.3
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• pp.175-182
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• 2018

In this research, we investigated the cleanliness by optimizing the water content of the aqueous stripper in fluidic strip process. The stripping properties of the photoresist with optimized aqueous stripper were compared with the commercial organic stripper. The stripping performance was evaluated by electrical and optical characteristics on the surface of the transparent electrode that compare with stripped the transparent electrode surface and the rare surface before patterning by the photoresist. As a result of the photoresist stripping process of the organic stripper and the aqueous stripper optimized for water content, the aqueous stripper exhibited better electrical and optical characteristics than the organic stripper. In the case of the fluidic strip process with organic stripper, the photoresist dissolves in the stripper solution during stripping which can cause re-adsorption by contamination. Whereas that the aqueous stripper under development seems to decrease the photoresist dissolution in the stripper solution. Because the cyclodextrin contained in the stripper captures organic photoresist into hall of cyclodextrin which stripped through swelling and tearing. The photoresist residue captured by the cyclodextrin can be filtered. After the fluidic stripping process by different chemical stripping mechanism, the cleanliness of the organic stripper and aqueous stripper was compared and analyzed.

• Journal of the Korean Vacuum Society
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• v.17 no.1
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• pp.73-79
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• 2008

In order to apply for transparent conductive oxide(TCO), we deposited ZnO thin films on the glass at room temperature by RF magnetron sputtering method. Deposition conditions for high transmittance and low resistivity were optimized in our previous studies. Under the deposition condition with the RF power of 200 W, target to substrate distance of 30 mm and working pressure of 5 mTorr, highly conductive($7.4{\times}10^{-3}{\Omega}cm$) and transparent(over 85%) ZnO films were prepared. Highly oriented ZnO film in the [002] direction were obtained with specifically designed ZnO targets. Systematic study on dependence of deposition parameters on electrical and optical properties of the as-grown ZnO films were mainly investigated in this work. And for application tests using these films as transparent conductive oxide anodes, wet chemical etching behaviors of ZnO films were also investigated using various chemicals. Wet-chemical etching behavior of ZnO films were investigated using various acid solutions. The concentrations of these different acid solutions were controlled to study the etching shapes and etching rate. ZnO films were anisotropically etched at various concentrations and wet etching led to crater-like surface structure. Also we firstly found that the etching rate and etching shapes of ZnO films strongly depended on the etchant concentrations (i.e. pH) and the etching rate is exponentially decreased with increasing pH values regardless of the acid etchants.

• Journal of Korean Ophthalmic Optics Society
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• v.10 no.1
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• pp.27-34
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• 2005

Photochromic lens is the color changing lens from colorlessness to colorness when exposed to UV light. It can protect eyes from UV-B light which cause the cataract and can be used as sunglass in the summer since it can cut off 70~80% of sun light. Surface coating technique was used to develop lens which has 70% light transmittance and of which fading time of color change is within 5 min. Various color lenses were developed so that these had various color such as blue, green, brown, violet, yellow and red etc. Lens has an excellent physical properties, 100% adhesion and 4~5H hardness. The chemical and the scratch resistance of this lens were the greatest and the thermal stability was also higher. The clinical trial of developed lens were applied to 65 patients who had photophobia by various reasons at ophthalmology of Soonchunhyang University Hospital. Results showed that glaring was significantly reduced and the visual health were remarkably improved. Especially, anti-glaring effect in the night was great for the patient who had the LASIK operation. Protection of UV-B and blue light also can prevent the patient from cataract and the yellowish crystalline lens at old ages. Through the result of clinical. trial, we know that photochromic lens could be a new technique for both cure and precaution of photophobia.

• Polymer(Korea)
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• v.30 no.2
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• pp.112-117
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• 2006

To improve the type error of osmotic tablet which is one of the drug delivery system, osmotic granule could be manufactured by fluidized bed coating. It has drug layer containing different amount of osmogant and is coated with membrane including different types of binder. We confirmed that the morphology of osmotic granule was different at each coating step. The more mont of osmotic agent, the faster drug release was observed due to increasing the driving force for drug release from osmotic granule. And drug release from osmotic granule coated with membrane using different types of binder was differed by solubility of binders to water. The formation of pore in membrane was confirmed by SEM and DSC Membrane using water soluble binder released more amount of drug. From these results, we assured that difference of osmotic pressure between the inside and the outside of granule and porosity of membrane have an effect on drug release from osmotic granule.

• Journal of the Korean Society of Propulsion Engineers
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• v.2 no.2
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• pp.14-23
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• 1998

The present study investigates numerically particle laden flow through compressor cascade. In general, a lot of turbine engines are affected by various particles which are suspending in the atmosphere. Especially in the case of aircraft aviating in volcanic, industrial and desert region including many particles, each components of engine system are damaged severely. That damage modes are erosion of compressor binding and rotor path components, partial or total blockage of cooling passage and engine control system degradation.. Initial damages can not be serious but cumulation of damages influences on safety of aircraft control and economical maintenance cost of engine system can be increased. When dust, materials and volcanic particles in the atmosphere flow in the compressor, it is necessary to predict damaged and deposited region of compressor blades. To the various flow inlet angle, predictions of particles trajectory in compressor cascade by Lagrangian method are presented and impulses by impaction of particles at blade surface are calculated. By the definition of particle deposition efficiency, characteristics of particles impact are considered quantitatively. With these prediction and experimental data, erosion rates are predicted for two materials - ceramic, soft metal - on compressor blade surface. Improvements like coating of blade surface could be found, by above prediction.

• Journal of the Korean Society of Marine Environment & Safety
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• v.26 no.5
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• pp.576-585
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• 2020

This study quantitatively investigated the increase in ballasting time through numerical calculations when an ultraviolet (UV) ballast water management system (BWMS) is installed on an existing vessel. The calculation results indicate that the ballasting time of a gas carrier having 55,000 dead weight tonnage was 2.152 hours without installation of the UV BWMS and implementation of a flow control function. Ballasting time increased by 14.2% after installing the UV BWMS, and it increased by 20.4% with both its installation and implementation of a flow control function. If actual conditions are taken into account, ballasting time after installing the UV BWMS is estimated to increase by at least 30% compared with current ballasting time. Therefore, when concerned parties select a UV type BWMS, it is advisable for them to minimize ship operation losses from an increase in ballasting time by considering the capacity of the actual ballast pumps on board and the flow energy loss of the UV BWMS. Additionally, it is recommended that a BWMS with larger capacity, larger pipes, and pipes with inside coatings be used to minimize the increase in ballasting time after installation of the BWMS.

• Journal of Powder Materials
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• v.21 no.4
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• pp.266-270
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• 2014

Metal foams have a cellular structure consisting of a solid metal containing a large volume fraction of pores. In particular, open, penetrating pores are necessary for industrial applications such as in high temperature filters and as a support for catalysts. In this study, Fe foam with above 90% porosity and 2 millimeter pore size was successfully fabricated by a slurry coating process and the pore properties were characterized. The Fe and $Fe_2O_3$ powder mixing ratios were controlled to produce Fe foams with different pore size and porosity. First, the slurry was prepared by uniform mixing with powders, distilled water and polyvinyl alcohol(PVA). After slurry coating on the polyurethane(PU) foam, the sample was dried at $80^{\circ}C$. The PVA and PU foams were then removed by heating at $700^{\circ}C$ for 3 hours. The debinded samples were subsequently sintered at $1250^{\circ}C$ with a holding time of 3 hours under hydrogen atmosphere. The three dimensional geometries of the obtained Fe foams with an open cell structure were investigated using X-ray micro CT(computed tomography) as well as the pore morphology, size and phase. The coated amount of slurry on the PU foam were increased with $Fe_2O_3$ mixing powder ratio but the shrinkage and porosity of Fe foams were decreased with $Fe_2O_3$ mixing powder ratio.

• Transactions of the Korean hydrogen and new energy society
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• v.29 no.1
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• pp.105-110
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• 2018

The flow boiling heat transfer of water was experimentally investigated on plain and sintered microporous surfaces in a mini-channel. The effects of microporous coating on flow boiling heat transfer of subcooled water were investigated in a 300 mm long mini-channel with a cross section of $20{\times}10mm^2$. The test section has sufficiently long entrance length of 300 mm which provides a fully-developed flow before the channel inlet. The bottom side of the channel was heated by a copper block assembled with a high-density cartridge heater and other sides of the channel were insulated. The microporous surface was fabricated by sintering copper particles with the average particle size of $50{\mu}m$ on the top side of the copper block. Heat transfer measurement was conducted at the mass flux of $208kg/m^2s$ and the heat flux up to $500kW/m^2$. Microporous coated surface showed an earlier boiling incipience compared with plain surface regardless of the mass flux. Microporous coating were significantly attributed to local wall temperature and local heat transfer coefficient for flow boiling.